Abstract: The ratio of oxygen concentration to aluminum concentration in an aluminum film deposited in a vacuum chamber on an integrated circuit (IC) substrate is monitored by measuring either the resistivity or the resistance of a film of aluminum being simultaneously deposited film on a monitor substrate. The monitor substrate is arranged within the vacuum chamber such that the film of aluminum thereon has a concentration ratio of oxygen to aluminum that is significantly higher than the concentration ratio of oxygen to aluminum flux in the IC substrate film. This is done by reducing the aluminum flux or increasing the oxygen flux on the monitor substrate film. A measurement of the resistivity (or resistance) of the monitor substrate aluminum film is indicative of the resistivity and thus the oxygen concentration of the IC film.

Abstract: A process for defining improved tapered openings in glass coatings requires that passivating layers be formed of a doped silicon oxide having a relatively low flow temperature formed on a layer of undoped silicon oxide. After the contact openings are formed, both oxide layers are heated to a temperature below the flow temperature of the doped layer for a period of time sufficient to only soften and partially reflow the doped layer, the temperature being insufficient to form a significant oxide growth on the exposed portion of the semiconductor body.

Abstract: A method for depositing a refractory on a semiconductor substrate passivated with silicon dioxide and/or oxygen doped polycrystalline silicon is disclosed. The usual undercutting of the oxygen doped polycrystalline silicon or of the silicon substrate at the edge where it meets the oxide is prevented by depositing a layer of phosphorus doped polycrystalline silicon over the passivation material before the metal is deposited.

Abstract: A crystal seed holder assembly for retaining a crystal seed used to grow a ribbon of crystal by the EFG technique is disclosed. The holder assembly is arranged so that the seed is not subjected to fastener stress, can expand without thermal stress and can slide a limited distance relative to the holder assembly.

Abstract: A radiation system for projecting a uniform field of irradiance to expose an irradiance-sensitive surface (such as a photomask) through a transparency in proximity to, or in contact with, the irradiance sensitive surface (such as a wafer or another mask) comprises a pulsed source of irradiance in the near and deep ultraviolet wavelength spectrum, a doublet condenser lens and doublet field lens disposed serially along an optical axis. Every point in the exposure plane surface is focused on the transparency which is in the exposure plane. The two planes are conjugates of each other and vice versa. For every opening in the mask pattern to be resolved on a photoresist coated wafer or mask there exists a well-defined ray bundle passing through the conjugate point located on the exposure plane conjugate surface. One advantage of the doublet field lens is that its large diameter makes possible the transmission of marginal ray bundles without vignetting on the exposure plane.

Abstract: A circuit pattern is formed on a front side surface of a semiconductor wafer and an apertured photoresist pattern is formed over the circuit pattern. Via holes are then formed by laser irradiating the wafer at sites corresponding to the photoresist apertures. The back side surface of the wafer is next metallized and this surface is adhered to a plating block by means of an adhesive layer. Electrical connection between the substrate and plating block is then made, the via holes are electroplated, and the substrate is separated from the plating block and adhesive layer.

Abstract: A body of a semiconductor material of a Group III-V compound or alloy of such compounds includes a substrate of one conductivity type with a pair of spaced, substantially parallel grooves in a surface thereof. Over the surface of the substrate and the grooves are, in sequence, a buffer epitaxial layer of the one conductivity type, a first confinement epitaxial layer of the one conductivity type, a guide epitaxial layer of the one conductivity type, an active epitaxial layer which is the active recombination layer, a second confinement epitaxial layer of the opposite conductivity type and a cap epitaxial layer of the opposite conductivity type. The epitaxial layers are of materials forming heterojunctions between the first confinement layer and the guide layer, and between the active layer and second confinement layer.

Abstract: High density information discs comprising a conductive carbon-loaded polyvinylchloride disc lubricated with a fractionated methyl alkyl siloxane lubricant which contains a tetrakis(dialkylamino)silane additive.

Abstract: High density information discs comprising a conductive carbon-loaded polyvinylchloride disc lubricated with a fractionated methyl alkyl siloxane lubricant which contains a hexaalkyldisilazane additive.

Abstract: There is disclosed a method of forming a multi-layer passivant system including a layer of oxygen doped polycrystalline silicon over the semiconductor substrate. A layer of silicon dioxide is thermally grown over the oxygen doped polycrystalline silicon layer. If desired, layers of glass and an additional oxide layer can be formed over the thermally grown oxide.

Abstract: A novel wafer retainer assembly is described which includes a ring member for securing wafers in a planetary fixture. The ring member is easily removed or inserted by means of thumb and forefinger pressure exerted on tabs extending from open ends of a resilient spring and maintains the wafers in apertures on the planet member without exerting any pressure on the wafers, thus avoiding breakage.

Abstract: There is disclosed a method of etching a semiconductor substrate having a region heavily doped with N type impurity atoms spaced from one surface thereof. The one surface of the substrate is masked with an oxide layer or the like and openings are formed in this layer to expose surface areas of the substrate. The substrate is exposed to a refractory metal hexafluoride at elevated temperature whereby the hexafluoride and the exposed substrate material react such that the refractory metal replaces the substrate material until the metal reaches the heavily doped region. This region substantially stops the reaction. Depending on the semiconductor device being made, the refractory metal can then be etched in an etchant that does not react with the semiconductor material to form a moat of uniform depth, or it can be left in place.

Abstract: Molecular distillation of methyl alkyl siloxanes of the formula ##STR1## wherein R.sub.1 and R.sub.2 are alkyl groups of 4-20 carbon atoms and m and p are integers to produce a distillate having a molecular weight fraction wherein the sum of m and p is about 4, produces an improved lubricant for the video disc, a lubricant that is stable to long term storage and to wide variations in temperature and relative humidity.

Abstract: High density information discs comprising a conductive carbon loaded polyvinylchloride disc is lubricated with a fractionated methyl alkyl siloxane lubricant which contains an alkyl-substituted-(trialkoxysilyl)alkyl quaternary ammonium salt additive.

Abstract: A technique for positioning a body having a tapered profile when viewed along a first axis comprises exposing the body to a first beam of light oriented along the first axis in a manner such that the tapered profile is projected as a first image onto a first linear array of photodectors disposed along a direction orthogonal to both the first axis and the direction of the taper. The body is exposed to a second beam of light oriented along a second axis orthogonal to the first axis in a manner such that a second profile of the body is projected as a second image onto a second linear array of photodetectors disposed along a direction parallel to the first axis. The body is then moved along the first and the second axes until the first and the second images strike predetermined locations along the first and second photodetector arrays.

Abstract: An apparatus is disclosed for holding a matrix during electroforming. The apparatus is secured to the cathode of an electroforming apparatus and consists of a flat disc member having a diameter at least as large as the diameter of the matrix to be duplicated, and a ring member which is adapted to screw onto the outer diameter of the flat disc member so as to hold the matrix in contact with the surface of the disc. Resilient seals are provided in the ring member and disc member which encase and hold the matrix in a liquid-tight fit between the disc member and the ring member during electroforming of replica parts on the surface of the matrix.

Abstract: A technique for positioning the tip of a stylus mounted on an arm attached to a cartridge for viewing through a microscope comprises a platform having a transparent plate attached thereto. The platform is adapted to support the cartridge so that the tip of the stylus contacts a surface of a transparent plate disposed between the tip and an objective of the microscope, the plate being prepositioned so that the surface lies in the focal plane of the microscope objective. The tip of the stylus is moved in a direction along the surface of the plate so that the stylus tip is centered within the field of view of the microscope objective. In order to guide the tip, the surface of the plate may have two raised ledges thereon, intersecting at a vertex centered within the field of view of the microscope objective.

Abstract: This invention relates to novel terpolymers of 3-methylcyclopentene, 2-cyclopentene-1-acetic acid and sulfur dioxide. Positive electron beam resist media prepared from the subject terpolymers possesses excellent sensitivity and development latitude and unexpectedly are developable with conventional aqueous alkaline developers.

Abstract: The invention is an improved optical recording medium and a method for making same in which the substrate has a raised center and peripheral portions. The sides of the raised portions and the upper surface of a light absorptive layer, which overlies the unraised portion, form a mold which is filled with the overcoat material.

Abstract: High density information discs comprising a conductive carbon loaded polyvinylchloride disc is lubricated with a fractionated methyl alkyl siloxane lubricant which contains a quinuclidene additive.