Abstract: A process module wherein radiant heating is combined with the capability for generating a plasma in proximity to the wafer face. It is useful to clamp the slice to a susceptor which is of the same material as the wafer, or at least has essentially the same thermal coefficient of expansion. The susceptor is directly heated by a radiant heater, but the rate of temperature change is slow enough that no large thermal gradients between the susceptor and the wafer develop.

Abstract: The disclosure relates to the use of metastable state of mixed gases which, when appropriately mixed, provide better control of current and voltage conditions and subsequent arc formation properties in making balls of aluminum, copper and gold with an electronic flame-off method. The specific mixtures involve inert argon mixed with small amounts of hydrogen and neon. Exceptionally well controlled balls of uniform size result.

Abstract: A semiconductor memory device which has a memory portion and a counter to count rows and/or columns of the memory portion, the counter being so constructed to return to a reset mode at the beginning of an address counting sequence when coming up to an arbitrary address such that an address or addresses corresponding to a region of the memory containing one or more defective memory cells and occurring after the arbitrary address are inaccessible. The counter thereby comprises a defective bit relief circuit built into the memory device.

Abstract: A semiconductor memory device having a memory portion and a sense amplifier portion through which data is written into, preferably also read out from the memory portion, the improvement in which a capacitor is connected with the sense amplifier portion to perform the writing of the data by the use of charge stored in the capacitor.

Abstract: A system for scheduling the operation of interrelated machines which perform a process flow. A global definition of the system is made once, and each machine has an individual profile describing its local interaction with the system. Local scheduling decisions for each machine are made based on that machines individual profile and the state of the manufacturing facility at the time a decision is needed. Operation of the individual machines is controlled by the local scheduling decisions made therefor.

Abstract: A controllable mobile apparatus such as a mobile robot travels to a commanded destination under the control of a guidance system that provides speed and direction commands to the controllable mobile apparatus. A plurality of wheels carry the mobile apparatus to the commanded position in response to the speed commands from the guidance system. Steering commands will cause the selected members of the plurality of wheels to vary their angles by a predetermined amount in response to the steering commands that are provided by the guidance system. Additionally, a braking system is provided for stopping the controllable mobile apparatus when it encounters loss of power or communications with the guidance system.

Abstract: A manufacturing system has a material handling system that uses free roaming mobile apparatuses that are under the control of a visual navigation system that has the capability of regenerating images that are temporarily obstructed from view of a visual navigation system. The visual navigation system uses the images to provide commands that navigate an electrical controllable apparatus such as a mobile robot. The mobile robot is fitted with a minimum of three navigation beacons which emit a light visible to overhead television cameras. The beacon area is arranged so as to form a triangle. The shape and dimension of the triangular pattern is measured and stored in a memory unit within the visual navigation system. When a beacon is blocked from view of the television cameras, the visual navigation will regenerate coordinate of the blocked beacon and provide the necessary navigation commands to the mobile apparatus.

Abstract: A display and keyboard panel for an electronic device such as a handheld or desktop calculator, the panel having a keyboard area and an indication area located in the vicinity of the keyboard area. The indication area has a plurality of key sections each having at least two component areas each for indicating a single piece of information. Each of the key sections is typically formed by a touch sensor switch area having at least two adjacent areas corresponding respectively to the aforesaid component areas, each of the adjacent areas of the touch sensor switch area including at least one segment or plural segments of a conductor.

Abstract: An elastic buffer for absorbing frequency jitter or drift of an incoming data signal which includes a serial stack of data register. These data registers are used for storing data bits from an incoming data stream one at a time with each bit adjacent a next earlier bit at a frequency equal to the frequency of the incoming data and also for releasing stored bits onto an output data line. The stored bits are released one at a time at a predetermined fixed rate equal to the average frequency of incoming data from a number of registers away from the register into which data is being written which depends on the frequency difference between incoming data and the fixed rate aforesaid.

Abstract: Method of ionizing a gas within a chamber having a cathode disposed therein, wherein the sputtering effect upon the cathode is substantially reduced to prolong the life of the cathode. The cathode within the chamber is initially activated to emit thermal electrons by applying a voltage thereto. The gas to be ionized is then introduced into the chamber along with an active gas. Ionization of the gas to be ionized is then achieved by subjecting the gas to be ionized to the thermal electrodes emitted by the cathode. The voltage applied to the cathode and the voltage between the cathode and the wall of the chamber are regulated so as to maintain a substantially constant electric arc current flowing from the wall of the chamber to the cathode.

Abstract: An electronic terminal is mechanically and electrically connected to an electronic printer module to form a portable electronic terminal/printer. The bottom housing of the terminal and an extended portion of the bottom housing of the printer module together form a dovetail type connection. The bottom housing of the terminal has a plurality of rails formed thereon and the extended portion of the bottom housing of the printer module has a plurality of channels formed therein for slidably receiving the rails, forming a dovetail type connection. One half of an electrical connector is mounted on the terminal and the other half of the electrical connector is mounted on the printer module in a position to couple when the mechanical dovetail connection is made. A latch mechanism, attached to the extended portion of the bottom housing of the printer secures the bottom housing of the printer and also the two halves of the electrical connector.

Abstract: Speech recognition is improved using prestored words and prestored sentences which provide grammar or context rules. Multiple word hypotheses and plural sentence hypotheses are used.A speech recognition system uses a word hypothesizer to generate hypothesized words for a sentence recognizer. The sentence recognizer receives information containing the hypothesized word and its beginning and end points. The sentence recognizer compares each incoming hypothesis with words allowed by a grammar, and generates a partial or complete sentence hypothesis for each state in which the hypothesis is allowed by the grammar. A dynamic programming technique using backpointer is used to retain all currently valid partial and complete sentence hypotheses. When a complete sentence satisfies suitable criteria, it is output as a recognized sentence. Gaps and overlaps between hypothesized words are used in calculation of a sentence error for each partial and complete sentence hypothesis.

Abstract: A processing apparatus and method for depositing doped or undoped polysilicon on a wafer utilizing a single process chamber to heat the wafer, provide a silicon comtaining gas, and if desired, an appropriate dopant gas to the chamber with the excitation energy being provided by either or both of a remotely generated plasma form and illumination of the wafer with an in situ generated ultraviolet energy.

Abstract: A method is described of making an electrically programmable integrated circuit which comprises meltable contact bridges (22) between selected connecting points. In the method, firstly in a semiconductor substrate (10) by means of diffusion or ion implantation to obtain desired circuit functions a semiconductor structure with zones (12) of different conductivity type is formed. On the surface of the semiconductor structure a first protective layer (14) is formed in which contact windows (18) to the selected connecting points are then formed. On the surface of the first protective layer (14) and in the contact windoews (18) a through conductive layer (20) is made of a material forming the fusible contact bridges (22). Using a plasma etching method the conductive layer (20) is etched away so that only the contact bridges (22) with an associated connecting end (21) and conductor regions leading from the contact bridges (22) to the connecting points in the contact windows (18) remain.

Abstract: A communication system for a mobile apparatus includes a means for communicating commanded destination to the mobile apparatus. The mobile apparatus includes a plurality of beacons that are used for both communicating with a master station and as a means of locating the mobile apparatus by the master station. The location of the mobile apparatus is used to generate commands which are transmitted to the mobile apparatus by light emitting diodes such that the light emitting diodes mounted on the mobile apparatus are used for both navigation purposes and communication.

Abstract: A FIFO memory is provided with individual arrays of dynamic memory cells and includes a dedicated write line buffer memory and a dedicated read line buffer memory operably connected thereto. First and second line buffer memories are also provided in conjunction with the write line buffer memory and the read line buffer memory so as to permit a faster response to the input and output of data with respect to the FIFO memory. Data may be alternately written into either one of the line buffer memories as a lead-in to the subsequent writing of data in the dynamic memory arrays via the write line buffer memory. Data read out from the other line buffer memory may occur simultaneously. The FIFO memory may serve as a video data frame memory for storing a frame of a video screen image.

Abstract: A printer has a detection mechanism for detecting the absence of paper and the end position of the printhead upon start-up and reset. The detection mechanism includes a detection lever arm that is spring loaded and operationally positioned in a normal state. An optical sensor made up of an LED and a photo transistor that receives light from the LED, has the lower end of the detection lever arm operationally positioned in the normal state, between the LED and the photo transistor. The upper end of the detection lever arm is urged against the paper, by the spring. The platen supporting the paper has a groove formed therein which, in the absence of paper, receives the upper end of the detection lever arm, causing the lower end to move from its normal position between the LED and the photo transistor, the optical sensor then indicating a paper-out condition.

Abstract: The disclosure relates to a gripper arm for use in conjunction with a robotic arm for gripping a tool wherein the tool is retained in the gripper arm until a positive action signal and lack of pressure from the tool are simultaneously provided. The tool cannot be discharged from the gripper arm under other conditions including power loss to the robotic device.

Abstract: A processing apparatus and method for edge-preferential processing of partially fabricated integrated circuit wafers or of other substantially flat and thin workpieces. A plasma remote from the workpiece is used to generate activated species, and a baffle which is in proximity to the wafer face but not in contact with it is used to direct the stream of activated species. This module can be set up to perform both edge bead removal and bake of spun-on photoresist.

Abstract: A process for obtaining extremely smooth interfaces of poly 1/inter-level dielectric film/poly 2 films. Essentially, the poly 1 layer is LPCVD-deposited in the amorphous phase and implant-doped, after which an appropriate dielectric film is deposited by LPCVD. Following this, the poly 1 is crystallized at a temperature of about 1000.degree. C., after which poly 2 is LPCVD-deposited and POCl.sub.3 -doped at 950.degree. C. The resulting poly 2/inter-level dielectric/poly 1 interfaces are extremely smooth on an atomic scale, even after other device fabrication thermal cycles, and are believed to resutl in superior leakage characteristics.