Abstract: A method for forming aluminum metallization for contacting a conductive element in an integrated circuit, and an integrated circuit formed according to the same, is disclosed. According to a first disclosed embodiment, a first aluminum alloy layer is formed within the contact, optionally with a barrier layer between it and the underlying electrode. An etch stop layer is formed thereover, of a material which has a low etch rate to an aluminum etchant species. A second, thicker, aluminum alloy layer is formed thereover. The second aluminum layer is etched until the etch stop layer is reached; the mask for defining the metal line may have an edge within the dimensions of the contact opening. After removal of the exposed etch stop layer, a timed etch removes the first aluminum alloy layer, without exposing the bottom of the contact. The metal line may thus be safely formed, without requiring an enclosure around the contact opening.

Abstract: A static random-access memory is disclosed which utilizes bit line pairs for each column of memory cells for communication of data between external data terminals and the memory cells. A precharge transistor is connected between each bit line and a precharge voltage, for example V.sub.cc, and an equilibration transistor is connected between the bit lines in each bit line pair. The precharge and equilibration transistors are controlled according to selection of the column, so that all columns which are not selected by the column address are precharged and equilibrated, including the unselected columns in the same sub-array as the selected columns.

Abstract: An integrated circuit memory is disclosed which includes redundant columns associated with a sub-array, and in which multiple input/output terminals are placed in communication with multiple columns in the sub-array in read and write cycles. The number of redundant columns per sub-array is less than the number of input/output terminals. A multiplexer connects the selected redundant column to a selected sense amplifier and write circuit for the input/output with which the replaced column was associated. The multiplexer includes pass gates connected to the bit lines of the redundant column, and fuses connected between each of the pass gates and each of the sense/write circuits selectable for the redundant column. Those of the fuses which are not associated with the selected input/output are opened, and the fuses associated with the selected input/output are left intact.

Abstract: An integrated circuit memory is disclosed which has a parallel test read mode. The memory includes comparators for comparing multiple data words, on a bit-by-bit basis, during the parallel read mode, with the result of the comparison used to enable or disable the output buffers. In test mode, in the event of a failed parallel test comparison, the comparator causes the output buffers to go into a high-impedance state; for a passing parallel test, the actual data state is presented by the output terminals The comparison circuitry is in parallel with the output data path, so that the output data path is not adversely affected by the test circuitry, and so that the access time in test mode is the same as the access time during normal operation (assuming a passing test). The technique may be adapted to wide parallel test schemes.

Abstract: An integrated circuit memory is disclosed which has its primary memory array arranged into blocks and which has redundant columns, each of which can replace a column in any one of the blocks. The redundant columns are selected by way of a redundant column decoder associated with each column, each of which includes a set of address fuses into which an address is programmed, responsive to which its associated redundant column is to be selected. A plurality of redundant sense amplifiers are each associated with a group of redundant columns. The coupling of each redundant sense amplifier is controlled by a redundant multiplexer associated with each of the input/output terminals.

Abstract: A read/write memory having timed-out control of certain of its peripheral circuitry is disclosed. The control circuit for controlling the time at which time-out is to occur includes two delay stages of different lengths. The shorter delay stage is used to define the time-out in a read operation, and the longer delay stage is used to define the time-out in a write operation, since a read operation can generally be accomplished sooner than a write operation. Enabling of the periphery is controlled by an address transition detection circuit, and by a data transition detection circuit. The circuit includes a short path by which enabling of the periphery is performed responsive to a data transition in the absence of an address transition, in order to perform a late write operation.

Abstract: An integrated circuit memory is disclosed which has its primary memory array arranged into blocks and which has redundant columns, each of which can replace a column in any one of the blocks. The redundant columns are selected by way of a redundant column decoder, associated with each column. A plurality of redundant sense amplifiers are each associated with selected redundant columns. Each of the redundant column decoders includes a set of fuses for storing the column address responsive to which its associated redundant column is to be selected. The coupling of each redundant sense amplifier is controlled by a redundant multiplexer associated with each of the input/output terminals. Each redundant multiplexer receives the redundant column select signals from each redundant column decoder corresponding thereto, and includes fuses which indicate if its input/output terminal is to be placed in communication with its associated sense amplifier upon selection of a redundant column.

Abstract: An integrated circuit, such as a memory, having an internal data bus and circuitry for precharging the same, with each data conductor in the said data bus associated with a dummy data conductor, which is driven to a complementary logic state from that of its associated data conductor. During precharge and equilibration at the beginning of a cycle, initiated by an address transition detection or by a clock signal, each data conductor is connected to its dummy data conductor so that the data conductor is precharged to a midlevel by way of charge sharing. Also during precharge and equilibration, the data driver is placed in a high impedance state by the sense amplifier output nodes both going to the same logic level. This midlevel precharge allows for faster switching, and reduced instantaneous current, than obtained for rail-to-rail switching.

Abstract: A method of forming a capacitor in an integrated circuit, such as a dynamic random access memory (DRAM), and a capacitor and DRAM cell formed by such a method, is disclosed. A first capacitor plate is formed of silicon, for example polysilicon, followed by oxidation thereof to form a thin capacitor oxide layer thereover; alternatively, the thin capacitor oxide layer may be deposited. Nitrogen ions are then implanted through the oxide and into the silicon. A high temperature anneal is then performed in a nitrogen atmosphere, which causes the implanted nitrogen to accumulate near the interface between the silicon first plate and the oxide layer, forming a nitride-like region thereat. An optional sealing thermal reaction (oxidation or nitridation) may then be performed, to reduce the effects of pinholes or other defects in the composite film. The second plate may then be formed of polysilicon, metal, or a metal silicide, completing the capacitor.

Abstract: A method of analyzing an integrated circuit to determine the cause of an open or resistive intermetal via is disclosed. Instead of conventional cross-sectioning of the suspected via, the method removes the upper of the metal layers at the location of the via, with a selective etch to maintain the presence of the contaminant or other cause of failure at the via. When an isotropic metal etch is used, as is preferred, partial removal of the interlevel dielectric layer will facilitate subsequent analysis by increasing the area to be analyzed. Optical microscopy, SEM microscopy, Auger spectroscopy, EDS spectroscopy, and other conventional analysis techniques may be used at the portion of the circuit within the failed via, to indicate the composition of the undesired contaminant.

Abstract: A method of forming an insulated-gate field-effect transistor, and the transistor formed thereby, is described. According to a first embodiment, an inverted-T gate structure is formed by the deposition of a polycrystalline silicon layer, followed by the deposition of a metal silicide layer thereover. The metal silicide layer is etched with etchant which does not significantly etch polysilicon, to define the upper portion of the gate electrode. The reachthrough lightly-doped source/drain extensions are then implanted through the polysilicon layer, using the upper gate electrode portion as a mask. Sidewall spacers are formed on the sides of the upper portion of the gate electrode, and the polysilicon etched using the spacers as a mask, to define the inverted-T gate structure.

Abstract: An integrated circuit having a normal operating mode and a special operating mode, such as a special test mode, is disclosed. The special test mode is enabled by a series of signals, such as overvoltage excursions at a terminal, rather than by a single such excursion, so that it is less likely that the special test mode is entered inadvertently, such as due to noise or power-down and power-up of the device. The circuit for enabling the test mode includes a series of D-type flip-flops, each of which are clocked upon detection of the overvoltage condition together with a particular logic level applied at another terminal; multiple series of flip-flops may be provided for multiple special test modes. Additional features include the provision of a power-on reset circuit which locks out the entry into the test mode during power-up of the device.

Abstract: A pulse width modulated power supply controller is disclosed which is capable of generating synchronization pulses in such a manner that multiple ones of such power supply controllers in a system are synchronized to the controller having the highest oscillation frequency, without requiring one of the controllers to be implemented as a master and the others implemented as slaves. The power supply controller includes two comparators which are coupled to receive the external capacitor voltage. A first comparator enables a fast charging circuit, such as a current source, for increasing the rate at which the capacitor is charged responsive to the capacitor voltage reaching a first threshold; a single-ended or differential synchronization pulse is also generated, and communicated to the first comparators of other power supply controllers in a multiple controller system.

Abstract: An integrated circuit having a normal operating mode and a special operating mode, such as a special test mode, is disclosed. The special test mode is enabled by a series of signals, such as overvoltage excursions at a terminal, rather than by a single such excursion, so that it is less likely that the special test mode is entered inadvertently, such as due to noise or power-down and power-up of the device. The circuit for enabling the test mode includes a series of D-type flip-flops, each of which are clocked upon detection of the overvoltage condition together with a particular logic level applied at another terminal; multiple series of flip-flops may be provided for multiple special test modes. Additional features include the provision of a power-on reset circuit which locks out the entry into the test mode during power-up of the device.

Abstract: An integrated circuit having a normal operating mode and a special operating mode, such as a special test mode, is disclosed. The special test mode is enabled by a series of signals, such as overvoltage excursions at a terminal, rather than by a single such excursion, so that it is less likely that the special test mode is entered inadvertently, such as due to noise or power-down and power-up of the device. The circuit for enabling the test mode includes a series of D-type flip-flops, each of which are clocked upon detection of the overvoltage condition together with a particular logic level applied at another terminal; multiple series of flip-flops may be provided for multiple special test modes. Additional features include the provision of a power-on reset circuit which locks out the entry into the test mode during power-up of the device.

Abstract: A method for forming isolation structures in an integrated circuit, and the structures so formed, are disclosed. After definition of active regions of the surface is accomplished by provision of masking layers, recesses are etched into the exposed locations, to a depth on the order of the final thickness of the insulating isolation structure. Sidewall spacers of silicon dioxide, or another insulating amorphous material, are disposed along the sidewalls of the recesses, with silicon at the bottom of the recesses exposed. Selective epitaxial growth of silicon then forms a layer of silicon within the recesses, preferably to a thickness on the order of half of the depth of the recess. The epitaxial silicon is thermally oxidized, filling the recesses with thermal silicon dioxide, having a top surface which is substantially coplanar with the active regions of the surface.

Abstract: An integrated circuit memory is disclosed which has its memory array divided into blocks, or sub-arrays. Between each sub-array is placed a row line repeater which communicates the row line from the row decoder, or from a prior sub-array, into the next sub-array. The row line repeaters are controlled according to a portion of the column address so that, after the entire selected row has been energized, those row line repeaters which are not associated with the selected sub-array will de-energize the row line at their output. The row line repeaters each include a latch, so that the row line repeater which is associated with the selected sub-array will maintain the selected row line energized. Various embodiments of the row line repeater circuit are disclosed. Further control of the row line repeaters from a power-on reset circuit is also disclosed. A dummy row line is also disclosed, which emulates an actual row line so that the time at which the selected row has been fully energized is more closely known.

Abstract: An integrated circuit memory is disclosed which has its memory array divided into blocks, or sub-arrays. Between each sub-array is placed a row line repeater which communicates the row line from the row decoder, or from a prior sub-array, into the next sub-array. The row line repeaters are controlled according to a portion of the column address so that, after the entire selected row has been energized, those row line repeaters which are not associated with the selected sub-array will de-energize the row line at their output. The row line repeaters each include a latch, so that the row line repeater which is associated with the selected sub-array will maintain the selected row line energized. Various embodiments of the row line repeater circuit are disclosed. Further control of the row line repeaters from a power-on reset circuit is also disclosed. A dummy row line is also disclosed, which emulates an actual row line so that the time at which the selected row has been fully energized is more closely known.

Abstract: An input buffer circuit having a latching function controlled by a transition detection circuit is disclosed. The input stage of the input buffer is connected to a delay stage, and to a transition detection circuit. The output of the delay stage is connected to a pass gate, which is controlled by the output of the transition detection circuit; a latch is connected to the other side of the pass gate. The transition detection circuit produces a pulse responsive to a transition, and the pass gate is turned off during the length of the pulse, with the latch maintaining and presenting the state of the input prior to the transition. After the pulse is complete, the new value of the input signal is latched and presented to the circuit. Since the pass gate is turned off during the transition detection pulse, a short and spurious transition at the input terminal is isolated from the latch by the pass gate (with the transition detection pulse lengthened), and does not appear at the output of the input buffer circuit.

Abstract: An integrated circuit memory is disclosed which has its memory array divided into blocks, or sub-arrays. Between each sub-array is placed a row line repeater which communicates the row line from the row decoder, or from a prior sub-array, into the next sub-array. The row line repeaters are controlled according to a portion of the column address so that, after the entire selected row has been energized, those row line repeaters which are not associated with the selected sub-array will de-energize the row line at their output. The row line repeaters each include a latch, so that the row line repeater which is associated with the selected sub-array will maintain the selected row line energized. Various embodiments of the row line repeater circuit are disclosed. Further control of the row line repeaters from a power-on reset circuit is also disclosed. A dummy row line is also disclosed, which emulates an actual row line so that the time at which the selected row has been fully energized is more closely known.