Patents Assigned to Heraeus GmbH
  • Patent number: 4828391
    Abstract: Test-glass changer for measuring layer properties optically in vacuum coating installations. A holding device (10) that accommodates several test glasses (12) is rotatably supported on a substrate holder (4), which serves to transport substrates (5) through a stream (22) of coating material. A control mechanism (16) serves to introduce in each case one test glass (12) into a path of rays (A-A) of a measuring device (7,8) and into the stream (22) of coating material. The control mechanism (16) is an incremental motor, by means of which in each case one test glass (12) can be changed over into a position, stationary relative to the substrate holder (4), in which position it can be passed alternately with the substrates (5) through the path of rays (A-A) of the measuring device (8,8) and through the stream (22) of coating material.
    Type: Grant
    Filed: July 3, 1986
    Date of Patent: May 9, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Walter Zultzke, Walter Lehnert
  • Patent number: 4820106
    Abstract: In an apparatus for passing a discoidal workpiece into and out of a coating chamber through a lock and for shifting the workpiece into and out of the range of a coating source, a swivelling arm is journaled for movement about a vertical axis on the top of the coating chamber. The ends of the swiveling arm have jacks bearing workpiece holding plates which transport the workpiece to an opening in the coating chamber. The workpiece holders are adapted to close off the opening from above. A turntable which can swivel about a vertical axis in the interior of the coating chamber has recesses on its top side for accommodating the workpieces. Lifting plates are journaled in these recesses and can be raised and lowered by lifting means in the bottom plate.
    Type: Grant
    Filed: September 2, 1987
    Date of Patent: April 11, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Michael Walde, Jaroslav Zejda
  • Patent number: 4818282
    Abstract: The invention concerns a method, equipment and a regulating means for use in recovering metal-carbide scrap by alloying. This is carried out by treating the scrap with a low melting point metal which brings the metal-carbride matrix into solution at temperatures above the melting point of the alloy formed. The treatment is carried out in a container in the presence of inert gas, the pressure of which is gradually reduced following completion of the alloying process, the resultant metal vapor being condensed.To solve the problem of producing, in the resultant residue, a proportion of low melting point metal of less than 100 ppm and of preventing condensation of the metal vapors on the container, it is proposed in the invention that the metal-carbide scrap and the low melting point metal should be alloyed with each other in an inner chamber arranged within the container.
    Type: Grant
    Filed: September 10, 1987
    Date of Patent: April 4, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Erwin Wanetzky, Franz Hugo, Fernand Kuhlmann
  • Patent number: 4818358
    Abstract: In a cathode sputtering apparatus, in order to achieve a very uniform utilization of the target and a high-quality coating on the substrate, the cathode is provided on its side of the target facing away from the substrate with a flat plate on which a plurality of magnets are disposed in rows, the magnets of the individual rows parallel to one another being at approximately equal distances apart and having the same polarity. Moreover, the magnetic of the one row are offset by a dimension g from the magnets of the adjacent row, so that, in the area of the target provided with the coating material, when the cathode is used in a chamber with suitable gas pressure and with a voltage of any desired frequency is applied, plasma tubes form which are like serpentinely curved racetracks.
    Type: Grant
    Filed: November 12, 1987
    Date of Patent: April 4, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Peter Hubert, Barbara Kussel, Peter Wirz
  • Patent number: 4818626
    Abstract: To permit using a single firing step, sintered aluminum nitride ceramic bodies provided with firmly adhering electrically conductive films or resistive layers can be produced by sintering of the green ceramic bodies and the films or layers in common, if these films or layers additionally contain a mixture of aluminum nitride and rare earth metal oxide.
    Type: Grant
    Filed: August 3, 1987
    Date of Patent: April 4, 1989
    Assignee: W. C. Heraeus GmbH
    Inventors: Waltraud Werdecker, Dieter Brunner, Martin Kutzner
  • Patent number: 4815415
    Abstract: An apparatus for producing and coiling films of insulating material coated under a vacuum with electrically conductive material, comprising an electron beam vaporizer, a feed drum, a roller disposed above the electron beam vaporizer and looped by the film, a take-up drum, and deflector rolls for establishing a path for the film, at least one plasma source oriented towards the path of the film so that the plasma touches the film, said plasma source being disposed in the region of the path of the film from the electron beam vaporizer to the take-up drum, wherein the plasma source is disposed at the end of the angle of contact specified by one of the deflector rolls.
    Type: Grant
    Filed: March 28, 1988
    Date of Patent: March 28, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Albert Feuerstein, Helmut Eberhardt, Helmut Lammermann, Volker Bauer, Gerard Lobig
  • Patent number: 4816412
    Abstract: Method for the determination of the content of solid carbon compounds in soil samples, particularly in humus soils, by converting the solid carbon compounds with a reactant into carbon dioxide and conveying the carbon dioxide gas into an analyzer. To reach the reaction temperature, metal particles are added to a specified amount of the dry, milled soil sample and the dry matter is heated inductively in the presence of the reactant to the reaction temperature.
    Type: Grant
    Filed: August 15, 1986
    Date of Patent: March 28, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Manfred Schmidt, Horst Fechter
  • Patent number: 4813846
    Abstract: An inserter for vacuum installations has a two-part arm provided with a driving and, a single joint and an end for holding an object. The arm can turn in at least one horizontal plane about a vertical main axis disposed in the area of the driving end, and has at least one motor for moving the arm about the main axis and changing the angle between the parts of the arm at the joint.
    Type: Grant
    Filed: April 29, 1987
    Date of Patent: March 21, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventor: Dirk Helms
  • Patent number: 4812613
    Abstract: A beam guiding optical system for laser radiation, especially for the radiation of a medical laser, for the continuous adjustment of focal length is described, which is distinguished by the fact that aberrations are largely prevented. The beam guiding optical system preferably has a linearly movable carriage with at least two carriage mirrors disposed fixedly with respect to one another, at least one of these carriage mirrors being concavely or convexly curved, and the beam axis of the entry beam falling on a mirror being parallel to the beam axis of the beam emerging from the adjusting means. The axis of displacement of the carriage is aligned parallel to the beam axis of the entry and emerging beam. In the beam path outside of the adjusting means there is disposed at least one deflecting mirror which has a curvature complementary to the curvature of the at least one curved carriage mirror.
    Type: Grant
    Filed: January 13, 1988
    Date of Patent: March 14, 1989
    Assignee: W. C. Heraeus GmbH
    Inventor: Wolfram Gorisch
  • Patent number: 4808373
    Abstract: A multiple-substance alloy used as a target in a cathode sputtering apparatus, and having a gold content most preferably in the range of 94-98 percent by weight, is disclosed. The alloy further contains non-gold alloys of aluminum, copper and preferably an element of the group of Co, Ni, Ga, Ti, In, Cd, Sn, Fe and Pd.
    Type: Grant
    Filed: October 20, 1986
    Date of Patent: February 28, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Dieter Hoffman, Wolf-Dieter Munz, G. A. Hoist Siewert, Horst Dietrich
  • Patent number: 4806765
    Abstract: The disclosure relates to a method and apparatus for checking the signal path in a measuring system of the type having a collector for charged particles and an amplifier connected to its output to form a voltage or current signal. To permit sensitivity tests with currents on the order of 10.sup.-12 A and less, it is proposed that a capacitive current, produced by means of a influencing electrode situated in the vicinity of the charge collector, be fed into the charge collector. An electrode already present in the measuring system can be used as the influencing electrode.
    Type: Grant
    Filed: October 9, 1986
    Date of Patent: February 21, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventor: Raymond Heinen
  • Patent number: 4803398
    Abstract: An electron gun with one directly heatable initial cathode (2), one indirectly heatable second blocking cathode (3) and one focusing electrode (17). The focusing electrode (17) presents an initial centering region (18) and, by means of supporting braces, the blocking cathode (3) is fixed concentrically in a carrier ring (19) presenting a second centering region complementary to the first centering region (18). This permits the blocking cathode (3) to be introduced into the focusing electrode from the back by means of the carrier ring (19), and the carrier ring (19) is secured by means of a locking ring (24).
    Type: Grant
    Filed: July 3, 1986
    Date of Patent: February 7, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Reinhardt Kraft, Horst Ranke
  • Patent number: 4799046
    Abstract: To monitor the winding temperature of a coil, preferably the magnet coil of a magnetic valve, it is proposed to use as the monitored magnitude the resistance related to the temperature of the winding. For this purpose the winding is supplied during the measurement time with a constant or predeterminable voltage or current and the voltage or current related to the temperature of the winding is used as the magnitude to be measured.
    Type: Grant
    Filed: January 30, 1987
    Date of Patent: January 17, 1989
    Assignee: Leybold-heraeus GmbH
    Inventor: Raymond Heinen
  • Patent number: 4798521
    Abstract: A system for regulating pressure in a container. The system includes a membrane pressure regulator with a reference pressure chamber containing a reference pressure, and a vacuum pump connected to the container via the membrane pressure regulator. The system further includes a gas inlet valve connected to the reference pressure chamber for increasing the reference pressure; a gas outlet valve connected to the reference pressure chamber for decreasing the reference pressure; and a regulator connected to the gas inlet valve and the gas outlet valve for actuating the valves. The regulator includes a device for generating a desired pressure value for the container and a measuring member connected for providing an indication of the pressure in at least one of the reference pressure chamber and the container.
    Type: Grant
    Filed: May 4, 1987
    Date of Patent: January 17, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Lothar Schmidt, Hans-Joachim Schumbert
  • Patent number: 4798663
    Abstract: Sputtering apparatus for the reactive coating of substrates with hard substances, which has a housing (1) with a feed line (3, 4) for a reaction gas a nobble gas, a magnetron (6) as well as at least one mounting (9) for the substrates, the mounting (9) being positionable in front of the sputtering surface and between an ionization system with at least two electrodes (7, 8), of which the one electrode (8) is operable as an electron emitter and the other electrode (7) is at a positive potential with respect to the emitter electrode, and the substrate mounting (9) itself is at a negative voltage in relation to the ground.
    Type: Grant
    Filed: September 30, 1986
    Date of Patent: January 17, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Gunther Herklotz, Hans Eligehausen
  • Patent number: 4797062
    Abstract: A device for moving a gas at a subatmospheric pressure with a screwthread-like device on at least one of the facing surfaces of a rotor spacedly surrounded axially by a relatively-rotatable stator insulates the stator from a housing for the device to prevent thermal variation of the space between the rotor and stator and, thus, keeping the gas-moving action constant.
    Type: Grant
    Filed: October 20, 1987
    Date of Patent: January 10, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Ludger Deters, Heinrich Englander, Hans-Peter Kabelitz, Gunter Schutz
  • Patent number: 4794784
    Abstract: A leak detecting apparatus includes a detector arranged for sensing a gas emanating through a specimen to be tested for leaks; a leak simulator having an outlet emitting a gas of a known flow rate; and a valve for selectively connecting the outlet to the detector during a calibration thereof and disconnecting the outlet from the detector during a leak detecting operation thereof. The valve comprises a fast-switching 3/2-way valve including a movable valve member having first and second positions. In the first position the movable valve member allows communication through the valve solely between the outlet of the leak simulator and an input of the detector and in the second position allows communication through the valve solely between the outlet of the leak simulator and the atmosphere.
    Type: Grant
    Filed: April 23, 1987
    Date of Patent: January 3, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventor: Werner G. Bley
  • Patent number: 4793911
    Abstract: In an apparatus for the production of coatings with a uniform thickness profile on substrates by cathode sputtering, a substrate carriage held and guided between wheels is provided, which can be moved through the coating chamber, and which has on its side facing the cathode rotatably mounted substrate disks whose axes of rotation are each disposed transversely of the plane of movement of the substrate carriage. On the side of the substrate carriage facing away from the cathode, motor-driven shafts equipped with permanent magnets are journaled in the coating chamber with their longitudinal axes extending in a plane parallel to the plane of movement of the substrate carriage, and they produce a disk current in rotor disks which are affixed co-rotationally to the substrate disks. As a result of the disk current, the rotor disks, and with them the substrate disks, are set in rotation as they pass by the shafts.
    Type: Grant
    Filed: November 12, 1987
    Date of Patent: December 27, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Guenther Kemmerer, Hans Wolf
  • Patent number: 4794330
    Abstract: A method and circuit for measuring and displaying a parameter, in which the parameter is sensed by means of a sensor which supplies an output voltage representative of the value of the parameter, the output voltage is compared with a comparison voltage associated with the sensor response characteristic, and a display is produced on the basis of the result of the comparing step. The comparison is effected by supplying the output voltage from the sensor to a first input of a comparator, supplying the comparison voltage to a second input of the comparator, and varying the comparison voltage between successive values extending over the output voltage range of the sensor.
    Type: Grant
    Filed: February 3, 1987
    Date of Patent: December 27, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans-Hermann Klein, Zoltan Szocs
  • Patent number: 4791017
    Abstract: An underlayer of at least one a carbonitride of titanium, zirconium, hafnium or vanadium or hafnium nitride may be under a surface layer at least containing gold or on a still-undermore decorative article, and preferably both. It has a brilliance approximating that of gold so that, when appropriately color matched to the surface layer, it disguises spots of the surface layer worn away in use of the article. The underlayer and surface layer may be deposited in a cathode vaporization process from corresponding metallic cathode targets in appropriate neutral or reactive atmospheres.
    Type: Grant
    Filed: December 31, 1986
    Date of Patent: December 13, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Dieter Hofmann, Klaus-Jurgen Heimbach, Helmut Petersein, Wolf-Dieter Munz