Abstract: Provided are systems and methods for overcoming optical errors occurring from reticle and other hardware usage in a semiconductor fabrication apparatus. The systems and methods minimize optical errors, such as those resulting from gravitational sag on a reticle or mask, for a pattern being projected onto a wafer. The reduced errors allow larger reticles and masks to be used—while maintaining optical accuracy; and also improve optical budget management.
Abstract: The present invention is directed to a memory that allows two simultaneous read requests with improved density. In an aspect of the present invention, a memory module includes at least two primary memory sub-modules and an additional memory sub-module including a sum of values located in the at least two primary memory sub-modules at corresponding addresses. The sum of the additional memory module enables at least two simultaneous read requests to be performed.
Type:
Grant
Filed:
December 3, 2002
Date of Patent:
April 26, 2005
Assignee:
LSI Logic Corporation
Inventors:
Egor A. Andreev, Anatoli A. Bolotov, Ranko Scepanovic, Alexander E. Andreev
Abstract: A method of testing or calibrating analog to digital converters in a digital test environment comprising: providing a phase lock loop having a voltage controlled oscillator, and calibrating the phase lock loop in terms of the relation between the input voltage to the voltage controlled oscillator and the frequency of the loop; providing in the phase lock loop a digital comparison means providing an output to a charge pumping means which provides a voltage to the input of a voltage controlled oscillator; applying a predetermined code to one input of the digital comparison means and applying the output code of an analog to digital converter to a further input of the digital comparison means, and applying the input voltage to the voltage controlled oscillator to the input of the analog to digital converter; and when equality is established between the digital codes applied to the inputs of the digital comparison means, and the frequency of the phase lock loop is constant, measuring the frequency of the phase loc
Abstract: The present invention is a method, system, and product for optimizing timing in a circuit after layout of the circuit has been completed. The circuit includes at least one variable delay line and includes coupled endpoint devices. The variable delay line includes multiple, different selectable settings. A current setting of the variable delay line is varied from a maximum setting to a minimum setting. A timing accuracy indicator of a combination of the coupled endpoint devices is determined as the variable delay line is varied from its maximum setting to its minimum setting. Thus, multiple timing accuracy indicators are determined where an indicator is determined for and associated with each one of the settings from the maximum setting to the minimum setting. An optimum one of the selectable settings is determined utilizing the timing accuracy indicators, wherein the optimum one of the settings is associated with an optimum one of the multiple timing accuracy indicators.
Type:
Grant
Filed:
December 31, 2002
Date of Patent:
April 26, 2005
Assignee:
LSI Logic Corporation
Inventors:
Gregory A. Johnson, Andrew Carl Brown, Travis Alister Bradfield
Abstract: Objects are assigned to points in a rectangle by dividing the rectangle is divided into a plurality of smaller rectangles and applying an object assignment procedure, such as Kuhn's algorithm, to initially assigned objects in each second rectangle. The initial assignment is performed by calculating a maximal cost of assignment of objects to points, and selecting an assignment of objects having a minimum value of maximal cost, identified by iteratively recalculating the maximal matching assignment based on a midpoint of between the minimum and maximum costs.
Type:
Application
Filed:
October 17, 2003
Publication date:
April 21, 2005
Applicant:
LSI Logic Corporation
Inventors:
Alexander Andreev, Andrey Nikitin, Ranko Scepanovic
Abstract: The present invention is directed to a method and system for measuring bus frequency. A system suitable for determining bus frequency may include a bus device and a processor. The bus device is suitable for performing an operation and the processor is communicatively coupled to the bus device utilizing a bus. The processor is capable of starting a timer, initiating the bus device to perform a number of operations, receiving an indication that the bus device completed the number of operations, stopping the timer when the indication is received. A bus clock frequency is computed based upon time taken to complete the number of operations as indicated by the timer and the number of operations performed by the bus device.
Abstract: A multiple channel communication system includes a plurality of network communication ports, a plurality of communication devices and an autonegotiation controller. Each communication device is coupled to a respective one of the plurality of network communication ports. The autonegotiation controller is coupled to and shared by the plurality of communication devices.
Abstract: A circuit generally comprising a memory and a core module is disclosed. The memory may be configured as (i) a first stack having a plurality of index pointers and (ii) a table having a plurality of entries. The core module may be configured to (i) pop a first index pointer of the index pointers from the first stack in response to receiving a first command generated by a first module external to the circuit, (ii) assign a first entry of the entries identified by the first index pointer to the first module, (iii) generate an address in response to converting the first index pointer and (iv) transfer the address to the first module.
Abstract: In the context of a DVD-RAM read-type architecture in which an optical storage medium (20) makes use of an eccentric wobble (164) to attain synchronisation information, a wobble PLL (179) is held in an acquired state whenever header regions (32, 33) embossed at regular intervals across the optical storage medium (20) are detected. More specifically, large dc variations associated with voltage spikes caused by header regions (32, 33) are scaled (260) relative to a dynamically varying amplitude envelope of the extracted wobble signal (164), such as to identify a start location (300) for each header region. The wobble PLL (179) is effectively allowed to free-run and hold state during periods of header, thereby mitigating the likelihood that the wobble PLL will loose lock during the header regions.
Type:
Grant
Filed:
October 23, 2001
Date of Patent:
April 19, 2005
Assignee:
LSI Logic Corporation
Inventors:
Stephen Williams, David I. Boddy, Nicholas A. I. Mihailovits
Abstract: A three step process for planarizing an integrated circuit structure comprising one or more dielectric layers having trench and/or via openings therein lined with a layer of electrically conductive barrier liner material and filled with copper filler material. Sufficient excess copper (formed over the barrier liner portions on the top surface of the dielectric layer) is removed in an initial chemical mechanical polish (CMP) step to provide a planarized copper layer with a global planarity of about 20 nm to about 30 nm. The remainder of the excess copper over the portion of the barrier liner material lying on the top surface of the dielectric layer is then removed by electropolishing the structure, in a second step, until all of the excess copper over the portion of the barrier liner material lying on the top surface of the dielectric layer is removed.
Type:
Grant
Filed:
July 7, 2003
Date of Patent:
April 19, 2005
Assignee:
LSI Logic Corporation
Inventors:
Wilbur G. Catabay, Richard Schinella, Zhihai Wang, Wei-Jen Hsia
Abstract: A system and method are presented for indicating active tag bits within valid entries of a dual-clock FIFO data buffer, used to transfer data between two clock domains. Data (containing tag bits) are written to the FIFO and read from the FIFO using separate clocks. Data writes are synchronous with the first clock, while reads are synchronous with the second clock. A FIFO entry is “valid” after data has been written to it, and before it is read. The system disclosed herein identifies the valid FIFO entries and generates a set of logic outputs, synchronized to the second clock (i.e., the read clock). Each output corresponds to one of the tag bit positions, and is HIGH if the corresponding tag bit is HIGH in any of the valid entries. This creates a means of detecting active tag bits in the FIFO without having to actually read each entry. Since the tag bits convey important information about the source and nature of the data, this detection system may expedite the data transfer.
Abstract: A method and system for selectively identifying reliability risk die based on characteristics of local regions on a wafer by computing particle sensitive yield and using the particle sensitive yield to identify reliability risk die. Specifically, a bin characteristics database which identifies hard and soft bins that are sensitive to different failure mechanisms is maintained, and the bin characteristics database is used to compute particle sensitive yield. It is determined whether the particle sensitive yield of the local region around the current die is less than a pre-set threshold, and the die is downgraded if the particle sensitive yield of the local region around the current die is less than the pre-set threshold. If the particle sensitive yield of the local region around the current die is not less than the pre-set threshold, the die is not downgraded.
Type:
Grant
Filed:
June 4, 2003
Date of Patent:
April 12, 2005
Assignee:
LSI Logic Corporation
Inventors:
Ramon Gonzales, Kevin Cota, Manu Rehani, David Abercrombie
Abstract: A method of calculating delay for a process variation includes finding a value for each of exactly two independent variables that results in a maximum or minimum variation of estimated cell delay plus net delay, calculating a variation of resistance from the value found for each of the exactly two independent variables, calculating a variation of capacitance from the value found for each of the exactly two independent variables, adding the calculated variation of resistance to a net resistance to generate a modified net resistance for a selected net, adding the calculated variation of capacitance to a net capacitance to generate a modified net capacitance for the selected net, and calculating the cell delay plus net delay from the modified net resistance and the modified net capacitance.
Type:
Grant
Filed:
October 16, 2002
Date of Patent:
April 12, 2005
Assignee:
LSI Logic Corporation
Inventors:
Qian Cui, Robert W. Davis, Sandeep Bhutani, Payman Zarkesh-Ha, John D. Corbeil, Jr., Prabhakaran Krishnamurthy
Abstract: A pipeline processor having an exception program counter chain generates a return address in the exception program counter chain for an executing instruction. The return address is the point at which instruction execution should resume after an exception handler routine runs if the executing instruction incurs an exception. The return address is stored into a profiling register if and when the corresponding instruction completes execution. The profiling register is periodically sampled and a statistical profile is built of instructions executed in the processor by using the return addresses sampled. A sampled return address is identified as a branch delay instruction and included in the statistical profile if the sampled return address is that of a branch instruction which immediately precedes a branch delay instruction.
Abstract: An improved method of using the Elmore Model to estimate the delay which is associated with the a clock buffer output. The improved method provides that the clock buffer output resistor is taken into account when the Elmore Model is used to calculate the delay. Also provided is a method of using the Elmore Model to estimate wire delay, where the method includes steps of calculating an approximate delay based on a distributed RC model, and using a capacitance value corresponding to the approximate delay in the Elmore Model to estimate the wire delay.
Abstract: A memory input-output (IO) buffer is provided, which includes a bit line, a data input-output line and a combined sense amplifier and write driver. The combined sense amplifier and write driver is coupled to the data input-output line and the first bit line and shares the same physical area on an integrated circuit.
Abstract: A process for reacting a gaseous species with a substrate includes placing the substrate in a space, heating the space, introducing the gaseous species into the space, and cooling the space. Introducing the gaseous species into the space includes introducing the gaseous species into the space before the substrate reaches a steady state temperature and/or reacting the gaseous species with the substrate includes reacting the gaseous species with the substrate while cooling the space.
Abstract: A disclosed address generation system includes a decrementer and a multiplexer. The decrementer produces a decremented address signal by subtracting a first integer value from an incremented address signal. The multiplexer produces either the incremented address signal or the decremented address signal dependent upon a control signal. A described instruction fetch apparatus includes an instruction queuing and selection subsystem producing either an even portion or an odd portion of an instruction data block, specified by a first address signal, as a fetched instruction dependent upon one or more control signals generated based on determining bits of second and third address signals. A disclosed central processing unit (CPU) includes an instruction cache and a processor core, wherein the processor core includes an address generation subsystem generating the first, second, and third address signals, and the instruction queuing and selection subsystem. A method is described for fetching an instruction.
Abstract: A process for forming a conductive via in an integrated circuit structure that includes a first dielectric layer overlying a first conductive layer. A via cavity is formed in the first dielectric layer, which exposes the first conductive layer. A titanium nitride liner layer is formed in the via cavity, and the titanium nitride liner layer is exposed to an isotropic plasma containing hydrogen ions, thereby densifying the liner layer. A second conductive layer is formed adjacent the titanium nitride liner layer in the via cavity, which second conductive layer substantially fills the via cavity to form the conductive via. The via cavity is selectively etched with a hydrogen containing plasma prior to forming the titanium nitride liner layer. The plasma etch at least partially removes residue in the bottom of the via cavity, including carbon and oxygen.
Abstract: Embodiments of the invention include a method for forming copper interconnect structure. The method involves providing a substrate having a copper conductive layer formed thereon. An insulating layer having openings is formed on the conductive layer so that the openings expose portions of the underlying conductive layer at the bottom of the openings. A barrier layer is formed on the surface of the substrate. A portion of the barrier layer is removed at the bottom of the opening to expose the underlying conductive layer. A copper plug is formed in the opening such that the bottom of the plug is in contact with the exposed conductive layer. The substrate can be subjected to further processing if desired. The invention also includes a copper interconnect structure having increased resistance to electromigration.