Abstract: The present invention relates to an immersion lithographic system for patterning a work piece arranged at an image plane and covered at least partly with a layer sensitive to electromagnetic radiation. Said system comprising a source emitting electromagnetic radiation onto an object plane, a mask, adapted to receive and modulate said electromagnetic radiation at said object plane and to relay said electromagnetic radiation toward said work piece, and an immersion medium contacting at least a portion of a final lens of said lithographic system and a portion of said work piece, wherein an area of said contacting is restricted by capillary forces. The invention further relates to a method for patterning a workpiece.

Abstract: The present invention relates to alignment of a writing system and a workpiece. In particular, it relates to alignment to write a second layer pattern on a workpiece that has a first layer pattern, using an SLM. It extends to producing a mask or reticle, and to producing a layer of a device using the mask or reticle. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: The present invention relates to methods for patterning substrates, such as reticles, masks or wafers, which reduce critical dimension variations, improving CD uniformity. In particular, it relates to tuning doses applied in passes of a multipass writing strategy to measurable characteristics of resists or radiation sensitive layers applied to the substrates. Particular writing strategies are described. Aspects of the present invention are described in the claims, specification and drawings.

Abstract: A microfluidic device which operates without the need for an external power source. The device includes a body structure, at least one microscale channel within the structure, a port for introducing fluid into the channel, and a power source internal to the structure for propelling the fluid through the channel. Various structures are described which embody the invention.

Abstract: A numerical control device for a machine tool switching two reference axes comprising switching timing determining means for determining a timing for switching the moving position definition on the basis of the first reference axis and the moving position definition on the basis of the second reference axis; and reference axis switching means for switching, in response to the switching timing determining means, the moving position definition on the basis of the first reference axis and the moving position definition on the basis of the second reference axis.

Abstract: An aspect of the present invention includes a method of lithography to enhance uniformity of critical dimensions of features patterned onto a workpiece. Said workpiece is coated with a coating sensitive to electromagnetic radiation. An electromagnetic radiation source having an illumination intensity is provided. At least one object pixel of electromagnetic radiation is created. A predetermined pattern is exposed, by using said at least one object pixel, on at least a portion of said workpiece in a first exposure pass with a first dose to provide less than full exposure of said coating sensitive to electromagnetic radiation. Said exposing action is repeated at least until said portion of said coating sensitive to electromagnetic radiation is fully exposed, wherein said dose is increased for every following pass. Said fully exposed coating sensitive to electromagnetic radiation is developed.

Abstract: An electromagnetic receiver of a balanced armature type is employed as a receiver to be mounted in a portable telephone. The balance armature receiver has lower power consumption and higher electric acoustic conversion efficiency. The balanced armature receiver provides a required output even though small in size. The receiver occupies a considerably reduced space in the portable telephone, compared with a conventional portable telephone having a conventional dynamic receiver. The longitudinal wall of the receiver is parallel to the upper edge of a liquid crystal display panel, so that the liquid crystal display panel is extended upward and considerably enlarged.

Abstract: A microfluidic system for isolation and amplification of DNA or RNA from aqueous solutions and detection of the DNA or RNA on a lateral flow detection strip, including a disposable microfluidic card for use in analysis of bacteria in platelets and an analysis of sexually transmitted diseases (STD) in urine. The card will include an embedded membrane that filters out cells and cellular debris. Any biological debris on the membrane will be lysed and the DNA or RNA amplified via PCR amplification protocol, including appropriate reagents and thermal cycling conditions. The amplified DNA or RNA are transferred to a lateral flow detection strip for a visual diagnostic read out. An alternate embodiment includes a microfluidic card for use in typing antiglobulin assays.

Abstract: The present invention relates to a method and a system for producing large area display panels with improved precision. The system according to the invention comprises a first mask producing means (1) for producing a mask with a predetermined pattern according to input data and microlithographic exposing means (2) for exposing a photosensitive substrate with light and with use of a mask to impose the pattern of the mask on the substrate, whereby said substrate has a layer being sensitive to said light. Further, the system comprises measuring means (3) for measuring the pattern on the substrate and detecting deviations relative to the intended pattern as given by the input data, and second mask producing means (1) for producing a second mask according to second input data, and being controllable according to said measurement, to modify the pattern on the mask to compensate for the measured deviations, and thus compensate for production distortions.

Abstract: An aspect of the present invention includes a method to print pattern with improved edge acuity. In one embodiment a method for printing fine patterns comprising the actions of: providing an SLM and providing a pixel layout pattern with different categories of modulating elements, the categories differing in the phase of the complex amplitude. Other aspects of the present invention are reflected in the detailed description, figures and claims.

Abstract: An aspect of the present invention includes a method to print pattern with improved edge acuity. In one embodiment a method for printing fine patterns comprising the actions of: providing an SLM and providing a pixel layout pattern with different categories of modulating elements, the categories differing in the phase of the complex amplitude. Other aspects of the present invention are reflected in the detailed description, figures and claims.

Abstract: Microfluidic devices and methods for performing a microfluidic process are presented. A microfluidic device conforms with a standard well plate format. The device includes a well plate comprising a plate and an array of wells formed on or in the plate, and a microfluidic structure connecting at least two of the wells. The device can rely exclusively on gravitational and capillary forces that exist in channels within the microfluidic structure when receiving fluid streams. Also disclosed is a microfluidic device having an array of microfluidic structures, each connecting at least two wells of a well plate, and connecting three or more wells in alternative embodiments. With the present invention, a large number of microfluidic processes or reactions can be performed simultaneously.

Abstract: The status of a plurality of service orders is summarized. A first data set that includes a plurality of records corresponding to service orders, such as requests for initiation of telephone or other communications services, is imported into a database application. At least one query or test may be executed on the first data set to generate a second data set that includes at least part of the first data set and one or more labels that have been appended to at least some of the plurality of records in the first data set. This second data may be imported into a spreadsheet application so that the spreadsheet application can automatically generate a summary of at least some of the data contained in the second data set.

Abstract: The present invention relates to a device for homogenizing the spatial intensity distribution of a spatially coherent radiation beam. The device includes a grating arranged in the propagation path of a spatially coherent radiation beam for diffracting the coherent beam and thus decreasing the coherence length of a diffracted radiation beam in a direction orthogonal to the propagation direction of the radiation beam relative to the width of the radiation beam in the orthogonal direction; and a radiation splitting and directing arrangement arranged in the propagation path of the diffracted radiation beam for splitting the diffracted radiation beam into spatially separated portions and for superimposing the spatially separated portions to form a radiation beam having a homogenized spatial intensity distribution.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask, a display panel or a microoptical device. The apparatus comprises a radiation source and a spatial modulator (SLM) having a multitude of modulating elements (pixels). It further comprises an electronic data processing and delivery system feeding drive signals to the modulator, a precision mechanical system for moving said workpiece and an electronic control system coordinating the movement of the workpiece, the feeding of the signals to the modulator and the intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns. According to the invention the drive signals can set a modulating element to a number of states larger than two.

Abstract: The present invention relates to a method for compensating the impact of at least one defective pixel with a known position in a spatial light modulator (SLM) when creating a pattern of the SLM on a work piece covered with a layer sensitive to electromagnetic radiation. A source for emitting electromagnetic radiation is provided. Said radiation is illuminating said SLM having a plurality of modulating elements (pixels). In a writing pass an image of said modulator is projected on said work piece. A compensation for defective pixels in at least one other writing pass is performed. The invention also relates to an apparatus for performing said method.

Abstract: A system for making small modifications to the pattern in standard processed semiconductor devices. The modifications are made to create a small variable part of the pattern against a large constant part of the same pattern. In a preferred embodiment the exposure of the variable and constant parts are done with the same wavelength in the same combined stepper and code-write. The invention devices a way of writing variable parts of the chip that is automatic, inexpensive and risk-free. A system for automatic design and production of die-unique patterns is also shown.

Abstract: The present invention relates to a method to detect at least one defective pixel in a spatial light modulator comprising numerous pixel elements. The spatial light modulator is imaged to a detector. A relayed image of a first chess-board pattern of pixels in said spatial light modulator is detected by said detector. A relayed image of a second chess-board pattern of pixels in said spatial light modulator is detected, which is inverted to the first chessboard pattern, by said detector. The relayed images of said first and second chessboard patterns are analyzed to detect differences between said detected images and theoretical images thereof.

Abstract: A core having a coil wound thereon is fixed to a base at the bottom. The base is fixed to a case made of synthetic resin by insert molding. A diaphragm is fixed to the case in circumference, and also a magnetic flux guide member is fixed to the case in circumference. Since the diaphragm and the magnetic flux guide member is commonly fixed to the case, no variation in the distance between the diaphragm and the magnetic flux guide member would occur for every product. Further, a gap L is formed between the magnet and the magnetic flux guide member, and an air hole is formed in the magnetic flux guide member. This improves the passage of air and reduces air dumper effect without modifying the magnet in shape.

Abstract: An electroacoustic transducer 1 includes a base 24 made of a magnetic material; a magnetic core 22 made of a magnetic material and upstanding on the base 24; a diaphragm 20 made of a magnetic material and spaced from a leading end of the magnetic core; a magnetic field generating member 25 cooperating with the base 24, the magnetic core 22 and the diaphragm 20 to constitute a magnetic circuit, for supplying a static magnetic field; a coil 23 placed around the magnetic core, for supplying an oscillating magnetic field to the magnetic circuit. The magnetic field generating member 25 constitutes a multiplex ring structure in which a magnet 25a and a support ring 26 are integrated together, whose faces opposing the diaphragm 20 have respectively magnetic poles of the same polarity.