Abstract: The present invention relates to a method for modulating at least one pulse of electromagnetic radiation with a spatial light modulator. At least one mechanically movable modulator element is provided. At least one actuating element is provided capable to produce forces on said modulator element. An address signal to said at least one movable element is provided. A first amplifying signal is provided to at least one first electrode belonging to said at least one movable element shaping and timing said amplifying signal for creating a mechanical response in the modulator element representing a desired modulation state for said electromagnetic radiation pulse when impinging onto said modulator element.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus comprises a source for emitting electromagnetic radiation, a spatial modulator having multitude of modulating elements (pixels), adapted to being illuminated by said radiation, and a projection system creating an image of the modulator on the workpiece.

Abstract: An electrical connecting apparatus comprises: a plurality of plate-like probes, each of which electrically connects an electrode of a device under test and a conductive portion formed in a base plate, and each of which has a tip to be pressed against the electrode on one end side of the probe and a curved outer face on one side in the width direction of the probe, and each of which further has a first recess opening on the one side; and an assembler for assembling the probes into the base plate such that the probes are arranged at intervals in the thickness direction and that the tips are projected to the side opposite to the base plate.

Abstract: It is an object of the invention to determine whether a passenger sits in a passenger seat or backseat, and if YES, determine whether the passenger is an adult or a child, and whether the passenger is sitting in a normal attitude. A pair of thermopile sensors 13 and 14 are disposed on a dashboard 11 at a predetermined distance from each other in a horizontal direction. The pair of thermopile sensors 13 and 14 are disposed such that they monitor a predetermined same position P on a surface of the passenger seat 12 when a passenger 15 does not sit in a passenger seat 12. Output signal which are output from the pair of thermopile sensors 13 and 14 are subtracted by a subtraction circuit 25, an output difference signal of the pair of thermopile sensors 13 and 14 is taken out, and it is detected whether a passenger sits in the seat by this signal.

Abstract: The invention relates to microlithography, in particular to the writing of photomasks for computer displays, microelectronic devices, and precision photoetching. It is also applicable to wafers, optical devices and a variety of electronic interconnection structures such as multichip modules. Other applications are possible, such as printing and graphics, as well as laser projection displays. In the present invention the data conversion is divided in two steps: first cutting the geometries in scan lines and simplifying them, and then finishing the conversion of the scan lines at the point of demand, i.e. in a beam processor in the driving electronics for each beam. The idea is to make as much as possible of the conversion at the latest possible point, i.e. at the beams. What is needed at an earlier stage is to separate the data for different beams and distribute them, and to simplify the data enough to make sure that the beam processors can always handle the data flow.

Abstract: An aperture stop assembly for use in an electromagnetic radiation system may include an aperture stop made of a material at least partly transparent to an applied electromagnetic radiation. At least a portion of the aperture stop may be formed at an edge of an aperture to deflect electromagnetic radiation into the at least partially transparent material.

Abstract: The present invention relates to a method for modulating at least one pulse of electromagnetic radiation with a spatial light modulator. At least one mechanically movable modulator element is provided. At least one actuating element is provided capable to produce forces on said modulator element. An address signal to said at least one movable element is provided. A first amplifying signal is provided to at least one first electrode belonging to said at least one movable element shaping and timing said amplifying signal for creating a mechanical response in the modulator element representing a desired modulation state for said electromagnetic radiation pulse when impinging onto said modulator element.

Abstract: The present invention relates to a method to reduce charging effects affecting a degree of movement of at least one movable micro mirror in a spatial light modulator, said at least one movable micro mirror is electrostatically attractable to at least one electrode, including the action of attracting electrostatically said at least one micro mirror in a sequence of reversed electrical field between said micro mirror and said at least one electrode.

Abstract: Apparatuses and methods for making and using a filter cloth assembly are described. A filter cloth assembly can have a liquid permeable filtering medium attached to a connector ring. The liquid permeable filtering media separates at least one solid from at least one liquid in a slurry. The filtering media has a feed hole formed therein that allows passage of a slurry through the filter cloth. The connector ring including a flange having an upper flange section and a lower flange section. The lower flange section receives an edge of the feed hole to connect the filtering media to the connector ring such that the face of the filtering media is substantially flush with the upper flange section.

Abstract: The present invention relates to a method to detect at least one defective pixel in a spatial light modulator comprising numerous pixel elements. The spatial light modulator is imaged to a detector. A relayed image of a first chess-board pattern of pixels in said spatial light modulator is detected by said detector. A relayed image of a second chess-board pattern of pixels in said spatial light modulator is detected, which is inverted to the first chessboard pattern, by said detector. The relayed images of said first and second chessboard patterns are analyzed to detect differences between said detected images and theoretical images thereof.

Abstract: The present invention relates to a method to form an integrated device, said device comprising a first substrate and at least one element provided on a second substrate. A bonding material is arranged on at least one of said substrates. Said first and second substrates are joined together. At least one recess is provided through at least said first substrate and said material. Support structures are provided in at least a part of said at least one recess to mechanically and/or electrically interconnect said at least one element on said second substrate and said first substrate. At least one element out of said first substrate is formed to be mechanically and/or electrically connectable to said at least one support structure. At least a portion of said material between said first and second substrates is stripped away to make said element on said first substrate movable.

Abstract: In a microphone having a microphone body stored in a substantially cylindrical metal casing, the casing per se is formed as a ground terminal while a plus terminal is disposed in the center of a lower end surface of the microphone body. A holder is formed to have a bottom wall portion extending from a lower end portion of the holder to a lower end surface of the microphone. An outer circumferential edge portion and a center portion of the bottom wall portion are made of electrically conductive rubber so as to serve as first and second electrically conductive portions electrically connected to the two terminals respectively. Sufficient contact areas of the two electrically conductive portions with electrically conductive patterns of an external board is obtained while a sufficient gap is ensured between the two electrically conductive portions.

Abstract: The present invention relates to producing ultra flat micro surfaces suitable, for instance, for micro-mirrors. In particular, it relates to low pressure chemical mechanical planarization (CMP) of a partially cured sacrificial layer.

Abstract: A numerical control apparatus for machine tool, includes: an NC program storage portion for storing an NC program; a block skip command detection portion for detecting whether a block skip command for skipping execution of blocks after a position where the block skip command is described is present in the NC program stored in the NC program storage portion or not; a block skip end command detection portion for detecting whether a block skip end command provided in connection with the block skip command to permit execution of blocks after a position where the block skip end command is described is present in the NC program or not; and a coordinate comparison portion for performing comparison concerning a difference between coordinates on at least one control axis in the block skip command and the block skip end command.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus comprises a source for emitting electromagnetic radiation, a spatial modulator having multitude of modulating elements (pixels), adapted to being illuminated by said radiation, and a projection system creating an image of the modulator on the workpiece.

Abstract: The present invention relates to methods and systems that define feature boundaries in a radiation sensitive medium on a workpiece using a diffraction-type micromirror array, extending to production of patterns and structures on a semiconductor substrate. Workpieces include lithographic masks, integrated circuits and other electronic and optical devices. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: A method of treating a waste stream comprises a vacuum treatment to promote disintegration of the waste material by “flash vapor” production, causing a swiftly vaporizing fraction inside the material to literally explode or shred apart the matrix of the material as a whole. A main processor operates at a level of vacuum that determines a given boiling temperature for a vaporizing fraction, and one which lower than the fraction's boiling temperature for the local vicinity's barometric pressure (eg., atmospheric pressure). The input stream is pre-heated to above the given boiling temperature for that fraction as determined by the main processor's vacuum level without, however, going over the boiling temperature for the local barometric pressure. It is then introduced into the vacuum of the main processor whereby a minor percentage of the vaporizing fraction flashes into vapor, and this presumptively promotes destruction and/or disintegration of the material.

Abstract: A mattress vibrator comprises a mat having a hard plate and an elastic plate which are laminated on each other, and the mat is provided with a vibration generator, a vibrator which generates vibration by operating a moving body in an axial direction of the vibrator is used as the vibration generator, the vibrator is disposed on substantially a central portion of one end of the hard plate, an axis of the vibrator is disposed within a plate thickness of the hard plate.

Abstract: Phase stepped and paired piston SLM configurations are described, with attention to rasterization and image stability. In contrast to attenuated phase-shift reticle performance of simple titling mirror SLMs, these configuration have phase shifting capabilities emulating a hard phase shift reticle and beyond. To use a straight-forward rasterization architecture where individual pixels are determined by the local pattern data, the SLM is operated so that the complex amplitude created by a mirror or mirror pair is confined to the real axis. The tilting phase-step mirror SLM gives a new set of rules for lithography: no penalty for phase shift over binary, no penalty for OPC verses non-OPC pattern, seamless pattern decompositions, optimal tones for each pattern, etc. This gives performance and flexibility never seen before.