Patents Assigned to NGK Insulators
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Publication number: 20230317433Abstract: A wafer placement table includes: a ceramic plate having a wafer placement surface on its upper surface and incorporating an electrode; an electrically conductive plate provided on a lower surface side of the ceramic plate; an electrically conductive bonding layer that bonds the ceramic plate with the electrically conductive plate; a gas intermediate passage embedded in the electrically conductive bonding layer or provided at an interface between the electrically conductive bonding layer and the electrically conductive plate; a plurality of gas supply passages extending from the gas intermediate passage through the electrically conductive bonding layer and the ceramic plate to the wafer placement surface; and a gas introduction passage provided so as to extend through the electrically conductive plate and communicate with the gas intermediate passage, the number of the gas introduction passages being smaller than the number of the gas supply passages communicating with the gas intermediate passage.Type: ApplicationFiled: February 9, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Seiya INOUE, Tatsuya KUNO, Ikuhisa MORIOKA
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Publication number: 20230311049Abstract: A honeycomb filter includes a honeycomb structure body that has porous partition walls disposed so as to surround cells, and plugging portions that are disposed at any one of the ends on the inflow end face and the ends on the outflow end face. A cross-sectional shape of each of the inflow cells is octagonal and a cross-sectional shape of each of the outflow cells is quadrangular. An area ratio (S1/S2) of a cross-sectional area S2 of each of the outflow cells to a cross-sectional area S1 of each of the inflow cells is 1.40 to 2.20. The plugging portions have convex portions that protrude from the end faces on which the plugging portions are disposed, toward the outer sides, and have a protruding height H of 0.3 to 3.0 mm, and the plugging portions have a plugging depth L of 4.0 to 9.0 mm.Type: ApplicationFiled: February 7, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Fumihiko YOSHIOKA, Yudai KURIMOTO
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Publication number: 20230311048Abstract: A honeycomb filter comprising a pillar-shaped honeycomb structure body having a porous partition wall and a plugging portion, wherein a thickness of the partition wall is 0.217 mm or less, a porosity of the partition wall is 57 to 63%, an average pore diameter of the partition wall is 6 to 14 ?m, a number per unit area of pores which exist at a surface of the partition wall and which have equivalent circle opening diameters exceeding 3 ?m is 800 to 1500 /mm2, an average equivalent circle opening diameter of pores which exist at a surface of the partition wall and which have equivalent circle opening diameters exceeding 3 ?m is 6.7 to 12.5 ?m, and in a pore diameter distribution of the partition wall, D10 is 3.0 to 7.0 ?m, D90 is 13.0 to 27.0 ?m, and (Log (D90)-Log (D10))/Log (D50) is 0.75 or less.Type: ApplicationFiled: March 2, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Yudai KURIMOTO, Fumihiko YOSHIOKA
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Publication number: 20230313721Abstract: A honeycomb structure including an electrically conductive honeycomb structure portion, comprising an outer peripheral wall, and partition walls disposed inside the outer peripheral wall and partitioning a plurality of cells forming flow paths from one end surface to the other end surface; and a pair of electrode layers provided on an outer surface of the outer peripheral wall so as to face each other across a central axis of the honeycomb structure portion; wherein a coefficient of linear expansion of the honeycomb structure portion measured according to JIS R1618:2002 when temperature is changed from 40° C. to 300 ° C. is 4.1×10?6/° C. or more, and the coefficient of linear expansion of the honeycomb structure portion measured according to JIS R1618:2002 when the temperature is changed from 300 ° C. to 800 ° C. is 4.2×10?6/° C. or more and 4.8×10?6/° C. or less.Type: ApplicationFiled: February 1, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventor: Mako HATTORI
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Publication number: 20230311110Abstract: A honeycomb structure including a honeycomb structure portion made of ceramics having an outer peripheral wall and partition walls disposed inside the outer peripheral wall and partitioning a plurality of cells; and a pair of electrode layers provided on an outer surface of the outer peripheral wall; wherein in a cross-section orthogonal to a direction in which the cells extend, assuming a coordinate value of a center of gravity O is 0, and a coordinate value of an inner peripheral surface of the outer peripheral wall is 1.00 R, an average value P1A of a porosity (%) of the partition walls in a range of coordinate values of 0 to 0.50 R and an average value P2A of a porosity (%) of the partition walls in a range of coordinate values of 0.50 R to 1.00 R satisfy a relationship of 1<P2A/P1A.Type: ApplicationFiled: February 8, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventor: Taro OSADA
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Publication number: 20230317430Abstract: The wafer placement table includes a ceramic plate and a conductive substrate. The ceramic plate includes a plate annular portion at an outer circumference of a plate central portion having a wafer placement surface. The plate annular portion has an annular focus ring placement surface. The conductive substrate is provided on a lower surface of the ceramic plate and used as a radio-frequency source electrode. At the same height from the focus ring placement surface in the plate annular portion, a focus ring attraction electrode and a focus-ring-side radio-frequency bias electrode to which a bias radio frequency is supplied are embedded.Type: ApplicationFiled: February 6, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Ikuhisa MORIOKA, Hiroshi TAKEBAYASHI, Tatsuya KUNO, Seiya INOUE
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Publication number: 20230311112Abstract: A pillar-shaped honeycomb structure includes an outer peripheral side wall, and a plurality of partition walls partitioning a plurality of cells, wherein an average pore diameter of the partition walls measured by a mercury intrusion method specified in JIS R1655: 2003 is 3 to 10 ?m, and when a cross-section of the plurality of partition walls is observed with an X-ray microscope and a porosity (%) is measured in a thickness direction from one surface to the other surface of each partition wall, assuming PAVE is an average porosity of each partition wall, P1 MIN is a minimum porosity from the one surface to a thickness of 5% of the partition wall, and P2MIN is a minimum porosity from the other surface to a thickness of 5% of the partition wall, 40% PAVE ?70%, and {(P1 MIN+P2MIN)/2} /PAVE ?0.9 are satisfied.Type: ApplicationFiled: March 9, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Shuji MURAMATSU, Yasuhiro SHIGA
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Publication number: 20230311047Abstract: A honeycomb filter comprising a pillar-shaped honeycomb structure body having a porous partition wall disposed to surround a plurality of cells which serve as fluid through channels extending from a first end face to a second end face and a plugging portion provided at an open end on the first end face side or the second end face side of each of the cells, wherein the partition wall has an average number of branches of pores existing at the outermost surface of the partition wall of greater than 7.5 and less than 9.0.Type: ApplicationFiled: March 2, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Yudai KURIMOTO, Yasuyuki FURUTA, Fumihiko YOSHIOKA, Tatsuya OHASHI, Ayaka SAKAI, Ritsuko TERANISHI
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Publication number: 20230311398Abstract: A method for manufacturing a cylindrical honeycomb fired body including: preparing a cylindrical honeycomb formed body; obtaining a cylindrical honeycomb dried body by drying the cylindrical honeycomb formed body; calculating predetermined parameters (EAVE1, EAVE2, EAVE3 and EAVE4) from average values of distance between a center of gravity position O and an outer peripheral contour in a plurality of predetermined angle ranges; specifying a minimum value of the predetermined parameters; obtaining a cylindrical honeycomb fired body by placing the cylindrical honeycomb dried body on a shelf plate and firing it while passing it through a continuous firing furnace, such that the direction in which the cells of the cylindrical honeycomb dried body extend vertically, and a particular location on the outer peripheral side surface determined according to the minimum value is positioned at the front.Type: ApplicationFiled: February 10, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Yasunori YAMAZAKI, Kazuya KAGEYAMA, Yusuke HAYAKAWA
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Publication number: 20230317431Abstract: A joined structure includes: a ceramic member having a wafer placement surface; an embedded electrode that is embedded in the ceramic member and has a shape extending along the wafer placement surface; a metallic connection member embedded in a surface of the ceramic member that is opposite to the wafer-placement surface so as to reach the embedded electrode; and a metallic external energizing member joined to a surface of the connection member that is exposed to the outside with a joint layer interposed therebetween. The connection member has an arithmetic mean surface roughness Ra of 6 to 16 ?m.Type: ApplicationFiled: February 21, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Yutaka UNNO, Mikiya TADAKI, Takuya YOKONO
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Publication number: 20230311111Abstract: A honeycomb filter includes: a honeycomb structure having porous partition walls disposed so as to surround cells, and plugging portions disposed at any one of ends on the inflow end face and the ends on the outflow end face, of cells. In a cross section perpendicular to an extending direction of the cells, a thickness T1 of the partition walls in a central portion including a center of gravity O of the cross section is 0.17 to 0.32 mm, a thickness T2 of the partition walls in an outer peripheral portion is 70 to 90% of the thickness T1, and the outer peripheral portion extends from an outer peripheral edge of the cross section of honeycomb structure by 6 to 12% of a radius r which is from the center of gravity O of the cross section to the outer peripheral edge.Type: ApplicationFiled: February 24, 2023Publication date: October 5, 2023Applicant: NGK Insulators, Ltd.Inventors: Fumihiko YOSHIOKA, Yudai KURIMOTO
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Publication number: 20230304429Abstract: A honeycomb structure includes: a honeycomb structure portion including: an outer peripheral wall; a partition wall disposed on an inner side of the outer peripheral wall, the partition wall defining a plurality of cells, each of the cells extending from one end face to other end face to form a flow path, wherein the outer peripheral wall and/or the cells include at least one slit containing a filling material layer made of a filling material, wherein the filling material layer has pores, and wherein the pores having a pore diameter of 90 ?m or more account for 30% by volume or more of all the pores contained in the filling material layer.Type: ApplicationFiled: February 6, 2023Publication date: September 28, 2023Applicant: NGK Insulators, Ltd.Inventor: Naoki SAKAI
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Publication number: 20230302440Abstract: A metal ratio inspection method for inspecting a metal ratio of a thermally sprayed composite material containing at least one metal and at least one ceramic, the method includes: an imaging step (step S11) of imaging the thermally sprayed composite material while irradiating the thermally sprayed composite material with imaging light; and an estimating step (step S12) of estimating a metal ratio of the thermally sprayed composite material based on a luminance distribution of the image of the thermally sprayed composite material obtained in the imaging step.Type: ApplicationFiled: March 16, 2023Publication date: September 28, 2023Applicant: NGK Insulators, Ltd.Inventors: Rina YOKOI, Takashi NORO, Takamichi SATO
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Publication number: 20230302524Abstract: A method for producing a heat conductive member includes the steps of: preparing a hollow type heat recovery member having: an inner peripheral surface and an outer peripheral surface in an axial direction; and a first end face and a second end face in a direction orthogonal to the axial direction; inserting an inner cylindrical member into a hollow portion formed in an inner region of the inner peripheral surface; and subjecting the inner cylindrical member to plastic working, and fitting at least a part of the inner cylindrical member to at least a part of one or more selected from the inner peripheral surface, the first end face, and the second end face of the heat recovery member.Type: ApplicationFiled: January 19, 2023Publication date: September 28, 2023Applicant: NGK Insulators, Ltd.Inventors: Makoto YOSHIHARA, Tatsuo KAWAGUCHI
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Publication number: 20230309197Abstract: A heater includes: a first cordierite substrate; a glass portion provided on the first cordierite substrate; and an electrically heating portion embedded in the glass portion, wherein the glass portion comprises MgO, Al2O3 and SiO2.Type: ApplicationFiled: November 17, 2022Publication date: September 28, 2023Applicant: NGK Insulators, Ltd.Inventors: Yukio MIYAIRI, Masaaki MASUDA, Koji KUZUTANI, Shinzou HAYASHI
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Publication number: 20230303460Abstract: Provided is a method of manufacturing a Si-SiC-based composite structure capable of manufacturing a Si-SiC-based composite structure having a desired shape while suppressing the deformation of a molded body. The method of manufacturing a Si-SiC-based composite structure includes a step of impregnating a molten metal containing Si into a molded body containing SiC by heating a supply body containing Si under a state in which the molded body is in contact with a deformation suppressing member configured to suppress deformation of the molded body and in which the supply body is in contact with the molded body.Type: ApplicationFiled: February 8, 2023Publication date: September 28, 2023Applicants: NGK Insulators, Ltd., NGKADREC CompanyInventors: Sora GOTO, Shuhei KUNO, Hiroomi MATSUBA
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Publication number: 20230309195Abstract: A ceramic body mainly based on BaTiO3-based crystalline particles in which a part of Ba is substituted with at least one rare earth element and at least one alkaline earth metal element. The ceramic body contains from 1.0 to 8.0% by mass of Ba6Ti17O40 crystalline particles. The BaTiO3-based crystal particles have a substituted amount of one mol of the Ba with the alkaline earth metal element of 0.01 to 0.10 mol.Type: ApplicationFiled: February 27, 2023Publication date: September 28, 2023Applicant: NGK Insulators, Ltd.Inventors: Toru HAYASE, Hirofumi YAMAGUCHI
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Publication number: 20230302523Abstract: A method for producing a shrink-fitted member by arranging a hollow type pillar shaped ceramic body inside a metal pipe and shrink-fitting them, the hollow type pillar shaped ceramic body including: an outer peripheral surface and an inner peripheral surface in a direction substantially parallel to an axial direction; and a first end face and a second end face in a direction substantially perpendicular to the axial direction. The method includes arranging the hollow type pillar shaped ceramic body inside the metal pipe while gripping the hollow type pillar shaped ceramic body using a chuck mechanism.Type: ApplicationFiled: January 9, 2023Publication date: September 28, 2023Applicant: NGK Insulators, Ltd.Inventors: Fumitaka TAKEUCHI, Shuhei KUNO, Seiya SAWADA
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Publication number: 20230298882Abstract: Provided is a method of manufacturing a Si—SiC-based composite structure capable of improving the manufacturing efficiency of the Si—SiC-based composite structure. The method of manufacturing a Si—SiC-based composite structure includes a step of impregnating a molten metal containing Si into a molded body containing SiC by heating a supply body containing Si under a state in which the supply body is in contact with the molded body, wherein a contact portion of the supply body with the molded body is a part of a surface of the supply body facing the molded body.Type: ApplicationFiled: February 8, 2023Publication date: September 21, 2023Applicants: NGK Insulators, Ltd., NGKADREC CompanyInventors: Sora GOTO, Shuhei KUNO, Daisuke KIMURA, Hiroomi MATSUBA
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Publication number: 20230298921Abstract: A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.Type: ApplicationFiled: February 15, 2023Publication date: September 21, 2023Applicant: NGK Insulators, Ltd.Inventors: Akiyoshi HATTORI, Koji UEDA, Hitoshi NISHIO, Tomohisa MIZOGUCHI