Abstract: An electrostatic chuck heater includes an electrostatic chuck including an electrostatic electrode embedded in a ceramic sintered body, a cooling member cooling the electrostatic chuck, and a heater layer disposed between the electrostatic chuck and the cooling member and including a plurality of metal layers embedded therein in multiple stages, the metal layers including resistance heating element layers. The heater layer includes a ceramic insulating layer with a thickness of 2 ?m or more and 50 ?m or less between the metal layers.

Abstract: A sensor element includes: a base part containing an oxygen-ion conductive solid electrolyte as a constituent material; at least one internal space into which a measurement gas is introduced; and at least one pump cell including an internal electrode disposed to face the internal space, an out-of-space pump electrode disposed at a location other than the internal space, and a portion of the base part located between these electrodes, the internal electrode includes a noble metal, the solid electrolyte, and a pore, and, in the internal electrode, a degree of variation of a boundary of a first region formed of the base part or the solid electrolyte contiguous with the base part and a second region occupied by the noble metal and the pore in a thickness direction of the element is 0.5 ?m or more and 6.5 ?m or less.

Abstract: Provided is a lithium complex oxide sintered plate for use in a positive electrode of a lithium secondary battery. The lithium complex oxide sintered plate has a structure in which a plurality of primary grains having a layered rock-salt structure are bonded, and has a porosity of 3 to 40%, a mean pore diameter of 15 ?m or less, an open porosity of 70% or more, and a thickness of 15 to 200 ?m. The plurality of primary grains has a primary grain diameter, i.e., a mean diameter of the primary grains, of 20 ?m or less and a mean tilt angle of more than 0° to 30° or less. The mean tilt angle is a mean value of the angles defined by the (003) planes of the primary grains and the plate face of the lithium complex oxide sintered plate.

Abstract: A ceramic molded body including a ceramic powder and an organic binder includes an oxidizable ceramic powder as the ceramic powder, includes an oxidizable metal or metal compound, or is in contact with a solid body including an oxidizable metal or metal compound. In a hydrogen atmosphere, the ceramic molded body is heated to a maximum temperature set within a range of 1,100° C. to 1,400° C. at a heating rate of more than 25° C./h, is degreased at the maximum temperature, and is then cooled at a cooling rate of more than 25° C./h.

Abstract: Provided is a lithium secondary battery including a positive electrode layer composed of a lithium complex oxide sintered body, a negative electrode layer composed of a titanium-containing sintered body, a ceramic separator, an electrolytic solution, and an exterior body including a closed space, the closed space accommodating the positive electrode layer, the negative electrode layer, the ceramic separator, and the electrolytic solution, wherein the positive electrode layer, the ceramic separator, and the negative electrode layer are bonded together, the ceramic separator is composed of MgO and glass, the glass has an average grain size of 0.5 to 25 ?m, and a ratio of the average grain size of the glass to the average grain size of MgO is 1.5 to 85.

Abstract: A sensor element includes a base part containing a solid electrolyte as a constituent material; at least one internal space into which a measurement gas is introduced; and at least one pump cell including an internal space electrode disposed to face the internal space, an out-of-space pump electrode disposed at a location other than the internal space, and a portion of the base part located between these electrodes, the internal space electrode includes a noble metal, the solid electrolyte, and a pore, and, in the internal space electrode, a ratio of a length of a boundary of a first region formed of the base part or the solid electrolyte contiguous with the base part and a second region occupied by the noble metal and the pore to a length of a boundary of the solid electrolyte and the internal space electrode is 1.1 or more.

Abstract: A gas sensor element includes an element body including an oxygen-ion-conductive solid electrolyte layer; and a protective layer that covers at least part of the element body, and has a thermal conductivity ratio R of 1.6 or higher, the thermal conductivity ratio R (=?s/?t) being a surface direction thermal conductivity ?s [W/m K] to a thickness direction thermal conductivity ?t [W/m K].

Abstract: There is provided a ceramic susceptor including a ceramic plate bonded body including a first ceramic plate and a second ceramic plate; an internal electrode embedded in the first ceramic plate; a terminal hole provided to penetrate the second ceramic plate in a thickness direction so as to reach the internal electrode and the like, the terminal hole including a small-diameter portion and a large-diameter portion, the small-diameter portion closer to a bottom of the terminal hole, the large-diameter portion far from the bottom of the terminal hole; an eyelet made of metal and adapted to be fitted in the small-diameter portion; a terminal rod inserted through the terminal hole and the eyelet, the terminal rod having one end connected to the internal electrode; and an isolation structure including a space and/or an insulating material for electrically isolating the terminal rod and the eyelet from the ceramic bonding interface.

Abstract: An AlN joined body includes a first AlN member and a second AlN member that are joined together. The content of yttria in the first AlN member is equal to or below the detection limit. The second AlN member contains yttria.

Abstract: A metal member includes a metal substrate, a first intermediate plating layer, a second intermediate plating layer, and a precious metal plating layer. The metal substrate includes a surface constituted of a plurality of crystal grains. The first intermediate plating layer is directly formed on the plurality of crystal grains of the metal substrate, contains a nickel element, and is non-oriented with respect to each crystal orientation of the plurality of crystal grains of the metal substrate. The second intermediate plating layer is directly formed on the first intermediate plating layer. The precious metal plating layer is formed on the second intermediate plating layer.

Abstract: A member for a semiconductor manufacturing apparatus includes: a ceramic plate that has a wafer placement surface at an upper surface thereof; a plug disposition hole that extends through the ceramic plate in an up-down direction and that has a truncated conical space whose upper opening is larger than a lower opening thereof; a truncated conical plug that is disposed in the plug disposition hole, that allows gas to flow in the up-down direction, and whose upper surface is larger than a lower surface thereof; an adhesive layer that is provided between the plug disposition hole and the truncated conical plug; an electrically conductive baseplate that is joined to a lower surface of the ceramic plate through a joint layer; and a gas supply path that is provided in the baseplate and the joint layer and that supplies gas to the truncated conical plug.

Abstract: A member for a semiconductor manufacturing apparatus, includes: a ceramic plate that has a ceramic plate through hole; an electroconductive base plate that has a base plate through hole and that is disposed on a lower surface side of the ceramic plate; an insulating sleeve which is inserted into the base plate through hole and of which an outer peripheral surface is adhered to an inner peripheral surface of the base plate through hole via an adhesion layer; and a sleeve through hole that passes through the insulating sleeve in the up-down direction and that communicates with the ceramic plate through hole. The insulating sleeve has a tool engaging portion that is engageable with an external tool, and upon being engaged with the external tool, the tool engaging portion transmits rotation torque of the external tool to the insulating sleeve.

Abstract: A composite substrate includes: a piezoelectric layer; and a reflective layer arranged on a rear surface side of the piezoelectric layer, wherein the reflective layer includes a high-impedance layer and a low-impedance layer containing silicon oxide, and wherein a ratio of a region of first structures in the high-impedance layer is more than 70%.

Abstract: A wafer placement table includes: a ceramic substrate having a wafer placement surface at an upper surface, and incorporating an electrode; a cooling substrate which is bonded to a lower surface of the ceramic substrate, and in which a refrigerant flow path is formed; a power supply terminal connected to the electrode; and a power supply terminal hole vertically penetrating the cooling substrate and storing the power supply terminal. The power supply terminal hole intersects with the refrigerant flow path.

Abstract: A pillar shaped honeycomb structure, including: an outer peripheral wall; and a porous partition wall disposed inside the outer peripheral wall, the a porous partition wall defining a plurality of cells, each of the cells extending from one end face to other end face to form a flow path, wherein a surface of the porous partition wall in the cells comprise a collecting layer having an average pore diameter lower than that of the porous partition wall; and wherein magnetic particles having a Curie point of 700° C. or higher are provided either or both between the surfaces of the porous partition wall and the collecting layer, and on the collecting layer.

Abstract: A method for controlling a reductant generation device 100, the reductant generation device 100 including: a sprayer 10 capable of spraying a reductant precursor 50; and a heater 20 comprising a ceramic substrate 21, the heater 20 being arranged on a downstream side of the sprayer 10 and capable of heating the reductant precursor 50 to generate a reductant 60. The method includes: a permeation step of spraying the reductant precursor 50 from the sprayer 10 and permeating the ceramic substrate 21 with the reductant precursor 50 when the heater is not heated; and after the permeation step, a heating step A of heating the reductant precursor 50 by the heater 20 and generating the reductant 60 while spraying the reductant precursor 50 from the sprayer 10.

Abstract: There is provided an electrostatic chuck assembly including: an electrode-embedded ceramic plate; a cooling plate that supports a bottom surface of the ceramic plate and has an internal space of an annular or arcuate shape; an internal fixation member of an annular or arcuate shape accommodated in the internal space so as to be rotatable about a central axis of the cooling plate; female threads in a multiple of n, which is an integer of 2 or more, spaced apart from each other in the internal fixation member; and n insertion holes for insertion of bolts for being fixed to a chamber, the insertion holes each being provided at the bottom of the cooling plate such that one set of n female threads is exposed. Each of the female threads is disposed such that another set of n female threads is exposed in the insertion holes when rotated.

Abstract: A honeycomb structure includes a pillar-shaped honeycomb structure body having a porous partition wall so as to surround a plurality of cells extending from a first end face to a second end face, and a circumferential coating layer composed of a circumferential coating material coated on at least a part of circumference of the honeycomb structure body, wherein the circumferential coating layer has a printing area for printing on the surface thereof, the printing area has a lightness (L*) in L*a*b* color space (CIE1976) defined by International Commission on Illumination (CIE) of 35 or more, and the printing area has a surface roughness Ra of 30 ?m or less.

Abstract: A first detection electrode is provided on an insulating layer. A second detection electrode is provided away from the first detection electrode on the insulating layer, and forms a capacitance together with the first detection electrode. The protection layer covers the first detection electrode and the second detection electrode, has a thickness d satisfying 1 ?m?d?10 ?m, and is made of zirconia or alumina. The protection layer is a sintered body.

Abstract: A honeycomb structure includes a base material that is a tubular member and provided with a plurality of cells extending from one end face to the other end face, and a coating layer provided on a surface of a target cell that is at least one of the plurality of cells, the coating layer being formed by magnetic particles bonded to one another. The coating layer contains at least one element selected from among Si, Al, and Mg as an additional element(s). In the coating layer, the ratio of the sum of the weight fraction(s) of the additional element(s) to the sum of the weight fraction(s) of a main constituent element(s) of the magnetic particles is higher than or equal to 1.7 wt %.