Abstract: A liquid fuel synthesis system includes a liquid fuel synthesis portion and a sweep gas supply unit. The liquid fuel synthesis portion is partitioned into a non-permeation side space and a permeation side space by the separation membrane. A temperature of the sweep gas flowing into the permeation side space is higher than at least one of a temperature of the raw material gas flowing into the non-permeation side space and a temperature of a first outflow gas flowing out of the non-permeation side space. A temperature of a second outflow gas flowing out of the permeation side space is higher than at least one of the temperature of the raw material gas flowing into the non-permeation side space and the temperature of the first outflow gas flowing out of the non-permeation side space.

Abstract: A heater element including a honeycomb structure and a functional material-containing layer, wherein the honeycomb structure has an outer peripheral wall and partition walls provided inside the outer peripheral wall, the partition walls partitioning a plurality of cells that form flow paths extending from an inlet end surface to an outlet end surface, and at least the partition walls are made of a material having PTC characteristics, and wherein the functional material-containing layer is provided on a surface of the partition walls, and a thickness of the functional material-containing layer increases from the inlet end surface toward the outlet end surface.

Abstract: A member for semiconductor manufacturing apparatus includes: an upper plate that has a wafer placement surface, contains no electrode, and is a ceramic material plate; an intermediate plate that is provided on a surface of the upper plate, opposite to the wafer placement surface, that is used as an electrostatic electrode, and that is a conductive material plate; and a lower plate that is joined to a surface of the intermediate plate, opposite to the surface on which the upper plate is provided, and that is a ceramic material plate.

Abstract: A bottom face processing method of a pillar-shaped honeycomb structure including steps of: preparing a pillar-shaped honeycomb structure including a plurality of first cells which extend in parallel with each other from a first bottom face to a second bottom face, and each of which is opened in the first bottom face and has a protruding plugged portion in the second bottom face, and a plurality of second cells each of which is adjacent to at least one of the first cells with a partition wall interposed therebetween, which extend in parallel with each other from the first bottom face to the second bottom face, and each of which has a protruding plugged portion in the first bottom face, and is opened in the second bottom face; and removing the protruding portion from the plugged portion of each of the first cells and the second cells of the pillar-shaped honeycomb structure.

Abstract: A wafer placement table includes a ceramic base including an electrode, a cooling base including a coolant flow path formed therein, a bonding layer bonding the ceramic base and the cooling base, a stepped hole penetrating the bonding layer and the cooling base and including an upper hole portion with a small diameter, a lower hole portion with a large diameter, and a hole stepped portion between the upper hole portion and the lower hole portion, the upper hole portion passing through a region in which the coolant flow path is formed, a stepped insulating pipe inserted through the stepped hole and including an upper pipe portion with a small diameter, a lower pipe portion with a large diameter, and a pipe stepped portion between the upper pipe portion and the lower pipe portion; and a connection terminal bonded to the electrode and inserted through the stepped insulating pipe.

Abstract: A wafer placement table includes a ceramic base having a wafer placement surface on its top surface where a wafer is able to be placed and incorporating an electrode, a cooling base bonded to a bottom surface of the ceramic base and having a refrigerant flow channel, a plurality of holes extending through the cooling base in an up and down direction, and a heat exchange promoting portion that is provided in an area around at least one of the plurality of holes and that promotes heat exchange between refrigerant flowing through the refrigerant flow channel and a wafer placed on the wafer placement surface.

Abstract: A gallium oxide single crystal particle according to the present invention is an ?-Ga2O3 single crystal particle and has a diameter and a height that exceed 100 ?m.

Abstract: A heat recovery device includes: a honeycomb structure including an outer peripheral wall having at least one outer peripheral surface, and partition walls arranged on an inner side of the outer peripheral wall, the partition walls defining a plurality of cells each extending from a first end face to a second end face to form a flow path for a first fluid; a thermoelectric conversion element arranged to face the outer peripheral surface of the outer peripheral wall; a cylindrical member that circumferentially covers the honeycomb structure in which the thermoelectric conversion element is arranged; a casing arranged at an interval so as to form a flow path for a second fluid, the casing being arrange on a radially outer side of the cylindrical member; and a pressing member being configured to press the cylindrical member against the thermoelectric conversion element. The cylindrical member has one or more slit portions.

Abstract: A member for semiconductor manufacturing apparatus includes a ceramic plate that has an upper surface including a wafer placement surface and that contains an electrode; a plug insertion hole that is formed as at least a portion of a through-hole extending through the ceramic plate in an up-down direction, an internal thread portion being on an inner circumferential surface around the plug insertion hole; and an insulating plug that includes an external thread portion screwed on the internal thread portion on an outer circumferential surface and that allows gas to pass therethrough.

Abstract: A wafer placement table is a wafer placement table that includes a refrigerant flow channel through which refrigerant is flowed and includes a top base including a ceramic base incorporating an electrode and having a wafer placement surface on a top surface of the ceramic base, a bottom base on a top surface of which a flow channel groove defining a side wall and a bottom of the refrigerant flow channel is provided, and a seal member disposed between the top base and the bottom base so as to seal the refrigerant flow channel from an outside.

Abstract: Provided is a photonic crystal element, which shows small delay of an electric signal, shows a small propagation loss, and has uniform characteristics over its entirety. The photonic crystal element includes a two-dimensional photonic crystal slab having holes periodically formed in a substrate made of a ceramics material, the photonic crystal element being configured to guide an electromagnetic wave having a frequency of 30 GHz or more and 20 THz or less.

Abstract: A wafer placement table includes a ceramic base having a wafer placement surface on its top surface and incorporating an electrode, a cooling base in which a refrigerant flow channel is formed, and a metal bonding layer that bonds the ceramic base with the cooling base. The cooling base includes a ceiling base made of a metal matrix composite material or a low thermal expansion metal material and defining a ceiling of the refrigerant flow channel, a grooved base of which a main component is made of the same ceramic material as a main component of the ceramic base and on a top surface of which a flow channel groove defining a bottom and a side wall of the refrigerant flow channel is provided, and a metal ceiling bonding layer that bonds a bottom surface of the ceiling base with the top surface of the grooved base.

Abstract: A separation membrane complex includes a porous support and a separation membrane formed on the support and used to separate fluid. A supply/permeation area ratio obtained by dividing a supply-side surface area by a permeation-side surface area is higher than or equal to 1.1 and lower than or equal to 5.0, the supply-side surface area being the area of a region of the surface of the separation membrane to which fluid is supplied, the permeation-side surface area being the area of a region of the surface of the support from which fluid that has permeated through the separation membrane and the support flows off.

Abstract: Provided is an optical scanning element, which has a large scan angle, is quickly responsive, and can be downsized. The optical scanning element includes: a photonic crystal layer having holes periodically formed in an electro-optical crystal substrate; a line-defect optical waveguide formed in the photonic crystal layer; a diffraction grating arranged in at least one portion selected from an upper portion, a left side surface portion, and a right side surface portion of the optical waveguide; and electrodes arranged on a left side and a right side of the optical waveguide. The optical scanning element is configured so that an emission angle of light emitted from an upper surface of the optical waveguide is changed.

Abstract: A separation system includes first and second separation parts each having a separation membrane and provided with a fluid supply port, a permeate fluid exhaust port, and a non-permeate fluid exhaust port, an intermediate connecting part for connecting the permeate fluid exhaust port of the first separation part and the fluid supply port of the second separation part, a supply pipe connected to the fluid supply port of the first separation part, in which a mixed fluid flows at a pressure higher than an atmospheric pressure, and a pressure reducing part connected to the permeate fluid exhaust port of the second separation part, for reducing a pressure inside the permeate fluid exhaust port to a pressure lower than the atmospheric pressure. A pressure inside the intermediate connecting part is lower than a pressure inside the supply pipe and not lower than the atmospheric pressure.

Abstract: A vehicle compartment purification system configured to be capable of executing a regeneration mode of a functional material by a controller, the regeneration mode including a first regeneration step in which the air is flowed through a plurality of cells of a heater element at a flow velocity A for a predetermined time from a start of the regeneration mode, and after the first regeneration step, a second regeneration step in which the air is flowed through the plurality of cells at a flow velocity B and flowed out to the outflow piping; wherein the flow velocity A and the flow velocity B satisfy the flow velocity A<the flow velocity B, provided that a direction from a first end surface to a second end surface of the heater element is regarded as a positive direction, and the flow velocity B is a positive value.

Abstract: A pillar-shaped honeycomb structure including a plurality of first cells extending from an inlet side end surface to an outlet side end surface, and a plurality of second cells extending from the inlet side end surface to the outlet side end surface, with a porous partition wall interposed therebetween, wherein a porous film having a porosity higher than that of the partition walls is provided on a surface of each of the first cells, and at a cross-section orthogonal to the direction in which the first cells of the pillar-shaped honeycomb structure filter extend, the average thickness of the porous film in the central portion is larger than the average thickness of the porous film in the outer peripheral portion.

Abstract: A SiC powder containing 70% by mass or more of a ?-SiC, wherein in a volume-based cumulative particle size distribution measured by a laser diffraction method, a D50 is 8 to 35 ?m and a D10 is 5 ?m or more.

Abstract: A pillar shaped honeycomb structure includes: a porous partition wall that defines a plurality of cells, the cells forming flow paths for a fluid, the cells extending from an inflow end face to an outflow end face; and an outer peripheral wall located at the outermost circumference. At least a part of surfaces of the partition walls has a surface layer, and the surface layer includes magnetic particles and has permeability.

Abstract: A method for estimating characteristics of a ceramic fired body, the method including: preparing a ceramic fired body by firing a formed green body; measuring a color of the ceramic fired body; and with use of a correlation between the color and at least one characteristic selected from a group consisting of a porosity, a pore diameter, and a thermal expansion coefficient previously determined for a ceramic fired body having a same composition as that of the ceramic fired body, estimating the at least one characteristic of the ceramic fired body from the color of the ceramic fired body, measured in the previous step.