Abstract: A method for measuring at least one desired parameter of a patterned structure having a plurality of features defined by a certain process of its manufacturing. The structure represents a grid having at least one cycle formed of at least two metal-containing regions spaced by substantially transparent regions with respect to incident light defining a waveguide. An optical model is provided, which is based on at least some of the features of the structure defined by a certain process of its manufacturing, and on the relation between a range of the wavelengths of incident radiation to be used for measurements and a space size between the two metal-containing regions in the grid cycle, and a skin depth of said metal. The model is capable of determining theoretical data representative of photometric intensities of light components of different wavelengths specularly reflected from the structure and of calculating said at least one desired parameter of the structure.

Abstract: A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.

Abstract: Electron multipliers, radiation detectors, and methods of making the multipliers and detectors are described. In some embodiments an electron multiplier has a structure including a plurality of interconnected fibers having electron-emissive surfaces, the fibers having a width to thickness aspect ratio greater than one.

Abstract: A method and system for optical measurements of line edge roughness (LER) of patterned structures based on illuminating the structure with incident radiation and detecting a spectral response of the structure, and further applying software and/or hardware utilities for deriving information representative of said line edge roughness parameter/s from said spectral response of the structure.

Abstract: A method for fabricating GaN-based LED is provided. The method first forms a first contact spreading metallic layer on top of the texturing surface of the p-type ohmic contact layer. The method then forms a second and a third contact spreading metallic layers on top of the first contact spreading layer. The p-type transparent metallic conductive layer composed of the three contact spreading metallic layers, after undergoing an alloying process within an oxygenic or nitrogenous environment under a high temperature, would have a superior conductivity. The p-type transparent metallic conductive layer could enhance the lateral contact uniformity between the p-type metallic electrode and the p-type ohmic contact layer, so as to avoid the localized light emission resulted from the uneven distribution of the second contact spreading metallic layer within the third contact spreading metallic layer. The GaN-based LED's working voltage and external quantum efficiency are also significantly improved.

Abstract: The present invention relates to the deposition in a magnetron reactor (1) equipped with a magnetron cathode (MC) of at least one material on a substrate (11a), according to which process said material is vaporized by magnetron sputtering, using a gas that is ionized in pulsed mode. To this effect and in order to favour the formation of high current pulses of short duration while avoiding the formation of electric arcs and while enabling an effective ionisation of the sputtered vapour, a preionization of the said gas prior to the application of the main voltage pulse on the magnetron cathode (MC) is carried out in order to generate current pulses (CP) whose decay time (Td), after cut-off of the main voltage pulse (VP) is shorter than 5 ?s.

Abstract: Alignment of layers during manufacture of a multi-layer sample is controlled by applying optical measurements to a measurement site in the sample. The measurement site includes two diffractive structures located one above the other in two different layers, respectively. The optical measurements comprise at least two measurements with different polarization states of incident light, each measurement including illuminating eh measurement site so as to illuminate one of the diffractive structures through the other. The diffraction properties of the measurement site are indicative of a lateral shift between eth diffractive structures. The diffraction properties detected are analyzed for the different polarization states of the incident light to determine an existing lateral shift between the layers.

Abstract: An oxygen sensor has a laminated body with a fluid sample inlet end and an electrical contact end, a fluid sample inlet, a substantially flat test chamber communicating with the fluid sample inlet where the test chamber is adapted to collect a fluid sample through the sample fluid inlet, a working electrode and a reference electrode within the test chamber, and a reagent matrix disposed on the working electrode where the reagent matrix contains an oxidase, a reduced form of a redox mediator and a peroxidase.

Abstract: The present invention is aimed to provide a measurement system installable within a processing equipment and more specifically within the exit station of a polishing machine. The optical scheme of this system includes a spectrophotometric channel, an imaging channel and also means for holding the wafer under measurement.

Abstract: A system for providing granular functionality called web services to commercial customers includes a web server configured to accept service requests from software application clients, functional implementations of the services, and a means of accounting for usage. The service grid architecture makes practical a reliable commercial provider of web services in the face of unreliable sources of functional implementations. This is accomplished through the commoditization of multiple implementation sources per service, standard forms for each service to which a plurality of sources is adapted, and a rules based approach to source selection per service call.

Abstract: A system for providing granular functionality called web services to commercial customers includes among other things a client to issue service requests and receive responses, a web server configured to accept and process service requests, and a means of accounting for usage. The current art specifies standards for functional interactions between web service clients and servers. A set of commercial extensions are defined herein to enable maintenance interactions. This “maintenance protocol” includes operations such as client software that is self-updating in response to server changes and the capability of reconciling client usage logs with service provider invoicing.

Abstract: A probe for a dermal phase meter includes a handle with a removable extension that terminates with a displaceable center conductor. A replaceable tip attaches to the distal end of the extension and includes a center conductor that engages the center conductor in the extension and an outer conductor that establishes electrical connection through the extension. Substituting different replacement tips provides a probe with an articulation capability.

Abstract: A thermal cracking process using tubes, pipes, and coils made of. An outermost surface covering not less than 55% of stainless steel, said surface having a thickness from 0.1 to 15 microns and being a spinel of the formula MnxCr3-xO4 wherein x is from 0.5 to 2 is not prone to coking and is suitable for hydrocarbyl reactions such as furnace tubes for cracking.

Abstract: A system and method for correcting the oxygen effect on oxidase-based analyte sensors includes an oxygen sensor with a working electrode, a reagent matrix disposed on at least the working electrode that contains a reduced form of a redox mediator, an oxidase and a peroxidase, an oxidase-based analyte sensor, a means for determining the oxygen concentration in a portion of a fluid sample using the oxygen sensor, means for determining an analyte concentration in another portion of the fluid sample using the oxidase-based analyte sensor, and means for using the oxygen concentration in the fluid sample to determine a corrected analyte concentration in the fluid sample.

Abstract: A new and distinct cultivar of Euphorbia amygdaloides plant characterized by deep green leaves with red new growth and stems, large chartreuse inflorescences that turn orange in the summer, and a rhizomatous habit.

Abstract: A new and distinct cultivar of Echinacea purpurea plant named ‘Sparkler’ characterized by its distinctive leaves with mottled variegation.

Abstract: A new and distinct cultivar of Persicaria plant characterized by its compact habit and multicolored leaves exhibiting a two-toned effect with the younger leaves dark purple brown and patterned while the older leaves are green and patterned.

Abstract: A new and distinct Podophyllum plant characterized by beautiful large umbrella-shaped, lobed leaves with an attractive brown-spotted spring color followed by green leaves with lighter spots and larger maroon red flowers in clusters.

Abstract: A new and distinct hybrid of Sedum plant characterized by maroon tinted foliage and stems, large mauve colored flowers, and an open habit.

Abstract: A new and distinct cultivar of Tiarella plant characterized its compact habit with numerous flowering stems and pink flowers, distinct leaf form and coloration.