Abstract: A mass separation filter has a first magnet forming a first magnetic field in an orthogonal direction to a beam axis of an ion beam, a second magnet sequentially arranged with the first magnet along the beam axis, parallel with and facing the opposite direction of the first magnet, and forming a second magnetic field orthogonal to the beam axis; and a collimator wall formed within the first and second magnetic fields that forms a transfer channel from a first curved channel deflected from the first magnetic field to a second curved channel deflected by the second magnetic field in a direction the reverse of the first magnetic field. Incident ions pass through a channel inversely curved by the magnetic fields of the first and second magnets according to the mass separation filter, and it is possible to lead ions of a desired mass in the same direction as the beam axis.
Abstract: In an ion implantation method of the present invention, an ion beam extracted from an ion source is implanted into a wafer by way of a plasma shower in a transportation section on the upstream side of the wafer. The plasma shower comprised of an arc chamber and a shower tube is arranged in a resolving aperture member or in the immediate vicinity of the downstream side.
Abstract: Non-Newtonian fluids, such as partially polymerized monomers or solutions of polymer in monomer may be pressure atomized below the free surface of a continuous liquid phase to produce a dispersed phase. A uniform or customized droplet size distribution can be obtained by imposing a required pressure pulsation on a flowing monomer upstream the atomizer inlet. This initial particle size distribution can be maintained or modified during subsequent polymerization process in a low shear, controlled turbulence flow pattern, created without mechanical agitation within the continuous liquid, by continuously or periodically injecting an inert gas at selected locations within the reactor.
Type:
Grant
Filed:
October 8, 2002
Date of Patent:
August 26, 2003
Assignee:
Nova Chemical Inc.
Inventors:
Karel Cornelis Bleijenberg, Grazyna Petela
Abstract: A method and system are presented for use in controlling a process of material removal from the surface of a patterned structure, by measuring at least one of residue, erosion, dishing and corrosion effects in the structure induced by this process. The structure is imaged utilizing phase modulation of light reflected from the structure, and a phase map of the structure is thereby obtained. This phase map is analyzed and data indicative of light reflective properties of layer stacks of the structure is utilized to determine a phase difference between light reflected from a selected measured site and at least one reference site spaced-apart from the selected site. The phase difference is thus indicative of the measured effect.
Type:
Application
Filed:
December 4, 2002
Publication date:
August 21, 2003
Applicant:
Nova Measuring Instruments Ltd.
Inventors:
Vladimir Machavariani, David Scheiner, Amit Weingarten, Avi Ravid
Abstract: The melt of polyvinyl aromatic polymers comprising from 10 to 45 weight % of star branched polymer prepared using a combination of thermal and tetra functional peroxide initiation has an improved melt strength permitting better foam formation for extrusion foam blown with conventional blowing agents and inert gases including CO2 and an improved tensile strength for oriented polystyrene (OPS) articles, e.g. blown film or extruded sheet.
Abstract: An assembly is provided or supporting a flat monitor in adjacent but underlying relationship to a preferably window pane equipped, preferably rectangularly-configured aperture provided in a desk-type working platform. An aperture frame extends about perimeter portions of the aperture. A flat monitor support platform is located beneath but adjacent to the aperture. Joining components extend between and interconnect portions of the aperture frame with portions of the flat monitor support platform. A flat monitor is supportable by the platform with the platform generally suspended from the aperture frame with the aperture frame so positioned in the aperture. The flat monitor viewing screen with the flat monitor so supported is viewable through the aperture. The inclination of the flat monitor viewing screen is adjustable if desired. Various aperture frame structures, flat monitor support platforms, and joining components can be utilized.
Abstract: An apparatus for processing substrates according to a predetermined photolithography process is presented. The apparatus includes a loading station in which the substrates are loaded, a coating station in which the substrates are coated with a photoresist material, an exposing station in which the photoresist coating is exposed to light through a mask having a predetermined pattern to produce a latent image of the mask on the photoresist coating, a developing station in which the latent image is developed, an unloading station in which the substrates are unloaded and a monitoring station for monitoring the substrates with respect to predetermined parameters of said photolithography process before reaching the unloading station. The monitoring station comprises an optical monitoring system comprising a spectrophotometric channel, and is accommodated in a sealed enclosure, such that incident light passes through the optical system towards the substrate through a transparent window.
Abstract: A multi-channel integrated circuit is provided in which each channel has an analog section and a digital section. Each channel of the readout chip employs low noise charge sensitive amplifier at its input followed by other circuitry such as shaper, pole-zero, peak hold, different comparators, buffers and digital control and readout. Each channel produces a self-trigger and a fast timing output. Channel-to-channel time differences are also recorded. Integrated circuit also provides a large dynamic range to facilitate large range of applications. The trigger threshold can be adjusted to provide energy discrimination. The chip has different, externally selectable, operational modes including a sparse readout mode in which only the channels which have received signals greater than a preselected threshold value are read out. The sparse readout mode results in increased data throughput, thus providing fast data acquisition capabilities.
Abstract: “Cast” films having excellent puncture resistance and tear strength are manufactured from “pseudohomogeneous” linear low-density polyethylene resin. The preferred pseudohomogeneous resins used in the present invention are prepared with an advanced Ziegler Natta catalyst (having a magnesium component and a titanium component), preferably in medium pressure solution polymerization process. The films of this invention are especially suitable for “pallet wrapping” and for wrapping goods of unusual or uneven shapes and sizes.
Abstract: The present invention provides a Ziegler-Natta catalyst useful in solution processes for the polymerization of olefins having a low amount of aluminum and magnesium. The catalysts of the present invention contain an alkyl silanol and have a molar ratio of Si:Ti from 0.25:1 to 4:1. The catalysts are effective for the solution polymerization of olefins at high temperatures.
Abstract: An ion beam processing apparatus comprises a beam line vacuum chamber from an ion source to a processing chamber. The apparatus further comprises a beam line structure for transporting ion beam from the ion source through the beam line vacuum chamber to the processing chamber. A mass analysis magnet unit is arranged from the outside in a partial section of the beam line vacuum chamber. An effective magnetic field area of the mass analysis magnet unit is disposed in a partial section of the beam line structure. Continuous cusp field forming magnet apparatuses are arranged at the series of beam line vacuum chamber part of the beam line structure to confine ion beam by forming continuous cusp fields.
Abstract: A device in a tool holding assembly for axially moving a rotatable shaft on which is arranged at a first end of the shaft a device for performing work during rotation of the shaft includes an electric motor for rotating the shaft, and at least one bearing radially supporting the shaft and permitting movement of the shaft in the axial direction. The shaft has a second end forming a free end and an electromagnetic mechanism is arranged to affect or operate on the second end of the shaft to draw the shaft in the axial direction from the first end to the second end against the affect of pressure acting against the second end of the shaft in the opposite axial direction. A mechanism controls the electromagnetic mechanism to achieve axial movement of the shaft during rotation of the shaft.
Abstract: A phosphinimine catalyst for olefin polymerization is supported on a directly fluorided metal oxide with an aluminoxane. This catalyst is highly active for olefin polymerization in comparison to prior art catalysts which use non-fluorided metal oxide supports. The directly fluorided metal oxide may be conveniently prepared by contacting the precursor metal oxide with a simple alkali metal salt (such as NaF) in an aqueous slurry.
Type:
Application
Filed:
September 16, 2002
Publication date:
June 26, 2003
Applicant:
NOVA Chemicals (International) S.A.
Inventors:
Xiaoliang Gao, P. Scott Chisholm, Robert D. Donaldson, Ian McKay
Abstract: Novel ethylene styrene interpolymers having triads with double reverse styrene incorporation (SSS) may be prepared in the presence of a transition metal phosphinimine compound and an activator.
Type:
Grant
Filed:
January 18, 2002
Date of Patent:
June 17, 2003
Assignee:
Nova Chemicals (International)S.A.
Inventors:
Qinyan Wang, Patrick Lam, Zengrong Zhang, Garry Yamashita, Lianyou Fan
Abstract: A two dimensional beam deflector is disclosed which deflects beams from multiple optical assemblies. The input of beams of the multiple optical assemblies follow parallel optical paths until deflection to a wafer. An ellipsometer using a two-dimensional beam deflector is also disclosed.
Abstract: A new and distinct hybrid of Pulmonaria plant characterized by vigor, silver blotched and spotted leaves and large, open, purple to violet flowers.
Abstract: A new and distinct cultivar of Pulmonaria plant characterized by lime green blotches and spots over contrasting deep green foliage and purple pink flowers changing to deep violet blue, and with mildew resistance.
Abstract: A new and distinct hybrid of Pulmonaria plant characterized by silvered foliage and rose pink flowers that stay rose pink rather that fading to violet and mildew resistance.