Abstract: A lithographic manufacturing system produces periodic structures with feature sizes less than 10 nm and a direction of periodicity (D). A beam of radiation (1904) having a range of wavelengths in the EUV spectrum (1-100 nm or 1-150 nm) is focused into a spot (S) of around 5 ?m diameter. Reflected radiation (1908) is broken into a spectrum (1910) which is captured (1913) to obtain a target spectrum signal (ST). A reference spectrum is detected (1914) to obtain a reference spectrum signal (SR). Optionally a detector (1950) is provided to obtain a further spectrum signal (SF) using radiation diffracted at first order by the grating structure of the target. The angle of incidence (?) and azimuthal angle (?) are adjustable. The signals (ST, SR, SF) obtained at one or more angles are used to calculate measured properties of the target, for example CD and overlay.

Abstract: A method for reading out a non-volatile memory element having at least two stable states 0 and 1. This memory element comprises at least one resistive memory cell, which encodes the two states 0 and 1 into a state HRS having higher electrical resistance and a state LRS having lower electrical resistance. In the two states 0 and 1, the memory element has differing capacitances C0,1; this difference is used to determine which state is present. A memory element is selected in which a fixed capacitance that is independent of the state of the memory cell is connected in series with the memory cell. A series connection of a resistive memory cell with a fixed capacitance, instead of with a second resistive memory cell, improves the signal strength during capacitive read-out. The second memory cell becomes indispensable for the memory function when the memory element is read out capacitively.

Abstract: The application relates to a method for determining beam parameters of a charge carrier beam, a measuring device, and a charge carrier beam device. The charge carrier beam (4) from a charge carrier beam device (1) is guided, by means of a beam deflection unit (3), over a slit aperture arrangement which is provided in an aperture device (7) and which has one or more slit apertures (8). Measurement plane coordinates of the beam components that penetrate the slit aperture arrangement are determined. On the basis of the measurement plane coordinates, the aperture device automatically moves in such a way that a measuring aperture (9) arranged in the aperture device moves over a predefined measurement reference point. The beam parameter is measured by the measuring aperture. In a measuring device (5) suitable for carrying out said method, the slit aperture arrangement has at least two non-parallel slit aperture sections (12, 13, 15, 16) which can be part of a single continuous slit aperture.

Abstract: A method and an apparatus for butt-coupling an input beam incoming from a photonic device of a second optical element to a primary photonic chip at an input interface of the primary photonic chip is disclosed. The primary photonic chip comprises a coupling apparatus. The light from the input beam is butt-coupled to the coupling apparatus. The coupling apparatus comprises a plurality of more than one single mode optical paths on the primary photonic chip. The single mode optical paths are strongly coupled to each other at the input interface of the primary photonic chip. Regions of strongly coupled single mode optical paths can correspond to one or both of distinct but highly coupled waveguides or waveguides fully merged into a multi-mode section.

Abstract: A photonic apparatus comprises an integrated waveguide, an integrated resonator in the form of a microtoroid and a thermally reflowable film. The reflowable film comprises a first film area and a second film area. The reflowable film is one of a thin film and a stack of thin films. The first film area is thermally reflown, the microtoroid is formed in the thermally reflown first film area. The second film area is not reflown in the immediate vicinity of the microtoroid. The microtoroid is optically coupled to the integrated waveguide located on or located within one of or both of the first or second film areas. The first and second film areas are directly connected to each other. The microtoroid has an edge extending along a circumference. The microtoroid can be a non-inverted or an inverted microtoroid, wherein the second film area is inside or outside of the circumference.

Abstract: The invention relates to an amplifier assembly.

Abstract: A phase noise detection apparatus comprises a laser beam, an optical resonator coupled thereto at a coupling point and a photodetector receiving light from the laser beam. The laser beam and the resonator coupled thereto convert phase noise of light transported by the laser beam prior to the coupling point into intensity noise of light transported by the laser beam thereafter. Intensity noise is converted into an electrical signal by the photodetector. The electrical signal is sent through a first signal path and a second signal path such that the first signal path transports a signal substantially proportional to the intensity noise, which is integrated in an integrator in the second path. Relative gain of the two signal paths can be adjusted and the overall gain of the signal path is preferably such that the optical phase modulator at least partially cancels said phase noise in the optical domain.

Abstract: A method for the production of aliphatic alcohols and/or their ethers, comprising the step of reacting a substrate of the general formula (I): in which m is 0, 1, 2, 3, 4, 5, 6, 7, 8 or 9 and n is 1 or 2; R1 is hydrogen, a linear, branched or cyclic alkyl rest, a primary alkanol rest, an aryl rest or one of the following radicals: and R2 is hydrogen or —CH2OH; with hydrogen in the presence of a hydrogenation catalyst system, wherein the hydrogenation catalyst system comprises: a hydrogenation catalyst comprising Re, Fe, Ru, Os, Co, Rh, Ir, Ni, Pd and/or Pt; and an acidic additive selected from the group of organoperfluorocarboxylic acids, hydrochloric acid, formic acid, acetic acid, phosphoric acid, sulfuric acid, sulfonic acid and/or organic compounds comprising sulfonic acid groups, phosphoric acid groups and/or phosphonic acid groups; with the proviso that the acidic additive is a liquid and/or at least partially dissolved in the substrate (I) during the reaction of (I) with hydrogen in the case that R2 is

Abstract: An optical data link has a transmitter and a receiver with coherent detection at the receiver and more than one optical carrier frequency. The optical carrier frequencies are generated by a frequency comb source in both the transmitter and the receiver. The frequency comb sources generate frequency combs that have frequency components and a free spectral range. The optical carrier frequencies transport more than one optical channel. Either at least one frequency component or the free spectral range of the optical comb generated at the receiver is locked to the comb generated at the transmitter by an optical phase locked loop, or an electrical phase locked loop or a feed-forward carrier recovery generates an intermediate frequency carrier reference that is routed to more than one channel to demodulate the data.

Abstract: The invention relates to a transmitter front-end device for generating output signals representing a digital stream, wherein the device has at least one first input for a first input signal and at least one second input for a second input signal, with the first input signal and the second input signal representing a complex data signal of the digital stream and being intended to influence an output signal of the transmitter front-end device.

Abstract: An electro-optical modulator with two electrodes as part of a transmission line of a first phase modulator and two electrodes as part of a transmission line of a second phase modulator included in two arms of a Mach-Zehnder-interferometer. An electrical controller applies a first electrical high-frequency-modulated voltage signals between the first and second electrodes and applies a second electrical high-frequency-modulated signals between the fourth and third electrodes. The electrical controller applies signals such that voltages applied to the first and fourth electrodes have substantially a same high-frequency content, and voltages applied to the second and third electrodes have substantially the same high-frequency content. In such configuration, a constant voltage offset is produced by either the voltages applied to the first and fourth electrodes or, the second and third electrodes. Thereby, cross-talk between electrodes, electrical losses, device size and fabrication costs may be reduced.

Abstract: The application relates to a method for determining beam parameters of a charge carrier beam, a measuring device, and a charge carrier beam device. The charge carrier beam (4) from a charge carrier beam device (1) is guided, by means of a beam deflection unit (3), over a slit aperture arrangement which is provided in an aperture device (7) and which has one or more slit apertures (8). Measurement plane coordinates of the beam components that penetrate the slit aperture arrangement are determined. On the basis of the measurement plane coordinates, the aperture device automatically moves in such a way that a measuring aperture (9) arranged in the aperture device moves over a predefined measurement reference point. The beam parameter is measured by the measuring aperture. In a measuring device (5) suitable for carrying out said method, the slit aperture arrangement has at least two non-parallel slit aperture sections (12, 13, 15, 16) which can be part of a single continuous slit aperture.

Abstract: The present invention relates to a stable optical cavity, in which an obstacle is formed or arranged on the optical axis in the form of a through-opening in one of the mirrors or of an input- or output-coupling element, in order to enable a direct geometric access to the optical axis. The mirrors of the cavity are arranged such that a degeneracy of a plurality of transverse eigenmodes of the cavity occurs without an obstacle, by the combination of which an intensity minimum is obtained in the cavity with an obstacle at the position of the through-opening or of the input- or output-coupling element. With this configuration an optical cavity of high finesse which has a position of maximum intensity on the optical axis can be realized.

Abstract: The invention relates to a method for a transmitter for a multi-channel communication system for sending real-time sensitive data D, wherein the communication system has n sub-channels, wherein n is greater than 1, wherein the sub-channels are spatially different and/or the sub-channels have different frequencies. The method comprises the steps of receiving information about the channel state of the n sub-channels, receiving information about the number of statistically independent sub-channels m, wherein m is less than or equal to n, and receiving dataD intended to be sent.

Abstract: A method for performing magnetic resonance measurements on a sample includes applying a first predetermined number of pulse trains for excitation, each pulse train having a constant amplitude and including a second predetermined number of pulses spaced by a predetermined time interval. The pulse trains are modulated by a bent function. After each pulse, data is sampled. Preferably a square number of pulses is generated being constant in power, and the Walsh transform of the sequence of their phases is constant in power, so that the power of the excitation in time and frequency domain is constant. The method can reduce power requirements and may permit undercutting specific absorption rate (SAR) limits due to the small excitation power necessary to create time signals with reasonable signal to noise ratio.

Abstract: The invention relates to a device for modifying trajectories.

Abstract: The invention relates to a transmitter front-end device for generating output signals representing a digital stream, wherein the device has at least one first input for a first input signal and at least one second input for a second input signal, with the first input signal and the second input signal representing a complex data signal of the digital stream and being intended to influence an output signal of the transmitter front-end device.

Abstract: The invention relates to an amplifier arrangement for high-frequency signals. Said amplifier arrangement comprises a signal input (IN) for receiving high-frequency signals (RFin) that are to be amplified, a first amplifier device (Mn1, Mn2) that amplifies the high-frequency signals that are to be amplified, the first amplifier device having a drain circuit, a source follower circuit or a similar device, an additional amplifier device (GB; Mn3, Mn4, Mn5, M6) which is arranged in parallel to the first amplifier device (Mn1, Mn22) and amplifies the high-frequency signals that are to be amplified, and a signal output (OUT) for outputting the high-frequency signals (RFout) amplified by the first and the additional amplifier device (GB; Mn3, Mn4, Mn5, Mn6).

Abstract: An electro-optical modulator with two electrodes as part of a transmission line of a first phase modulator and two electrodes as part of a transmission line of a second phase modulator included in two arms of a Mach-Zehnder-interferometer. An electrical controller applies a first electrical high-frequency-modulated voltage signals between the first and second electrodes and applies a second electrical high-frequency-modulated signals between the fourth and third electrodes. The electrical controller applies signals such that voltages applied to the first and fourth electrodes have substantially a same high-frequency content, and voltages applied to the second and third electrodes have substantially the same high-frequency content. In such configuration, a constant voltage offset is produced by either the voltages applied to the first and fourth electrodes or, the second and third electrodes. Thereby, cross-talk between electrodes, electrical losses, device size and fabrication costs may be reduced.

Abstract: An optical data link has a transmitter and a receiver with coherent detection at the receiver and more than one optical carrier frequency. The optical carrier frequencies are generated by a frequency comb source in both the transmitter and the receiver. The frequency comb sources generate frequency combs that have frequency components and a free spectral range. The optical carrier frequencies transport more than one optical channel. Either at least one frequency component or the free spectral range of the optical comb generated at the receiver is locked to the comb generated at the transmitter by an optical phase locked loop, or an electrical phase locked loop or a feed-forward carrier recovery generates an intermediate frequency carrier reference that is routed to more than one channel to demodulate the data.