Patents Assigned to Soitec
  • Patent number: 8691662
    Abstract: A method for fabricating a silicon-on-insulator structure includes forming a first oxide layer on a silicon donor substrate, forming a second oxide layer on a supporting substrate, and forming a weakened zone in the donor substrate. The donor substrate is bonded to the supporting substrate by establishing direct contact between the first oxide layer on the silicon donor substrate and the second oxide layer on the supporting substrate and establishing a direct oxide-to-oxide bond therebetween. The donor substrate is split along the weakened zone to form a silicon-on-insulator structure, and the silicon-on-insulator structure is subjected to two successive rapid thermal annealing processes at temperatures T1 and T2, respectively, wherein T1 is less than or equal to T2, T1 is between 1200° C. and 1300° C., T2 is between 1240° C. and 1300° C., and when T1 is below 1240° C., then T2 is above 1240° C.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: April 8, 2014
    Assignee: Soitec
    Inventors: Carole David, Sébastien Kerdiles
  • Patent number: 8691670
    Abstract: A method and structure for a semiconductor device, the device including a handle wafer, a diamond layer formed directly on a front side of the handle wafer, and a thick oxide layer formed directly on a back side of the handle wafer, the oxide layer of a thickness to counteract tensile stresses of the diamond layer. Nitride layers are formed on outer surfaces of the diamond layer and thick oxide layer and a polysilicon is formed on outer surfaces of the nitride layers. A device wafer is bonded to the handle wafer to form the semiconductor device.
    Type: Grant
    Filed: December 18, 2012
    Date of Patent: April 8, 2014
    Assignee: Soitec
    Inventors: Rick Carlton Jerome, Francois Hebert, Craig McLachlan, Kevin Hoopingarner
  • Publication number: 20140084290
    Abstract: The invention relates to a method for manufacturing a semiconductor on insulator type substrate for radiofrequency applications, comprising the following steps in sequence: (a) provision of a silicon substrate (1) with an electrical resistivity of more than 500 Ohm·cm, (b) formation of a polycrystalline silicon layer (4) on said substrate (1), said method comprising a step between steps a) and b) to form a dielectric material layer (5), different from a native oxide layer, on the substrate (1), between 0.5 and 10 nm thick.
    Type: Application
    Filed: March 22, 2012
    Publication date: March 27, 2014
    Applicants: Commissariat A L'Energie Atomique et aux Energies Alternatives, Soitec
    Inventors: Frédéric Allibert, Julie Widiez
  • Patent number: 8679942
    Abstract: Composite substrates are produced that include a strained III-nitride material seed layer on a support substrate. Methods of producing the composite substrate include developing a desired lattice strain in the III-nitride material to produce a lattice parameter substantially matching a lattice parameter of a device structure to be formed on the composite substrate. The III-nitride material may be formed with a Ga polarity or an N polarity. The desired lattice strain may be developed by forming a buffer layer between the III-nitride material and a growth substrate, implanting a dopant in the III-nitride material to modify its lattice parameter, or forming the III-nitride material with a coefficient of thermal expansion (CTE) on a growth substrate with a different CTE.
    Type: Grant
    Filed: October 30, 2009
    Date of Patent: March 25, 2014
    Assignee: Soitec
    Inventors: Fabrice Letertre, Jean-Marc Bethoux, Alice Boussagol
  • Patent number: 8679944
    Abstract: The invention provides a method of trimming a structure that includes a first wafer bonded to a second wafer, with the first wafer having a chamfered edge. The method includes a first trimming step carried out over a first depth that includes at least the thickness of the first wafer and over a first width determined from the edge of the first wafer. A second trimming step is then carried out over a second depth that includes at least the thickness of the first wafer and over a second width that is less than the first width.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: March 25, 2014
    Assignee: Soitec
    Inventors: Marcel Broekaart, Marion Migette, Sébastien Molinari, Eric Neyret
  • Publication number: 20140077751
    Abstract: A modular electrical energy production device that includes a plurality of input connectors; a regulator unit coupled electrically to the input connectors; a converter unit, a storage device and an optional first output connector, coupled electrically to the regulator unit; a control unit; and a second output connector coupled electrically to the converter unit. The invention also concerns an electrical energy production system that includes a first modular electrical energy production device and a second modular electrical energy production device.
    Type: Application
    Filed: May 30, 2012
    Publication date: March 20, 2014
    Applicant: SOITEC
    Inventors: Antoine Auberton-Herve, Jean-Luc Delcarri, Gilles Du Sordet
  • Patent number: 8673733
    Abstract: Methods of transferring a layer of semiconductor material from a first donor structure to a second structure include forming a generally planar weakened zone within the first donor structure defined by implanted ions therein. At least one of a concentration of the implanted ions and an elemental composition of the implanted ions may be formed to vary laterally across the generally planar weakened zone. The first donor structure may be bonded to a second structure, and the first donor structure may be fractured along the generally planar weakened zone, leaving the layer of semiconductor material bonded to the second structure. Semiconductor devices may be fabricated by forming active device structures on the transferred layer of semiconductor material. Semiconductor structures are fabricated using the described methods.
    Type: Grant
    Filed: September 27, 2011
    Date of Patent: March 18, 2014
    Assignee: Soitec
    Inventors: Mariam Sadaka, Ionut Radu
  • Publication number: 20140065759
    Abstract: A method for bonding first and second wafers by molecular adhesion. The method includes placing the wafers in an environment having a first pressure (P1) greater than a predetermined threshold pressure above which initiation of bonding wave propagation is prevented, bringing the first wafer and the second wafer into alignment and contact, and spontaneously initiating the propagation of a bonding wave between the wafers after they are in contact solely by reducing the pressure within the environment to a second pressure (P2) below the threshold pressure.
    Type: Application
    Filed: October 30, 2013
    Publication date: March 6, 2014
    Applicant: Soitec
    Inventor: Marcel BROEKAART
  • Patent number: 8664712
    Abstract: The invention relates to a flash memory cell having a FET transistor with a floating gate on a semiconductor-on-insulator (SOI) substrate composed of a thin film of semiconductor material separated from a base substrate by an insulating buried oxide (BOX) layer, The transistor has in the thin film, a channel, with two control gates, a front control gate located above the floating gate and separated from it by an inter-gate dielectric, and a back control gate located within the base substrate directly under the insulating (BOX) layer and separated from the channel by only the insulating (BOX) layer. The two control gates are designed to be used in combination to perform a cell programming operation. The invention also relates to a memory array made up of a plurality of memory cells according to the first aspect of the invention, which can be in an array of rows and columns, and a method of fabricating such memory cells and memory arrays.
    Type: Grant
    Filed: November 15, 2010
    Date of Patent: March 4, 2014
    Assignee: Soitec
    Inventors: Carlos Mazure, Richard Ferrant
  • Patent number: 8658514
    Abstract: A manufacturing process for a semiconductor-on-insulator structure having reduced electrical losses and which includes a support substrate made of silicon, an oxide layer and a thin layer of semiconductor material, and a polycrystalline silicon layer interleaved between the support substrate and the oxide layer. The process includes a treatment capable of conferring high resistivity to the support substrate prior to formation of the polycrystalline silicon layer, and then conducting at least one long thermal stabilization on the structure at a temperature not exceeding 950° C. for at least 10 minutes.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: February 25, 2014
    Assignee: Soitec
    Inventors: Patrick Reynaud, Sébastien Kerdiles, Daniel Delprat
  • Patent number: 8652887
    Abstract: The present invention relates to a method for providing a Silicon-On-Insulator (SOI) stack that includes a substrate layer, a first oxide layer on the substrate layer and a silicon layer on the first oxide layer (BOX layer). The method includes providing at least one first region of the SOI stack wherein the silicon layer is thinned by thermally oxidizing a part of the silicon layer and providing at least one second region of the SOI stack wherein the first oxide layer (BOX layer) is thinned by annealing.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: February 18, 2014
    Assignee: Soitec
    Inventors: Bich-Yen Nguyen, Carlos Mazure, Richard Ferrant
  • Patent number: 8654602
    Abstract: A circuit made on a semiconductor-on-insulator substrate. The circuit includes a first transistor having a first channel, a second transistor having a second channel, with the transistors provided in serial association between first and second terminals for applying a power supply potential, each of the transistors comprising a drain region and a source region in the thin layer, a channel extending between the source region and the drain region, and a front control gate located above the channel. Each transistor has a back control gate formed in the base substrate below the channel of the transistor and capable of being biased in order to modulate the threshold voltage of the transistor. At least one of the transistors is configured for operating in a depletion mode under the action of a back gate signal which will sufficiently modulate its threshold voltage.
    Type: Grant
    Filed: June 13, 2012
    Date of Patent: February 18, 2014
    Assignee: Soitec
    Inventors: Carlos Mazure, Richard Ferrant, Bich-Yen Nguyen
  • Publication number: 20140041584
    Abstract: Systems for the sustained, high-volume production of Group III-V compound semiconductor material suitable for fabrication of optic and electronic components, for use as substrates for epitaxial deposition, or for wafers. The equipment is optimized for producing Group III-N (nitrogen) compound semiconductor wafers and specifically for producing GaN wafers. The method includes reacting an amount of a gaseous Group III precursor as one reactant with an amount of a gaseous Group V component as another reactant in a reaction chamber to form the semiconductor material; removing exhaust gases including unreacted Group III precursor, unreacted Group V component and reaction byproducts; and heating the exhaust gases to a temperature sufficient to reduce condensation thereof and enhance manufacture of the semiconductor material. Advantageously, the exhaust gases are heated to sufficiently avoid condensation to facilitate sustained high volume manufacture of the semiconductor material.
    Type: Application
    Filed: October 16, 2013
    Publication date: February 13, 2014
    Applicant: Soitec
    Inventors: Chantal ARENA, Christiaan WERKHOVEN
  • Publication number: 20140038388
    Abstract: A manufacturing process for a semiconductor-on-insulator structure having reduced electrical losses and which includes a support substrate made of silicon, an oxide layer and a thin layer of semiconductor material, and a polycrystalline silicon layer interleaved between the support substrate and the oxide layer. The process includes a treatment capable of conferring high resistivity to the support substrate prior to formation of the polycrystalline silicon layer, and then conducting at least one long thermal stabilization on the structure at a temperature not exceeding 950° C. for at least 10 minutes.
    Type: Application
    Filed: October 9, 2013
    Publication date: February 6, 2014
    Applicant: Soitec
    Inventors: Patrick REYNAUD, Sébastien KERDILES, Daniel DELPRAT
  • Patent number: 8642995
    Abstract: Radiation-emitting semiconductor devices include a first base region comprising an n-type III-V semiconductor material, a second base region comprising a p-type III-V semiconductor material, and a multi-quantum well structure disposed between the first base region and the second base region. The multi-quantum well structure includes at least three quantum well regions and at least two barrier regions. An electron hole energy barrier between a third of the quantum well regions and a second of the quantum well regions is less than an electron hole energy barrier between the second of the quantum well regions and a first of the quantum well regions. Methods of forming such devices include sequentially epitaxially depositing layers of such a multi-quantum well structure, and selecting a composition and configuration of the layers such that the electron hole energy barriers vary across the multi-quantum well structure.
    Type: Grant
    Filed: June 25, 2013
    Date of Patent: February 4, 2014
    Assignee: Soitec
    Inventor: Chantal Arena
  • Patent number: 8642443
    Abstract: The present invention relates to the field of semiconductor manufacturing. More specifically, it relates to a method of forming islands of at least partially relaxed strained material on a target substrate including the steps of forming islands of the strained material over a side of a first substrate; bonding the first substrate, on the side including the islands of the strained material, to the target substrate; and after the step of bonding splitting the first substrate from the target substrate and at least partially relaxing the islands of the strained material by a first heat treatment.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: February 4, 2014
    Assignee: Soitec
    Inventor: Romain Boulet
  • Publication number: 20140030877
    Abstract: A process for avoiding formation of a Si—SiO2—H2 environment during a dissolution treatment of a semiconductor-on-insulator structure that includes a carrier substrate, an oxide layer, a thin layer of semiconductor material and a peripheral ring in which the oxide layer is exposed. This process includes encapsulating at least the exposed oxide layer of the peripheral ring with semiconductor material by performing a creep thermal treatment; and performing an oxide dissolution treatment to reduce part of the thickness of the oxide layer. In this process, the semiconductor material that encapsulates the oxide layer has a thickness before the oxide dissolution that is at least twice that of the oxide that is to be dissolved, thus avoiding formation of a Si—SiO2—H2 environment on the peripheral ring where the oxide layer would otherwise be exposed.
    Type: Application
    Filed: October 2, 2013
    Publication date: January 30, 2014
    Applicant: SOITEC
    Inventors: Didier LANDRU, Fabrice GRITTI, Eric GUIOT, Oleg KONONCHUK, Christelle VEYTIZOU
  • Publication number: 20140027714
    Abstract: A quantum well thermoelectric component for use in a thermoelectric device based on the thermoelectric effect, comprising a stack of layers of two materials respectively made on the basis of silicon and silicon-germanium, the first of the two materials, made on the basis of silicon, defining a barrier semiconductor material and the second of the two materials, made on the basis of silicon-germanium, defining a conducting semiconductor material, the barrier semiconductor material having a band gap higher than the band gap of the conducting semiconductor material, wherein the conducting semiconductor material is an alloy comprising silicon, germanium and at least a lattice-matching element, the lattice-matching element(s) being present in order to control a lattice parameter mismatch between the barrier layer made of the barrier semiconductor material and the conducting layer made of the conducting semiconductor material.
    Type: Application
    Filed: April 4, 2012
    Publication date: January 30, 2014
    Applicant: SOITEC
    Inventors: Daniel Delprat, Christophe Figuet, Oleg Kononchuk
  • Patent number: 8637995
    Abstract: Methods of forming semiconductor devices include providing a substrate including a layer of semiconductor material on a layer of electrically insulating material. A first metallization layer is formed over a first side of the layer of semiconductor material. Through wafer interconnects are foamed at least partially through the substrate. A second metallization layer is formed over a second side of the layer of semiconductor material opposite the first side thereof. An electrical pathway is provided that extends through the first metallization layer, the substrate, and the second metallization layer between a first processed semiconductor structure carried by the substrate on the first side of the layer of semiconductor material and a second processed semiconductor structure carried by the substrate on the first side of the layer of semiconductor material. Semiconductor structures are fabricated using such methods.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: January 28, 2014
    Assignee: SOITEC
    Inventor: Mariam Sadaka
  • Patent number: 8637383
    Abstract: Methods of fabricating semiconductor structures include forming a plurality of openings extending through a semiconductor material and at least partially through a metal material and deforming the metal material to relax a remaining portion of the semiconductor material. The metal material may be deformed by exposing the metal material to a temperature sufficient to alter (i.e., increase) its ductility. The metal material may be formed from one or more of hafnium, zirconium, yttrium, and a metallic glass. Another semiconductor material may be deposited over the remaining portions of the semiconductor material, and a portion of the metal material may be removed from between each of the remaining portions of the semiconductor material. Semiconductor structures may be formed using such methods.
    Type: Grant
    Filed: December 23, 2010
    Date of Patent: January 28, 2014
    Assignee: Soitec
    Inventor: Christiaan J. Werkhoven