Abstract: A transistor device package includes a component assembly comprising an interconnect structure, a transistor die having a front surface including gate, drain, and source terminal on a first surface of the interconnect structure, and one or more passive electrical components electrically coupled to the gate, drain, and/or source terminal by the interconnect structure. A thermally conductive flange is attached to a back surface of the transistor die, which is opposite the front surface, by a conductive adhesive. Respective patterns of the conductive adhesive are provided on the first surface of the interconnect structure, and least one of the respective patterns of the conductive adhesive provides an input, output, or ground signal path for the transistor device package. Related fabrication methods are also discussed.
Type:
Grant
Filed:
June 14, 2023
Date of Patent:
June 2, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Alexander Komposch, Eng Wah Woo, Basim Noori
Abstract: A wide band-gap semiconductor layer structure is provided that comprises a drift region having a first conductivity type and a plurality of source regions having the first conductivity type on the drift region. A plurality of trenches are provided in an upper surface of the wide band-gap semiconductor layer structure. Second conductivity type dopants are implanted into the wide band-gap semiconductor layer structure to simultaneously form well regions underneath the source regions and trench shielding regions underneath the trenches, the well regions and the trench shielding regions each having a second conductivity type.
Type:
Grant
Filed:
June 21, 2022
Date of Patent:
June 2, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Madankumar Sampath, Sei-Hyung Ryu, Naeem Islam, Woongsun Kim
Abstract: A vertical field effect device having a body, gate dielectric, and a gate electrode, which is in a trench that extends into the body from the top surface of the body and is located between first and second source regions. The first and second regions vertically overlap the gate electrode. The first and second channel regions laterally overlap a bottom of the gate electrode, such that each channel formed in the first and second source regions have a horizontal segment where the first and second channel regions laterally overlap the bottom of the gate electrode. In another embodiment, the first and second channel regions also vertically overlap the gate electrode such that each channel formed in the first and second source regions also have a vertical segment where the first and second channel regions vertically overlap the gate electrode.
Type:
Grant
Filed:
June 19, 2020
Date of Patent:
May 26, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Daniel Jenner Lichtenwalner, Naeem Islam
Abstract: A semiconductor device includes a semiconductor layer structure comprising a gate trench formed in an upper surface thereof, a gate finger in the gate trench, a supplemental dielectric layer on an upper surface of the gate finger and vertically overlaps the gate trench, and a gate connector on an upper surface of the supplemental dielectric layer and on an upper surface of the gate finger.
Type:
Grant
Filed:
June 23, 2022
Date of Patent:
May 26, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Madankumar Sampath, Woongsun Kim, Naeem Islam, Sei-Hyung Ryu
Abstract: In some aspects, a device includes a substrate. A first metallization arranged on the substrate. A second metallization arranged on the substrate. A circuit arranged on the substrate and electrically connected to the first metallization and the second metallization. The first metallization and the second metallization being configured, structured, and arranged to make a solder connection to a device, where the substrate may include silicon carbide (SiC).
Type:
Grant
Filed:
September 23, 2022
Date of Patent:
May 5, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Kok Meng Kam, Eng Wah Woo, Samantha Cheang, Marvin Marbell, Haedong Jang, Jeremy Fisher, Basim Noori
Abstract: Systems and methods for grinding semiconductor workpieces are provided. In one example, a method includes providing a surface of the semiconductor workpiece against a grinding apparatus. The grinding apparatus includes an abrasive surface. The method further includes imparting relative motion between the abrasive surface and the semiconductor workpiece to implement a grinding operation on the semiconductor workpiece. The method further includes providing a fluid to the surface of the semiconductor workpiece or the abrasive surface during the grinding operation. The fluid includes an additive. The additive includes one or more of an oxidizing agent, an etchant, a surfactant, or a lubricant.
Type:
Grant
Filed:
March 7, 2024
Date of Patent:
April 21, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Simon Bubel, Dinusha Priyadarshani Karunaratne
Abstract: A semiconductor die includes a semiconductor body, and a multi-layer environmental barrier on the semiconductor body. The multi-layer environmental barrier includes first and second sublayers of first and second oxide materials, respectively, where the first oxide material is different than the second oxide material. Related devices and fabrication methods are also discussed.
Type:
Grant
Filed:
June 1, 2021
Date of Patent:
April 7, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Kyoung-Keun Lee, Fabian Radulescu, Scott Sheppard, Daniel Namishia
Abstract: A crystalline material processing method includes forming subsurface laser damage at a first average depth position to form cracks in the substrate interior propagating outward from at least one subsurface laser damage pattern, followed by imaging the substrate top surface, analyzing the image to identify a condition indicative of presence of uncracked regions within the substrate, and taking one or more actions responsive to the analyzing. One potential action includes changing an instruction set for producing subsequent laser damage formation (at second or subsequent average depth positions), without necessarily forming additional damage at the first depth position. Another potential action includes forming additional subsurface laser damage at the first depth position.
Type:
Grant
Filed:
January 12, 2024
Date of Patent:
April 7, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Matthew Donofrio, John Edmond, Harshad Golakia, Eric Mayer
Abstract: A transistor device includes a metal submount; a transistor die arranged on said metal submount; an IPD component arranged on said metal submount, and the IPD component having a baseband damping resistor arranged on a thermally conductive dielectric substrate; and a second IPD component arranged on said metal submount, and the second IPD component may include a baseband decoupling capacitor arranged on a thermally conductive dielectric substrate.
Type:
Grant
Filed:
December 23, 2022
Date of Patent:
March 31, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Haedong Jang, Mehdi Hasan, Marvin Marbell, Jeremy Fisher
Abstract: Die attach materials are provided. In one example, the die-attach material includes a plurality of core-shell particles. Each core-shell particle includes a core and a shell on the core. The core includes a conducting material. The shell includes a metal nitride.
Abstract: A transistor device ac includes a semiconductor epitaxial layer structure including a channel layer and a barrier layer on the channel layer, wherein the barrier layer has a higher bandgap than the channel layer, a source contact and a drain contact on the barrier layer, and a gate contact on the barrier layer between source contact and the drain contact. The device further includes a plurality of selective modified access regions at an upper surface of the barrier layer opposite the channel layer. The selective modified access regions include a material having a lower surface barrier height than the barrier layer, and the plurality of selective modified access regions are spaced apart on the barrier layer along a length of the gate contact.
Type:
Grant
Filed:
May 20, 2021
Date of Patent:
March 10, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Kyoung-Keun Lee, Fabian Radulescu, Scott Sheppard
Abstract: Field reducing structures for transistor devices having Group III-nitride semiconductor structures are provided. In one example, a transistor device includes a nitrogen-polar (N-polar) Group III-nitride semiconductor structure. The transistor device includes a source contact, a drain contact, and a gate contact. The transistor device includes a field reducing structure operable to reduce an electric field in a region in the N-polar Group III-nitride semiconductor structure between the gate contact and the drain contact.
Type:
Grant
Filed:
March 6, 2023
Date of Patent:
February 24, 2026
Assignee:
WOLFSPEED, INC.
Inventors:
Kyle Bothe, Chris Hardiman, Scott Sheppard
Abstract: An apparatus configured to reduce lag includes a substrate; a group III-Nitride back barrier layer on the substrate; a group III-Nitride channel layer on the group III-Nitride back barrier layer; a group III-Nitride barrier layer on the group III-Nitride channel layer, the group III-Nitride barrier layer include a higher bandgap than a bandgap of the group III-Nitride channel layer; a source electrically coupled to the group III-Nitride barrier layer; a gate on the group III-Nitride barrier layer; a drain electrically coupled to the group III-Nitride barrier layer; and a p-region being arranged at or below the group III-Nitride barrier layer. Additionally, at least a portion of the p-region is arranged vertically below at least one of the following: the source, the gate, an area between the gate and the drain.
Abstract: A transistor device includes a semiconductor structure comprising a channel layer and a barrier layer, source and drain contacts on the semiconductor structure, and a conductive element in a recess in the barrier layer between the source and drain contacts. The barrier layer has a first thickness adjacent the source or drain contact, a second thickness at a floor of the recess between the conductive element and the channel layer, and the first thickness is about 1.2 times to 4 times greater than the second thickness. Related methods of fabrication using a looped recess process are also discussed.
Type:
Grant
Filed:
May 2, 2023
Date of Patent:
February 10, 2026
Assignee:
WOLFSPEED, INC.
Inventors:
Chris Hardiman, Matthew King, Kyle Bothe
Abstract: A method of fabricating a semiconductor device includes forming a protective structure on at least one die on a substrate. The protective structure exposes one or more electrical contacts on a first surface of the at least one die. Respective terminals are formed on the one or more electrical contacts exposed by the protective structure. Related packages and fabrication methods are also discussed.
Abstract: A packaged electronic device comprises a power semiconductor die that includes a first terminal and a second terminal, a power substrate comprising a dielectric substrate having a first metal cladding layer on an upper surface thereof, an encapsulation covering the power semiconductor die and at least a portion of the power substrate, a first lead extending through the encapsulation that is electrically connected to the first terminal, and a second lead extending through the encapsulation that is electrically connected to the second terminal. The first terminal is bonded to the first lead via a first transient liquid phase solder joint.
Abstract: Grinding systems and methods for semiconductor workpieces are provided. In one example, a grinding system includes a workpiece support operable to support a semiconductor workpiece and rotate the semiconductor workpiece about a first axis. The grinding system further includes a grind wheel operable to rotate about a second axis. The grind wheel has a plurality of grinding teeth arranged in a grinding ring on the grind wheel. A radius of the grinding ring is less than or equal to a radius of the semiconductor workpiece (e.g., such that an effective gap ratio between grinding teeth on the grind wheel are reduced).
Abstract: A multiple transport level tester system according to some embodiments includes an entry point, an exit point, a first transport level having a first level, and at least one additional transport levels, wherein the first level is different than the at least one additional levels. The multiple transport level tester system further includes at least one environmental conditioning chamber configured to perform an environmental conditioning on units under test; and at least one test station configured to perform at least one test on the units under test.
Type:
Grant
Filed:
December 8, 2022
Date of Patent:
January 27, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
Jason P. Hricik, Timothy Foster, Jacob Kobliska, Michael Scott
Abstract: A semiconductor device includes a drift region, an active region in the drift region, and an edge termination region in the drift region adjacent to the active region. The edge termination region includes one or more guard rings in the drift region. The drift region has a first conductivity type and the one or more guard rings have a second conductivity type. The edge termination region may also include a passivation layer that is disposed on the one or more guard rings and on the drift region in the edge termination region. The passivation layer has a first thickness over each guard ring and a second thickness over the drift region, where the first thickness is greater than the second thickness. Alternatively, the edge termination region may also include a passivation layer that is only disposed on the one or more guard rings in the edge termination region.
Type:
Grant
Filed:
June 24, 2022
Date of Patent:
January 20, 2026
Assignee:
Wolfspeed, Inc.
Inventors:
In-Hwan Ji, Edward Robert Van Brunt, Woongsun Kim