Patents Examined by Allan R. Wilson
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Patent number: 10910276Abstract: A structure, an STI structure and a related method are disclosed. The structure may include an active region extending from a substrate; a gate extending over the active region; and a source/drain region in the active region, and an STI structure. The STI structure includes a liner and a fill layer on the liner along the opposed longitudinal sides of a lower portion of the active region, and the fill layer along the opposed ends of the active region. The liner may include a tensile stress-inducing liner that imparts a transverse-to-length tensile stress in at least a lower portion of the active region but not lengthwise. The liner can be applied in an n-FET region and/or a p-FET region to improve performance.Type: GrantFiled: October 1, 2019Date of Patent: February 2, 2021Assignee: GLOBALFOUNDRIES INC.Inventors: Yongjun Shi, Xinyuan Dou, Chun Yu Wong, Hongliang Shen, Baofu Zhu
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Patent number: 10910407Abstract: A high-performance semiconductor device is provided. The semiconductor device includes a transistor, an insulating film over the transistor, an electrode, and a metal oxide over the insulating film. The transistor includes a first gate electrode, a first gate insulating film over the first gate electrode, an oxide over the first gate insulating film, a source electrode and a drain electrode electrically connected to the oxide, a second gate insulating film over the oxide, and a second gate electrode over the second gate insulating film. The electrode includes a region in contact with the insulating film. The first gate insulating film is in contact with the insulating film. The thicknesses of the insulating film over the second gate electrode, the insulating film over the source electrode, and the insulating film over the drain electrode are substantially the same, and the insulating film includes excess oxygen.Type: GrantFiled: January 22, 2018Date of Patent: February 2, 2021Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yoshinori Ando, Takashi Hamada, Yasumasa Yamane
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Patent number: 10903424Abstract: A method is presented for enabling heat dissipation in resistive random access memory (RRAM) devices. The method includes forming a plurality of conductive lines within an interlayer dielectric (ILD) and forming a RRAM stack over a conductive line of the plurality of conductive lines, the RRAM stack including a bottom electrode, a conductive pillar, thermal conducting layers, and a top electrode. The thermal conducting layers are disposed on opposed ends of the conductive pillar. The thermal conducting layers directly contact the top electrode and the bottom electrode. The thermal conducting layers include aluminum oxide (Al2O3).Type: GrantFiled: May 7, 2019Date of Patent: January 26, 2021Assignee: International Business Machines CorporationInventors: Praneet Adusumilli, Takashi Ando, Jianshi Tang, Ramachandran Muralidhar
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Patent number: 10896967Abstract: An integrated circuit device includes a gate stack structure on a base layer, the gate stack structure having a gate insulating layer with a first dielectric layer on the base layer and having first relative permittivity, and a gate structure on the gate insulating layer, and a gate spacer structure on opposite side walls of the gate stack structure and on the base layer, the gate spacer structure including a buried dielectric layer buried in a recess hole of the gate insulating layer at a lower portion of the gate spacer structure on the base layer, and the buried dielectric layer including a same material as the first dielectric layer.Type: GrantFiled: May 7, 2019Date of Patent: January 19, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Chan-sic Yoon, Dong-oh Kim, Je-min Park, Ki-seok Lee
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Patent number: 10896851Abstract: A method of fabricating a vertically stacked nanosheet semiconductor device includes epitaxially growing at least three layers each of alternating silicon and silicon germanium layers on a substrate and patterning a gate structure. The method includes performing at least three reactive ion etch processes forming recesses. The method includes forming source or drain regions in a channel formed by a shallow trench isolation layer formed in the recesses. The method includes growing a first epitaxial layer on the source or drain regions, forming at least three pFET structures. The method includes etching away a portion of each of the pFET structures and depositing a dielectric layer on each. The method includes growing a second epitaxial layer, forming at least three nFET structures. Each layer of the pFET structure and nFET structure are stacked vertically and each layer of the pFET structure and nFET structures have independent source or drain contacts.Type: GrantFiled: September 25, 2019Date of Patent: January 19, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Tenko Yamahita, Chun Wing Yeung, Chen Zhang
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Patent number: 10886219Abstract: An electronic component mounting package includes a semiconductor element which is disposed such that an active surface faces a main surface of a wiring portion, and which is electrically connected to the wiring portion via a first terminal; and a thin film passive element which is disposed between the active surface of the semiconductor element and the main surface of the wiring portion when seen in a lamination direction, and which is electrically connected to the semiconductor element. A part of the first terminal is disposed on an outer side with respect to the thin film passive element in a plan view. A length of the first terminal in the lamination direction disposed on the outer side with respect to the thin film passive element is larger than a thickness of the thin film passive element in the lamination direction.Type: GrantFiled: January 10, 2018Date of Patent: January 5, 2021Assignee: TDK CORPORATIONInventors: Kazuhiro Yoshikawa, Mitsuhiro Tomikawa, Kenichi Yoshida
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Patent number: 10886486Abstract: A light-emitting layer structure that improves the optical extraction efficiency using asymmetrical quantum dots aligned with a plane of the layer structure is provided. The structure includes a substrate; a first electrode layer deposed on the substrate; a first charge transport layer deposited on the first electrode layer; an emissive layer (EML) deposited on the first charge transport layer; a second charge transport layer deposited on the EML; and a second electrode layer deposited on the second charge transport layer; wherein the EML includes asymmetrical quantum dot nanoparticles, and each nanoparticle has a major axis longer than a first minor axis and a second minor axis, both the first minor axis and the second minor axis being orthogonal to the major axis, and wherein the major axis of each of the nanoparticles of the plurality of nanoparticles is aligned parallel to a plane of the EML.Type: GrantFiled: August 5, 2019Date of Patent: January 5, 2021Assignee: Sharp Kabushiki KaishaInventors: David James Montgomery, Enrico Angioni
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Patent number: 10879375Abstract: A gate tie-down structure includes a gate structure including a gate conductor and gate spacers and inner spacers formed on the gate spacers. Trench contacts are formed on sides of the gate structure. An interlevel dielectric (ILD) has a thickness formed over the gate structure. A horizontal connection is formed within the thickness of the ILD over an active area connecting the gate conductor and one of the trench contacts over one of the inner spacers.Type: GrantFiled: August 9, 2019Date of Patent: December 29, 2020Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC.Inventors: Su Chen Fan, Andre P. Labonte, Lars W. Liebmann, Sanjay C. Mehta
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Patent number: 10879391Abstract: Various embodiments of the present disclosure are directed towards a ferroelectric memory device. The ferroelectric memory device includes a pair of source/drain regions disposed in a semiconductor substrate. A gate dielectric is disposed over the semiconductor substrate and between the source/drain regions. A first conductive structure is disposed on the gate dielectric. A ferroelectric structure is disposed on the first conductive structure. A second conductive structure is disposed on the ferroelectric structure, where both the first conductive structure and the second conductive structure have an overall electronegativity that is greater than or equal to an overall electronegativity of the ferroelectric structure.Type: GrantFiled: May 7, 2019Date of Patent: December 29, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Mickey Hsieh, Chun-Yang Tsai, Kuo-Ching Huang, Kuo-Chi Tu, Pili Huang, Cheng-Jun Wu, Chao-Yang Chen
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Patent number: 10879367Abstract: A gate electrode (3) is provided on a main surface of a silicon substrate (1) via a gate insulating film (2). A source/drain region (4,5) is provided on sides of the gate electrode (3) on the main surface of the silicon substrate (1). A first silicide (6) is provided on an upper face and side faces of the gate electrode (3). A second silicide (7) is provided on a surface of the source/drain region (4,5). No side-wall oxide film is provided on the side faces of the gate electrode (3). The second silicide (7) is provided at a point separated from the gate electrode (3).Type: GrantFiled: April 19, 2017Date of Patent: December 29, 2020Assignee: Mitsubishi Electric CorporationInventor: Chikayuki Okamoto
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Patent number: 10861974Abstract: A semiconductor structure includes at least one stacked fin structure, a gate and a source/drain. At least one stacked fin structure is located on a substrate, wherein the stacked fin structure includes a first fin layer and a second fin layer, and a fin dielectric layer is sandwiched by the first fin layer and the second fin layer. The gate is disposed over the stacked fin structure. The source/drain is disposed directly on the substrate and directly on sidewalls of the whole stacked fin structure. The present invention provides a semiconductor process formed said semiconductor structure.Type: GrantFiled: March 22, 2019Date of Patent: December 8, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Zhi-Cheng Lee, Wei-Jen Chen, Kai-Lin Lee
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Patent number: 10861942Abstract: Techniques are disclosed for forming tunable capacitors including multiple two-dimensional electron gas (2DEG) and three-dimensional electron gas (3DEG) structures for use in tunable radio frequency (RF) filters. In some cases, the tunable capacitors include a stack of group III material-nitride (III-N) compound layers that utilize polarization doping to form the 2DEG and 3DEG structures. In some instances, the structures may be capable of achieving at least three capacitance values, enabling the devices to be tunable. In some cases, the tunable capacitor devices employing the multi-2DEG and 3DEG structures may be a metal-oxide-semiconductor capacitor (MOSCAP) or a Schottky diode, for example. In some cases, the use of tunable RF filters employing the multi-2DEG and 3DEG III-N tunable capacitor devices described herein can significantly reduce the number of filters in an RF front end, resulting in a smaller physical footprint and reduced bill of materials cost.Type: GrantFiled: December 9, 2015Date of Patent: December 8, 2020Assignee: Intel CorporationInventors: Han Wui Then, Sansaptak Dasgupta, Marko Radosavljevic
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Patent number: 10861882Abstract: A pixel structure includes a first TFT, an adhesive layer, an LED, and a detection conductive layer. The first TFT is coupled to a conductive layer and is configured to transmit display data to the conductive layer. The adhesive layer covers the conductive layer. The LED is disposed on the adhesive layer. The detection conductive layer is disposed on the adhesive layer, and the detection conductive layer, the adhesive layer, and the conductive layer constitute a detection capacitor. Here, a thickness of the detection conductive layer is equal to or slightly greater than a height of the LED.Type: GrantFiled: July 16, 2019Date of Patent: December 8, 2020Assignee: Au Optronics CorporationInventors: Mao-Hsun Cheng, Chia-Che Hung, Yung-Chih Chen, Cheng-Yeh Tsai, Cheng-Han Huang, Chen-Chi Lin
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Patent number: 10862000Abstract: A light emitting element, a method of manufacturing a light emitting element, and a display device including a light emitting element are provided. A method of manufacturing a light emitting element includes: preparing a lower panel including a substrate and a first sub conductive semiconductor layer on the substrate; forming a first mask layer including at least one mask pattern on at least a part of the lower panel to be spaced apart from each other and an opening region in which the mask patterns are spaced apart from each other; laminating a first conductive semiconductor layer, an active material layer, and a second conductive semiconductor layer on the first mask layer to form an element laminate; etching the element laminate in a vertical direction to form an element rod; and removing the mask pattern to separate the element rod from the lower panel.Type: GrantFiled: February 12, 2019Date of Patent: December 8, 2020Assignee: Samsung Display Co., Ltd.Inventors: Jung Hong Min, Dae Hyun Kim, Seung A Lee, Hyun Min Cho, Jong Hyuk Kang, Dong Uk Kim, Hyun Deok Im, Hyung Rae Cha
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Patent number: 10861916Abstract: The present application provides a display substrate, a method of manufacturing the same and a display panel. The display substrate includes pixel units each including a light emitting region and a transparent display region. A light emitting element including a first electrode, a light emitting functional layer and a second electrode is provided in the light emitting region, and second electrodes of light emitting elements forms a second electrode layer having an integral structure. The display substrate further includes an auxiliary electrode in the light emitting region and an auxiliary connection member made of a transparent conductive material. A portion of the auxiliary connection member is in the light emitting region and electrically coupled with the auxiliary electrode and another portion thereof is in the transparent display region and electrically coupled with the second electrode layer.Type: GrantFiled: December 9, 2019Date of Patent: December 8, 2020Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Wei Liu, Ying Han
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Patent number: 10854770Abstract: Methods and devices for an avalanche photo-transistor. In one aspect, an avalanche photo-transistor includes a detection region configured to absorb light incident on a first surface of the detection region and generate one or more charge carriers in response, a first terminal in electrical contact with the detection region and configured to bias the detection region, an interim doping region, a second terminal in electrical contact with the interim doping region and configured to bias the interim doping region, a multiplication region configured to receive the one or more charge carriers flowing from the interim doping region and generate one or more additional charge carriers in response, a third terminal in electrical contact with the multiplication region and configured to bias the multiplication region, wherein the interim doping region is located in between the detection region and the multiplication region.Type: GrantFiled: May 7, 2019Date of Patent: December 1, 2020Assignee: Artilux, Inc.Inventor: Yun-Chung Na
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Patent number: 10854795Abstract: A Light Emitting Device (LED) that has increased reliability and efficiency. Specifically, the LED may be formed using Atomic Layer Deposition to improve the thermal conductivity between the ceramic plate and the LED, decrease the amount of organic contamination, and increase the efficiency of the optical output of the LED.Type: GrantFiled: September 9, 2019Date of Patent: December 1, 2020Assignee: Lumileds LLCInventors: Ken T. Shimizu, Hisashi Masui, Daniel B. Roitman
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Patent number: 10854798Abstract: Quantum dots and methods of making quantum dots are described. A method begins with forming quantum dots having a core-shell structure with a plurality of ligands on the shell structure. The method includes exchanging the plurality of ligands with a plurality of second ligands. The plurality of second ligands have a weaker binding affinity to the shell structure than the plurality of first ligands. The plurality of second ligands are then exchanged with hydrolyzed alkoxysilane to form a monolayer of hydrolyzed alkoxysilane on a surface of the shell structure. The method includes forming a barrier layer around the shell structure by using the hydrolyzed alkoxysilane as a nucleation center.Type: GrantFiled: October 1, 2019Date of Patent: December 1, 2020Assignee: Nanosys, Inc.Inventors: Shihai Kan, Jay Yamanaga, Charles Hotz, Jason Hartlove, Veeral Hardev, Jian Chen, Christian Ippen, Wenzhou Guo, Robert Wilson
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Patent number: 10840186Abstract: A first metallization layer comprises a set of first conductive lines that extend along a first direction on a first dielectric layer on a substrate. Pillars are formed on recessed first dielectric layers and a second dielectric layer covers the pillars. A dual damascene etch provides a contact hole through the second dielectric layer and an etch removes the pillars to form air gaps.Type: GrantFiled: July 25, 2019Date of Patent: November 17, 2020Assignee: Applied Materials, Inc.Inventors: Susmit Singha Roy, Ziqing Duan, Abhijit Basu Mallick, Praburam Gopalraja
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Patent number: 10840225Abstract: A package-on-package and a package connection system including the same are provided. The package-on-package includes a first semiconductor package including a first semiconductor chip, and a second semiconductor package disposed on the first semiconductor package and including a second semiconductor chip electrically connected to the first semiconductor chip. The first semiconductor chip includes an application processor (AP) including a first image signal processor (ISP), and the second semiconductor chip includes a second image signal processor (ISP).Type: GrantFiled: August 5, 2019Date of Patent: November 17, 2020Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Young Kwan Lee, Young Sik Hur, Won Wook So