Patents Examined by Bilkis Jahan
-
Patent number: 11437478Abstract: A semiconductor device, its manufacturing method, and a radiation measurement method are presented, relating to semiconductor techniques. The semiconductor device includes: a substrate comprising a base area and a collector area adjacent to each other; a plurality of semiconductor fins on the substrate, wherein the plurality of semiconductor fins comprises at least a first semiconductor fin and a second semiconductor fin on the base area and separated from each other, the first semiconductor fin comprises an emission area adjacent to the base area, and the second semiconductor fin comprises a first region adjacent to the base area; a first gate structure on the second semiconductor fin; and a first source and a first drain at two opposite sides of the first gate structure and at least partially in the first region. Radiation in a semiconductor apparatus can be measured through this semiconductor device.Type: GrantFiled: February 13, 2020Date of Patent: September 6, 2022Inventor: Fei Zhou
-
Patent number: 11430863Abstract: A semiconductor device includes a source region, a drain region, and a gate insulating film formed on a substrate, a gate electrode formed on the gate insulating film, a first insulating film pattern formed to extend from the source region to a part of a top surface of the gate electrode, and a spacer formed on a side surface of the gate electrode in a direction of the drain region.Type: GrantFiled: July 14, 2020Date of Patent: August 30, 2022Assignee: MagnaChip Semiconductor, Ltd.Inventor: Guk Hwan Kim
-
Patent number: 11430782Abstract: The present disclosure provides a silicon controlled rectifier and a manufacturing method thereof. The silicon controlled rectifier comprises: a P-type substrate; an N-type well 60, an upper portion of which is provided with a P-type heavily doped region 20 and an N-type heavily doped region 28; an N-type well 62, an upper portion of which is provided with a P-type heavily doped region 22 and an N-type heavily doped region 26; and a P-type well 70 connecting the N-type well 60 and the N-type well 62, an upper portion of which is provided with a P-type heavily doped region 24; wherein a first electrode is in mirror symmetry with a second electrode with respect to the P-type heavily doped region 24, and shallow trench isolations are respectively provided between the P-type heavily doped region 24 and each of the N-type heavily doped region 28 and the N-type heavily doped region 26.Type: GrantFiled: April 19, 2021Date of Patent: August 30, 2022Assignee: SHANGHAI HUALI MICROELECTRONICS CORPORATIONInventor: Tianzhi Zhu
-
Patent number: 11424321Abstract: The present invention provides a semiconductor structure and a preparation method thereof. A transition metal and an impurity are co-doped on a buffer layer above a substrate layer to reduce the leakage current of a semiconductor device, to improve the pinch-off behavior, and to avoid the device current collapse, moreover, the ranges of the concentration of the transition metal and the impurity in the buffer layer are controlled to ensure the balance of the leakage current during the dynamic characteristics of the device.Type: GrantFiled: March 9, 2021Date of Patent: August 23, 2022Assignee: ENKRIS SEMICONDUCTOR, INC.Inventors: Kai Cheng, Kai Liu
-
Patent number: 11424355Abstract: A method of fabricating a gate stack for a power transistor device includes thermally oxidizing a surface of a Group IIIA-N layer on a substrate to form a first dielectric layer of an oxide material that is >5 A thick. A second dielectric layer being silicon nitride or silicon oxynitride is deposited on the first dielectric layer. A metal gate electrode is formed on the second dielectric layer.Type: GrantFiled: March 23, 2017Date of Patent: August 23, 2022Assignee: Texas Instruments IncorporatedInventor: Nicholas Stephen Dellas
-
Patent number: 11424239Abstract: Embodiments may relate to a package substrate that is to couple with the die. The package substrate may include a signal line that is communicatively coupled with the die. The package substrate may further include a conductive line. The package substrate may further include a diode communicatively coupled with the signal line and the conductive line. Other embodiments may be described or claimed.Type: GrantFiled: December 21, 2019Date of Patent: August 23, 2022Assignee: Intel CorporationInventors: Aleksandar Aleksov, Adel A. Elsherbini, Feras Eid, Veronica Aleman Strong, Johanna M. Swan
-
Patent number: 11424343Abstract: A method of forming a fin field effect transistor device is provided. The method includes forming a plurality of vertical fins on a substrate. The method further includes forming a bottom source/drain layer adjacent to the plurality of vertical fins, and growing a doped layer on the bottom source/drain layer and sidewalls of the plurality of vertical fins. The method further includes forming a dummy gate liner on the doped layer and the bottom source/drain layer, and forming a dummy gate fill on the dummy gate liner. The method further includes forming a protective cap layer on the dummy gate fill, and removing a portion of the protective cap layer to expose a top surface of the plurality of vertical fins.Type: GrantFiled: January 24, 2020Date of Patent: August 23, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Juntao Li, Choonghyun Lee, Shogo Mochizuki
-
Patent number: 11417811Abstract: A light emitting element includes a semiconductor stacked body, an insulating film, first and second electrodes, a second external connection portion, and first external connection portions. The first semiconductor layer is exposed at a plurality of exposed portions disposed in a plurality of rows in plan view. The first external connection portions include at least one smaller-size first external connection portion disposed between adjacent ones of the rows other than the outermost one of the rows, and at least one larger-size first external connection portion extending from the end region, in which a spacing between a first outer edge of a second semiconductor layer and the exposed portions in the outermost one of the rows is narrower than a spacing between the exposed portions in adjacent ones of the rows, to at least a position between the outermost one of the rows and an adjacent one of the rows.Type: GrantFiled: December 17, 2019Date of Patent: August 16, 2022Assignee: NICHIA CORPORATIONInventors: Koichi Takenaga, Takanori Fukumori, Satoshi Shichijo, Hiroki Fukuta, Kunihito Sugimoto
-
Patent number: 11410990Abstract: A silicon carbide MOSFET device includes a gate pad area, a main MOSFET area and a secondary MOSFET area. A main source contact is electrically coupled to the source region of each of the main MOSFETs, and a separate secondary source contact is electrically coupled to the source region of each of the secondary MOSFETs. A gate contact electrically connects to each of the insulated gate members of the main and secondary MOSFETs. An asymmetric gate clamping circuit is coupled between the secondary source contact and the gate contact. In a first mode of operation of the MOSFET device the main source contact is electrically coupled with the secondary source contact to activate the gate clamping circuit. When activated, the circuit clamping a gate-to-source voltage to a first clamp voltage in an on-state of the MOSFET device, and to a second clamp voltage in an off-state of the MOSFET device.Type: GrantFiled: October 15, 2020Date of Patent: August 9, 2022Assignee: SEMIQ INCORPORATEDInventors: Rahul R. Potera, Carl A. Witt
-
Patent number: 11410995Abstract: A semiconductor structure and a method for forming a semiconductor structure are provided. The semiconductor structure includes a well region extending in a first direction; a gate electrode disposed within the substrate and overlapping the well region; a gate dielectric layer disposed within the substrate and laterally surrounding the gate electrode; a plurality of first protection structures disposed over the gate electrode; a second protection structure extending in a second direction different from the first direction over the gate dielectric layer; and an insulating layer extending in the second direction between the second protection structure and the gate dielectric layer.Type: GrantFiled: May 14, 2021Date of Patent: August 9, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Jhu-Min Song, Chien-Chih Chou, Kong-Beng Thei, Fu-Jier Fan
-
Patent number: 11404457Abstract: An image sensor may include a substrate including a plurality of unit pixel regions and having first and second surfaces facing each other. Each of the unit pixel regions may include a plurality of floating diffusion parts spaced apart from each other in the substrate, storage nodes provided in the substrate to be spaced apart from and facing the floating diffusion parts, a transfer gate adjacent to a region between the floating diffusion parts and the storage nodes, and photoelectric conversion parts sequentially stacked on one of the first and second surfaces. Each of the photoelectric conversion parts may include common and pixel electrodes respectively provided on top and bottom surfaces thereof and each pixel electrode may be electrically connected to a corresponding one of the storage nodes.Type: GrantFiled: September 29, 2020Date of Patent: August 2, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Gwi-Deok Ryan Lee, Taeyon Lee
-
Patent number: 11404535Abstract: A method includes forming a layer stack with a plurality of first layers of a first doping type and a plurality of second layers of a second doping type complementary to the first doping type on top of a carrier. Forming the layer stack includes forming a plurality of epitaxial layers on the carrier. Forming each of the plurality of epitaxial layers includes depositing a layer of semiconductor material, forming at least two first implantation regions of one of a first type or a second type at different vertical positions of the respective layer of semiconductor material, and forming at least one second implantation region of a type that is complementary to the type of the first implantation regions, the first implantation regions and the second implantation regions being arranged alternatingly.Type: GrantFiled: December 5, 2019Date of Patent: August 2, 2022Assignee: Infineon Technologies Austria AGInventors: Rolf Weis, Richard Hensch, Ahmed Mahmoud
-
Patent number: 11404309Abstract: Interconnect structures and corresponding techniques for forming the interconnect structures are disclosed herein. An exemplary interconnect structure includes a conductive feature that includes cobalt and a via disposed over the conductive feature. The via includes a first via barrier layer disposed over the conductive feature, a second via barrier layer disposed over the first via barrier layer, and a via bulk layer disposed over the second via barrier layer. The first via barrier layer includes titanium, and the second via barrier layer includes titanium and nitrogen. The via bulk layer can include tungsten and/or cobalt. A capping layer may be disposed over the conductive feature, where the via extends through the capping layer to contact the conductive feature. In some implementations, the capping layer includes cobalt and silicon.Type: GrantFiled: December 19, 2019Date of Patent: August 2, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Jen Chang, Min-Yann Hsieh, Hua Feng Chen, Kuo-Hua Pan
-
Patent number: 11393800Abstract: A display device and a manufacturing method of a display device are provided. The display device includes a substrate, a plurality of first light-emitting elements, and at least one second light-emitting element. The first light-emitting elements are arranged on the substrate. A plurality of first electrodes are provided on a surface of each of the first light-emitting elements facing away from the substrate. The second light-emitting element is disposed on the substrate. A plurality of second electrodes are provided on a surface of the second light-emitting element facing away from the substrate. An orthographic projection of the second light-emitting element on the substrate partially overlaps orthographic projections of the first light-emitting elements on the substrate.Type: GrantFiled: August 11, 2020Date of Patent: July 19, 2022Assignee: Au Optronics CorporationInventors: Yi-Fen Lan, Tsung-Tien Wu
-
Patent number: 11393779Abstract: Representative techniques and devices including process steps may be employed to mitigate the potential for delamination of bonded microelectronic substrates due to metal expansion at a bonding interface. For example, a metal pad having a larger diameter or surface area (e.g., oversized for the application) may be used when a contact pad is positioned over a TSV in one or both substrates.Type: GrantFiled: June 12, 2019Date of Patent: July 19, 2022Assignee: INVENSAS BONDING TECHNOLOGIES, INC.Inventors: Guilian Gao, Bongsub Lee, Gaius Gillman Fountain, Jr., Cyprian Emeka Uzoh, Laura Wills Mirkarimi, Belgacem Haba, Rajesh Katkar
-
Patent number: 11387326Abstract: A silicon carbide semiconductor device includes: a silicon carbide semiconductor substrate that has a front surface and a rear surface; and a plurality of ohmic electrodes that are in ohmic contact with a surface of silicon carbide on at least one of the front surface and the rear surface of the silicon carbide semiconductor substrate. The plurality of ohmic electrodes are scattered on the surface of the silicon carbide to provide a concavity and convexity. The concavity and convexity has a height due to the ohmic electrodes less than 1.0 ?m.Type: GrantFiled: October 7, 2020Date of Patent: July 12, 2022Assignee: DENSO CORPORATIONInventors: Kentarou Okumura, Hidekazu Odake, Hajime Tsukahara, Yukihiko Watanabe
-
Patent number: 11385552Abstract: An overlay metrology target (T) is formed by a lithographic process. A first image (740(0)) of the target structure is obtained using with illuminating radiation having a first angular distribution, the first image being formed using radiation diffracted in a first direction (X) and radiation diffracted in a second direction (Y). A second image (740(R)) of the target structure using illuminating radiation having a second angular illumination distribution which the same as the first angular distribution, but rotated 90 degrees. The first image and the second image can be used together so as to discriminate between radiation diffracted in the first direction and radiation diffracted in the second direction by the same part of the target structure. This discrimination allows overlay and other asymmetry-related properties to be measured independently in X and Y, even in the presence of two-dimensional structures within the same part of the target structure.Type: GrantFiled: September 30, 2020Date of Patent: July 12, 2022Assignee: ASML Netherlands B.V.Inventors: Martin Jacobus Johan Jak, Kaustuve Bhattacharyya
-
Patent number: 11387264Abstract: A substrate includes a photoelectric converting unit in a pixel unit and a reflection ratio adjusting layer provided on the substrate in an incident direction of incident light with respect to the substrate for adjusting reflection of the incident light on the substrate. The reflection ratio adjusting layer includes a first layer formed on the substrate and a second layer formed on the first layer, the first layer has an uneven structure provided on the substrate, and a recess portion on the uneven structure is filled with a material having a lower refractive index than that of the substrate forming the second layer, and a thickness of the first layer is optimized for a wavelength of light to be received. The present technology may be applied to an imaging device.Type: GrantFiled: November 7, 2017Date of Patent: July 12, 2022Assignee: Sony Semiconductor Solutions CorporationInventor: Koichi Takeuchi
-
Patent number: 11380778Abstract: A method of forming a fin field effect transistor device is provided. The method includes forming a plurality of vertical fins on a substrate. The method further includes forming a bottom source/drain layer adjacent to the plurality of vertical fins, and growing a doped layer on the bottom source/drain layer and sidewalls of the plurality of vertical fins. The method further includes forming a dummy gate liner on the doped layer and the bottom source/drain layer, and forming a dummy gate fill on the dummy gate liner. The method further includes forming a protective cap layer on the dummy gate fill, and removing a portion of the protective cap layer to expose a top surface of the plurality of vertical fins.Type: GrantFiled: January 24, 2020Date of Patent: July 5, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Juntao Li, Choonghyun Lee, Shogo Mochizuki
-
Patent number: 11380804Abstract: A semiconductor device including a first conductivity-type layer into which first conductivity-type impurities are introduced, a second conductivity-type layer into which second conductivity-type impurities are introduced, the second conductivity-type impurities being different in polarity from the first conductivity-type impurities, and an intermediate layer that is sandwiched between the first conductivity-type layer and the second conductivity-type layer, and does not include the first conductivity-type impurities or the second conductivity-type impurities, or includes the first conductivity-type impurities or the second conductivity-type impurities at a concentration lower than a concentration of the first conductivity-type impurities in the first conductivity-type layer or the second conductivity-type impurities in the second conductivity-type layer, the first conductivity-type layer, the intermediate layer, and the second conductivity-type layer being stacked in a thickness direction of a semiconductorType: GrantFiled: July 13, 2018Date of Patent: July 5, 2022Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATIONInventor: Hitoshi Okano