Patents Examined by Cheung Lee
  • Patent number: 11710779
    Abstract: An integrated circuit device is provided that includes a first fin structure and a second fin structure extending from a substrate. The first fin structure is a first composition, and includes rounded corners. The second fin structure is a second composition, different than the first composition. A first interface layer is formed directly on the first fin structure including the rounded corners and a second interface layer directly on the second fin structure. The first interface layer is an oxide of the first composition and the second interface layer is an oxide of the second composition. A gate dielectric layer is formed over the first interface layer and the second interface layer.
    Type: Grant
    Filed: April 5, 2021
    Date of Patent: July 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Liang Cheng, I-Ming Chang, Hsiang-Pi Chang, Yu-Wei Lu, Ziwei Fang, Huang-Lin Chao
  • Patent number: 11710676
    Abstract: Electronics assemblies and methods of manufacturing electronics assemblies having improved thermal performance. One example of these electronics assemblies includes a printed circuit board (PCB), an integrated circuit package mounted to the PCB, the integrated circuit packing having a heat generating component, and a heat spreader soldered to the PCB such that the heat spreader is thermally coupled to the heat generating component of the integrated circuit package to dissipate heat generated by the heat generating component.
    Type: Grant
    Filed: August 20, 2021
    Date of Patent: July 25, 2023
    Assignee: INTELLIGENT PLATFORMS, LLC
    Inventor: Bernd Sporer
  • Patent number: 11710756
    Abstract: A direct-bond hybridization (DBH) method is provided to assemble a sensor wafer device. The DBH method includes fabricating an optical element on a handle wafer and depositing first oxide with n-x thickness on the optical element where n is an expected final oxide thickness of the sensor wafer, depositing second oxide with x thickness onto a sensor wafer, executing layer transfer of the optical element by a DBH fusion bond technique to the sensor wafer whereby the first and second oxides form an oxide layer of n thickness between the optical element and the sensor wafer and removing the handle wafer.
    Type: Grant
    Filed: November 19, 2020
    Date of Patent: July 25, 2023
    Assignee: RAYTHEON COMPANY
    Inventors: Jamal I. Mustafa, Robert C. Anderson, John L. Vampola, Sean P. Kilcoyne, Eric R. Miller, George Grama
  • Patent number: 11710700
    Abstract: A semiconductor structure is provided. The semiconductor structure comprises a first conductive feature embedded within a first dielectric layer, a via disposed over the first conductive feature, a second conductive feature disposed over the via, and a graphene layer disposed over at least a portion of the first conductive feature. The via electrically couples the first conductive feature to the second conductive feature.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: July 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shin-Yi Yang, Yu-Chen Chan, Ming-Han Lee, Hai-Ching Chen, Shau-Lin Shue
  • Patent number: 11699741
    Abstract: In an example, a method includes depositing a first sidewall spacer layer over a substrate having a layer stack including alternating layers of a nanosheet and a sacrificial layer, and a dummy gate formed over the layer stack, the first sidewall spacer layer formed over the dummy gate. The method includes depositing a metal-containing liner over the first sidewall spacer layer; forming a first sidewall spacer along the dummy gate by anisotropically etching the metal-containing liner and the first sidewall spacer layer; performing an anisotropic etch back process to form a plurality of vertical recesses in the layer stack; laterally etching the layer stack and form a plurality of lateral recesses between adjacent nanosheets; depositing a second sidewall spacer layer to fill the plurality of lateral recesses; and etching a portion of the second sidewall spacer layer to expose tips of the nanosheet layers.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: July 11, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Yusuke Yoshida, Sergey Voronin, Christopher Talone, Alok Ranjan
  • Patent number: 11696510
    Abstract: The present disclosure describes an exemplary method that can prevent or reduce out-diffusion of Cu from interconnect layers to magnetic tunnel junction (MTJ) structures. The method includes forming an interconnect layer over a substrate that includes an interlayer dielectric stack with openings therein; disposing a metal in the openings to form corresponding conductive structures; and selectively depositing a diffusion barrier layer on the metal. In the method, selectively depositing the diffusion barrier layer includes pre-treating the surface of the metal; disposing a precursor to selectively form a partially-decomposed precursor layer on the metal; and exposing the partially-decomposed precursor layer to a plasma to form the diffusion barrier layer. The method further includes forming an MTJ structure on the interconnect layer over the diffusion barrier layer, where the bottom electrode of the MTJ structure is aligned to the diffusion barrier layer.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: July 4, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jung-Tang Wu, Jui-Hung Ho, Chin-Szu Lee, Meng-Yu Wu, Szu-Hua Wu
  • Patent number: 11682683
    Abstract: A 3D micro display, the 3D micro display including: a first level including a first single crystal layer, the first single crystal layer includes a plurality of LED driving circuits; a second level including a first plurality of light emitting diodes (LEDs), the first plurality of LEDs including a second single crystal layer; a third level including a second plurality of light emitting diodes (LEDs), the second plurality of LEDs including a third single crystal layer, where the first level is disposed on top of the second level, where the second level includes at least ten individual first LED pixels; and a bonding structure, where the bonding structure includes oxide to oxide bonding.
    Type: Grant
    Filed: October 17, 2022
    Date of Patent: June 20, 2023
    Assignee: MONOLITHIC 3D INC.
    Inventors: Zvi Or-Bach, Deepak C. Sekar
  • Patent number: 11677030
    Abstract: A thin-film transistor substrate includes: an active layer on a substrate, the active layer including: a first semiconductor material layer; a conductor layer on the first semiconductor material layer, and including a metal element; and a second semiconductor material layer on the conductor layer; a gate insulating layer on the active layer; and a gate electrode on the gate insulating layer, and at least partially overlapping with the active layer.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: June 13, 2023
    Assignee: Samsung Display Co., Ltd.
    Inventors: Sangwoo Sohn, Yeonkeon Moon, Myounghwa Kim, Taesang Kim, Geunchul Park, Joonseok Park, Junhyung Lim, Hyelim Choi
  • Patent number: 11670653
    Abstract: An imaging device includes: a photoelectric converter including first and second electrodes, and a photoelectric conversion layer located between the first electrode and the second electrode; a voltage supply circuit applying a bias voltage between the first electrode and the second electrode; an amplifier transistor including a gate electrically connected to the second electrode, the amplifier transistor configured to output a signal corresponding to a potential of the second electrode; and a detection circuit configured to detect a level of the signal from the amplifier transistor. The voltage supply circuit applies the bias voltage in a first voltage range when the level detected by the detection circuit is greater than or equal to a first threshold value, and applies the bias voltage in a second voltage range that is greater than the first voltage range when the level detected by the detection circuit is less than a second threshold value.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: June 6, 2023
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Masashi Murakami, Kazuko Nishimura, Yasuo Miyake, Yasunori Inoue
  • Patent number: 11670698
    Abstract: A method of fabricating a semiconductor device includes forming a first stack of semiconductor layers on a substrate. The first stack of semiconductor layers includes alternating first and second semiconductor strips. The first and second semiconductor strips includes first and second semiconductor materials, respectively. The method also includes removing the first semiconductor strips to form voids between the second semiconductor strips in the first stack of semiconductor layers. The method further includes depositing a dielectric structure layer and a first conductive fill material in the voids to surround the second semiconductor strips. Further, the method includes removing the second semiconductor strips to form a second set of voids, and depositing a third semiconductor material in the second sets of voids.
    Type: Grant
    Filed: July 28, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Chung-Liang Cheng
  • Patent number: 11670720
    Abstract: In an embodiment, a method includes forming a first gate electrode over a substrate. The method also includes forming a first gate dielectric layer over the first gate electrode. The method also includes depositing a semiconductor layer over the first gate dielectric layer. The method also includes forming source/drain regions over the first gate dielectric layer and the semiconductor layer, the source/drain regions overlapping ends of the semiconductor layer. The method also includes forming a second gate dielectric layer over the semiconductor layer and the source/drain regions. The method also includes and forming a second gate electrode over the second gate dielectric layer.
    Type: Grant
    Filed: May 19, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yun-Yan Chung, Chao-Ching Cheng, Chao-Hsin Chien
  • Patent number: 11670721
    Abstract: A semiconductor device in which fluctuation in electric characteristics due to miniaturization is less likely to be caused is provided. The semiconductor device includes an oxide semiconductor film including a first region, a pair of second regions in contact with side surfaces of the first region, and a pair of third regions in contact with side surfaces of the pair of second regions; a gate insulating film provided over the oxide semiconductor film; and a first electrode that is over the gate insulating film and overlaps with the first region. The first region is a CAAC oxide semiconductor region. The pair of second regions and the pair of third regions are each an amorphous oxide semiconductor region containing a dopant. The dopant concentration of the pair of third regions is higher than the dopant concentration of the pair of second regions.
    Type: Grant
    Filed: October 30, 2020
    Date of Patent: June 6, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 11664441
    Abstract: A method of forming a semiconductor device includes: forming a dummy gate structure over a nanostructure, where the nanostructure overlies a fin that protrudes above a substrate, where the nanostructure comprises alternating layers of a first semiconductor material and a second semiconductor material; forming openings in the nanostructure on opposing sides of the dummy gate structure, the openings exposing end portions of the first semiconductor material and end portions of the second semiconductor material; recessing the exposed end portions of the first semiconductor material to form first sidewall recesses; filling the first sidewall recesses with a multi-layer spacer film; removing at least one sublayer of the multi-layer spacer film to form second sidewall recesses; and forming source/drain regions in the openings after removing at least one sublayer, where the source/drain regions seal the second sidewall recesses to form sealed air gaps.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: May 30, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Kai Lin, Che-Hao Chang, Yung-Cheng Lu, Chi On Chui
  • Patent number: 11652147
    Abstract: Disclosed is a metal-semiconductor contact structure based on two-dimensional (2D) semimetal electrodes, including a semiconductor module and a metal electrode module, where the semiconductor module is a 2D semiconductor material, and the metal electrode module is a 2D semimetal material with no dangling bonds on its surface; the 2D semiconductor material and the 2D semimetal material are interfaced with a Van der Waals interface with a surface roughness of 0.01-1 nanometer (nm) and no dangling bonds on the surface, the 2D semiconductor material and the 2D semimetal material are spaced less than 1 nm apart.
    Type: Grant
    Filed: November 2, 2022
    Date of Patent: May 16, 2023
    Assignee: UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING
    Inventors: Yue Zhang, Xiankun Zhang, Zheng Zhang, Huihui Yu, Mengting Huang, Wenhui Tang, Li Gao, Xiaofu Wei
  • Patent number: 11652002
    Abstract: The present disclosure is directed to methods for the fabrication of gate-all-around (GAA) field effect transistors (FETs) with low power consumption. The method includes depositing a first and a second epitaxial layer on a substrate and etching trench openings in the first and second epitaxial layers and the substrate. The method further includes removing, through the trench openings, portions of the first epitaxial layer to form a gap between the second epitaxial layer and the substrate and depositing, through the trench openings, a first dielectric to fill the gap and form an isolation structure. In addition, the method includes depositing a second dielectric in the trench openings to form trench isolation structures and forming a transistor structure on the second epitaxial layer.
    Type: Grant
    Filed: February 23, 2022
    Date of Patent: May 16, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shahaji B. More, Chun Hsiung Tsai
  • Patent number: 11646357
    Abstract: The present application provides a method for preparing a p-type semiconductor structure, an enhancement mode device and a method for manufacturing the same. The method for preparing a p-type semiconductor structure includes: preparing a p-type semiconductor layer; preparing a protective layer on the p-type semiconductor layer, in which the protective layer is made of AlN or AlGaN; and annealing the p-type semiconductor layer under protection of the protective layer, and at least one of the p-type semiconductor layer and the protective layer is formed by in-situ growth. In this way, the protective layer can protect the p-type semiconductor layer from volatilization and to form high-quality surface morphology in the subsequent high-temperature annealing treatment of the p-type semiconductor layer.
    Type: Grant
    Filed: January 18, 2021
    Date of Patent: May 9, 2023
    Assignee: ENKRIS SEMICONDUCTOR, INC.
    Inventor: Kai Cheng
  • Patent number: 11637099
    Abstract: The present disclosure provides a method of manufacturing a semiconductor device. The method includes providing a structure having a frontside and a backside, the structure including a substrate and a stack of a first type and a second type epitaxial layers having different material compositions alternatively stacked above the substrate, wherein the stack is at the frontside of the structure and the substrate is at the backside of the structure; patterning the stack, thereby forming a fin above the substrate; implanting a first dopant into a first region of the fin, the first dopant having a first conductivity type; implanting a second dopant into a second region of the fin, the second dopant having a second conductivity type opposite the first conductivity type; and forming a first contact on the first region and a second contact on the second region.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: April 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Hung Wang, Ming-Shuan Li, Chih Chieh Yeh, Zi-Ang Su, Chia-Ju Chou
  • Patent number: 11626406
    Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: April 11, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Fredrick D. Fishburn
  • Patent number: 11626439
    Abstract: An imaging device having a three-dimensional integration structure is provided. A first structure including a transistor including silicon in an active layer or an active region and a second structure including an oxide semiconductor in an active layer are fabricated. After that, the first and second structures are bonded to each other so that metal layers included in the first and second structures are bonded to each other; thus, an imaging device having a three-dimensional integration structure is formed.
    Type: Grant
    Filed: January 24, 2022
    Date of Patent: April 11, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Takayuki Ikeda, Naoto Kusumoto
  • Patent number: 11626408
    Abstract: A memory device and a forming method thereof are provided. The memory device includes: a semiconductor substrate, wherein multiple active regions are formed in the semiconductor substrate, and the multiple active regions are separated by multiple first trenches extending along a first direction and multiple second trenches extending along a second direction; a third trench, extending along the first direction and located in the semiconductor substrate at the bottom of the first trench; a bit line doped region, located in the semiconductor substrate on two sides of the third trench; a gate dielectric layer, located on a sidewall surface of the first trench and a sidewall surface of the second trench; a first dielectric layer that fills the third trench; a metal gate, located in the second trench and the first trench on the first dielectric layer.
    Type: Grant
    Filed: June 14, 2022
    Date of Patent: April 11, 2023
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Shuai Guo