Patents Examined by Earl N. Taylor
  • Patent number: 11276576
    Abstract: A method of forming gate structures to a nanosheet device that includes forming at least two stacks of nanosheets, wherein each nanosheet includes a channel region portion having a gate dielectric layer present thereon. The method may further include forming a dual metal layer scheme on the gate dielectric layer of each nanosheet. The dual metal layer scheme including an etch stop layer of a first composition and a work function adjusting layer of a second composition, wherein the etch stop layer has a composition that provides that the work function adjusting layer is removable by a wet etch chemistry that is selective to the etch stop layer.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: March 15, 2022
    Assignee: International Business Machines Corporation
    Inventors: Junli Wang, Alexander Reznicek, Shogo Mochizuki, Joshua Rubin
  • Patent number: 11264529
    Abstract: Provided is a solar cell and a method for manufacturing the same, the method includes: forming a doped layer on a surface of a semiconductor substrate, the doped layer having a first doping concentration of a doping element in the doped layer; depositing, on a surface of the doped layer, a doped amorphous silicon layer including the doping element; selectively removing at least one region of the doped amorphous silicon layer; performing annealing treatment, for the semiconductor substrate to form a lightly doped region having the first doping concentration and a heavily doped region having a second doping concentration in the doped layer, the second doping concentration is greater than the first doping concentration; and forming a solar cell by post-processing the annealed semiconductor substrate. The solar cell and the method for manufacturing the same simplify the manufacturing process and improve conversion efficiency of the solar cell.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: March 1, 2022
    Assignees: JINKO GREEN ENERGY (SHANGHAI) MANAGEMENT CO., LTD, ZHEJIANG JINKO SOLAR CO., LTD
    Inventors: Jie Yang, Zhao Wang, Peiting Zheng, Xinyu Zhang, Hao Jin
  • Patent number: 11257977
    Abstract: Described herein is a diffusion-based ex-situ group V element doping method in the CdCl2 heat-treated polycrystalline CdTe film. The ex-situ doping using group V halides, such as PCl3, AsCl3, SbCl3, or BiCl3, demonstrated a promising PCE of ˜18% and long-term light soaking stability in CdSe/CdTe and CdS/CdTe devices with decent carrier concentration>1015 cm?3. This ex-situ solution or vapor process can provide a low-cost alternative pathway for effective doping of As, as well as P, Sb, and Bi, in CdTe solar cells with limited deviation from the current CdTe manufacturing process.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: February 22, 2022
    Assignees: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ALABAMA, The University of Toledo
    Inventors: Feng Yan, Yanfa Yan
  • Patent number: 11257968
    Abstract: In a method of manufacturing a solar cell, a groove is formed on a first surface of an n-type semiconductor substrate. A p-side transparent conductive film layer is formed on the first surface of the n-type semiconductor substrate formed with the groove. A non-deposition area, where the p-side transparent conductive film layer is not formed, is formed in at least a part of a side surface of the groove formed on the first surface of the n-type semiconductor substrate.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: February 22, 2022
    Assignee: PANASONIC CORPORATION
    Inventor: Toshiyuki Sakuma
  • Patent number: 11245049
    Abstract: Embodiments of the present disclosure provide a method of manufacturing an optoelectronic device epitaxial structure. The method includes forming a mask pattern on a base substrate, the mask pattern defining a plurality of growth regions on the base substrate, and the plurality of growth regions being separated from each other; and forming an optoelectronic device epitaxial structure in each of the plurality of growth regions; and removing the mask pattern.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: February 8, 2022
    Inventors: Mengjun Hou, Zongmin Liu
  • Patent number: 11245006
    Abstract: A trench semiconductor device includes a layer of semiconductor material, an exterior trench pattern formed in the layer of semiconductor material, and an interior trench pattern formed in the layer of semiconductor material, at least partially surrounded by the exterior trench pattern. The exterior trench pattern includes a plurality of exterior trench portions that are each lined with dielectric material and filled with conductive material, and the interior trench pattern includes a plurality of interior trench portions that are each lined with dielectric material and filled with conductive material.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: February 8, 2022
    Assignees: Polar Semiconductor, LLC, SANKEN ELECTRIC CO., LTD.
    Inventors: Dosi Dosev, Don Rankila, Tatsuya Kamimura, Shunsuke Fukunaga, Steven L. Kosier, Peter West
  • Patent number: 11239162
    Abstract: A semiconductor device includes a lower wiring, an upper wiring on the lower wiring, and a via between the lower wiring and the upper wiring. The lower wiring has a first end surface and a second end surface opposing each other, the upper wiring has a third end surface and a fourth end surface opposing each other, and the via has a first side adjacent to the second end surface of the lower wiring and a second side adjacent to the third end surface of the upper wiring. A distance between a lower end of the first side of the via and an upper end of the second end surface of the lower wiring is less than ? of a width of a top surface of the via, and a distance between an upper end of the second side of the via and an upper end of the third end surface of the upper wiring is less than ? of the width of the top surface of the via.
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: February 1, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Miji Lee, Taeyoung Jeong, Yoonkyeong Jo, Sangwoo Pae, Hwasung Rhee
  • Patent number: 11239325
    Abstract: Structures and methods that include a device such as a gate-all-around transistor formed on a frontside and a contact to one terminal of the device from the frontside of the structure and one terminal of the device from the backside of the structure. The backside contact may include selectively etching from the backside a first trench extending to expose a first source/drain structure and a second trench extending to a second source/drain structure. A conductive layer is deposited in the trenches and patterned to form a conductive via to the first source/drain structure.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: February 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11239337
    Abstract: To provide a semiconductor device having improved reliability. The semiconductor device has, on a SOI substrate thereof having a semiconductor substrate, an insulating layer, and a semiconductor layer, a gate insulating film having an insulating film and a high dielectric constant film. The high dielectric constant film has a higher dielectric constant than a silicon oxide film and includes a first metal and a second metal. In the high dielectric constant film, the ratio of the number of atoms of the first metal to the total number of atoms of the first metal and the second metal is equal to or more than 75%, and less than 100%.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: February 1, 2022
    Assignee: Renesas Electronics Corporation
    Inventor: Tetsuya Yoshida
  • Patent number: 11239148
    Abstract: A semiconductor package includes a core layer formed of a ferromagnetic material, and includes a frame passing through the core layer and having a through-hole, a semiconductor chip disposed in the through-hole of the frame, and having an active surface on which a connection pad is disposed, and an inactive surface opposite to the active surface, an encapsulant covering at least a portion of the semiconductor chip, and a first connection structure including a first redistribution layer disposed on the active surface of the semiconductor chip and electrically connected to the connection pad.
    Type: Grant
    Filed: November 15, 2019
    Date of Patent: February 1, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Youngkwan Lee, Youngsik Hur, Taehee Han
  • Patent number: 11233140
    Abstract: In a method of manufacturing a semiconductor device including a field effect transistor (FET), a sacrificial region is formed in a substrate, and a trench is formed in the substrate. A part of the sacrificial region is exposed in the trench. A space is formed by at least partially etching the sacrificial region, an isolation insulating layer is formed in the trench and the space, and a gate structure and a source/drain region are formed. An air spacer is formed in the space under the source/drain region.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: January 25, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun Hsiung Tsai, Clement Hsingjen Wann, Kuo-Feng Yu, Yi-Tang Lin, Yu-Ming Lin
  • Patent number: 11227969
    Abstract: A marking method for applying a unique identification to each individual solar cell stack of a semiconductor wafer, at least comprising the steps: Providing a semiconductor wafer having an upper side and an underside, which comprises a Ge substrate forming the underside; and generating an identification with a unique topography by means of laser ablation, using a first laser, on a surface area of the underside of each solar cell stack of the semiconductor wafer, the surface area being formed in each case by the Ge substrate or by an insulating layer covering the Ge substrate.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: January 18, 2022
    Assignee: AZUR SPACE Solar Power GmbH
    Inventors: Wolfgang Koestler, Steffen Sommer, Alexander Frey
  • Patent number: 11222830
    Abstract: A heat dissipation structure is provided for an electronic device. The heat dissipation structure includes a substrate and cooling fins connected to the substrate. The substrate includes a thermally conductive material. A first surface of the substrate has a plurality of contact regions. The plurality of contact regions of the first surface contact at least one device to be cooled.
    Type: Grant
    Filed: January 3, 2019
    Date of Patent: January 11, 2022
    Assignee: LENOVO (BEIJING) CO., LTD.
    Inventors: Xiaogang Lu, Guodong Jiang, Zhirong Gao
  • Patent number: 11217695
    Abstract: Semiconductor devices are provided. A semiconductor device includes a fin structure having a plurality of first semiconductor patterns and a plurality of second semiconductor patterns alternately stacked on a substrate, and extending in a first direction. The semiconductor device includes a semiconductor cap layer on an upper surface of the fin structure, and extending along opposite side surfaces of the fin structure in a second direction crossing the first direction. The semiconductor device includes a gate electrode on the semiconductor cap layer, and extending in the second direction. The semiconductor device includes a gate insulating film between the semiconductor cap layer and the gate electrode. Moreover, the semiconductor device includes a source/drain region connected to the fin structure. The plurality of first semiconductor patterns include silicon germanium (SiGe) having a germanium (Ge) content in a range of 25% to 35%, and the plurality of second semiconductor patterns include silicon (Si).
    Type: Grant
    Filed: March 11, 2020
    Date of Patent: January 4, 2022
    Inventors: Sanghoon Lee, Krishna Bhuwalka, Myunggil Kang, Kyoungmin Choi
  • Patent number: 11211516
    Abstract: A stack-like III-V semiconductor product comprising a substrate and a sacrificial layer region arranged on an upper side of the substrate and a semiconductor layer arranged on an upper side of the sacrificial layer region. The substrate, the sacrificial layer region and the semiconductor layer region each comprise at least one chemical element from the main groups III and a chemical element from the main group V. The sacrificial layer region differs from the substrate and from the semiconductor layer in at least one element. An etching rate of the sacrificial layer region differs from an etching rate of the substrate and from an etching rate of the semiconductor layer region at least by a factor of ten. The sacrificial layer region is adapted in respect of its lattice to the substrate and to the semiconductor layer region.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: December 28, 2021
    Assignee: AZUR SPACE Solar Power GmbH
    Inventor: Gerhard Strobl
  • Patent number: 11211519
    Abstract: The method for manufacturing a solar cell includes: forming a first semiconductor layer of first conductivity type on a surface of a semiconductor substrate; forming a lift-off layer containing a silicon-based material on the first semiconductor layer; selectively removing the lift-off layer and first semiconductor layer; forming a second semiconductor layer of second conductivity type on a surface having the lift-off layer and first semiconductor layer; and removing the second semiconductor layer covering the lift-off layer by removing the lift-off layer using an etching solution.
    Type: Grant
    Filed: August 21, 2020
    Date of Patent: December 28, 2021
    Assignee: KANEKA CORPORATION
    Inventors: Ryota Mishima, Kunihiro Nakano, Katsunori Konishi, Daisuke Adachi, Takashi Kuchiyama, Kenji Yamamoto
  • Patent number: 11198198
    Abstract: A method for manufacturing a substrate with a transparent conductive film, includes emitting subnano-to-nanosecond laser light to a transparent conductive film formed on a surface of a substrate to form a laser-induced periodic surface structure having a corrugated shape in at least a part of the transparent conductive film.
    Type: Grant
    Filed: February 28, 2020
    Date of Patent: December 14, 2021
    Assignee: FURUKAWA ELECTRIC CO., LTD.
    Inventor: Masaki Iwama
  • Patent number: 11183607
    Abstract: A solar cell includes polysilicon P-type and N-type doped regions on a backside of a substrate, such as a silicon wafer. A trench structure separates the P-type doped region from the N-type doped region. Each of the P-type and N-type doped regions may be formed over a thin dielectric layer. The trench structure may include a textured surface for increased solar radiation collection. Among other advantages, the resulting structure increases efficiency by providing isolation between adjacent P-type and N-type doped regions, thereby preventing recombination in a space charge region where the doped regions would have touched.
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: November 23, 2021
    Assignee: SunPower Corporation
    Inventor: David D. Smith
  • Patent number: 11171249
    Abstract: Wafer-level methods for manufacturing one or more uniform layers of material on one or more surfaces of a plurality of optoelectronic modules include assembling a wafer assembly, injecting a formable material into the wafer assembly, ejecting excess formable material form the wafer assembly, and hardening one or more formable material layers on one or more surfaces of the plurality of optoelectronic modules such that the hardened one or more formable material layers are the one or more uniform layers of material.
    Type: Grant
    Filed: July 24, 2018
    Date of Patent: November 9, 2021
    Assignee: ams Sensors Singapore Pte. Ltd.
    Inventors: Robert Lenart, Sonja Gantner-Hanselmann, Özkan Ahishali
  • Patent number: 11171248
    Abstract: SiC Schottky rectifier 100 with surge current ruggedness. As referenced above, the Schottky rectifier 100 may be configured to provide multiple types of surge current protection.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: November 9, 2021
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Andrei Konstantinov