Patents Examined by Edward Chin
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Patent number: 11800698Abstract: Techniques for fabricating semiconductor structures and devices with stacked structures having embedded capacitors are disclosed. In one example, a semiconductor structure includes a substrate having a first region and a second region. The semiconductor structure further includes a capacitor structure disposed in the second region of the substrate. The capacitor structure includes a capacitor conductor and a dielectric insulator disposed between the capacitor conductor and the substrate. The semiconductor structure further includes a stacked device disposed on the first region of the substrate. The stacked device includes a first transistor and a second transistor. At least a portion of the second transistor is disposed under at least a portion of the first transistor. The first transistor and the second transistor are each coupled to the capacitor conductor.Type: GrantFiled: August 17, 2021Date of Patent: October 24, 2023Assignee: International Business Machines CorporationInventors: Ruilong Xie, Takashi Ando, Alexander Reznicek, Bahman Hekmatshoartabari
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Patent number: 11791416Abstract: This application discloses a display panel, a method for manufacturing a display panel, and a display device. The method includes steps of forming, in a display region of the display panel, a first active switch including a first semiconductor layer, and forming, in a non-display region of the display panel, a second active switch including a second semiconductor layer. A material of the first semiconductor layer formed is an oxide, a material of the second semiconductor layer formed is polysilicon, and the first semiconductor layer and the second semiconductor layer are formed on an identical layer.Type: GrantFiled: December 26, 2019Date of Patent: October 17, 2023Assignee: HKC CORPORATION LIMITEDInventors: En-Tsung Cho, Qionghua Mo
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Patent number: 11792976Abstract: A semiconductor memory device may have a substrate including an active region in a memory cell region and a logic active region in a peripheral region, an element isolation structure between the active region and the logic active region, an insulating layer pattern covering the active region, and a support insulating layer. The insulating layer pattern may include an extension portion that extends along the element isolation structure, may be spaced apart from the element isolation structure, and may overhang over the element isolation structure. The support insulating layer may fill a recess space defined between the extension portion and the element isolation structure.Type: GrantFiled: July 9, 2021Date of Patent: October 17, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Dongoh Kim, Gyuhyun Kil, Junghoon Han, Doosan Back
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Patent number: 11784053Abstract: A semiconductor device manufacturing method includes: forming an electrode including an Ni layer and an Au layer successively stacked on a semiconductor layer; forming a Ni oxide film by performing heat treatment to the electrode at a temperature of 350° C. or more to deposit Ni at least at a part of a surface of the Au layer and to oxidize the deposited Ni; and forming an insulating film in contact with the Ni oxide film and containing Si.Type: GrantFiled: January 22, 2021Date of Patent: October 10, 2023Assignee: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.Inventor: Yukinori Nose
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Patent number: 11785765Abstract: Provided are a semiconductor memory device with guard pillars and a manufacturing method thereof. The semiconductor memory device includes a substrate having a memory region and a periphery region surrounding the memory region, a plurality of bit line structures, a plurality of contacts, a plurality of guard pillars and a plurality of capacitors. The bit line structures are arranged parallel to each other on the substrate in the memory region. The contacts are disposed between the adjacent bit line structures and electrically connected to the substrate. The guard pillars are disposed on the substrate and located between the adjacent bit line structures at the boundary between the memory region and the periphery region. The capacitors are disposed on the plurality of contacts to be electrically connected to the plurality of contacts.Type: GrantFiled: June 6, 2021Date of Patent: October 10, 2023Assignee: Winbond Electronics Corp.Inventor: Chang-Hung Lin
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Patent number: 11776907Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a data line, a memory cell coupled to the data line, a ground connection, and a conductive line. The memory cell includes a first transistor and a second transistor. The first transistor includes a first region electrically coupled to the data line, and a charge storage structure electrically separated from the first region. The second transistor includes a second region electrically coupled to the charge storage structure and the data line. The ground connection is coupled to the first region of the first transistor. The conductive line is electrically separated from the first and second regions and spans across part of the first region of the first transistor and part of the second region of the second transistor and forming a gate of the first and second transistors.Type: GrantFiled: August 26, 2020Date of Patent: October 3, 2023Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Karthik Sarpatwari, Haitao Liu, Durai Vishak Nirmal Ramaswamy
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Patent number: 11778805Abstract: Disclosed are semiconductor memory devices and methods of fabricating the same. The semiconductor memory devices may include a capacitor including first and second electrodes and a dielectric layer. The dielectric layer may include a zirconium aluminum oxide layer including a first zirconium region adjacent to the first electrode, a first aluminum region, a second aluminum region adjacent to the second electrode, and a second zirconium region between the first and second aluminum regions. The first and second zirconium regions may include zirconium and oxygen and may be devoid of aluminum. The first and second aluminum regions may include aluminum and oxygen and may be devoid of zirconium. The first aluminum region and the first zirconium region may be spaced apart by a first distance, and the first aluminum region and the second zirconium region may be spaced apart by a second distance shorter than the first distance.Type: GrantFiled: February 4, 2022Date of Patent: October 3, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Kyooho Jung, Jeong-Gyu Song, Younsoo Kim, Jooho Lee
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Patent number: 11764540Abstract: A method is disclosed for mounting and cooling a circuit component having a plurality of contacts. The method comprises mounting the circuit component on a rigid substrate of a thermally conductive material having and electrically insulating regions with a circuit board arranged between the circuit component and the substrate. The circuit board, which carries conductive traces that terminate in contact pads, is secured to the substrate with at least some of the contact pads on the circuit board disposed on the side of the board facing the substrate, some of which being bonded to the substrate. To establish both an electrical and a thermal connection between the contacts of the circuit component and the contact pads bonded to the substrate, blind holes are formed in the base of the circuit board, each hole terminating at a respective one of the contact pads bonded to the substrate.Type: GrantFiled: June 30, 2020Date of Patent: September 19, 2023Assignee: Landa Labs (2012) LTD.Inventors: Ronny Costi, Gilad Reut Gelbart
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Patent number: 11765880Abstract: A method of manufacturing a semiconductor device includes: forming a lower structure that includes a substrate and conductive lines on the substrate, within a chip region and an edge region of the lower structure; forming data storage structures on the chip region of the lower structure; forming dummy structures on the edge region of the lower structure; forming an interlayer insulating layer covering the data storage structures and the dummy structures on the lower structure, the interlayer insulating layer including high step portions and low step portions, an upper end of the low step portions being lower than an upper end of the high step portions; and planarizing the interlayer insulating layer.Type: GrantFiled: April 30, 2021Date of Patent: September 19, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yanghee Lee, Seokhan Park, Sungchang Park, Boun Yoon, Ilyoung Yoon, Youngsuk Lee, Junseop Lee, Seungho Han, Jaeyong Han, Jeehwan Heo
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Patent number: 11758713Abstract: A semiconductor device includes first and second trenches in respective first and second regions in a substrate, a first isolation structure having a first inner wall oxide pattern, a first liner, and a first filling insulation pattern sequentially stacked I the first trench, a second isolation structure having a second inner wall oxide pattern, a second liner, and a second filling insulation pattern sequentially stacked I the second trench, a first gate structure having a first high-k dielectric pattern, a first P-type metal pattern, and a first N-type metal pattern sequentially stacked on the first region, and a second gate structure having a second high-k dielectric pattern and a second N-type metal pattern sequentially stacked on the second region, wherein the first and second liners protrude above upper surfaces of the first and second inner wall oxide patterns and the first and second filling insulation patterns, respectively.Type: GrantFiled: July 27, 2021Date of Patent: September 12, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dongoh Kim, Gyuhyun Kil, Junghoon Han, Doosan Back
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Patent number: 11753254Abstract: The invention relates to a transport apparatus for transferring a sample between two devices. The transport apparatus comprises a transport tube provided with a carrier for holding a sample. The carrier is movable within said transport tube along a length thereof. The transport apparatus further comprises an actuator tube extending substantially next to said transport tube and which is provided with an actuator element that is movable within said actuator tube. Said actuator element comprises a first magnet part, and said sample carrier is provided with a second magnet part, wherein said first magnet part and said second magnet part are configured such that movement of the sample carrier through said transport tube is linked to movement of the magnetic actuator element through the actuator tube. In this way, movement of the magnetic actuator causes movement of the sample carrier, allowing safe, reliable and protected transport of the sample.Type: GrantFiled: January 23, 2020Date of Patent: September 12, 2023Assignee: FEI CompanyInventor: Tomas Kratochvíl
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Patent number: 11744061Abstract: A method of forming an array of capacitors comprises forming a vertical stack above a substrate. The stack comprises a horizontally-elongated conductive structure and an insulator material directly above the conductive structure. Horizontally-spaced openings are formed in the insulator material to the conductive structure. An upwardly-open container-shaped bottom capacitor electrode is formed in individual of the openings. The bottom capacitor electrode is directly against conductive material of the conductive structure. The conductive structure directly electrically couples the bottom capacitor electrodes together. A capacitor insulator is formed in the openings laterally-inward of the bottom capacitor electrodes. A top capacitor electrode is formed in individual of the openings laterally-inward of the capacitor insulator. The top capacitor electrodes are not directly electrically coupled together. Structure independent of method is disclosed.Type: GrantFiled: January 27, 2021Date of Patent: August 29, 2023Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Kirk D. Prall, Mitsunari Sukekawa
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Patent number: 11720791Abstract: An apparatus for optimizing experimental conditions by using a neural network may calculate a prediction yield and accuracy of the prediction yield by using a neural network-based experimental prediction model. The apparatus may optimize the experimental conditions by determining an experiment priority of a respective experiment condition combination based on the prediction yield and the prediction accuracy and receiving a feedback of results of experiments performed according to the experiment priority.Type: GrantFiled: May 29, 2020Date of Patent: August 8, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Youngchun Kwon, Jinwoo Park, Dongseon Lee, Youngmin Nam, Minsik Park, Jiho Yoo, Younsuk Choi
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Patent number: 11716838Abstract: A apparatus includes a memory cell region; a peripheral region adjacent to the memory cell region; first, second, third, fourth and fifth bit-lines arranged in numerical order and extending across the memory cell region and the peripheral region; and first, second and third bit-line contacts connecting with the first, third and fifth bit-lines in the peripheral region, respectively; wherein the first and second bit-line contacts are arranged adjacently without interposing the second bit-line therebetween; and wherein the second and third bit-line contacts are arranged adjacently with interposing the fourth bit-line therebetween.Type: GrantFiled: August 11, 2021Date of Patent: August 1, 2023Assignee: Micron Technology, Inc.Inventor: Yasuyuki Sakogawa
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Patent number: 11705425Abstract: A bond tip for thermocompression bonding a bottom surface includes a die contact area and a low surface energy material covering at least a portion of the bottom surface. The low surface energy material may cover substantially all of the bottom surface, or only a peripheral portion surrounding the die contact area. The die contact area may be recessed with respect to the peripheral portion a depth at least as great as a thickness of a semiconductor die to be received in the recessed die contact area. A method of thermocompression bonding is also disclosed.Type: GrantFiled: April 15, 2021Date of Patent: July 18, 2023Assignee: MICRON TECHNOLOGY, INC.Inventors: Benjamin L. McClain, Brandon P. Wirz, Zhaohui Ma
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Patent number: 11705450Abstract: Semiconductor structures and methods for forming a semiconductor structure are provided. The method includes forming a first active semiconductor region disposed in a first vertical level of the semiconductor structure, forming a second active semiconductor region disposed in the first vertical level, where the second active semiconductor region is separated from the first active semiconductor region by a distance in a first direction, forming a first conductive structure disposed in a second vertical level that is adjacent to the first vertical level. The first conductive structure extends along the first direction and electrically couples the first active semiconductor region to the second active semiconductor region.Type: GrantFiled: April 7, 2021Date of Patent: July 18, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Ni-Wan Fan, Jung-Chan Yang, Hsiang-Jen Tseng, Tommy Hu, Chi-Yu Lu, Wei-Ling Chang
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Patent number: 11700725Abstract: A memory device includes a substrate, an active layer that is spaced apart from the substrate and laterally oriented, a word line that is laterally oriented in parallel to the active layer along one side of the active layer, an active body that is vertically oriented by penetrating through the active layer, a bit line that is vertically oriented by penetrating through the active layer to be spaced apart from one side of the active body, and a capacitor that is vertically oriented by penetrating through the active layer to be spaced apart from another side of the active body.Type: GrantFiled: April 12, 2022Date of Patent: July 11, 2023Assignee: SK hynix Inc.Inventor: Kangsik Choi
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Patent number: 11696434Abstract: A semiconductor memory device includes a bit line extending in a first direction, a channel pattern on the bit line, the channel pattern including first and second vertical portions facing each other and a horizontal portion connecting the first and second vertical portions, first and second word lines provided on the horizontal portion and between the first and second vertical portions and extended in a second direction crossing the bit line, and a gate insulating pattern provided between the first word line and the channel pattern and between the second word line and the channel pattern.Type: GrantFiled: April 27, 2021Date of Patent: July 4, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kiseok Lee, Kyunghwan Lee, Dongoh Kim, Yongseok Kim, Hui-Jung Kim, Min Hee Cho
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Patent number: 11695075Abstract: The disclosure provides a thin film transistor, a method of manufacturing the thin film transistor, an array substrate and a display device, belongs to the field of display technology, and can solve the problem that an existing thin film transistor is prone to cracking or breaking due to bending. The thin film transistor of the present disclosure includes a substrate and an active layer arranged on the substrate, and at least one groove is arranged on a surface of the active layer distal to the substrate.Type: GrantFiled: June 23, 2020Date of Patent: July 4, 2023Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventor: Xiaming Zhu
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Patent number: 11683926Abstract: A method includes forming a stack of material layers to cover an array region and a periphery region of a substrate. A first patterned mask layer is formed, and the pattern of the first patterned mask layer is transferred to the stack of material layers, thereby forming a first array pattern and a first periphery pattern respectively in the array and periphery regions. A second patterned mask layer is provided above the first array and periphery patterns. The pattern of the second patterned mask is not aligned with the pattern of the first patterned mask. The pattern of the second patterned mask layer is transferred to form the first and second sacrificial patterns respectively in the array and periphery regions. The first array pattern, the first and second sacrificial patterns, and the first periphery pattern are simultaneously transferred to form a second array pattern and a second periphery pattern.Type: GrantFiled: September 15, 2021Date of Patent: June 20, 2023Assignee: WINBOND ELECTRONICS CORP.Inventors: Po-Han Wu, Pai-Chun Tsai, Tzu-Ming Ou Yang, Shu-Ming Lee