Abstract: The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes dividing a design layout into a plurality of units; creating a lookup table that maps each of the plurality of units to its position within the design layout and a data set, wherein the lookup table associates any repeating units in the plurality of units to a same data set; and exposing an energy sensitive layer to a charged particle beam based on the lookup table.

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. A novel sample structure and a novel use of a milling pattern allow the creation of S/TEM samples as thin as 50 nm without significant bowing or warping. Preferred embodiments of the present invention provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.

Abstract: A UVC radiation system for producing decontaminated air which flows into the surroundings of the system while blocking UVC radiation from entering the surrounding environment. In one embodiment, the system comprises a first housing forming a first air chamber and having multiple side walls each having one or more UVC lamps adjacent thereto. Each side wall has air vent openings in a pattern which confronts substantially the entire length of the one or more adjacent lamps. A second housing surrounds the first housing and lamps and forms a second air chamber having one or more walls containing an air filter to permit air to flow through the filter into the surrounding environment and to prevent UVC radiation from entering the environment.

Abstract: A periodic field differential mobility analyzer apparatus for separating and identifying ionic analytes employs a series of elongated parallel channels, a pump, a first voltage providing an electric field Ex in a direction opposing the gas flow, a second voltage providing an electric field Ey in a direction perpendicular to the gas flow, an ion source, and a detector. The periodic field differential mobility analyzer provides high resolution and sensitivity.

Abstract: An equation expressing a previously and experimentally determined relationship between the number of ions and a CV value is stored in a reference CV value calculation data memory. When mass spectrometry is performed for a target sample under measurement conditions including a loop time Tp and a dwell time Td, a chromatogram creator creates a chromatogram based on the analysis result and calculates a peak area value A. A CV-value-related information calculator computes the number X of ions by X=A×(Td/Tp), and based on the equation stored in the memory, calculates a CV value corresponding to the calculated number of ions. This is a reference CV value containing only statistical dispersion factors for data. This CV value is displayed in such a manner that it can be compared with an actual CV value calculated based on the variance of actually measured peak area values corresponding to a plurality of measurements.

Abstract: A method of reflecting ions in a multireflection time of flight mass spectrometer is disclosed. The method includes guiding ions toward an ion mirror having multiple electrodes, and applying a voltage to the ion mirror electrodes to create an electric field that causes the mean trajectory of the ions to intersect a plane of symmetry of the ion mirror and to exit the ion mirror, wherein the ion are spatially focussed by the mirror to a first location and temporally focused to a second location different from the first location. Apparatus for carrying out the method is also disclosed.

Abstract: The invention relates to time-of-flight mass spectrometers in which individual time-of-flight spectra are measured by detection systems with limited dynamic measurement range and are summed to sum spectra. The invention proposes a method to increase the dynamic range of measurement of the spectrum. To achieve this, those ion signals whose measured values display saturation of the analog-to-digital converter (ADC) are replaced by correction values, particularly if several successive measured values are in saturation. The correction values are obtained from the width of the signals, preferably simply from the number of measured values in saturation.

Abstract: A method for operating a mass spectrometer having an ion trap over a plurality of selected mass-to-charge ranges constituting an overall mass-to-charge range is disclosed. For each of the plurality of selected mass-to-charge ranges the method comprises filling the ion trap with fragmented ions of the selected mass-to-charge ranges, cooling the fragmented ions trapped in the ion trap for a first cooling period, applying an RF voltage and a resolving direct current voltage to the ion trap for eliminating any remaining fragmented ions outside the selected ion mass-to-charge range and retaining ions within the selected ion mass-to-charge range, cooling the retained ions in the ion trap for a second cooling period, and scanning the retained ions out of the ion trap and detecting the ions released therefrom.

Abstract: An illuminator comprising a short-wave infrared (SWIR) laser, a fiber optic, and a lens optic. The fiber optic is coupled to the SWIR laser for mixing the modes of a beam emitted by the SWIR laser. The lens optic is coupled to the fiber optic for shaping the beam into a top-hat beam profile. A method for creating SWIR illumination includes emitting a laser beam with multiple modes from a SWIR laser, transmitting the laser beam through a multi-mode fiber optic, and transmitting the laser beam through a lens optic. Transmitting the laser beam through the multi-mode fiber optic can including mixing modes of the laser beam thereby reducing speckle and constructive and destructive interference in the laser beam. Transmitting the laser beam through the lens optic can include generating a top-hat beam profile.

Abstract: A particle beam irradiation system having a multi-energy extraction control operation that controls the extraction beam energy in a synchrotron within a short time, such that when the ion beam irradiation is halted, an operating cycle is updated within a short time and a dose rate is improved. To this end, operating control data for each of the devices constituting the synchrotron is constructed by multi-energy extraction control pattern data for controlling extraction of beams of a plurality of energy levels at one operating cycle, and a plurality of sets of deceleration control data that correspond to the extraction control of the beam of the plurality of energy levels. The devices are controlled by using the operating control data.

Abstract: An open electrostatic trap mass spectrometer is disclosed for operation with wide and diverging ion packets. Signal on detector is composed of signals corresponding to multiplicity of ion cycles, called multiplets. Using reproducible distribution of relative intensity within multiplets, the signal can be unscrambled for relatively sparse spectra, such as spectra past fragmentation cell of tandem mass spectrometer, past ion mobility and differential ion mobility separators. Various embodiments are provided for particular pulsed ion sources and pulsed converters such as orthogonal accelerators, ion guides, and ion traps. The method and apparatus enhance the duty cycle of pulsed converters, improve space charge tolerance of the open trap analyzer and extends the dynamic range of time-of-flight detectors.

Abstract: Flanges (10a) of an attachment plate (10) integrally combined with an ion detector (5) are fixed to an inner surface of a vacuum chamber (1) via cushioning members (12), such as O-rings. Although the vacuum chamber (1) mechanically vibrates due to a turbomolecular pump attached to it, this vibration is absorbed by the cushioning members (12), whereby the vibration of the ion detector (5) is suppressed. As a result, the noise which occurs with a vibration of the ion detector (5) and is superposed on the detection signal is reduced. Thus, the quality of the detection signal can be improved by a simple and inexpensive structure.

Abstract: The invention relates to a maskless lithography system for patterning a target using a plurality of charged particle beamlets. The system comprises an electron optical column including a blanker array for modulating the beamlets. The blanker array includes receivers for receiving data signals and blanker elements for modulating the beamlets in accordance with the data signals. The system further comprises a data path comprising a preprocessing system for processing pattern data and a plurality of transmission channels for transmitting processed pattern data to the blanker elements. The data path further comprises a pattern streaming system for receiving pattern data and generating data signals. First and second channel selectors connect a subset of selected transmission channels for pattern data transmission. The first channel selector is connected between the preprocessing system and the transmission channels. The second channel selector is connected between the channels and the blanker elements.

Abstract: An apparatus includes a portable housing and a plurality of separately operable microfluidic emitters disposed within the housing. Each microfluidic emitter h an inlet for receiving a liquid and an outlet for emitting a spray. Each microfluidic emitter is movable within the portable housing between a first position in which the outlet of that microfluidic emitter is fully retracted within the portable housing and a second position in which the outlet of that microfluidic emitter projects out of the portable housing. The portable housing with the multiple emitters is adapted to be detachably coupled to another housing portion. This housing portion includes a microfluidic substrate with a channel for transporting an eluent and an outlet aperture for emitting the eluent. The inlet of one of the emitters is detachably coupled to the outlet aperture of the microfluidic substrate.

Abstract: The present invention aims to provide a pattern dimension measurement method for accurately measuring an amount of shrinkage of a pattern that shrinks and an original dimension value before the shrinkage and a charged particle beam apparatus. In order to attain the above-mentioned object, there are proposed a pattern dimension measurement method and a charged particle beam apparatus that are characterized by: forming a thin film on a sample including the pattern after carrying out beam scanning onto a first portion of the pattern; acquiring a first measurement value by scanning a beam onto a region corresponding to the first portion on which the thin film is formed; acquiring a second measurement value by scanning a beam onto a second portion that has identical dimensions as those of the first portion on design data; and finding the amount of shrinkage of the pattern based on subtraction processing of subtracting the first measurement value from the second measurement value.

Abstract: An apparatus for generating extreme ultraviolet light may include: a chamber having an opening through which a laser beam is introduced into the chamber; a reference member on which the chamber is mounted; a target supply unit for supplying a target material to be irradiated by the laser beam to a predetermined region inside the chamber; a laser beam focusing optical system for focusing the laser beam in the predetermined region inside the chamber to turn the target material into plasma; and a collector mirror for collecting the extreme ultraviolet light emitted from the plasma.

Abstract: A mask cover according to one embodiment of the present invention comprises a frame body having an opening at the center, a conductive earth plate installed on the frame body such that its end protrudes into the opening of the frame body, an earth pin provided on the end of the earth plate and electrically connected to the earth plate, and a conductive cover part surrounding the earth pin such that the tip end of the earth pin protrudes and a gap is present between the cover part and the earth pin.

Abstract: The objective of the present application is to suppress the occurrence of flares and to reduce the amount of secondary electrons arising at an aperture provided to the lead-out electrode of an electron gun. By coating a thin film having a low rate of secondary electron emission such as carbon onto the aperture of a lead-out electrode closest to an electron source in an electron gun, it is possible to reduce the amount of secondary electrons arising. Secondary electrons arising at the lead-out electrode, are reduced, and so as a result, flare is reduced. By incorporating two apertures to the lead-out electrode, and applying to the two apertures a potential that is equipotential to the lead-out electrode, it is possible to eliminate an electric field from seeping from under to over the lead-out electrode. Secondary electrons arising when an electron beam impacts the lead-out electrode cease to incur force in the direction of passage from the lead-out electrode, and consequently there is a reduction in flares.

Abstract: The present invention relates to a particle therapy apparatus used for radiation therapy. More particularly, this invention relates to a gantry for delivering particle beams which comprises means to analyse the incoming beam. Means are integrated into the gantry to limit the momentum spread of the beam and/or the emittance of the beam.

Abstract: An X-ray CT apparatus includes an X-ray tube, an X-ray detector, and a control unit. The X-ray detector includes at least two divided ranges. One range includes a small detection range in which X-ray detection elements of a small size for detecting the X-rays radiated from the X-ray tube are arrayed. The other range includes a large detection range in which the X-ray detection elements of a large size for detecting the X-rays radiated from the X-ray tube are arrayed. The control unit is configured to select the small detection range or the large detection range. The X-ray CT apparatus can efficiently achieve high resolution upon imaging and, further, is capable of fully utilizing X-ray detection elements of a small detector size.