Patents Examined by Jeremy J Joy
  • Patent number: 10840249
    Abstract: An integrated circuitry construction comprises a first area and a second area aside the first area. Laterally-alternating first and second conductive lines extend from the first area into the second area. The second conductive lines extend laterally deeper into the second area on one side of the first area than the first conductive lines and comprise pairs of immediately-laterally-adjacent of the second conductive lines. Insulative material is in the second area laterally between the immediately-laterally-adjacent second conductive lines in individual of the pairs. An elevationally-extending wall of insulator material is within the insulative material in the second area. The wall extends laterally between immediately-laterally-adjacent of the second conductive lines within the respective individual pair and laterally all across the first conductive line that is laterally between the immediately-laterally-adjacent second conductive lines within the respective individual pair.
    Type: Grant
    Filed: August 23, 2018
    Date of Patent: November 17, 2020
    Assignee: Micron Technology, Inc.
    Inventor: Takayuki Iwaki
  • Patent number: 10840144
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a fin structure over a semiconductor substrate and a gate stack covering a portion of the fin structure. The gate stack includes a gate dielectric layer, a work function layer, and a conductive filling over the work function layer. The semiconductor device structure also includes a dielectric layer covering the fin structure. The dielectric layer is in direct contact with the conductive filling.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: November 17, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Che-Cheng Chang, Chih-Han Lin
  • Patent number: 10818876
    Abstract: The present disclosure relates to an organic light-emitting diode (OLED) display panel, including: a substrate, an OLED array layer configured on the substrate, a thin film packaging layer configured on the substrate and the OLED array layer, and a light extraction layer configured within the thin film packaging layer. The OLED array layer includes a plurality of OLED components arranged in matrix. The thin film packaging layer includes at least two inorganic barrier layers and at least one organic buffer layer. One side of the inorganic barrier layer facing away the substrate includes a plurality of pixel grooves corresponding to tops of each of the OLED components. The light extraction layer is configured within the pixel grooves, and the light extraction layer is covered by a flattening film configured to seal the light extraction layer within the pixel grooves, so as to flatten a surface of the inorganic barrier layer.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: October 27, 2020
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Hui Huang
  • Patent number: 10818777
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. A source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is etched, thereby forming a source/drain space. The first semiconductor layers are laterally etched through the source/drain space. An inner spacer made of a dielectric material is formed on an end of each of the etched first semiconductor layers. A source/drain epitaxial layer is formed in the source/drain space to cover the inner spacer. A lateral end of each of the first semiconductor layers has a V-shape cross section after the first semiconductor layers are laterally etched.
    Type: Grant
    Filed: April 1, 2020
    Date of Patent: October 27, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Chiang, Chen-Feng Hsu, Chao-Ching Cheng, Tzu-Chiang Chen, Tung Ying Lee, Wei-Sheng Yun, Yu-Lin Yang
  • Patent number: 10818599
    Abstract: An electrical device including a first semiconductor device having a silicon and germanium containing source and drain region, and a second semiconductor device having a silicon containing source and drain region. A first device contact to at least one of said silicon and germanium containing source and drain region of the first semiconductor device including a metal liner of an aluminum titanium and silicon alloy and a first tungsten fill. A second device contact is in contact with at least one of the silicon containing source and drain region of the second semiconductor device including a material stack of a titanium oxide layer and a titanium layer. The second device contact may further include a second tungsten fill.
    Type: Grant
    Filed: January 1, 2019
    Date of Patent: October 27, 2020
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC.
    Inventors: Hiroaki Niimi, Shariq Siddiqui, Tenko Yamashita
  • Patent number: 10811391
    Abstract: A semiconductor device includes a base, a first semiconductor chip mounted on the base, and a second semiconductor chip provided above the first semiconductor chip. The second semiconductor chip includes a first portion, a second portion including a region directly above a center of the first semiconductor chip, and a third portion including part of a portion of the second semiconductor chip other than a region directly above the first semiconductor chip. The second portion is thicker than the first portion. The third portion is thicker than the second portion and is disposed at a position sandwiching the first semiconductor chip.
    Type: Grant
    Filed: February 11, 2019
    Date of Patent: October 20, 2020
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA MEMORY CORPORATION
    Inventors: Akira Tojo, Kazuo Shimokawa, Masayuki Uchida, Takashi Ito, Masatoshi Tanabe
  • Patent number: 10811349
    Abstract: An electronic device includes a support wafer, an electronic chip and an encapsulating block for the electronic chip above the support wafer. The support wafer is provided with a first network of electrical connections and a second network of electrical connections formed solely by tracks. First electrical connection elements are interposed between first front electrical contacts of the electronic chip and rear electrical contacts of the first network. Second electrical connection elements are interposed between second front electrical contacts of the electronic chip and internal electrical contact zones of the tracks of the second network. The first network includes front external electrical contacts and the tracks exhibiting external electrical contact zones.
    Type: Grant
    Filed: August 23, 2018
    Date of Patent: October 20, 2020
    Assignees: STMicroelectronics (Grenoble 2) SAS, STMicroelectronics (Alps) SAS
    Inventors: David Auchere, Laurent Schwarz, Deborah Cogoni, Eric Saugier
  • Patent number: 10811518
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. A source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is etched, thereby forming a source/drain space. The first semiconductor layers are laterally etched through the source/drain space. An inner spacer made of a dielectric material is formed on an end of each of the etched first semiconductor layers. A source/drain epitaxial layer is formed in the source/drain space to cover the inner spacer. A lateral end of each of the first semiconductor layers has a V-shape cross section after the first semiconductor layers are laterally etched.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: October 20, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chao-Ching Cheng, Chen-Feng Hsu, Tzu-Chiang Chen, Tung Ying Lee, Wei-Sheng Yun, Yu-Lin Yang
  • Patent number: 10796986
    Abstract: A semiconductor device includes a leadframe, a semiconductor die attached to the leadframe, and an encapsulation material encapsulating the semiconductor die and a portion of the leadframe. The leadframe includes a first main face and a second main face opposite to the first main face. The leadframe includes leads wherein each lead includes a fully plated end face extending between an unplated first sidewall and an unplated second sidewall opposite to the first sidewall. The end face and the first and second sidewalls of each lead are perpendicular to the first and second main faces.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: October 6, 2020
    Assignee: Infineon Technologies AG
    Inventors: Stefan Macheiner, Markus Dinkel
  • Patent number: 10777687
    Abstract: A high-performance and highly reliable semiconductor device is provided. The semiconductor device includes: a first oxide; a source electrode; a drain electrode; a second oxide over the first oxide, the source electrode, and the drain electrode; a gate insulating film over the second oxide; and a gate electrode over the gate insulating film. The source electrode is electrically connected to the first oxide. The drain electrode is electrically connected to the first oxide. Each of the first oxide and the second oxide includes In, an element M (M is Al, Ga, Y, or Sn), and Zn. Each of the first oxide and the second oxide includes more In atoms than element M atoms. An atomic ratio of the In, the Zn, and the element M in the first oxide is equal to or similar to an atomic ratio of the In, the Zn, and the element M in the second oxide.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: September 15, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yuta Endo, Hiromi Sawai, Hajime Kimura
  • Patent number: 10770561
    Abstract: An annular device is provided. The annular device includes a first transistor including a first input terminal and a second transistor including a second input terminal. The first input terminal and the second input terminal extend radially outward from the annular device, and wherein the first input terminal is aligned with the second input terminal.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: September 8, 2020
    Assignee: SPIN MEMORY, INC.
    Inventors: Gian Sharma, Amitay Levi, Kuk-Hwan Kim
  • Patent number: 10748819
    Abstract: Vertical transport field effect transistors (FETs) having improved device performance are provided. Notably, vertical transport FETs having a gradient threshold voltage are provided. The gradient threshold voltage is provided by forming a gradient threshold voltage adjusting gate dielectric structure between the bottom drain region of the FET and the top source region of the FET. The gradient threshold voltage adjusting gate dielectric structure includes a doped interface high-k gate dielectric material that is located in proximity to the bottom drain region and a non-doped high-k dielectric material that is located in proximity to the top source region. The non-doped high-k dielectric material has a higher threshold voltage than the doped interface high-k gate dielectric.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: August 18, 2020
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Choonghyun Lee, SangHoon Shin, Jingyun Zhang, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10749024
    Abstract: A semiconductor device of an embodiment includes a first region including a first portion of a semiconductor layer having first and second planes, a first trench, a first gate electrode, a first source electrode and a drain electrode; a second region adjacent to the first region in a first direction and including a second portion of the semiconductor layer, a second trench, a second gate electrode, a second source electrode on the first plane side, and the drain electrode; a third region adjacent to the first region in a second direction crossing the first direction and including a third portion of the semiconductor layer, a third trench, a third gate electrode, a third source electrode on the first plane side, and the drain electrode; a first gate electrode pad connected to the first gate electrode; and a second gate electrode pad connected to the second and third gate electrodes.
    Type: Grant
    Filed: August 23, 2018
    Date of Patent: August 18, 2020
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventor: Akihiro Tanaka
  • Patent number: 10748878
    Abstract: Semiconductor device assemblies with heat transfer structures formed from semiconductor materials are disclosed herein. In one embodiment, a semiconductor device assembly can include a thermal transfer structure formed from a semiconductor substrate. The thermal transfer structure includes an inner region, an outer region projecting from the inner region, and a cavity defined in the outer region by the inner and outer regions. The semiconductor device assembly further includes a stack of first semiconductor dies in the cavity, and a second semiconductor die attached to the outer region of the thermal transfer structure and enclosing the stack of first semiconductor dies within the cavity.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: August 18, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Sameer S. Vadhavkar, Jaspreet S. Gandhi, James M. Derderian
  • Patent number: 10741401
    Abstract: A semiconductor and a method of creating the same are provided. The semiconductor structure includes a first set of fins and a second set of fins disposed on a substrate. There is a high-k dielectric disposed on top of the substrate and the first and second set of fins. There is a work-function metal disposed on top of the high-k dielectric. There is a pinch-off layer disposed on top of the work-function metal (WFM). There is a first dielectric layer disposed on top of the pinch-off layer. There is a second dielectric material configured as a gate cut between the first set of fins and the second set of fins, wherein the second dielectric material cuts through the nitride, pinch-off, and WFM layers.
    Type: Grant
    Filed: February 9, 2019
    Date of Patent: August 11, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Peng Xu, Kangguo Cheng, Ruqiang Bao
  • Patent number: 10741384
    Abstract: A process of depositing a silicon nitride (SiN) film on a nitride semiconductor layer is disclosed. The process includes steps of: (a) loading an epitaxial substrate including the nitride semiconductor layer into a reaction furnace at a first temperature and converting an atmosphere in the furnace into nitrogen (N2); (b) raising the temperature in the furnace to a second temperature while keeping pressure in the furnace at a first pressure higher than 30 kPa; (c) converting the atmosphere in the furnace to ammonia (NH3) at the second temperature; and (d) beginning the deposition by supplying SiH2Cl2 as a source gas for silicon (Si) at a second pressure lower than 100 Pa. A feature of the process is that a time span from when the temperature in the furnace reaches the critical temperature to the supply of SiH2Cl2 is shorter than 20 minutes, where the first pressure becomes the equilibrium pressure at the critical temperature.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: August 11, 2020
    Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
    Inventor: Kazuhide Sumiyoshi
  • Patent number: 10741426
    Abstract: A method for processing semiconductor wafers in a furnace is provided. The method includes forming a thin film on each of the semiconductor wafers. The method further includes controlling the temperature of the furnace in a first thermal mode during the formation of the thin film. In the first thermal mode, a first end thermal zone, a middle thermal zone and a second end thermal zone of the furnace which are arranged in sequence have a gradually increasing temperature. The method also includes controlling the temperature of the furnace in a second thermal mode after the formation of the thin film. In the second thermal mode, the first end thermal zone, the middle thermal zone and the second end thermal zone of the furnace have a gradually decreasing temperature.
    Type: Grant
    Filed: February 27, 2018
    Date of Patent: August 11, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jian-Lun Lo, Jih-Churng Twu, Feng-Yu Chen, Yuan-Hsiao Su, Yi-Chi Huang, Yueh-Ting Yang, Shu-Han Chao
  • Patent number: 10734219
    Abstract: Examples of a plasma film forming method include repeating feeding material gas onto a substrate placed on a susceptor via a shower head provided to oppose the susceptor, performing plasma film formation on the substrate by applying high frequency power to the shower head while providing reactant gas onto the substrate, and performing post-purge of discharging the gas used in the plasma film formation while heating the shower head, for a time longer than 0.1 seconds, a plurality of times in this order.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: August 4, 2020
    Assignee: ASM IP Holdings B.V.
    Inventor: Fumitaka Shoji
  • Patent number: 10734399
    Abstract: Some embodiments include apparatuses, and methods of forming the apparatuses. Some of the apparatuses include a first group of conductive materials interleaved with a first group of dielectric materials, a pillar extending through the conductive materials and the dielectric materials, memory cells located along the first pillar, a conductive contact coupled to a conductive material of the first group of conductive materials, and additional pillars extending through a second group of conductive materials and a second group of dielectric materials. The second pillar includes a first portion coupled to a conductive region, a second portion, a third portion, and a fourth portion coupled to the conductive contact. The second portion is located between the first and third portions. The second portion of each of the additional pillars is part of a piece of material extending from a first pillar to a second pillar of the additional pillars.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: August 4, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Akira Goda, Haitao Liu, Jin Chen, Guangyu Huang, Mojtaba Asadirad
  • Patent number: 10734377
    Abstract: An integrated circuit structure includes a first well, and a first and a second set of implants. The first well includes a first dopant type, a first portion extending in a first direction and having a first width, and a second portion adjacent to the first portion. The second portion extends in the first direction and has a second width greater than the first width. The first set of implants are in the first portion of the first well, and the second set of implants are in the second portion of the first well. At least one implant of the first set of implants being configured to be coupled to a first supply voltage. Each implant of the second set of implants having a second dopant type different from a first dopant type of the first set of implants.
    Type: Grant
    Filed: October 12, 2017
    Date of Patent: August 4, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kam-Tou Sio, Chih-Liang Chen, Charles Chew-Yuen Young, Hui-Zhong Zhuang, Jiann-Tyng Tzeng, Yi-Hsun Chiu