Patents Examined by José R. Díaz
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Patent number: 11232990Abstract: A semiconductor device includes a semiconductor substrate, an insulating layer, a semiconductor layers and a silicide layer. The insulating layer is formed on the semiconductor substrate. The semiconductor layer is formed on the insulating layer and includes a polycrystalline silicon. The silicide layer is formed on the semiconductor layer. The semiconductor layer has a first semiconductor part and a second semiconductor part. The first semiconductor part includes a first semiconductor region of a first conductivity type, and a second semiconductor region of a second conductivity type. The second semiconductor part is adjacent the second semiconductor region. In a width direction of the first semiconductor part, a second length of the second semiconductor part is greater than a first length of the first semiconductor part. A distance between the first and second semiconductor regions is 100 nm or more in an extension direction in which the first semiconductor region extends.Type: GrantFiled: December 14, 2020Date of Patent: January 25, 2022Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Yuta Mizukami, Tohru Kawai
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Patent number: 11227769Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming an interlayer dielectric (ILD) layer around the gate structure; performing a replacement metal gate (RMG) process to transform the gate structure into a metal gate; forming an inter-metal dielectric (IMD) layer on the metal gate; forming a metal interconnection in the IMD layer; and performing a high pressure anneal (HPA) process for improving work function variation of the metal gate.Type: GrantFiled: March 30, 2020Date of Patent: January 18, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Jung Tang, Yu-Jen Liu
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Patent number: 11201209Abstract: A method includes providing a semiconductor substrate, and forming a first N-type implant region and a second N-type implant region in the semiconductor substrate. The first N-type implant region and the second N-type implant region are separated by a portion of the semiconductor substrate. The method also includes forming a first P-type implant region in the semiconductor substrate, and performing a heat treatment process on the semiconductor substrate to form an N-type well region and a P-type well region in the semiconductor substrate. The N-type well region has a first portion, a second portion, and a third portion between the first portion and the second portion. The doping concentration of the third portion is lower than the doping concentration of the first portion and the doping concentration of the second portion.Type: GrantFiled: November 22, 2019Date of Patent: December 14, 2021Assignee: NUVOTON TECHNOLOGY CORPORATIONInventors: Syed Neyaz Imam, Po-An Chen
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Patent number: 11201217Abstract: The characteristic of Fe-doped HEMTs is improved. The invention provides a nitride semiconductor substrate having a substrate, a buffer layer made of nitride semiconductors on the substrate, and an active layer composed of nitride semiconductor layers on the buffer layer; the buffer layer containing Fe, the Fe having a concentration profile in which the Fe concentration increases monotonically and gradually in the thickness direction of the buffer layer from an interface between the substrate and the buffer layer, has a maximum value within 2×1017 to 1.1×1020 atoms/cm3 inclusive, and decreases monotonically and gradually toward an interface between the buffer layer and the active layer, and the point of the maximum value being within ±50 nm from the midpoint in the thickness direction of the buffer layer, and being 500 nm or more away from the interface between the buffer layer and the active layer.Type: GrantFiled: July 13, 2020Date of Patent: December 14, 2021Assignee: COORSTEK KKInventors: Kenichi Eriguchi, Yoshihisa Abe, Jun Komiyama
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Patent number: 11201250Abstract: A Schottky barrier diode includes a substrate, a first semiconductor layer formed on the substrate, a second semiconductor layer formed on the first semiconductor layer, and a metal layer formed on the second semiconductor layer to form a Schottky barrier, wherein the first semiconductor layer and the second semiconductor layer are formed of different materials, and a conduction band offset between the first semiconductor layer and the second semiconductor layer is less than a set value.Type: GrantFiled: April 14, 2020Date of Patent: December 14, 2021Assignee: Electronics and Telecommunications Research InstituteInventors: Dong Woo Park, Kyung Hyun Park, Jeong Woo Park, Jun Hwan Shin, Eui Su Lee, Hyun Soo Kim, Kiwon Moon, Il Min Lee
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Patent number: 11195871Abstract: An image sensing device is provided to include a pixel array including unit pixel blocks. Each of the unit pixel blocks includes a first subpixel block including a first floating diffusion (FD) region and unit pixels surrounding the first FD region, a second subpixel block including a second FD region electrically coupled to the first FD region and unit pixels surrounding the second FD region. The image sensing device also includes a first pixel transistor array and a second pixel transistor array that are disposed at opposite sides of the first subpixel block in the first direction. The first and the pixel transistor array include a first drive transistor set and a second drive transistor set, respectively.Type: GrantFiled: October 10, 2019Date of Patent: December 7, 2021Assignee: SK hynix Inc.Inventor: Pyong Su Kwag
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Patent number: 11189523Abstract: A method of forming a semiconductor structure includes the following steps. A dielectric layer is formed over a conductive line. A photoresist layer is formed over the dielectric layer. The photoresist layer is patterned to form a mask feature and an opening is defined by the mask feature. The opening has a bottom portion and a top portion communicated to the bottom portion, and the top portion is wider than the bottom portion. The dielectric layer is etched to form a via hole in the dielectric layer using the mask feature as an etch mask, such that the via hole has a bottom portion and a tapered portion over the bottom portion. The conductive material is filled in the via hole to form a conductive via.Type: GrantFiled: June 12, 2019Date of Patent: November 30, 2021Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Shing-Yih Shih, Mao-Ying Wang, Hung-Mo Wu
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Patent number: 11177334Abstract: A display substrate, display panel, and method of fabricating the display substrate. The display substrate includes: a first thin film transistor on a substrate; a second thin film transistor on the substrate and on the same side of the substrate as first thin film transistor; a light blocking structure between the substrate and an active region of first thin film transistor. The light blocking structure is configured to block at least a portion of light incident on the active region of first thin film transistor, such that a ratio of area of an illuminated portion of the active region of first thin film transistor to an area of the active region of first thin film transistor is less than a ratio of area of an illuminated portion of an active region of second thin film transistor to an area of the active region of second thin film transistor.Type: GrantFiled: October 10, 2019Date of Patent: November 16, 2021Assignees: HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Liang Lin, Yunhai Wan, Zhixiang Zou, Chuan Chen, Wei He
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Patent number: 11164935Abstract: Semiconductor devices and methods are disclosed herein. In one example, a disclosed semiconductor device includes: an insulation layer, a first electrode with sidewalls and a bottom surface in contact with the insulation layer; a second electrode with sidewalls and a bottom surface in contact with the insulation layer; and an insulator formed between the first electrode and the second electrode. The insulator is coupled to a sidewall of the first electrode and coupled to a sidewall of the second electrode.Type: GrantFiled: September 15, 2020Date of Patent: November 2, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei Kai Shih, Kuo-Liang Wang
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Patent number: 11165014Abstract: A semiconductor device includes a semiconductor substrate; a vertical Hall element including a magnetosensitive portion, and formed in the semiconductor substrate; and an excitation wiring provided above a surface of the semiconductor substrate and apart from the magnetosensitive portion. The excitation wiring is formed of a single wiring with a plurality of turns. The excitation wiring includes a plurality of main wiring portions arranged side by side, and apart from one another in an overlapping region that overlaps the magnetosensitive portion as viewed in plan view from a direction orthogonal to the surface of the semiconductor substrate; and auxiliary wiring portions connecting each of the plurality of main wiring portions to one another in series.Type: GrantFiled: March 20, 2020Date of Patent: November 2, 2021Assignee: ABLIC INC.Inventors: Yohei Ogawa, Hirotaka Uemura
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Patent number: 11164936Abstract: A first-layer insulating film having a barrier property against a determined element contained in a ferroelectric capacitor as well as an oxygen permeability, a hydrogen permeability, and a water permeability is formed over a surface of the ferroelectric capacitor formed over a substrate. After that, heat treatment is performed in an oxidizing atmosphere. After the heat treatment, a second insulating film having a hydrogen permeability and a water permeability lower than those of the first-layer insulating film respectively is formed over a surface of the first-layer insulating film in a non-reducing atmosphere. A third-layer insulating film is formed over a surface of the second-layer insulating film. By doing so, degradation of a ferroelectric film under and after the formation of a semiconductor device having the ferroelectric capacitor is suppressed and deterioration in the characteristics of the ferroelectric capacitor is suppressed.Type: GrantFiled: January 3, 2020Date of Patent: November 2, 2021Assignee: FUJITSU SEMICONDUCTOR MEMORY SOLUTION LIMITEDInventors: Youichi Okita, Wensheng Wang, Kazuaki Takai
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Patent number: 11158606Abstract: Dies and/or wafers are stacked and bonded in various arrangements including stacks, and may be covered with a molding to facilitate handling, packaging, and the like. In various examples, the molding may cover more or less of a stack, to facilitate connectivity with the devices of the stack, to enhance thermal management, and so forth.Type: GrantFiled: July 2, 2019Date of Patent: October 26, 2021Assignee: Invensas Bonding Technologies, Inc.Inventors: Guilian Gao, Cyprian Emeka Uzoh, Jeremy Alfred Theil, Belgacem Haba, Rajesh Katkar
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Patent number: 11139407Abstract: A method for forming a solar cell including steps of (1) providing a semiconductor wafer having an upper surface; (2) applying an electrical contact material to the upper surface, the electrical contact material forming an electrically conductive grid that includes grid lines extending from a bus bar; (3) forming an isolation channel in the semiconductor wafer to define a solar cell portion and a wing portion, wherein the wing portion is electrically isolated from the solar cell portion, and wherein the wing portion is substantially free of the electrical contact material; (4) submerging the semiconductor wafer in a solvent, wherein formation of metal dendrites on the grid lines of the electrically conductive grid is inhibited; and (5) separating the solar cell portion from the wing portion.Type: GrantFiled: January 16, 2019Date of Patent: October 5, 2021Assignee: The Boeing CompanyInventors: Xiaobo Zhang, Vincent A. Lim, Hoon H. Lee, John P. Serra, Uming T. Jeng, Steven M. Bunyan, Julie J. Hoskin, Kent E. Barbour, Dimitri D. Krut
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Patent number: 11133412Abstract: Integrated circuit devices including standard cells are provided. The standard cells may include a P-type vertical field effect transistor (VFET) including a first channel region and a first top source/drain region sequentially stacked on a substrate in a vertical direction, an N-type VFET including a second channel region and a second top source/drain region sequentially stacked on the substrate in the vertical direction, and a top contact layer contacting both the first top source/drain region and the second top source/drain region.Type: GrantFiled: August 14, 2019Date of Patent: September 28, 2021Inventor: Jung Ho Do
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Patent number: 11133269Abstract: A semiconductor package and a manufacturing method for the semiconductor package are provided. The package comprises a die, through interlayer vias (TIVs), a dielectric film, a backside film and solder paste portions. The TIVs are disposed beside the semiconductor die and a molding compound laterally surrounds the die and the TIVs. The dielectric film is disposed on a backside of the semiconductor die, and the backside film is disposed on the dielectric film. The backside film has at least one of a coefficient of thermal expansion (CTE) and a Young's modulus larger than that of the dielectric film. The solder paste portions are disposed on the TIVs and located within openings penetrating through the dielectric film and the backside film. There is a recess located at an interface between the dielectric film and the backside film within the opening.Type: GrantFiled: October 17, 2019Date of Patent: September 28, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Ti Lu, Hao-Yi Tsai, Ming-Hung Tseng, Tsung-Hsien Chiang, Yen-Liang Lin, Tzu-Sung Huang
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Patent number: 11121217Abstract: In a method of manufacturing a semiconductor device, a fin structure is formed over a substrate. The fin structure has a channel region and a source/drain region. A gate structure is formed over the channel region of the fin structure. A first source/drain etching is performed to recess the source/drain region of the fin structure. After the first source/drain etching, a second source/drain etching is performed to further recess the source/drain region of the fin structure. After the second source/drain etching, a third source/drain etching is performed to further recess the source/drain region of the fin structure, thereby forming a source/drain recess. One or more epitaxial layers are formed in the source/drain recess. The first source/drain etching is isotropic etching and the second source/drain etching is anisotropic etching.Type: GrantFiled: June 1, 2020Date of Patent: September 14, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Lung Chen, Kang-Min Kuo, Long-Jie Hong
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Patent number: 11114524Abstract: A semiconductor device including a first electrode on a substrate, a second electrode on the first electrode, a first dielectric layer between the first electrode and the second electrode; a third electrode on the second electrode, a second dielectric layer between the second electrode and the third electrode, and a first contact plug penetrating the third electrode and contacting the first electrode, the first contact plug contacts a top surface of the third electrode and a side surface of the third electrode.Type: GrantFiled: June 13, 2019Date of Patent: September 7, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Shaofeng Ding, Jinho Park, Yongseung Bang, Jeong Hoon Ahn
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Patent number: 11114553Abstract: A lateral insulated gate turn-off device includes an n-drift layer, a p-well formed in the n? drift layer, a shallow n+ type region formed in the well, a shallow p+ type region formed in the well, a cathode electrode shorting the n+ type region to the p+ type region, a trenched first gate extending through the n+ type region and into the well, a p+ type anode region laterally spaced from the well, an anode electrode electrically contacting the p+ type anode region, and a trenched second gate extending from the p+ type anode region into the n-drift layer. For turning the device on, a positive voltage is applied to the first gate the reduce the base width of the npn transistor, and a negative voltage is applied to the second gate to effectively extend the p+ emitter of the pnp transistor further into the n-drift layer to improve performance.Type: GrantFiled: March 11, 2020Date of Patent: September 7, 2021Assignee: Pakal Technologies, Inc.Inventors: Richard A. Blanchard, Vladimir Rodov
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Patent number: 11114552Abstract: An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n? drift layer, a p-well, trenched insulated gates formed in the p-well, and n+ regions between at least some of the gates, so that vertical npn and pnp transistors are formed. A cathode electrode is on top, and an anode electrode is on the bottom of the substrate. The device is formed of a matrix of cells. To turn the device on, a positive voltage is applied to the gates, referenced to the cathode electrode. To direct high energy electrons away from a gate oxide layer on the sidewalls of the trenches, boron is implanted between the trenches so p+ regions are formed in the mesas of the less-doped p-well. The p+ regions break down during an over-voltage event before the p-well breaks down in the mesas.Type: GrantFiled: March 18, 2020Date of Patent: September 7, 2021Assignee: Pakal Technologies, Inc.Inventors: Paul M. Moore, Woytek Tworzydlo, Richard A. Blanchard
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Patent number: 11107779Abstract: A semiconductor package includes a first die and a second die. The first die includes a first spiral section and first bonding metallurgies of an inductor. The first bonding metallurgies are connected to the first spiral section. The second die is bonded to the first die. The second die includes a second spiral section and second bonding metallurgies of the inductor. The second bonding metallurgies are connected to the second spiral section. The inductor extends from the first die to the second die.Type: GrantFiled: October 17, 2019Date of Patent: August 31, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Wei Chen, Ming-Fa Chen, Sen-Bor Jan, Chih-Chia Hu