Patents Examined by Kara Geisel
  • Patent number: 7072041
    Abstract: A system and method for fast peak finding in an optical spectrum prioritizes the information it first generates and how the information is then forwarded from the system to a host computer, for example. A spectrum detection subsystem generates a spectrum of an optical signal. An analog-to-digital converter converts the spectrum into sample data. Finally, a data processing subsystem first detects the spectral locations of peaks in the spectrum using the sample data and then uploads the peak information to a host computer before performing processing to determine the shapes of the peaks and/or noise information for the optical signal, for example. The system is thus able to quickly find some information, such as whether or not channels or carriers are present, at what frequency the carriers are operating, and the carriers' power level, and send this information to the host computer. In contrast, information concerning spectral shape or the noise floor sent later in time.
    Type: Grant
    Filed: June 15, 2004
    Date of Patent: July 4, 2006
    Assignee: Axsun Technologies, Inc.
    Inventors: Yu Li, Peter S. Whitney, Jeffrey A. Korn
  • Patent number: 7068360
    Abstract: In order to provide an optical sampling waveform measuring apparatus which can measure an ultra-high speed optical signal accurately by using a stable, narrow pulse, and a low timing jitter sampling optical pulse, an optical sampling waveform measuring apparatus is provided with a passive mode-locked fiber ring laser for generating a sampling optical pulse and a cavity length varying device which adjusts the cavity length in a passive mode-locked fiber ring laser.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: June 27, 2006
    Assignee: Yokogawa Electric Corporation
    Inventor: Hiroshi Ohta
  • Patent number: 7068367
    Abstract: The invention is directed to an arrangement for the optical detection of a moving target flow for pulsed energy beam pumped radiation generation based on a plasma. It is the object of the invention to find a novel possibility for detection of a moving target flow for energy beam pumped radiation generation based on a plasma which allows reliable orientation of the excitation beam on the target without the detector being subjected to influence and damage due to radiation emitted by the plasma. According to the invention, this object is met in that a target generator provides a target flow with relatively constant target states in an interaction point, a sensor unit is directed to a detection point which lies close to the interaction point in the direction of the path.
    Type: Grant
    Filed: October 8, 2003
    Date of Patent: June 27, 2006
    Assignee: XTREME technologies GmbH
    Inventors: Gregor Stobrawa, Mark Bischoff, Roland Sauerbrey, Wolfgang Ziegler, Klaus Ruehle
  • Patent number: 7064812
    Abstract: A method and system are provided for monitoring erosion of system components in a plasma processing system. The system components contain a gas emitter that can release a sensor gas into a plasma process environment. The sensor gas can produce characteristic fluorescent light emission when exposed to a plasma. The method can evaluate erosion of system components in a plasma, by monitoring fluorescent light emission and a mass signal from the sensor gas. Consumable system components that can be monitored using the method include rings, shields, electrodes, baffles, and liners.
    Type: Grant
    Filed: August 19, 2003
    Date of Patent: June 20, 2006
    Assignee: Tokyo Electron Limited
    Inventors: Audunn Ludviksson, Steven T. Fink
  • Patent number: 7061609
    Abstract: An optical wavelength analyser including: an entrance slit (4) for receiving a light beam (3) including signals with various wavelengths and passing the beam at least partly; a diffractor (6, 7, 9) for receiving the passed beam and diffracting the signals dependent on their wavelength; a detector (8) including adjacent detector elements (32, 33, 35, 36, 38, 39) for receiving the diffracted signals and generating their output signals; a processor (21) for determining the wavelengths from the output signals, in which the received light beam has a spatially uniform intensity; the diffractor diffracts each signal on a different detector element subset, consisting of at least a first element (32, 33, 35, 36, 38, 39.) for receiving at least a first signal with a first signal level; the processor determines each signal's wavelength dependent on the first signal level and a calibration value.
    Type: Grant
    Filed: May 1, 2001
    Date of Patent: June 13, 2006
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO
    Inventor: Lun Kai Cheng
  • Patent number: 7061610
    Abstract: A method and device for measuring the wavelength of a source, for example monitoring a laser used in DWDM fiber optic communications systems, wherein the method and device comprise using a coarse arrayed waveguide grating (AWG) to resolve an ambiguity of wavelength measurement in a fine arrayed waveguide grating. The wavelength monitor or meter of the present invention may be configured as a standalone device suitable for use in many different applications and may also be integrated into a laser or laser array for use in DWDM fiber optic communications systems.
    Type: Grant
    Filed: February 14, 2003
    Date of Patent: June 13, 2006
    Assignee: Technology Asset Trust
    Inventors: Michael Mittelstein, Hongmin Chen
  • Patent number: 7061627
    Abstract: A method for analyzing asymmetric structures (including isolated and periodic structures) includes a split detector for use in a broadband spectrometer. The split has detector has separate right and left halves. By independently measuring and comparing the right and left scattered rays, information about asymmetries can be determined.
    Type: Grant
    Filed: March 11, 2003
    Date of Patent: June 13, 2006
    Assignee: Therma-Wave, Inc.
    Inventors: Jon Opsal, Allan Rosencwaig
  • Patent number: 7057720
    Abstract: An optical interrogation system and method are described herein that are capable of generating light beams that have desired optical properties which are directed towards a specimen array. In one embodiment, the optical interrogation system includes a light source, a diffractive element and a collimating optic (e.g., simple lens(es), f-? lens(es), segmented mirror, fiber array). The light source emits a light beam to the diffractive optic which receives the light beam and outputs an array of light beams to the collimating optic. The collimating optic receives and conditions the light beams emitted from the diffractive optic and then outputs the conditioned light beams which have desired optical properties towards a specimen array. Several other embodiments of the optical interrogation system are also described herein.
    Type: Grant
    Filed: June 24, 2003
    Date of Patent: June 6, 2006
    Assignee: Corning Incorporated
    Inventors: Stephen J. Caracci, Norman H. Fontaine
  • Patent number: 7054013
    Abstract: Process for measuring distances by optical means on a specular or quasi-specular strip (1) of bright metal, characterised by the following steps: an incident light beam is emitted by a source (7) incorporated into a measurement head (10), said source projecting a pattern (11) in the form of a plurality of points, preferably a line, arranged along an axis that is essentially perpendicular to the motion direction of the metal surface, in an incidence direction upon a fixed part (5), preferably non-specular, of the installation; firstly, said beam is partially reflected by said fixed part (5) essentially along the same path as the incident beam and in the opposite direction towards a detector (8) belonging to said measurement head (10) and located in the immediate vicinity of said source (7); secondly, said beam is partially reflected towards said metal strip (1), from where it is further reflected in the direction of said detector (8).
    Type: Grant
    Filed: May 28, 2002
    Date of Patent: May 30, 2006
    Assignee: Centre de Recherches Metallurgiques
    Inventors: Marc Schyns, Cecile Mathy
  • Patent number: 7053994
    Abstract: Broadly speaking, an invention is provided for monitoring a plasma optical emission. More specifically, the present invention provides a method for monitoring the plasma optical emission through a variable aperture to detect an endpoint of a plasma etching process without interferences that could lead to false endpoint calls. The method includes collecting optical emission data from a plasma through an aperture defined by moveable members. The moveable members are capable of varying a configuration of the aperture. The method also includes holding the moveable members at a particular time to cause the aperture to maintain a fixed configuration. The method further includes detecting a specific perturbation in the plasma optical emission while holding the moveable members.
    Type: Grant
    Filed: October 28, 2003
    Date of Patent: May 30, 2006
    Assignee: Lam Research Corporation
    Inventors: Brian K. McMillin, Francois Chandrasekar Dassapa
  • Patent number: 7054000
    Abstract: A method of calibration of magnification of a microscope with the use of a diffraction grating has the steps of determining a mean period of a diffraction grating by irradiating the diffraction grating with an electromagnetic radiation having a known wavelength and analyzing a resulting diffraction pattern, determining a scatter of individual values of a period of the diffraction grating by multiple measurements of periods of the diffraction grating by a microscope in pixels in one area in a microscope field of view, and calculating a mean value of the period and the scatter based on the measurements, determining a sufficient number of measurements of the period for providing an accepted statistic error of a magnification of the microscope, performing measurements corresponding to the determined acceptable number of measurements, of individual values of the period in pixels in a plurality of portions of the diffraction grating, calculating a general mean value of the period in pixels based on the immediately
    Type: Grant
    Filed: August 4, 2003
    Date of Patent: May 30, 2006
    Assignee: General Phosphorix LLC
    Inventors: Arkady Nikitin, Albert Sicignano, Dmitriy Yeremin, Tim Goldburt
  • Patent number: 7038792
    Abstract: A measurement system is provided that facilitates the measuring of a shape of a flexible electromagnetic radiation structure. The measurement system includes a plurality of local sensors, a central sensor and a measurement processor. Each of the plurality of local sensors is configured to sense the position of a portion of the flexible electromagnetic radiation structure. The central sensor is configured to determine an overall shape of the flexible electromagnetic radiation structure. The measurement processor provides the ability to combine sensor data from the local sensors and sensor data from the central sensor to provide an accurate measurement of the shape of the flexible electromagnetic radiation structure.
    Type: Grant
    Filed: March 28, 2003
    Date of Patent: May 2, 2006
    Assignee: Honeywell International Inc.
    Inventors: Dimitry Gorinevsky, Tristram T. Hyde
  • Patent number: 7034942
    Abstract: A method, includes illuminating a first portion of a colored region with first light from a gas discharge tube and generating a first output using a diffuse reflection of the first light from the first portion. The method further includes illuminating a second portion of the colored region with second light from a first solid state lamp and generating a second output using a diffuse reflection of the second light from the second portion. Additionally, the method includes illuminating a third portion of the colored region with third light from a second solid state lamp and generating a third output using a diffuse reflection of the third light from the third portion.
    Type: Grant
    Filed: January 7, 2002
    Date of Patent: April 25, 2006
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Algird M Gudaitis, Sam M. Sarmast, Tod S. Heiles
  • Patent number: 7027149
    Abstract: A spectrographic analysis method which is photometric and non-contact for determining the presence of a chosen constituent in water is provided based on the fact that the inverse of reflectance is a measure of absorption. A full spectrum measurement of the reflectance of the water is made and an absorption spectrum calculated which is then fitted to a clear spectrum in a wavelength range where the water absorption dominates so as to have scaling and offset. Then the clear water spectrum is subtracted and a matching is repeated for the spectrum of the desired constituent and thus a measure of the concentration of the constituent in the water is obtained.
    Type: Grant
    Filed: May 16, 2001
    Date of Patent: April 11, 2006
    Assignee: Jeacle Limited
    Inventor: Eon O'Mongain
  • Patent number: 7023555
    Abstract: A measuring apparatus for measuring color characteristics of an object is provided. The apparatus includes at least two measuring units, each of which has at least one optical emitter and at least one optical receiver, wherein the measuring units are combined to form a measuring arrangement. The emitter has an illuminating angle and the receiver has a receiving angle, wherein relative to the object these angles are different for each measuring unit. Respective light guide terminals are provided for each measuring unit. A light source is connectable in common for at least two measuring units via a light guide and a light guide terminal. A detector is connectable in common for at least two measuring units via another light guide and light guide terminal. The light guide terminals can be selectively coupled with the light source and the detector.
    Type: Grant
    Filed: January 15, 2002
    Date of Patent: April 4, 2006
    Assignee: STEAG ETA-Optik GmbH
    Inventor: RĂ¼diger Kubitzek
  • Patent number: 7023545
    Abstract: A light source produces a pump wave that is used to pump a parametric device. The parametric device is configured at or near its degeneracy point and produces a broadband output. The broadband output is directed to a remote location where chemical agents may be located. The broadband output may be transmitted through or scattered from the remote location and chemical agents located at the remote location may absorb portions of the broadband output. The broadband output may be collected and dispersed to produce channels or sub-bands that are detected by a detector array. The detector array may multiplex the intensities of the sub-bands and produce an absorption spectrum. The absorption spectrum may be compared to a library of known chemical agents and the presence of a chemical agent at the remote location can be determined in or near real time.
    Type: Grant
    Filed: June 12, 2003
    Date of Patent: April 4, 2006
    Assignee: Textron Systems Corporation
    Inventor: Richard C. Slater
  • Patent number: 7023544
    Abstract: Method and apparatus for detecting biomolecular interactions. The use of labels is not required and the methods may be performed in a high-throughput manner. An instrument system for detecting a biochemical interaction on a biosensor. The system includes an array of detection locations comprises a light source for generating collimated white light. A beam splitter directs the collimated white light towards a surface of a sensor corresponding to the detector locations. A detection system includes an imaging spectrometer receiving the reflected light and generating an image of the reflected light.
    Type: Grant
    Filed: June 26, 2002
    Date of Patent: April 4, 2006
    Assignee: SRU Biosystems, Inc.
    Inventors: Brian T. Cunningham, Peter Y. Li
  • Patent number: 7023543
    Abstract: A method is disclosed for controlling a lighting fixture of a kind having individually colored light sources, e.g., LEDs, that emit light having a distinct luminous flux spectrum that varies in its initial spectral composition, that varies with temperature, and that degrades over time. The method controls such fixture so that it projects light having a predetermined desired flux spectrum despite variations in initial spectral characteristics, despite variations in temperature, and despite flux degradations over time.
    Type: Grant
    Filed: August 1, 2002
    Date of Patent: April 4, 2006
    Inventor: David W. Cunningham
  • Patent number: 7023554
    Abstract: A method and apparatus for determining a color and brightness of an LED includes a sensor having a plurality of filters arranged in a matrix and an output probe connected to the sensor, the output probe providing a color output and a brightness output in a single signal. The sensor may further include an input probe connected to the sensor providing power and a ground probe connected to the sensor providing a grounded connection to the sensor. The plurality of filters in the sensor are preferably configured in a matrix array of color receptors having different colors.
    Type: Grant
    Filed: November 14, 2003
    Date of Patent: April 4, 2006
    Assignee: Test Coach Corporation
    Inventor: Kevin Schmitt
  • Patent number: 7019832
    Abstract: An optical spectrometer comprises at least two coupling apertures with different mode field diameters, a means for dispersing the light beams exiting each of the coupling apertures along a dispersion axis and at least two decoupling apertures on which the dispersed light beams are imaged and whose mode field diameters each correspond to the mode field diameters of the associated coupling apertures. Due the enlarged mode field diameter, a larger spectral fraction of dispersed light beams, i.e., light of a larger spectral bandwidth, can be coupled into the decoupling aperture than into the decoupling aperture.
    Type: Grant
    Filed: July 2, 2003
    Date of Patent: March 28, 2006
    Assignee: Acterna Eningen GmbH
    Inventors: Thomas Fuhrmann, Wolfgang Schmid, Michael Pahlke