Abstract: A test pattern formed in a scribe line area of a wafer is irradiated with a light beam to measure the width thereof; the test pattern is irradiated with an electron beam so as to measure the width thereof; an amount of change in the width of the test pattern is calculated; a dummy pattern having the same width as that of a semiconductor device of the wafer is irradiated with an electron beam to measure the width thereof; and the width of a pattern is estimated by the use of the calculated amount of width change so as to determine the shape of the pattern. Thus, a shape measuring system and method capable of determining the shape of a micropattern in a semiconductor device without changing the dimensions of the micropattern can be provided.

Abstract: A microplasma emission spectrometer is described that includes a chamber for confining a sample volume of gas. A microplasma source that includes a resonant antenna structure generates a microplasma in the chamber from the sample volume of gas. A RF power supply provides power to the resonant antenna structure that generates the microplasma from the sample volume of gas. A spectrally sensitive detector is optically coupled to the microplasma. The entrance of the spectrally sensitive detector has dimensions and is positioned so that emissions from at least one-tenth of a total volume of the microplasma are transmitted through the entrance of the spectrally sensitive detector.

Abstract: An optical sensing enhancing material (and corresponding method of making) comprising: a medium, the medium comprising a plurality of aggregated nanoparticles comprising fractals; and a microcavity, wherein the medium is located in a vicinity of the microcavity. Also an optical sensor and sensing method comprising: providing a doped medium, the medium comprising a plurality of aggregated nanoparticles comprising fractals, with the material; locating the doped medium in the vicinity of a microcavity; exciting the doped medium with a light source; and detecting light reflected from the doped medium. Also an optical sensing enhancing material comprising a medium, the medium comprising a semicontinuous metal film of randomly distributed metal particles and their clusters at approximately their percolation threshold. The medium preferably additionally comprises a microcavity/microresonator. Also devices and methods employing such material.

Abstract: A surface containing a plurality of individually-addressable encoded images comprises an array of curved specular reflectors. Reflectance modifying treatment is applied to a first region of at least one of the curved specular reflectors, such that beamable energy that is directed towards the array is viewable from a first subset of the curved specular reflectors only under a first set of viewing conditions. Reflectance modifying treatment is applied to a second region of at least one of the curved specular reflectors, such that beamable energy that is directed towards the array is viewable from a second subset of the curved specular reflectors only under a second set of viewing conditions.

Abstract: A method of correcting aberrations in an optical system by applying a light adjustable aberration conjugator layer to a component of the system, determining the nature of the aberration, applying radiation to the conjugator layer such as to change the refraction and/or shape of the conjugator layer to compensate for the aberration, and locking in the desired optical property.

Abstract: A method for the detection and evaluation of the light generated in a fluorescing specimen by a short pulse laser, wherein at least a first and a second fluorophore and/or a self-fluorescing specimen are separately irradiated with different wavelengths and the specimen light is recorded in a wavelength-dependent manner with at least one nondescanned detector as reference spectrum and a separation into individual spectra is carried out during the irradiation of at least two fluorophores and/or self-fluorescing specimens simultaneously from the measured spectrum and the reference spectra through regression analysis, wherein the wavelength of the short pulse laser is advantageously changed continuously in at least one wavelength region.

Abstract: A sensor system employs a thermo-electrically cooled surface enhanced Raman (SERS) structure that is positioned in a sample chamber. Gas or vapor that may contain an analyte of interest is introduced into the sample chamber so that the analyte may come into contact with the SERS structure. The SERS structure may be cooled to facilitate condensation of selected analytes onto the SERS structure. When in contact with each other, the analyte and SERS structure may be optically stimulated by an optical excitation signal to produce a unique spectral response that may be detected by a spectroanalysis system. The spectral response then may be correlated to a specific analyte, i.e., identified.

Abstract: Methods are provided for determining and controlling polymer properties on-line in a polymerization reactor system, such as a fluidized bed reactor. The methods include obtaining a regression model for determining a polymer property, the regression model including principal component loadings and principal component scores, acquiring a Raman spectrum of a polyolefin sample comprising polyolefin, calculating a new principal component score from at least a portion of the Raman spectrum and the principal component loadings, and calculating the polymer property by applying the new principal component score to the regression model. The property can be controlled by adjusting at least one polymerization parameter based on the calculated polymer property.

Abstract: A sensing device for sensing a condition of a plasma processing system component. The sensing device includes a main body configured to contain a material, an emitter contained in the main body and configured to emit light when exposed to a plasma, and a mating feature connected to the main body and configured to be mated with a receiving feature of an object in the plasma processing system such that the emitter material is exposed to a processing environment of the plasma processing system. When the emitter material is exposed to a plasma, the light emitted from the emitter can be monitored to determine at least one of material accumulation on the system component and erosion of the system component.

Abstract: A method to change the color of hair. The method includes measuring an initial reflectance spectrum of a sample of the hair and analyzing a contribution of a plurality of natural hair factors to the initial reflectance spectrum. The method also includes calculating a hair treatment based on another reflectance spectrum. A system to measure a reflectance spectrum of a sample includes an integrating sphere having a sampling port and an inner surface and a window disposed near to the sampling port. The window is configured for being placed in close contact with the sample. The system also includes a light source configured to project light onto the sample via the window and a light detector configured to analyze light reflected from the inner surface to produce the reflectance spectrum of the sample.

Abstract: A diffraction grating and a prism with the appropriate characteristics are employed to provide a combined dispersive characteristic that is substantially linear over the visible spectrum. Radiation from the grating and prism is collimated by a lens towards a detector array. The grating or a telecentric stop between the grating and prism is placed at a focal point of the lens in a telecentric arrangement so that equal magnification is achieved at the detector array. If the detector array is replaced by a plurality of optical channels, a multiplexer/demultiplexer is obtained.

Abstract: A triple-pump coherent anti-Stokes Raman scattering (CARS) system for simultaneous measurements of temperature and species concentrations with high spatial and temporal resolution is described, wherein four laser beams generate CARS signals near two distinct wavelengths exhibiting an N2 CARS signal along with the CARS signal from another target molecule, each pair of CARS signals generated over a relatively narrow wavelength region and captured with fixed-wavelength detection. Temperature and relative concentrations of the target species with respect to N2 are extracted by fitting the measured CARS spectrum in each wavelength region.

Abstract: The present invention is directed to optical structures and methods detecting the fluorescence of a molecule using metal-enhanced fluorescence. In particular, the invention describes the use of surface plasmon excitation for excitation of fluorophores near the metal surface and the efficient collection of the emission by coupling into the plasmon resonance and directing towards the detector. More particularly, the present invention makes use of the unique directionality of the plasmon induced fluorescence signal. The present invention is directed to optical structures using metal enhanced fluorescence including: an optical fiber having a conductive external coating; a light emitting diode (LED) having a conical shaped depression with curved sides on a front end surface, the curved sides having a conducting coating on the outer surface with respect to the LED.

Abstract: A field multiplexed dispersive imaging spectrometer (20). The novel system includes foreoptics (22) for receiving incoming electromagnetic energy, a disperser (24) disposed to receive energy from the foreoptics (22), and a focal plane array (28) disposed to receive energy from the disperser (24). The disperser (24) is a computer generated holographic disperser designed to disperse light into several, overlapping diffraction orders. In the preferred embodiment, the disperser (24) is designed with greater energy in the central, undiffracted order than in the other diffracted orders. The system (20) also includes a processor (30) which takes the data detected by the focal plane array (28) and generates a representation of the input image in several color bands using an iterative restoration algorithm (32).

Abstract: The present invention is directed to an apparatus, a system and a method for detecting the presence or absence of trace elements in a biological sample using Laser-Induced Breakdown Spectroscopy. The trace elements are used to develop a signature profile which is analyzed directly or compared with the known profile of a standard. In one aspect of the invention, the apparatus, system and method are used to detect malignant cancer cells in vivo.

Abstract: In size measurement of a semiconductor device, profiles of a pattern formed in a resist process are determined through an exposure/development simulation in respect of individual different combinations of exposure values and focus values to form a profile matrix and scattered light intensity distributions corresponding to the individual profiles are determined through calculation to form a scattered light library, thereby forming a profile library consisting of the profile matrix and scattered light library. A scattered light intensity distribution of an actually measured pattern is compared with the scattered light intensity distributions of the scattered light library and a profile of profile matrix corresponding to a scattered light intensity distribution of scattered light library having the highest coincidence is determined as a three-dimensional shape of the actually measured pattern.

Abstract: An optical assembly to be mounted on a microscope for measuring micro-structures is provided, which images a first object image (7) onto a second object image (8) lying above the optical assembly and in this way shifts the object image at a standardized interface for a camera (12), as well as the interface for the camera itself, upwards. The optical assembly permits a stroboscope lamp (6) to be coupled into the incident beam path of the microscope over a beam splitter (5) without requiring any structural modifications to the microscope. Instead, the optical assembly according to the invention is simply mounted on the C-mount of the microscope. The invention enables the use of stroboscope lamps in commercially available microscopes, which otherwise are not suitable for stroboscopic examinations.

Abstract: Disclosed herein are a Raman spectroscopy structure comprising a porous material substrate, and a method of performing Raman spectroscopy of a sample disposed adjacent to the structure comprising the porous material substrate. Generally, the substrate includes one or more layers of a porous material such as porous silicon, porous polysilicon, porous ceramics, porous silica, porous alumina, porous silicon-germanium, porous germanium, porous gallium arsenide, porous gallium phosphide, porous zinc oxide, and porous silicon carbide. It has been discovered that such a substrate material, when excited with near-infrared light, does not exhibit undesired background fluorescence characteristic of other known Raman spectroscopy substrates.

Abstract: In the color imaging system, multiple rendering devices are provided at different nodes along a network. Each rendering device has a color measurement instrument for calibrating the color presented by the rendering device. A rendering device may represent a color display in which a member surrounds the outer periphery of the screen of the display and a color measuring instrument is coupled to the first member. The color measuring instrument includes a sensor spaced from the screen at an angle with respect to the screen for receiving light from an area of the screen. A rendering device may be a printer in which the measuring of color samples on a sheet rendered by the printer is provided by a sensor coupled to a transport mechanism which moves the sensor and sheet relative to each other, where the sensor provides light from the sample to a spectrograph.

Abstract: A depolarizer includes a second birefringent plate having a thickness which continuously changes in a direction of an optical axis of the second birefringent plate; and a third birefringent plate having a thickness which continuously changes in a direction of 45 degree with respect to an optical axis of the third birefringent plate; wherein the second birefringent plate is stuck on the third birefringent plate so that a reduction direction of the thickness of the second birefringent plate and a reduction direction of the thickness of the third birefringent plate are opposite to each other.