Patents Examined by Matthew E. Warren
  • Patent number: 11527553
    Abstract: In an embodiment, a device includes: a word line extending in a first direction; a data storage layer on a sidewall of the word line; a channel layer on a sidewall of the data storage layer; a back gate isolator on a sidewall of the channel layer; and a bit line having a first main region and a first extension region, the first main region contacting the channel layer, the first extension region separated from the channel layer by the back gate isolator, the bit line extending in a second direction, the second direction perpendicular to the first direction.
    Type: Grant
    Filed: January 4, 2021
    Date of Patent: December 13, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Meng-Han Lin, Han-Jong Chia, Sheng-Chen Wang, Feng-Cheng Yang, Yu-Ming Lin, Chung-Te Lin
  • Patent number: 11527552
    Abstract: A ferroelectric memory device includes a multi-layer stack, a channel layer and a III-V based ferroelectric layer. The multi-layer stack is disposed on a substrate and includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately. The channel layer penetrates through the plurality of conductive layers and the plurality of dielectric layers of the multi-layer stack. The III-V based ferroelectric layer is disposed between the channel layer and the multi-layer stack, and includes at least one element selected from Group III elements, at least one element selected from Group V elements, and at least one element selected from transition metal elements.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: December 13, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Chieh Lu, Sai-Hooi Yeong, Yu-Ming Lin, Mauricio Manfrini, Georgios Vellianitis
  • Patent number: 11527542
    Abstract: A semiconductor device includes: a substrate; a first dielectric layer over the substrate; a memory cell over the substrate in a first region of the semiconductor device, where the memory cell includes a first ferroelectric structure in the first dielectric layer, where the first ferroelectric structure includes a first bottom electrode, a first top electrode, and a first ferroelectric layer in between; and a tunable capacitor over the substrate in a second region of the semiconductor device, where the tunable capacitor includes a second ferroelectric structure, where the second ferroelectric structure includes a second bottom electrode, a second top electrode, and a second ferroelectric layer in between, where at least a portion of the second ferroelectric structure is in the first dielectric layer.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: December 13, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sai-Hooi Yeong, Chi On Chui, Chenchen Jacob Wang
  • Patent number: 11515353
    Abstract: Multicolor, stacked detector devices, focal plane arrays including multicolor, stacked detector devices, and methods of fabricating the same are disclosed. In one embodiment, a stacked multicolor detector device includes a first detector and a second detector. The first detector includes a first detector structure and a first ground plane adjacent the first detector structure. The second detector includes a second detector structure and a second ground plane adjacent the second detector structure. At least one of the first ground plane and the second ground plane is transmissive to radiation in a predetermined spectral band. The first detector and the second detector are in a stacked relationship.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: November 29, 2022
    Assignee: L3 CINCINNATI ELECTRONICS CORPORATION
    Inventors: Daniel Chmielewski, Yajun Wei, Nansheng Tang, Darrel Endres, Michael Garter, Mark Greiner
  • Patent number: 11515473
    Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer over a transistor region, where N is a natural number, and a bottom electrode over the Nth metal layer. The bottom electrode comprises a bottom portion having a first width, disposed in a bottom electrode via (BEVA), the first width being measured at a top surface of the BEVA, and an upper portion having a second width, disposed over the bottom portion. The semiconductor structure also includes a magnetic tunneling junction (MTJ) layer having a third width, disposed over the upper portion, a top electrode over the MTJ layer and an (N+1)th metal layer over the top electrode. The first width is greater than the third width.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: November 29, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Harry-Hak-Lay Chuang, Shih-Chang Liu, Chern-Yow Hsu, Kuei-Hung Shen
  • Patent number: 11515313
    Abstract: A gated ferroelectric memory cell includes a dielectric material layer disposed over a substrate, a metallic bottom electrode, a ferroelectric dielectric layer contacting a top surface of the bottom electrode, a pillar semiconductor channel overlying the ferroelectric dielectric layer and capacitively coupled to the metallic bottom electrode through the ferroelectric dielectric layer, a gate dielectric layer including a horizontal gate dielectric portion overlying the ferroelectric dielectric layer and a tubular gate dielectric portion laterally surrounding the pillar semiconductor channel, a gate electrode strip overlying the horizontal gate dielectric portion and laterally surrounding the tubular gate dielectric portion and a metallic top electrode contacting a top surface of the pillar semiconductor channel.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: November 29, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Han-Jong Chia, Sheng-Chen Wang, Yu-Ming Lin
  • Patent number: 11508732
    Abstract: A semiconductor device includes bit line structures disposed on a substrate, each bit line structure comprising a bit line and an insulating spacer structure, buried contacts which fill lower portions of spaces between bit line structures in the substrate, and landing pads which fill upper portions of the spaces, extend from upper surfaces of the buried contacts to upper surfaces of the bit line structures, and are spaced apart from each other by insulating structures. A first insulating structure is disposed between a first landing pad and a first bit line structure. The first insulating structure includes a sidewall extending along a sidewall of the first landing pad toward the substrate. In a direction extending toward the substrate, the sidewall of the first insulating structure gets closer to a first sidewall of the first bit line structure.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: November 22, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jihee Kim, Yeongshin Park, Hyunchul Yoon, Joonghee Kim, Jungheun Hwang
  • Patent number: 11502084
    Abstract: A three-dimensional semiconductor memory device includes first semiconductor patterns, which are vertically spaced apart from each other on a substrate, each of which includes first and second end portions spaced apart from each other, and first and second side surfaces spaced apart from each other to connect the first and second end portions, first and second source/drain regions disposed in each of the first semiconductor patterns and adjacent to the first and second end portions, respectively, a channel region in each of the first semiconductor patterns and between the first and second source/drain regions, a first word line adjacent to the first side surfaces and the channel regions and vertically extended, and a gate insulating layer interposed between the first word line and the first side surfaces. The gate insulating layer may be extended to be interposed between the first source/drain regions.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: November 15, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Joongchan Shin, Changkyu Kim, Hui-Jung Kim, Iljae Shin, Taehyun An, Kiseok Lee, Eunju Cho, Hyungeun Choi, Sung-Min Park, Ahram Lee, Sangyeon Han, Yoosang Hwang
  • Patent number: 11502179
    Abstract: Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region vertically offset from the first source/drain region, and a channel region between the first and second source/drain regions. A first conductive gate is operatively adjacent to the channel region of the active region. Insulative material is between the first conductive gate and the channel region. A second conductive gate is adjacent to the first conductive gate. Ferroelectric material is between the first and second conductive gates. Some embodiments include integrated memory. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: November 15, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Pankaj Sharma
  • Patent number: 11502157
    Abstract: A display panel includes: a substrate including: a first region; a second region; a non-display area surrounding the first region and the second region; and a display area surrounding the non-display area; a plurality of pixels in the display area; a plurality of wirings configured to supply signals to the plurality of pixels; a load matching area connected to first wirings of the wirings, the load matching area including load units in the non-display area; and a dummy area including a plurality of dummy units spaced apart from the load units in the non-display area, wherein each of the load units comprises a load semiconductor layer, a first load conductive layer, and a second load conductive layer which at least partially overlap each other with an insulating layer therebetween, and the load semiconductor layer is connected to the second load conductive layer via a first contact hole.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: November 15, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jisu Na, Yangwan Kim, Minwoo Byun
  • Patent number: 11495618
    Abstract: In an embodiment, a device includes: a source line extending in a first direction; a bit line extending in the first direction; a back gate between the source line and the bit line, the back gate extending in the first direction; a channel layer surrounding the back gate; a word line extending in a second direction, the second direction perpendicular to the first direction; and a data storage layer extending along the word line, the data storage layer between the word line and the channel layer, the data storage layer between the word line and the bit line, the data storage layer between the word line and the source line.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: November 8, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Meng-Han Lin, Han-Jong Chia, Sheng-Chen Wang, Feng-Cheng Yang, Yu-Ming Lin, Chung-Te Lin
  • Patent number: 11488891
    Abstract: A method of preparing a semiconductor substrate with metal bumps on both sides of the substrate. The method includes depositing a first-side UBM layer on a first surface of the semiconductor substrate. The method includes forming a plurality of first-side metal bumps on the first surface of the semiconductor substrate after the first-side UBM layer is deposited. The method includes forming a second-side UBM layer on a second side of the semiconductor substrate. The method includes forming a plurality of second-side metal bumps on the second surface of the semiconductor substrate after the second-side UBM layer is deposited. The method includes removing exposed first-side UBM layer and exposed second-side UBM layer after the plurality of first-side metal bumps and the plurality of second-side metal bumps are formed. The method includes reflowing the plurality of first-side metal bumps and the plurality of second side metal bumps.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: November 1, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: You-Hua Chou, Yi-Jen Lai, Chun-Jen Chen, Perre Kao
  • Patent number: 11488878
    Abstract: Embodiments of mechanisms for testing a die package with multiple packaged dies on a package substrate use an interconnect substrate to provide electrical connections between dies and the package substrate and to provide probing structures (or pads). Testing structures, including daisy-chain structures, with metal lines to connect bonding structures connected to signals, power source, and/or grounding structures are connected to probing structures on the interconnect substrate. The testing structures enable determining the quality of bonding and/or functionalities of packaged dies bonded. After electrical testing is completed, the metal lines connecting the probing structures and the bonding structures are severed to allow proper function of devices in the die package. The mechanisms for forming test structures with probing pads on interconnect substrate and severing connecting metal lines after testing could reduce manufacturing cost.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: November 1, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Hua Chen, Chen-Shien Chen, Ching-Wen Hsiao
  • Patent number: 11488979
    Abstract: A semiconductor device according to an embodiment includes a substrate, and a gate structure disposed over the substrate. The gate structure includes a hole pattern including a central axis extending in a direction perpendicular to a surface of the substrate. The gate structure includes a gate electrode layer and an interlayer insulation layer, which are alternately stacked along the central axis. The semiconductor device includes a ferroelectric layer disposed adjacent to a sidewall surface of the gate electrode layer inside the hole pattern, and a channel layer disposed adjacent to the ferroelectric layer inside the hole pattern. In this case, one of the gate electrode layer and the interlayer insulation layer protrudes toward the central axis of the hole pattern relative to the other one of the gate electrode layer and the interlayer insulation layer.
    Type: Grant
    Filed: October 20, 2020
    Date of Patent: November 1, 2022
    Assignee: SK hynix Inc.
    Inventors: Jae Gil Lee, Kun Young Lee, Hyangkeun Yoo
  • Patent number: 11488868
    Abstract: The present disclosure relates to a FinFET structure and a method of manufacturing the same. The FinFET structure includes a first fin and a second fin. The first fin is over a first base and has a first channel region. The first channel region has a first channel length. The second fin is over a second base and has a second channel region. The second channel region has a second channel length. The second channel length is different from the first channel length.
    Type: Grant
    Filed: November 16, 2020
    Date of Patent: November 1, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Chun-Heng Wu
  • Patent number: 11476361
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a gate stack over the substrate. The gate stack includes a first dielectric layer, a work function layer, and a gate electrode sequentially stacked over the substrate, the first dielectric layer is between the work function layer and the substrate, the work function layer is between the first dielectric layer and the gate electrode, the first dielectric layer has a thin portion and a thick portion, the thin portion is thinner than the thick portion and surrounds the thick portion. The semiconductor device structure includes. The semiconductor device structure includes an insulating layer over the substrate and wrapping around the gate stack. The thin portion is between the thick portion and the insulating layer.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: October 18, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Liang Cheng, Ziwei Fang
  • Patent number: 11476251
    Abstract: Systems, methods and apparatus are provided for a three-node access device in vertical three dimensional (3D) memory. An example method includes a method for forming arrays of vertically stacked memory cells, having horizontally oriented access devices and vertically oriented access lines. The method includes depositing alternating layers of a dielectric material and a sacrificial material in repeating iterations to form a vertical stack. An etchant process is used to form a first vertical opening exposing vertical sidewalls in the vertical stack adjacent a first region. The first region is selectively etched to form a first horizontal opening removing the sacrificial material a first horizontal distance back from the first vertical opening.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: October 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, John A. Smythe, III, Si-Woo Lee, Gurtej S. Sandhu, Armin Saeedi Vahdat
  • Patent number: 11476364
    Abstract: An SOI wafer contains a compressively stressed buried insulator structure. In one example, the stressed buried insulator (BOX) may be formed on a host wafer by forming silicon oxide, silicon nitride and silicon oxide layers so that the silicon nitride layer is compressively stressed. Wafer bonding provides the surface silicon layer over the stressed insulator layer. Preferred implementations of the invention form MOS transistors by etching isolation trenches into a preferred SOI substrate having a stressed BOX structure to define transistor active areas on the surface of the SOI substrate. Most preferably the trenches are formed deep enough to penetrate through the stressed BOX structure and some distance into the underlying silicon portion of the substrate. The overlying silicon active regions will have tensile stress induced due to elastic edge relaxation.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: October 18, 2022
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, R. Stockton Gaines
  • Patent number: 11469156
    Abstract: Disclosed is a semiconductor package comprising a package substrate, a first semiconductor chip on the package substrate and including a first region and a second region, a second semiconductor chip on the first region, a heat radiation spacer on the second region, a third semiconductor chip supported by the second semiconductor chip and the heat radiation spacer, and a molding layer covering the first to third semiconductor chips and the heat radiation spacer.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: October 11, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyunki Kim, Sangsoo Kim, Seung Hwan Kim, Kyung Suk Oh, Yongkwan Lee, Jongho Lee
  • Patent number: 11462665
    Abstract: The disclosure discloses an apparatus for detecting an electromagnetic touch.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: October 4, 2022
    Assignees: Chengdu BOE Optoelectronics Technology Co., Ltd., Beijing BOE Technology Development Co., Ltd.
    Inventors: Weilong Zhou, De Yuan