Patents Examined by Matthew E. Warren
  • Patent number: 11456318
    Abstract: A nonvolatile memory device according to an embodiment includes a substrate having an upper surface, and a gate structure disposed over the substrate. The gate structure includes at least one gate electrode layer pattern and at least one gate insulation layer pattern, which are alternately stacked along a first direction perpendicular to the upper surface. The gate structure extends in a second direction perpendicular to the first direction. The nonvolatile memory device includes a ferroelectric layer disposed on at least a portion of one sidewall surface of the gate structure. The one sidewall surface of the gate structure forms a plane substantially parallel to the first and second directions. The nonvolatile memory device includes a channel layer disposed on the ferroelectric layer, and a source electrode structure and a drain electrode structure disposed to contact the channel layer and spaced apart from each other in the second direction.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: September 27, 2022
    Assignee: SK hynix Inc.
    Inventors: Jae Hyun Han, Jae Gil Lee, Hyangkeun Yoo, Se Ho Lee
  • Patent number: 11456224
    Abstract: The present disclosure provides a semiconductor structure having a test structure. The semiconductor structure includes a semiconductor substrate, a memory device and a test structure. The memory device is disposed on the semiconductor substrate, and includes a device area and an edge area. The edge area surrounds the device area. The test structure is disposed on the semiconductor substrate, and includes a dummy area, a test edge area and a plurality of unit cells. The test edge area surrounds the dummy area. The unit cells have a first group disposed in the dummy area and a second group disposed in the test edge area. The second group of unit cells includes the outermost unit cells of the plurality of unit cells. A shape surrounded by the edge area in a top view is different from a shape surrounded by the test edge area in the top view.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: September 27, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Tsang-Po Yang, Jui-Hsiu Jao
  • Patent number: 11450687
    Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers and memory stack structures vertically extending through the alternating stack. Each of the memory stack structures includes a vertical semiconductor channel and a vertical stack of ferroelectric memory elements surrounding the vertical semiconductor channel and located at levels of the electrically conductive layers. Each of the ferroelectric memory elements includes a respective vertical stack of a first ferroelectric material portion and a second ferroelectric material portion that differs from the first ferroelectric material portion by at least one of a material composition and a lateral thickness.
    Type: Grant
    Filed: December 15, 2020
    Date of Patent: September 20, 2022
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Roshan Tirukkonda, Ramy Nashed Bassely Said, Senaka Kanakamedala, Rahul Sharangpani, Raghuveer S. Makala, Adarsh Rajashekhar, Fei Zhou
  • Patent number: 11450686
    Abstract: A device includes a first channel; a second channel above the first channel; and a gate structure surrounding the first and second channels, wherein the gate structure includes a ferroelectric (FE) layer surrounding the first and second channels and a gate metal layer surrounding the FE layer. The device further includes two first electrodes connected to two sides of the first channel; two second electrodes connected to two sides of the second channel; a dielectric layer between the first and the second electrodes; and an inner spacer layer between the two first electrodes and the gate structure.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: September 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sai-Hooi Yeong, Bo-Feng Young, Yu-Ming Lin, Chi On Chui
  • Patent number: 11444015
    Abstract: An electronic device with stud bumps is disclosed. In an embodiment an electronic device includes a carrier board having an upper surface and an electronic chip mounted on the upper surface, the electronic chip having a mounting side facing the upper surface of the carrier board, a top side facing away from the upper surface, and sidewalls connecting the mounting side to the top side, wherein the electronic chip has equal to or less than 5 stud bumps per square millimeter of a base area of the mounting side, wherein the carrier board has at least one recess in the upper surface, and wherein at least one of the stud bumps reaches into the recess.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: September 13, 2022
    Assignee: TDK Corporation
    Inventor: Wolfgang Pahl
  • Patent number: 11437403
    Abstract: Provided is a storage device according to an embodiment including: a stacked body including gate electrode layers stacked in a first direction; a semiconductor layer provided in the stacked body and extending in the first direction; and a gate insulating film provided between the semiconductor layer and the gate electrode layer, the gate insulating film having a first region disposed between the gate electrode layer and the semiconductor layer and a second region disposed between the two first regions adjacent to each other in the first direction, the gate insulating film containing a hafnium oxide, in which a first thickness of the first region in the second direction from the semiconductor layer toward the gate electrode layer is smaller than a second thickness of the second region in the second direction.
    Type: Grant
    Filed: June 16, 2020
    Date of Patent: September 6, 2022
    Assignee: Kioxia Corporation
    Inventors: Keiko Sakuma, Akio Kaneko, Hidenori Miyagawa, Yuuichi Kamimuta
  • Patent number: 11430901
    Abstract: Embodiments of the invention describe apparatuses, optical systems, and methods related to utilizing optical cladding layers. According to one embodiment, a hybrid optical device includes a silicon semiconductor layer and a III-V semiconductor layer having an overlapping region, wherein a majority of a field of an optical mode in the overlapping region is to be contained in the III-V semiconductor layer. A cladding region between the silicon semiconductor layer and the III-V semiconductor layer has a spatial property to substantially confine the optical mode to the III-V semiconductor layer and enable heat dissipation through the silicon semiconductor layer.
    Type: Grant
    Filed: October 7, 2020
    Date of Patent: August 30, 2022
    Assignee: OpenLight Photonics, Inc.
    Inventors: Erik Johan Norberg, Anand Ramaswamy, Brian Robert Koch
  • Patent number: 11417743
    Abstract: A semiconductor device of the present invention includes a semiconductor layer of a first conductivity type having a cell portion and an outer peripheral portion disposed around the cell portion, and a surface insulating film disposed in a manner extending across the cell portion and the outer peripheral portion, and in the cell portion, formed to be thinner than a part in the outer peripheral portion.
    Type: Grant
    Filed: August 25, 2020
    Date of Patent: August 16, 2022
    Assignee: ROHM CO., LTD.
    Inventors: Yuki Nakano, Ryota Nakamura
  • Patent number: 11410935
    Abstract: A semiconductor package includes a cavity substrate, a semiconductor die, and an encapsulant. The cavity substrate includes a redistribution structure and a cavity layer on an upper surface of the redistribution structure. The redistribution structure includes pads on the upper surface, a lower surface, and sidewalls adjacent the upper surface and the lower surface. The cavity layer includes an upper surface, a lower surface, sidewalls adjacent the upper surface and the lower surface, and a cavity that exposes pads of the redistribution structure. The semiconductor die is positioned in the cavity. The semiconductor die includes a first surface, a second surface, sidewalls adjacent the first surface and the second surface, and attachment structures that are operatively coupled to the exposed pads. The encapsulant encapsulates the semiconductor die in the cavity and covers sidewalls of the redistribution structure.
    Type: Grant
    Filed: June 2, 2020
    Date of Patent: August 9, 2022
    Assignee: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE. LTD.
    Inventors: Young Do Kweon, JeongByung Chae, DongJoo Park, ByoungWoo Cho, SeHwan Hong
  • Patent number: 11410991
    Abstract: Some embodiments relate to an integrated circuit. The integrated circuit includes a ring-shaped drain region having an inner edge and an outer edge. A channel region surrounds the ring-shaped drain region. A source region surrounds the channel region. The channel region separates the drain region from the source region. A gate electrode is arranged over the channel region and is separated from the channel region by a gate dielectric. An inner edge of the gate electrode is proximate to the drain region. A resistor structure is arranged over and spaced apart from an upper surface of the substrate. The resistor structure has a first end and a second end which are connected by a curved or polygonal path of resistive material. The first end is coupled to the ring-shaped drain. The resistor has an outer perimeter that is surrounded by the inner edge of the ring-shaped drain region.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: August 9, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ker Hsiao Huo, Fu-Chih Yang, Chun Lin Tsai, Yi-Min Chen, Chih-Yuan Chan
  • Patent number: 11411109
    Abstract: An integrated circuit structure includes a gate stack over a semiconductor substrate, and an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack. A first silicon germanium region is disposed in the opening, wherein the first silicon germanium region has a first germanium percentage. A second silicon germanium region is over the first silicon germanium region. The second silicon germanium region comprises a portion in the opening. The second silicon germanium region has a second germanium percentage greater than the first germanium percentage. A silicon cap substantially free from germanium is over the second silicon germanium region.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: August 9, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsueh-Chang Sung, Kun-Mu Li, Tze-Liang Lee, Chii-Horng Li, Tsz-Mei Kwok
  • Patent number: 11404091
    Abstract: Routing arrangements for 3D memory arrays and methods of forming the same are disclosed. In an embodiment, a memory array includes a ferroelectric (FE) material contacting a first word line; an oxide semiconductor (OS) layer contacting a source line and a bit line, the FE material being disposed between the OS layer and the first word line; a dielectric material contacting the FE material, the FE material being between the dielectric material and the first word line; an inter-metal dielectric (IMD) over the first word line; a first contact extending through the IMD to the first word line, the first contact being electrically coupled to the first word line; a second contact extending through the dielectric material and the FE material; and a first conductive line electrically coupling the first contact to the second contact.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: August 2, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Meng-Han Lin, Chenchen Jacob Wang, Yi-Ching Liu, Han-Jong Chia, Sai-Hooi Yeong, Yu-Ming Lin, Yih Wang
  • Patent number: 11398568
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to ferroelectric based transistors and methods of manufacture. The ferroelectric based transistor includes: a semiconductor-on-insulator substrate including a semiconductor material, a buried insulator layer under the semiconductor material and a substrate material under the semiconductor channel material; a ferroelectric capacitor under the buried insulator layer and which includes a bottom electrode, a top electrode and a ferroelectric material between the bottom electrode and the top electrode; a gate stack over the semiconductor material; a first terminal contact connecting to the bottom electrode of the ferroelectric capacitor; and a second terminal contact connecting to the top electrode of the ferroelectric capacitor.
    Type: Grant
    Filed: June 17, 2020
    Date of Patent: July 26, 2022
    Assignee: GLOBALFOUNDRIES DRESDEN MODULE ONE LIMITED LIABILITY COMPANY & CO. KG
    Inventors: Patrick Polakowski, Konrad Seidel, Tarek Ali
  • Patent number: 11398583
    Abstract: A light-emitting device, includes a substrate structure, including a base portion having a surface and a plurality of protrusions regularly formed on the base portion; a buffer layer covering the plurality of protrusions and the surface; and III-V compound semiconductor layers formed on the buffer layer; wherein one of the plurality of protrusions includes a first portion and a second portion formed on the first portion and the first portion is integrated with the base portion; and wherein the base portion includes a first material and the first portion includes the first material.
    Type: Grant
    Filed: September 2, 2020
    Date of Patent: July 26, 2022
    Assignee: EPISTAR CORPORATION
    Inventors: Peng Ren Chen, Yu-Shan Chiu, Wen-Hsiang Lin, Shih-Wei Wang, Chen Ou
  • Patent number: 11398608
    Abstract: Provided is a method for manufacturing a display device. The method includes forming a display unit including a bending area on a first surface of a mother substrate, aligning a mask in which a mask opening is defined on a second surface of the mother substrate, plasma treating the second surface of the mother substrate, removing the mask and attaching a protective film to the second surface of the mother substrate, and removing a portion of the protective film to form a film opening corresponding to the bending area. The mask opening corresponds to the bending area.
    Type: Grant
    Filed: March 4, 2020
    Date of Patent: July 26, 2022
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Sungjune Park, ByeongKyu Park
  • Patent number: 11393832
    Abstract: According to various aspects, a memory cell arrangement includes: a first control line and a second control line; a plurality of memory structures disposed between the first control line and the second control line, wherein each memory structure of the plurality of memory structures comprises a third control line, a first memory cell and a second memory cell; wherein, for each memory structure of the plurality of memory structures, the first memory cell and the second memory cell are coupled to each other by the third control line; wherein, for each memory structure of the plurality of memory structures, the first memory cell is coupled to the first control line and the second memory cell is coupled to the second control line.
    Type: Grant
    Filed: July 15, 2020
    Date of Patent: July 19, 2022
    Assignee: FERROELECTRIC MEMORY GMBH
    Inventor: Menno Mennenga
  • Patent number: 11393848
    Abstract: A semiconductor device includes a stacked structure including conductive layers and insulating layers stacked alternately with each other, a channel layer passing through the stacked structure, a ferroelectric layer surrounding a sidewall of the channel layer, a first dielectric layer surrounding a sidewall of the ferroelectric layer, and sacrificial patterns interposed between the first dielectric layer and the insulating layers and including a material with a higher dielectric constant than the first dielectric layer.
    Type: Grant
    Filed: January 18, 2021
    Date of Patent: July 19, 2022
    Assignee: SK hynix Inc.
    Inventors: Kun Young Lee, Changhan Kim, Sung Hyun Yoon
  • Patent number: 11362108
    Abstract: The present disclosure provides a semiconductor structure, including: a first layer including a logic device; and a second layer over the first layer, including a first type memory device, a though silicon via (TSV) electrically connecting the logic device and the first type memory device. A method of forming semiconductor structure is also disclosed.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: June 14, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Bo-Feng Young, Han-Jong Chia, Sai-Hooi Yeong, Yu-Ming Lin, Chung-Te Lin
  • Patent number: 11362653
    Abstract: According to one embodiment, a semiconductor device includes a semiconductor member, a gate electrode, a source electrode, a drain electrode, a conductive member, a gate terminal, and a first circuit. The semiconductor member includes a first semiconductor layer including a first partial region and including Alx1Ga1?x1N (0?x1?1), and a second semiconductor layer including Alx2Ga1?x2N (0<x2?1 and x1<x2). The first partial region is between the gate electrode and at least a portion of the conductive member in a first direction. The gate terminal is electrically connected to the gate electrode. The first circuit is configured to apply a first voltage to the conductive member based on a gate voltage applied to the gate terminal. The first voltage has a reverse polarity of a polarity of the gate voltage.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: June 14, 2022
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Masahiko Kuraguchi, Yosuke Kajiwara, Kentaro Ikeda
  • Patent number: 11362107
    Abstract: A nonvolatile memory device according to an embodiment includes a substrate having an upper surface, a source electrode structure disposed on the substrate, and a channel structure disposed over the substrate and disposed to contact one sidewall surface of the source electrode structure. In addition, the nonvolatile memory device includes a drain electrode structure disposed to contact one sidewall surface of the channel structure over the substrate. In addition, the nonvolatile memory device includes a plurality of ferroelectric structures extending in a first direction perpendicular to the substrate in the channel structure and disposed to be spaced apart from each other along the second direction perpendicular to the first direction. In addition, the nonvolatile memory device includes a gate electrode structure disposed in each of the plurality of ferroelectric structure to extend along the first direction.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: June 14, 2022
    Assignee: SK hynix Inc.
    Inventors: Jae Hyun Han, Se Ho Lee, Hyangkeun Yoo, Jae Gil Lee