Abstract: An optical shape sensing system employing an elongated device, an optical fiber embedded within the elongated device with the optical fiber, an optical interrogation console and a 3D shape reconstructor. In operation, the optical interrogation console generates reflection spectrum data indicative of a measurement of both an amplitude and a phase of a reflection for each core of the optical fiber as a function of wavelength. The 3D shape reconstructor executes a generation of local strain data for a plurality of positions along the optical fiber responsive to the reflection spectrum data, a generation of local curvature and torsion angle data as a function of each local strain along the fiber, and a reconstruction of the 3D shape of the optical fiber as a function of each local curvature and torsion angle along the optical fiber.

Abstract: A method of determining an absorption or turbidity coefficient of a liquid involves storing a set of data describing a plurality of droplets or other discrete bodies of liquid of different shapes, sizes and absorption or turbidity coefficients. Each body is captured as a combination of a measurable transmission parameter obtained by modelling the interaction of light with a drop, and of one or more dimensional measurements selected from lengths, areas and volumes. The absorption or turbidity coefficient is indicated also. By measuring the transmission of light through a real body of liquid, and making measurements allowing the droplet to be specified, the absorption or turbidity coefficient associated with a droplet giving rise to the same behaviour in transmitting light can be identified from the data set.

Abstract: Detection system comprising an examination region, a one-piece optical element including a focusing portion to concentrate light received from the examination region and a guiding portion to homogenize light received from the focusing portion, and a detector configured to detect homogenized light received from the guiding portion.

Abstract: The present disclosure describes a device for measuring an optical absorption property of a fluid as function of wavelength. The device comprises a broadband light source for emitting light, a plurality of integrated optical waveguides for guiding this light and a light coupler for coupling the emitted light into the integrated optical waveguides such that the light coupled into each integrated optical waveguide has substantially the same spectral distribution. The device also comprises a microfluidic channel for containing the fluid, arranged such as to allow an interaction of the light propagating through each waveguide with the fluid in the microfluidic channel, and a plurality of spectral analysis devices optically coupled to corresponding waveguides—such as to receive the light after interaction with the fluid. The spectral analysis devices are adapted for generating a signal representative of a plurality of spectral components of the light.

Abstract: An apparatus to provide a label-free or native particle analysis comprises a light generating system producing first light pulses at a first wavelength and second light pulses at a second wavelength; and a flow cell coupled to the light generating system to convey particles for analysis. The light generating system is configured to chirp at least one of the first light pulses and the second light pulses to analyze the particles.

Abstract: An optical device and a method for detecting a flaw of a transparent substrate. A first detection unit is configured to detect the substrate at a predetermined low resolution, where the first detection unit includes a first photosensitive element and a first lens between the substrate and the first photosensitive element, and the first photosensitive element and the first lens are disposed such that an object plane is inclined relative to the substrate; a second detection unit configured to detect the substrate at a predetermined high resolution, where the second detection unit includes a second photosensitive element and a second lens between the substrate and the second photosensitive element; and a processor configured to determine a portion of the flaws detected by the first detection unit as flaws to be detected by the second detection unit, and to determine a type of flaw for the substrate imaged.

Abstract: There is provided a position detection system for use in a processing apparatus including a mounting table configured to mount thereon a disc-shaped target object and a focus ring surrounding a periphery of the mounting table. The system includes a light source configured to generate measurement light, three or more optical elements configured to emit the measurement light as emission light and receive reflected light, a driving unit configured to move each of the optical elements such that a scanning range from the focus ring to the target object is scanned, and a control unit configured to obtain positional relation between the focus ring and the target object based on the reflected light in the scanning range of each of the optical elements.

Abstract: A surface inspection apparatus (1) has a stage (5) for supporting a wafer (10) on which predetermined patterns have been formed by exposure using an exposure device (100); an illumination system (20) for irradiating an illuminating light on the surface of the wafer (10) supported by the stage (5); an imaging device (35) for detecting light from the surface of the wafer (10) on which illuminating light has been irradiated, and outputting a detection signal; and an image processing unit (40) for determining the focus state during exposure, on the basis of the detection signal sent from the imaging device (35).

Abstract: Use of high throughput methods to analyze samples for toxic elements originating from industrial hygiene and environmental sampling are described. These methods utilize optical detection methods using plates with arrays and microwells. Methods to fabricate samples in such plates are described. The invention is particularly illustrated by demonstrating its applicability for analysis of beryllium by fluorescence and uranium by phosphorescence. This invention also discloses the use of improved filtration method and use of reagents with low background signals.

Abstract: A mounting plate and an optical inspection apparatus are disclosed. The mounting plate includes: a base plate; at least two first bars disposed above the base plate and extending in a first direction; and at least two second bars extending in a second direction. Each second bar being configured to be slidable in the first direction relative to the at least two first bars. The mounting plate may further comprises a third bar extending in the first direction and disposed between two adjacent first bars, the third bar being configured to be slidable in the second direction relative to the at least two second bars.

Abstract: [Object] To provide a shape measurement apparatus that, in measuring the unevenness shape of a measurement object by a light-section method, enables the shape of the measurement object to be measured precisely even when the distance between the measurement object and an image capturing apparatus fluctuates.

Abstract: A flow cell includes holding members for holding two ends of a capillary. A refractive index of holding members is 1.31 or less or 1.40 or greater at least in portions through which the holding members make contact with an outer surface of the capillary. A numerical aperture of light for measurement that enters from a light source into the capillary is 0.22 or less so that reflectance of portions through which the holding members make contact with the capillary is constant even when sample liquid that flows through the capillary is converted to water and acetonitrile.

Abstract: A calibration suspension unit has a container made of a flexible material that is filled with a calibration suspension for the calibration of a turbidity meter. There exists no air supernatant above the calibration suspension in the container. Further, a method for the manufacture of a calibration suspension unit is provided and its use for the calibration of a turbidity meter is described.

Abstract: The invention relates to a method and apparatus for reducing speckle noise in a system comprising a sensor for detecting electro-magnetic radiation backscattered from a target, comprising: illuminating the target with a first illuminating beam having a first optical path; illuminating the target with a second illuminating beam having a second optical path different to the first optical path; capturing at the sensor first and second backscattered radiation components associated with respectively the first and second illuminating beams, each of the backscattered radiation components comprising a speckle pattern; and taking a time-averaged measurement of the intensities of the first and second backscattered radiation components; wherein the capturing step is carried out within an integration time ? of the sensor, such that the time-averaged intensity measurement results in a decrease in speckle noise present in a signal representing the backscattered radiation.

Abstract: A method for target measurement is provided which comprises designing a reflection-symmetric target and measuring overlays of the target along at least one reflection symmetry direction of the target. Also, a tool calibration method comprising calibrating a scatterometry measurement tool with respect to a reflection symmetry of a reflection symmetric target. Further provided are methods of measuring scatterometry overlay using first order and zeroth order scatterometry measurements of a reflection-symmetric scatterometry targets. Also, a scatterometry target comprising a reflection-symmetric target having two cells in each of at least two measurement directions, wherein respective cells have different offsets along one measurement direction and similar offsets along other measurement directions. Further, a scatterometry measurement system comprising a reflection symmetric illumination and calibrated to measure reflection symmetric targets.

Abstract: A method for scanning a microarray, including (a) providing a microarray to an optical scanner, wherein the microarray includes a surface having features having different target molecules; (b) scanning the surface in the x or y direction to acquire optical signals from the features at sequential regions of the surface, wherein the focus setting between the optical scanner and the surface is dynamically controlled in real time by repeatedly (i) adding a predetermined focal offset, thereby introducing an error in the focus setting, and (ii) adjusting the focus setting to reduce the error in the focus setting, thereby acquiring the optical signals from different regions at different degrees of focus such that a subset of the regions that are scanned have an introduced focus error; and (c) analyzing the optical signals that are obtained at the different degrees of focus to identify the different target molecules.

Abstract: A test unit having a light source (e.g., a laser) for illuminating an aerosol sample directed into a test chamber and a removable insert for the test unit. The test unit includes at least one detector for detecting the effect of the aerosol sample on light, i.e., the detector detects at least one property of light after the light has illuminated the aerosol sample. The removable insert may take a number of different forms. For example, the removable insert can form at least a portion of an unsealed or sealed test chamber when installed in an operating position. Further, the removable insert may include a removable support and at least one film or collection substance connected or applied to the removable support. The at least one film could be a filter or a non-filter. The filter could be a polarization filter (i.e., horizontal or vertical) or a fluorescence filter.

Abstract: A vehicle part inspection device is configured to inspect an inspection object secured on a jig frame by a securing unit, and may include: i) a sensing unit which is pivotably installed on a mount frame, moves in multi-axis directions along the jig frame, and senses an inspection portion of the inspection object; and ii) angle changing units which are installed to be radially connected with the sensing unit, and change a sensing angle of the sensing unit by applying forward and rearward operating force to the sensing unit.

Abstract: To provide a crystal orientation mark which can be formed easily and inexpensively, and which enables to perform high precision alignment and allows information other than crystal orientation to be included, even for a small diameter process substrate. A crystal orientation mark is drawn on the surface of the process substrate. The crystal orientation mark includes a marking region for crystal orientation detection, and a marking region for information. The marking region for crystal orientation detection is provided at two locations in an outer edge portion of the process substrate to be used for the alignment of the process substrate. The marking region for information is provided on a straight-line region connecting the marking regions for crystal orientation detection at the two locations, and includes a pattern for demonstrating predetermined information relating to the process substrate.

Abstract: The invention relates to a system for determining the position of a test object comprising the following features: an autocollimation telescope having a beam source for emitting a beam; a beam splitter; a detector unit and an objective lens; and an optical element embodied as a focusing device, wherein the test object, the beam source and the focusing device are arranged along a common optical axis (z), and a control device for controlling the focusing device, which is designed in such a way that the beam can be focused onto a center of curvature of a first test surface of the test object with the coordinates (x1, y1) and at least onto a center of curvature of a second test surface of the test object with coordinates (x2, y2).