Abstract: A three-dimensional measurement apparatus using multiple striped patterns and a method thereof is disclosed to take a three-dimensional measurement by projecting and transporting the multiple striped patterns having a plurality of stripes, not a single striped pattern that is projected once to the entire area of an object, according to a striped pattern shape, thereby making a faster and more precise three-dimensional measurement, cutting down the entire size, weight and manufacturing cost of the relevant three-dimensional measurement apparatus and, at the same time, reducing measurement time.

Abstract: A turn controllable inspection table which have a step between a portion where mount sections on which respective objects being inspected are mounted are formed along a circumference and an inside portion thereof, so that light from a light source illuminating a side face portion of each object being inspected is allowed to be incident on at least a side face region including a bottom portion of a side face of each object being inspected in a direction perpendicular to the side face region is provided. Further, clamps for fixing the respective objects being inspected onto the mount sections by pressing a head portion of each object being inspected with a top board made of a transparent member, so that inspection is possible across an entire region from all directions including directions from above and sideways of each object being inspected are provided.

Abstract: A personal identification system, which uses a vein pattern of a finger, optimizes the amount of light of a light source based on a captured finger image and emphasizes the vein pattern during image processing for identification.

Abstract: An apparatus and method for quantitatively measuring ripple and distortion levels in a transparent sheet (or film) material is provided. The apparatus includes a light source for projecting light beams onto a screen. A frame assembly is positioned intermediate to the light source and is adapted to hold the transparent sheet material at a predetermined angle and distance from the screen. The light beams pass though the transparent sheet material and projects an image onto the screen. The process includes digitally capturing the image and generating parameter signals from the digital image. The parameter signals are used in a model to quantitatively assign a value to the level of ripple and distortion present in the transparent sheet material.

Abstract: There are provided a measuring head moved along a guide rail, first position detection means for detecting the positions of the measuring head on the guide rail using a predetermined position on the guide rail as a reference position, second position detection means for detecting the position in a world coordinate system of the measuring head on the guide rail, and means for storing in a storage device each of the positions of the measuring head on the guide rail using the predetermined position on the guide rail as the reference position and a corresponding position in the world coordinate system with the positions correlated with each other.

Abstract: An emissivity probe for measuring reflected energy from interior wall surfaces of large scale boilers. The emissivity probe uses a pair of light guides which respectively receive light energy from the interior of the boiler and that reflected off a wall surface. Using appropriate photo detectors sensitive to a desired light wavelength range, a ratio of the reflected and incident radiation is provided. This provides a measure of the reflectivity of the wall surface. The reflectivity values are used to control boiler cleaning systems.

Abstract: A pattern inspection apparatus includes a pulse laser light source sequentially generating pulse laser light, an illumination optics applying the pulse laser light onto a mask substrate, an imaging optics collecting light from the mask substrate to form an image thereof, an area sensor sensing the image of the mask substrate obtained by the optics in a rectangular area unit, a comparator comparing image data acquired by the area sensor with previously prepared reference data to detect a defect of a pattern, a stage driving apparatus two-dimensionally scanning a stage having the mask substrate placed thereon, and a stage position detector detecting a position of the stage. With the above configuration, it is possible to efficiently inspect the surface of the mask substrate by adequately setting the moving speed of the mask substrate and the sensing timing of the sensing apparatus.

Abstract: An apparatus measures a property of a layer (such as the sheet resistance of a conductive layer or thermal conductivity of a dielectric layer that is located underneath the conductive layer) by performing the following method: (1) focusing the heating beam on the heated a region (also called “heated region”) of the conductive layer (2) modulating the power of the heating beam at a predetermined frequency that is selected to be sufficiently low to ensure that at least a majority (preferably all) of the generated heat transfers out of the heated region by diffusion, and (3) measuring the power of another beam that is (a) reflected by the heated region, and (b) modulated in phase with modulation of the heating beam. The measurement in act (3) can be used directly as a measure of the resistance (per unit length) of a conductive line formed by patterning the conductive layer.

Abstract: System for analyzing sample liquids by evaluating test elements with an analytical unit (20) in which a test element (10) to be analyzed is positioned by a holder (21, 22, 120, 140) in an analytical position relative to the analytical unit and the system additionally comprises a position control unit to check whether an analytical area of the test element is correctly positioned relative to the analytical unit wherein the position control unit comprises a light source (30, 2) to irradiate an area of the test element and preferably the analytical area (11), a detector (31, 131) to detect light reflected from the area and an evaluation unit, and the light source and detector are positioned relative to one another in such a manner that the light intensity of specularly reflected radiation at the detector when the test element is correctly positioned is different from a light intensity when it is incorrectly positioned and the evaluation unit recognizes any faulty positioning on the basis of the light intensity a

Abstract: A semiconductor wafer inspection apparatus is provided with a rotatable table on which a semiconductor wafer is held by suction, an illuminating device which illuminates at least an edge portion of the semiconductor wafer held on the rotatable table, an imaging device which captures an image of the edge portion of the semiconductor wafer when the edge portion is illuminated by the illuminating device, an image processing device which detects at least an edge cut amount or a crack by acquiring the image of the edge portion which is captured by the imaging device, and a display section which displays an image of the edge portion subjected to image processing by the image processing device.

Abstract: The invention relates to a device and a method for the quantitative gas analysis in which the gas analysis of a sample atmosphere is implemented by means of a sensor device, a diffusion seal being produced between the sample atmosphere contained in a sample system and a measuring chamber and the gas analysis of the sample atmosphere which is diffused into the measuring chamber being implemented with the sensor device, the sensor head (5) being able to be coupled to the measuring adapter (4) and the radiation source (16) and the detector device (17) being fixed to the measuring chamber (9) in a defined orientation and the measuring radiation (24) emitted from the radiation source (16) traversing at least once through the measuring chamber (9) and being detected by the detector device (17) after leaving the measuring chamber (9).

Abstract: A measuring light of specific wavelength, which is selectively absorbed by fuel, is transmitted through a measuring passage in a combustion chamber of an engine, to be received by a light receiving element, and intensity of the measuring light of specific wavelength received by the light receiving element is detected.

Abstract: A system for material excitation in microfluidic devices is described. Aspects of the invention resemble a submerged periscope when in use. They allow for light to be redirected along a more advantageous trajectory as does the maritime device. A prism with a reflecting surface may be used to direct a laser beam along one or more microfluidic trenches or channels. Alternatively, a reflecting surface may be provided in connection with a simple support. Directing a beam along multiple paths is preferably accomplished by scanning a single laser across or around the reflecting surface provided. Provision may be made for at least a portion of the submersible used to function as an electrode to assist in electrokinetically driving fluids and/or ions within the microfluidic device.

Abstract: The inventive method and apparatus for detecting defects of a microscopic circuit pattern by imaging the pattern at high resolution comprises an objective lens for imaging the subject pattern, a laser illumination means for illuminating the pupil of the objective lens, means of diminishing the coherency of the laser illumination, an accumulative detector, and means of processing the signal detected by the detector. The method and apparatus are capable of imaging the subject pattern at high sensitivity and high speed based on the illumination by a short wavelength, which is indispensable for the enhancement of resolution, particularly based on a laser light source which is advantageous for practicing, with a resulting image being the same or better in quality as compared with an image resulting from the ordinary discharge tube illumination, whereby it is possible to detect microscopic defects at high sensitivity.

Abstract: Railroad beds require regrading in order to permit for an increased axial load. There are often cables or tubes embedded in the roadbed at the roadbed sides, making regrading difficult. In accordance with the present invention, material is moved by suction to form pits at each side of the track at intervals along the railroad bed, and a laser camera is used to obtain information relating to the profile adjacent to the pits and the positions of the embedded cables or tubes. This information is saved, and used to control a device for mechanically excavating material from the railroad bed sides without damaging the embedded cables or tubes and grading the railroad bed. A laser measuring device is provided for reading the railroad bed profile.

Abstract: The present invention provides a method and system for controlling mineral scale deposition from a formation fluid. The rate at which scaling is occurring is measured in real time using an attenuated total reflectance probe and a photometer. The results are then used to determine whether to increase, decrease or leave unchanged addition of anti-scaling additives.

Abstract: An improved turbidity sensor is provided with a pair of spaced apart arms respectively housing a light transmitter and a light receiver, with the receiver adapted to sense the light from the transmitter and generate a corresponding output signal. The opposing surfaces of the arms adjacent the transmitter and receiver are flame treated for approximately one second each so as to raise the surface energy such that bubble-induced noise is reduced or eliminated for a more accurate output signal.

Abstract: An apparatus and method for determining a physical parameter of features on a substrate by illuminating the substrate with an incident light covering an incident wavelength range ??, e.g., from 190 nm to 1000 nm, where the substrate is at least semi-transparent. A response light received from the substrate and the feature is measured to obtain a response spectrum of the response light. Further, a complex-valued response due to the feature and the substrate is computed and both the response spectrum and the complex-valued response are used in determining the physical parameter. The response light is reflected light, transmitted light or a combination of the two. The complex-valued response typically includes a complex reflectance amplitude, a complex transmittance amplitude or both. The apparatus and method take into account the effects of vertical and lateral coherence length and are well suited for examining adjacent features.

Abstract: An optical reflection sensor emits light and its reflection from a target object is received. A signal processor carries out a measurement on the received reflected light such as the distance to the target object each time the reflected light is received. Repeatability of measured values is calculated and displayed on a display device incorporated into the housing of the sensor. The display device may have two display areas such that the calculated repeatability and the measured value can be displayed simultaneously. The calculated repeatability may be compared with a specified threshold value, with the result of the comparison displayed. The housing may also incorporate an input device through which a required level of accuracy may be set.

Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.