Patents Examined by Shamim Ahmed
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Patent number: 11886122Abstract: A method comprising providing a carbonaceous material, the substrate having a first thermal conductivity. The method further comprises depositing a first masking layer having a second thermal conductivity on at least a portion of the substrate, a ratio of the second thermal conductivity to the first thermal conductivity being less than or equal to 1:30. The method further comprises depositing a second masking layer on the first masking layer to form an etch mask, and etching an exposed portion of the substrate.Type: GrantFiled: June 24, 2021Date of Patent: January 30, 2024Assignees: FRAUNHOFER USA, INC., THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORKInventors: Jung-Hun Seo, Yixiong Zheng, Matthias Muehle
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Patent number: 11885013Abstract: Methods and systems for depositing vanadium nitride layers onto a surface of the substrate and structures and devices formed using the methods are disclosed. An exemplary method includes using a cyclical deposition process, depositing a vanadium nitride layer onto a surface of the substrate. The cyclical deposition process can include providing a vanadium halide precursor to the reaction chamber and separately providing a nitrogen reactant to the reaction chamber. The cyclical deposition process may desirably be a thermal cyclical deposition process.Type: GrantFiled: December 7, 2020Date of Patent: January 30, 2024Assignee: ASM IP Holding B.V.Inventors: Giuseppe Alessio Verni, Qi Xie, Henri Jussila, Charles Dezelah, Jiyeon Kim, Eric James Shero, Paul Ma
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Patent number: 11880165Abstract: Disclosed is a method including the following steps: a) providing a substrate including a first silicon layer, a second silicon layer and an intermediate silicon oxide layer therebetween; b) etching the first silicon layer in order to form the timepiece components therein; c) releasing from the substrate a wafer formed by at least all or part of the etched, first silicon layer and including the timepiece components; d) thermally oxidizing and then deoxidizing the timepiece components; e) forming by thermal oxidation or deposition a silicon oxide layer on the timepiece components; f) detaching the timepiece components from the wafer.Type: GrantFiled: March 19, 2019Date of Patent: January 23, 2024Assignee: PATEK PHILIPPE SA GENEVEInventor: Sylvain Jeanneret
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Patent number: 11881400Abstract: Provided is a silicon-containing layer forming composition for forming a silicon-containing layer which exhibits an anti-reflective function during exposure in a multilayer resist process and, during dry etching, shows a high etching rate against a plasma of fluorine-based gas and a low etching rate against a plasma of oxygen-based gas. The silicon-containing layer forming composition includes a polysiloxane compound having a structural unit of the formula: [(R1)bR2mSiOn/2] and a solvent. In the formula, R1 is a group represented by the following formula: (where a is an integer of 1 to 5; and a wavy line means that a line which the wavy line intersects is a bond); R2 is each independently a hydrogen atom, a C1-C3 alkyl group, a phenyl group, a hydroxy group, a C1-C3 alkoxy group or a C1-C3 fluoroalkyl group; b is an integer of 1 to 3; m is an integer of 0 to 2; n is an integer of 1 to 3; and a relationship of b+m+n=4 is satisfied.Type: GrantFiled: July 26, 2022Date of Patent: January 23, 2024Assignee: Central Glass Company, LimitedInventors: Junya Nakatsuji, Kazuhiro Yamanaka
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Patent number: 11879688Abstract: A window assembly heat transfer system is disclosed in which a window member has a selected transparency to monitored or sensed electromagnetic wavelengths. One or more passages are provided in the window member for flowing a single-phase or two-phase heat transfer fluid. A mechanism allows either evaporation or condensation of the fluid and/or balancing of a flow of the fluid within the passages. In one embodiment, the window assembly can be made by producing passages in a top surface of a first single plate, optionally producing passages in a bottom surface of a second single plate and bonding the top surface of the first plate to a bottom surface of a second single plate to form the window member with the passage or passages. In another embodiment, the window assembly can be made by providing a core around which the window member material is grown and thereafter removing the core to produce the passage or passages.Type: GrantFiled: August 25, 2022Date of Patent: January 23, 2024Assignee: Mainstream Engineering CorporationInventors: Brian P. Tucker, Joshua D. Sole, Justin J. Hill, Robert P. Scaringe
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Patent number: 11878489Abstract: A method for manufacturing a sandwich panel for a vehicle includes: etching a sheet, which etches one surface of a metal sheet; pressing the sheet, which forms a pattern of a specific shape on the one surface of the metal sheet; laminating a pair of the metal sheets; and performing injection-molding by injecting a plastic resin into the laminated pair of the metal sheets. The method may improve the bonding performance of the sandwich panel, thereby improving the degree of freedom of shape due to the press-molding.Type: GrantFiled: January 21, 2021Date of Patent: January 23, 2024Assignees: HYUNDAI MOTOR COMPANY, KIA MOTORS CORPORATION, IL KWANG POLYMER. CO., LTDInventors: Jae-Gi Sim, Hyo-Moon Joo, Yong-Wan Jo
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Patent number: 11878323Abstract: A powder-coating process of a brake caliper has in sequence the steps of: (a) preparing the brake caliper; (b) applying masking elements to at least one seat and/or duct of said brake caliper; (c) distributing the coating powder on at least one portion of said brake caliper; (d) removing the at least one masking element by automated de-masking means; (e) curing inside a curing oven.Type: GrantFiled: May 16, 2019Date of Patent: January 23, 2024Assignee: Brembo S.p.A.Inventors: Gianluigi Roncalli, Alessio Garghentini
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Patent number: 11878906Abstract: In an embodiment, an integrated MEMS transducer device includes a substrate body having a first electrode on a substrate, an etch stop layer located on a surface of the substrate, a suspended micro-electro-mechanical systems (MEMS) diaphragm with a second electrode, an anchor structure with anchors connecting the MEMS diaphragm to the substrate body and a sacrificial layer in between the anchors of the anchor structure, the sacrificial layer including a first sub-layer of a first material, wherein the first sub-layer is arranged on the etch stop layer, a second sub-layer of a second material, wherein the second sub-layer is arranged on the first sub-layer, and wherein the first and the second material are different materials.Type: GrantFiled: September 30, 2022Date of Patent: January 23, 2024Assignee: Sciosense B.V.Inventors: Kailash Vijayakumar, Remco Henricus Wilhelmus Pijnenburg, Willem Frederik Adrianus Besling, Sophie Guillemin, Jörg Siegert
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Patent number: 11875973Abstract: Methods for preparing a void-free protective coating are disclosed herein. The void-free protective coating is used on a dielectric window having a central hole, which is used in a plasma treatment tool. A first protective coating layer is applied to the window, leaving an uncoated annular retreat area around the central hole. The first protective coating layer is polished to produce a flat surface and fill in any voids on the window. A second protective coating layer is then applied upon the flat surface of the first protective coating layer to obtain the void-free coating. This increases process uptime and service lifetime of the dielectric window and the plasma treatment tool.Type: GrantFiled: February 8, 2022Date of Patent: January 16, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Tsung Chen, Tsung-Cheng Ho, Chien-Yu Wang, Yen-Shih Wang, Jiun-Rong Pai, Yeh-Chieh Wang
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Patent number: 11869774Abstract: A method for improving an etching rate of wet etching involves an etching reaction chamber used for etching work. The etching reaction chamber is connected with an etchant supply mechanism. The etchant supply mechanism is connected with a purified water supply mechanism. The purified water supply mechanism injects purified water into the etchant supply mechanism according to a change range of pH of the etchant in the etchant supply mechanism to ensure that a hydrogen ion concentration and a fluoride ion concentration of the etchant in the etchant supply mechanism are stable.Type: GrantFiled: August 17, 2021Date of Patent: January 9, 2024Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.Inventors: Nannan Zhang, Yen-Teng Huang
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Patent number: 11867931Abstract: Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to optical devices and methods of manufacturing optical devices having optical device structures with at least one of varying depths or refractive indices across the surface of a substrate. According to certain embodiments, an inkjet process is used to deposit a volumetrically variable optical device that is etched to form a diffractive optic element (DOE). Volumetrically variable can relate to the thickness of the optical device, or the relative volume of two or more diffractive materials deposited in combination. According to other embodiments, a single-profile DOE is deposited on a substrate and an inkjet process deposits a volumetrically variable organic material over the DOE. The DOE and organic material are etched to modify the profile of the structure, after which the organic material is removed, leaving the modified-profile DOE.Type: GrantFiled: September 23, 2021Date of Patent: January 9, 2024Assignee: Applied Materials, Inc.Inventors: Kang Luo, Xiaopei Deng, Daihua Zhang, Ludovic Godet
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Patent number: 11862430Abstract: According to one embodiment, a pattern formation method includes placing an imprint resist film on a substrate, then imprinting a pattern in the imprint resist film. The pattern has a first loop section in a first end portion and a second loop section in a second end portion. After the imprint resist film has been patterned, it is selectively irradiated between the first loop section and the second loop section. The imprint resist film is then etched under conditions leaving the selectively irradiated portion of the imprint resist film and removing the unirradiated portion of the imprint resist film.Type: GrantFiled: August 3, 2021Date of Patent: January 2, 2024Assignee: Kioxia CorporationInventor: Ryota Seki
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Patent number: 11859288Abstract: A corrosion-resistant member including: a metal base material (10); a corrosion-resistant coating (30) formed on the surface of the base material (10); and a buffer layer (20) formed between the base material (10) and the corrosion-resistant coating (30). The base material (10) contains a main element having the highest mass content ratio among elements contained in the base material (10) and a trace element having a mass content ratio of 1% by mass or less. The corrosion-resistant coating (30) contains at least one kind selected from magnesium fluoride, aluminum fluoride, and aluminum oxide. The buffer layer (20) contains an element of the same kind as the trace element, and the content ratio obtained by energy dispersive X-ray analysis of the element of the same kind as the trace element contained in the buffer layer (20) is 2% by mass or more and 99% by mass or less.Type: GrantFiled: September 3, 2020Date of Patent: January 2, 2024Assignee: Resonac CorporationInventors: So Miyaishi, Masahiro Okubo, Masayuki Yoshimura, Wataru Sakane, Teppei Tanaka, Saeko Nakamura, Saori Yamaki
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Patent number: 11862470Abstract: An object of the present invention is to provide a silica particle having excellent polishing characteristics and storage stability, a method for producing the silica particle, a silica sol containing the silica particles, and a polishing composition containing the silica sol. Another object of the present invention is to provide a polishing method, a method for producing a semiconductor wafer, and a method for producing a semiconductor device, which are excellent in productivity of an object to be polished. The silica particle in the present invention satisfies formula (1): y?4.2 where a d value measured by wide-angle X-ray scattering is y ?.Type: GrantFiled: August 13, 2021Date of Patent: January 2, 2024Assignee: Mitsubishi Chemical CorporationInventors: Tomohiro Kyotani, Eiji Dejima, Naoko Sumitani, Tomohiro Kato, Takeshi Sawai
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Patent number: 11851766Abstract: The chemical conversion treatment liquid according to the present invention, which is cobalt-free and is capable of forming a chemical conversion film having excellent corrosion resistance, contains a water-soluble trivalent chromium-containing substance, a water-soluble titanium-containing substance, and a water-soluble lactic acid-containing substance as essential components and may optionally contain a component at least a part of which is any of a water-soluble glycolic acid-containing substance and a water-soluble ineffective organic acid-containing substance. The water-soluble ineffective organic acid-containing substance is a water-soluble organic acid-containing substance based on an ineffective organic acid that is an organic acid other than lactic acid and other than glycolic acid.Type: GrantFiled: December 8, 2021Date of Patent: December 26, 2023Inventors: Tsukasa Niwa, Masayuki Ooguchi, Yoshiki Hiramatsu
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Patent number: 11852869Abstract: A method of fabricating a waveguide structure to form a solid-core waveguide from a waveguiding layer may include etching a fluid channel into the waveguiding layer, etching a first air-gap and a second air gap into the waveguiding layer, wherein etching the first and the second air-gaps creates a solid-core waveguide in the waveguiding layer between the first air-gap and the second air-gap. A method for fabricating a waveguide structure to form a solid-core waveguide may include forming a first trench, a second trench, and a third trench in a substrate layer, and depositing a waveguiding layer on the machined substrate layer, wherein depositing the waveguiding layer creates a hollow core of a fluid channel in a location corresponding to the first trench, and a solid-core waveguide portion in the waveguiding layer in a location corresponding to an area between the second trench and the third trench.Type: GrantFiled: October 21, 2022Date of Patent: December 26, 2023Assignee: Fluxus, Inc.Inventors: Frank Zaugg, Joshua Wayne Parks
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Patent number: 11848208Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first spacer over a substrate. The method includes partially removing the first spacer to form a gap dividing the first spacer into a first part and a second part. The method includes forming a filling layer covering a first top surface and a first sidewall of the first spacer. The filling layer and the first spacer together form a strip structure. The method includes forming a second spacer over a second sidewall of the strip structure. The method includes forming a third spacer over a third sidewall of the second spacer. The third spacer is narrower than the second spacer.Type: GrantFiled: August 9, 2022Date of Patent: December 19, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTDInventors: Chih-Ming Lai, Shih-Ming Chang, Wei-Liang Lin, Chin-Yuan Tseng, Ru-Gun Liu
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Patent number: 11846028Abstract: Disclosed herein are embodiments of a molybdate-based composition and a conversion coating obtained therefrom that can replace conventional and toxic chromate-based conversion coatings in a variety of applications and industries. The molybdate-based composition provides conversion coatings that exhibit anodic inhibition and rapid repassivation when applied to objects, such as metal-based objects, and do not contain hexavalent chromium. The molybdate-based composition and conversion coating can be used to reduce corrosion. Embodiments of methods of protecting objects, such as metal surfaces, with the molybdate-based conversion coating also are disclosed.Type: GrantFiled: December 7, 2018Date of Patent: December 19, 2023Assignee: Nevada Research & Innovation CorporationInventors: Dev Chidambaram, David Rodriguez
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Patent number: 11845105Abstract: A method for depositing a coating on a substrate is disclosed. A first precursor comprising fluoro-acrylate monomers, fluoro-alkyl acrylate monomers, fluoro-methacrylate monomers, fluoro-alkyl methacrylate monomers, fluoro-silane monomers, or a combination or derivates thereof is provided. A second precursor comprising linear siloxanes, silane monomers, cyclosiloxanes, cyclosilane monomers, or a combination or derivates thereof is provided. The first and second precursors are co-injected in a treatment region. An atmospheric or reduced pressure plasma discharge is created in said treatment region. The substrate coating comprises alternated multi-stacked nanostructures and is formed by copolymerization of the first and second precursors.Type: GrantFiled: August 23, 2018Date of Patent: December 19, 2023Assignee: MOLECULAR PLASMA GROUP SAInventors: Régis Heyberger, Gill Scheltjens
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Patent number: 11846020Abstract: A particle coating method includes a heating step of heating soft magnetic metal particles containing an amorphous phase within a temperature range of 100° C. or higher and 500° C. or lower for 0.1 hours or more and 300 hours or less, and an insulating film formation step of forming an insulating film at surfaces of the soft magnetic metal particles by a chemical vapor deposition method. The soft magnetic metal particles preferably contain the amorphous phase at 50 vol % or more.Type: GrantFiled: November 25, 2020Date of Patent: December 19, 2023Inventor: Momoko Wakabayashi