Patents Examined by Shouxiang Hu
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Patent number: 10964585Abstract: Disclosed are a semiconductor structure and a method for forming same.Type: GrantFiled: August 9, 2019Date of Patent: March 30, 2021Assignees: Semiconductor Manufacturing (Beijing) International Corporation, Semiconductor Manufacturing (Shanghai) International CorporationInventors: Zhang Tianhao, Wu Yichao
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Patent number: 10950641Abstract: An image sensor includes a semiconductor substrate including a plurality of photo-sensing devices, a photoelectric conversion device disposed on the semiconductor substrate and absorbing the mixed light of a first color and a second color, and a color filter disposed on one side of the photoelectric conversion device and configured to selectively transmit a mixed light including a third color, and an electronic device including the image sensor is provided.Type: GrantFiled: July 3, 2018Date of Patent: March 16, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Yong Wan Jin, Gae Hwang Lee, Seon-Jeong Lim, Sung Young Yun, Kwang Hee Lee
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Patent number: 10950778Abstract: Test structures and methods for superconducting bump bond electrical characterization are used to verify the superconductivity of bump bonds that electrically connect two superconducting integrated circuit chips fabricated using a flip-chip process, and can also ascertain the self-inductance of bump bond(s) between chips. The structures and methods leverage a behavioral property of superconducting DC SQUIDs to modulate a critical current upon injection of magnetic flux in the SQUID loop, which behavior is not present when the SQUID is not superconducting, by including bump bond(s) within the loop, which loop is split among chips. The sensitivity of the bump bond superconductivity verification is therefore effectively perfect, independent of any multi-milliohm noise floor that may exist in measurement equipment.Type: GrantFiled: January 7, 2019Date of Patent: March 16, 2021Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: Aurelius L. Graninger, Joel D. Strand, Micah John Atman Stoutimore, Zachary Kyle Keane, Jeffrey David Hartman, Justin C. Hackley
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Patent number: 10943868Abstract: A semiconductor structure includes a first low-k dielectric layer disposed over a semiconductor substrate, a first conductive feature and a second conductive feature disposed in the first low-k dielectric layer, a second low-k dielectric layer disposed in the first low-k dielectric layer and interposed between the first conductive feature and the second conductive feature, where the second low-k dielectric layer includes an air gap, and an etch-stop layer disposed at an interface between the first low-k dielectric layer and the second low-k dielectric layer. The first low-k dielectric layer includes carbon whose concentration is graded in a direction away from the etch-stop layer.Type: GrantFiled: April 20, 2020Date of Patent: March 9, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Hsiang-Wei Lin
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Patent number: 10943843Abstract: A semiconductor package structure includes a conductive trace layer, a semiconductor die over the conductive trace layer, a structure enhancement layer surrounding the semiconductor die, and an encapsulant covering the semiconductor die and the structure enhancement layer. The structure enhancement layer coincides with a mass center plane of the semiconductor package structure. The mass center plane is parallel to a top surface of the semiconductor die. A method for manufacturing the semiconductor package structure is also provided.Type: GrantFiled: January 7, 2019Date of Patent: March 9, 2021Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.Inventors: Hsiu-Chi Liu, Hsu-Nan Fang
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Patent number: 10937762Abstract: A multi-chip package comprising: an interconnection substrate comprising an interconnection bridge embedded in the interconnection substrate, and an interconnection scheme comprising a first interconnection metal layer, a second interconnection metal layer over the first interconnection layer and the interconnection bridge, and a polymer layer between the first and second interconnection metal layers, wherein the interconnection bridge is embedded in the interconnection scheme and has sidewalls surrounded by the polymer layer; a semiconductor IC chip over the interconnection substrate and across over an edge of the interconnection bridge; a memory chip over the interconnection substrate and across over an edge of the interconnection bridge, wherein the interconnection bridge comprises a plurality of metal interconnects configured for a data bus coupling the semiconductor IC chip to the memory chip, wherein a bitwidth of the data bus between the semiconductor IC chip and the memory chip is greater than or equaType: GrantFiled: October 2, 2019Date of Patent: March 2, 2021Assignee: iCometrue Company Ltd.Inventors: Mou-Shiung Lin, Jin-Yuan Lee
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Patent number: 10930498Abstract: The current disclosure describes techniques for forming a low resistance junction between a source/drain region and a nanowire channel region in a gate-all-around FET device. A semiconductor structure includes a substrate, multiple separate semiconductor nanowire strips vertically stacked over the substrate, a semiconductor epitaxy region adjacent to and laterally contacting each of the multiple separate semiconductor nanowire strips, a gate structure at least partially over the multiple separate semiconductor nanowire strips, and a dielectric structure laterally positioned between the semiconductor epitaxy region and the gate structure. The first dielectric structure has a hat-shaped profile.Type: GrantFiled: October 10, 2019Date of Patent: February 23, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tzu-Chung Wang, Chao-Ching Cheng, Tzu-Chiang Chen, Tung Ying Lee
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Patent number: 10923577Abstract: The present disclosure relates to semiconductor structures and, more particularly, to cavity structures under shallow trench isolation regions and methods of manufacture. The structure includes: one or more cavity structures provided in a substrate material and sealed with an epitaxial material; and a shallow trench isolation region directly above the one or more cavity structures in the substrate material.Type: GrantFiled: January 7, 2019Date of Patent: February 16, 2021Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Johnatan A. Kantarovsky, Siva P. Adusumilli, Vibhor Jain
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Patent number: 10916578Abstract: A semiconductor apparatus in which are bonded a semiconductor substrate, in which a semiconductor element is arranged, and a supporting substrate is provided. A bonding layer for bonding the semiconductor substrate and the supporting substrate is arranged between the supporting substrate and a front side of the semiconductor substrate on the side of the supporting substrate. The bonding layer includes a first resin member arranged in a first region inside of an outer edge of the semiconductor substrate in an orthographic projection to the front side, and a second resin member arranged in a second region between the outer edge of the semiconductor substrate and the first region, in the orthographic projection to the front side. A linear expansion coefficient of the first resin member is less than a linear expansion coefficient of the second resin member.Type: GrantFiled: February 1, 2019Date of Patent: February 9, 2021Assignee: CANON KABUSHIKI KAISHAInventor: Takahiro Hachisu
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Patent number: 10916479Abstract: Semiconductor device and fabrication method are provided. The method includes: providing a semiconductor substrate; forming initial fins on the semiconductor substrate; forming a gate structure material layer on the semiconductor substrate and the initial fins, the gate material layer having a top surface higher than the initial fins; forming a trench in the gate structure material layer and the initial fins, which passes through the initial fins along a direction perpendicular to an extending direction of initial fins and in parallel with a surface of the semiconductor substrate to form initial fins into fins; forming an isolation layer in the trench having a top surface higher than the fins; and forming gate structures on both sides of the isolation layer by etching the gate structure material layer.Type: GrantFiled: August 30, 2018Date of Patent: February 9, 2021Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, SMIC New Technology Research and Development (Shanghai) CorporationInventor: Fei Zhou
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Patent number: 10896954Abstract: An electronic device can include a semiconductor layer having a primary surface, a drift region adjacent to the primary surface, a drain region adjacent to the drift region and extending deeper into the semiconductor layer as compared to the drift region, a resurf region spaced apart from the primary surface, an insulating layer overlying the drain region, and a contact extending through the insulating layer to the drain region. In an embodiment, the drain region can include a sinker region that allows a bulk breakdown to the resurf region to occur during an overvoltage event where the bulk breakdown occurs outside of the drift region, and in a particular embodiment, away from a shallow trench isolation structure or other sensitive structure.Type: GrantFiled: November 5, 2018Date of Patent: January 19, 2021Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Moshe Agam, Ladislav {hacek over (S)}eliga, Thierry Coffi Herve Yao, Jaroslav Pjen{hacek over (c)}ák, Gary H. Loechelt
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Patent number: 10886130Abstract: Some embodiments include a method of forming crystalline semiconductor material. A template is provided to have a polycrystalline region along a surface. Semiconductor material is deposited along the surface under conditions which grow crystalline semiconductor structures from grains of the polycrystalline region. The deposition is conducted at a temperature of less than or equal to 500° C. Some embodiments include a method of forming a transistor. A template is provided to have a polycrystalline region along a surface. Semiconductor material is deposited along the surface under conditions which grow crystalline semiconductor structures from grains of the polycrystalline region. The semiconductor material includes germanium. The crystalline semiconductor structures are doped to form a configuration having a first portion over a second portion. Insulative material is formed adjacent the second portion. A transistor gate is formed along the insulative material.Type: GrantFiled: August 24, 2018Date of Patent: January 5, 2021Assignee: Micron Technology, Inc.Inventors: Manuj Nahar, Darwin Franseda Fan, Junting Liu-Norrod, Michael Mutch
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Patent number: 10886145Abstract: A method of producing a surface-mountable multi-chip component includes providing a chip arrangement including a metallic conductor structure exposed at a rear side, a plurality of semiconductor chips and an housing material; and forming a solder stop coating on a rear side of the chip arrangement, wherein the solder stop coating separates connection regions of the conductor structure.Type: GrantFiled: January 26, 2017Date of Patent: January 5, 2021Assignee: OSRAM OLED GmbHInventors: Michael Zitzlsperger, Tobias Gebuhr, Stephan Eicher
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Patent number: 10879078Abstract: A method of patterning a resist layer is provided. The method includes forming the resist layer over the top surface of a silicon-containing layer that has a first contact angle. The method also includes exposing and developing the resist layer to form a patterned resist layer and expose a portion of the top surface of the silicon-containing layer. The method also includes applying a treating compound to the exposed portion of the top surface of the silicon-containing layer, so that the exposed portion of the top surface has a second contact angle that is greater than the first contact angle. The method also includes reflowing the patterned resist layer over the top surface of the silicon-containing layer having the second contact angle.Type: GrantFiled: February 19, 2019Date of Patent: December 29, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Wei Wang, Li-Po Yang, Ching-Yu Chang
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Patent number: 10867922Abstract: A device includes a substrate; a first layer over the substrate, the first layer containing a metallic material, wherein the first layer includes a trench; and a porous material layer having a first portion and a second portion. The first portion is disposed in the trench. The second portion is disposed on a top surface of the first layer. The first and the second portions contain substantially same percentage of Si, substantially same percentage of O, and substantially same percentage of C.Type: GrantFiled: April 2, 2018Date of Patent: December 15, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Bo-Jiun Lin, Ching-Yu Chang, Hai-Ching Chen, Tien-I Bao
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Patent number: 10867860Abstract: A method includes forming a fin protruding above a substrate; forming a gate structure over the fin; forming a gate spacer along a sidewall of the gate structure, where an upper surfaces of the gate structure is exposed by the gate spacer; depositing a gate film over the gate structure, the gate spacer, and the fin; performing one or more etching processes after depositing the gate film, where the one or more etching processes remove a first portion of the gate film from an upper surface of the fin and form a recess in the fin, where a second portion of the gate film remains on a sidewall of the gate spacer after the one or more etching processes; and forming an epitaxial source/drain region in the recess.Type: GrantFiled: August 30, 2018Date of Patent: December 15, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wan-Yi Kao, Chung-Chi Ko
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Patent number: 10861753Abstract: A method includes forming a gate stack over a semiconductor substrate, forming a first spacer layer on a sidewall of the gate stack, forming a sacrificial spacer film over the first spacer layer, forming an epitaxy structure on the semiconductor substrate, and performing an etching process on the sacrificial spacer film to form a gap between the first spacer layer and the epitaxy structure. An outer portion of the sacrificial spacer film has a topmost end higher than that of an inner portion of the sacrificial spacer film after performing the etching process. The method further includes forming a second spacer layer to seal the gap between the epitaxy structure and the first spacer layer.Type: GrantFiled: May 14, 2019Date of Patent: December 8, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Bo-Yu Lai, Kai-Hsuan Lee, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 10859920Abstract: A fabrication method of a mask and a mask, a display panel and a touch panel are provided. The fabrication method of the mask includes: providing a substrate; forming a photoresist material layer on the substrate; and performing at least two scanning exposure processes on the photoresist material layer by using a scanning beam, wherein, each of the at least two scanning exposure processes is performed along a first direction parallel to a surface where the substrate is located, the scanning beam in each of the at least two scanning exposure processes scans the photoresist material layer in a scanning region having a preset width, at least one pair of adjacent scanning regions partially overlap with each other, and a partially overlapping region of the at least one pair of adjacent scanning regions is located in a first region of the mask.Type: GrantFiled: August 9, 2018Date of Patent: December 8, 2020Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Liqing Liao, Hongmin Li, Jian Tao
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Patent number: 10861956Abstract: A thin film transistor substrate may include a base substrate, a semiconductor member, a gate electrode, a first insulation layer, and a source/drain electrode. The semiconductor member may overlap the base substrate. The gate electrode may overlap the semiconductor member and may be insulated from the semiconductor member. The first insulation layer may be positioned on the gate electrode and may include a first contact hole. The source/drain electrode may include a first discharge hole, may be electrically connected to the semiconductor member, and may be at least partially positioned inside the first contact hole. The first discharge hole may partially expose the semiconductor member.Type: GrantFiled: February 11, 2019Date of Patent: December 8, 2020Inventors: Ilhun Seo, Yun-Mo Chung, Daewoo Lee, Tak-Young Lee, Miyeon Cho
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Patent number: 10854538Abstract: A microelectronic device has a first die attached to a first die pad, and a second die attached to a second die pad. A magnetically permeable member is attached to a first coupler pad and a second coupler pad. A coupler component is attached to the magnetically permeable member. The first die pad, the second die pad, the first coupler pad, the second coupler pad, and the magnetically permeable member are electrically conductive. The first coupler pad is electrically isolated from the first die, from the second coupler pad, and from external leads of the microelectronic device. The second coupler pad is electrically isolated from the first die and from the external leads. The first die and the second die are electrically coupled to the coupler component. A package structure contains at least portions of the components of the microelectronic device and extends to the external leads.Type: GrantFiled: February 12, 2019Date of Patent: December 1, 2020Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Chang-Yen Ko, JK Ho