Patents Examined by Sonya McCall-Shepard
  • Patent number: 11289571
    Abstract: The present invention provides a diode chip, including: a semiconductor chip, including a p-type first semiconductor layer and an n-type second semiconductor layer formed on the first semiconductor layer; a first pad separation trench, formed on the semiconductor chip in a manner of penetrating the second semiconductor layer till reaching the first semiconductor layer, and forming a first internal parasitic capacitance between the first semiconductor layer and the second semiconductor layer by separating a portion of the semiconductor chip from other regions; an inter-insulation layer, covering the second semiconductor layer; and a first electrode layer, being opposite to the region separated by the first pad separation trench with the inter-insulation layer interposed in between, and forming, between the first electrode layer and the semiconductor chip, a first external parasitic capacitance connected in series to the first internal parasitic capacitance.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: March 29, 2022
    Assignee: ROHM CO., LTD.
    Inventor: Keishi Watanabe
  • Patent number: 11289577
    Abstract: A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein. The process includes (BN)XHy-radical interfacing with active sites on silicon nitride coated silicon (Si3N4/Si) surfaces for nucleation and growth of large-area, uniform and ultrathin h-BN directly on Si3N4/Si substrates (B/N atomic ratio=1:1.11±0.09). Further, monolayer graphene van der Waals bonded with the produced h-BN surface benefits from h-BN's reduced roughness (3.4 times) in comparison to Si3N4/Si. Because the reduced surface roughness leads to reduction in surface roughness scattering and charge impurity scattering, therefore an enhanced intrinsic charge carrier mobility (3 folds) for graphene on h-BN/Si3N4/Si is found.
    Type: Grant
    Filed: December 24, 2019
    Date of Patent: March 29, 2022
    Assignees: GlobalWafers Co., Ltd., Board of the Trustees of the University of Illinois
    Inventors: Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
  • Patent number: 11282827
    Abstract: A nonvolatile memory device includes a memory cell region including first metal pads, and a peripheral circuit region including second metal pads. The memory cell region includes a vertical structure including pairs of a first insulating layer and a first conductive layer, a second insulating layer on the vertical structure, a second conductive layer and a third conductive layer spaced apart from each other on the second insulating layer, first vertical channels and second vertical channels. The second conductive layer and the third conductive layer are connected with a first through via penetrating the vertical structure and a region of the second insulating layer that is exposed between the second conductive layer and the third conductive layer. The peripheral circuit region is vertically connected to the memory cell region by the first metal pads and the second metal pads directly.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: March 22, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyunghwa Yun, Chanho Kim, Dongku Kang
  • Patent number: 11276622
    Abstract: A semiconductor arrangement and an inverter incorporating the semiconductor arrangement, in particular to an inverter for use with traction power units e.g. for on and off road vehicles and stationary power inversion, are described. In the arrangement, semiconductor devices are thermally and electrically coupled to a heatsink as a module. The heatsink is configured as a bus bar to electrically connect the one or more semiconductor devices together to transmit power between the one or more semiconductor devices. The semiconductor devices may be cooled using the structure to which they are attached, and also immersed in a cooling medium to further increase the cooling of the device.
    Type: Grant
    Filed: January 30, 2018
    Date of Patent: March 15, 2022
    Assignee: YASA LIMITED
    Inventors: Simon David Hart, Tim Woolmer, Christopher Stuart Malam, Tom Hillman, Richard Phillips
  • Patent number: 11276578
    Abstract: A first semiconductor fin and a second semiconductor fin are disposed over a substrate. The second semiconductor fin and the first semiconductor fin are aligned substantially along a same line and spaced apart from each other. The first semiconductor fin has a first end portion, the second semiconductor fin has a second end portion, and an end sidewall of the first end portion and is spaced apart from an end sidewall of the second end portion. The gate structure extends substantially perpendicularly to the first semiconductor fin. When viewed from above, the gate structure overlaps with the first end portion of the first semiconductor fin. When viewed from above, the end sidewall of the first end portion of the first semiconductor fin facing the end sidewall of the second end portion of the second semiconductor fin has a re-entrant profile.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: March 15, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chang-Yin Chen, Che-Cheng Chang, Chih-Han Lin
  • Patent number: 11276759
    Abstract: A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein. The process includes (BN)XHy-radical interfacing with active sites on silicon nitride coated silicon (Si3N4/Si) surfaces for nucleation and growth of large-area, uniform and ultrathin h-BN directly on Si3N4/Si substrates (B/N atomic ratio=1:1.11±0.09). Further, monolayer graphene van der Waals bonded with the produced h-BN surface benefits from h-BN's reduced roughness (3.4 times) in comparison to Si3N4/Si. Because the reduced surface roughness leads to reduction in surface roughness scattering and charge impurity scattering, therefore an enhanced intrinsic charge carrier mobility (3 folds) for graphene on h-BN/Si3N4/Si is found.
    Type: Grant
    Filed: December 24, 2019
    Date of Patent: March 15, 2022
    Assignees: GlobalWafers Co., Ltd., Board of Trustees of the University of Illinois
    Inventors: Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
  • Patent number: 11276744
    Abstract: A display apparatus includes a substrate having a bending region between a first region and a second region, the bending region being configured to be bent about a bending axis that extends in one direction; a display unit on the substrate; a first wiring unit at the bending region, the first wiring unit including a first bending portion having a plurality of first holes; and a second wiring unit spaced apart from the first wiring unit and at the bending region, the second wiring unit including a second bending portion having a different shape from the first bending portion.
    Type: Grant
    Filed: April 24, 2020
    Date of Patent: March 15, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Yangwan Kim, Sunja Kwon, Byungsun Kim, Hyunae Park, Sujin Lee, Jaeyong Lee
  • Patent number: 11270943
    Abstract: An integrated circuit includes: a front end of line (FEOL) circuit including a transistor; and a back end of line circuit above the FEOL circuit and including insulator material having an interconnect feature therein. The interconnect feature includes: a core including copper; a first layer between the insulator material and the core, the first layer being distinct from the core; a second layer between the first layer and the core, the second layer being distinct from the first layer and the core, the second layer including a first metal and a second metal different from the first metal; and a capping member on the core and the second layer, the capping member including the second metal. In an embodiment, the first metal and the second metal are part of a solid solution in the second layer. In an embodiment, the first metal is ruthenium and the second metal is cobalt.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: March 8, 2022
    Assignee: Intel Corporation
    Inventors: Flavio Griggio, Philip Yashar, Anthony V. Mule, Gopinath Trichy, Gokul Malyavanatham
  • Patent number: 11264338
    Abstract: Apparatuses, systems and methods associated with over void signal trace design are disclosed herein. In embodiments, an integrated circuit (IC) package may include a first layer that has a void and a guard trace, wherein a first portion of the void is located on a first side of the guard trace and a second portion of the void is located on a second side of the guard trace. The IC package may further include a second layer located adjacent to the first layer, wherein the second layer has a signal trace that extends along the guard trace. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: March 23, 2018
    Date of Patent: March 1, 2022
    Assignee: Intel Corporation
    Inventors: Ananth Prabhakumar, Krishna Srinivasan, Arnab Sarkar
  • Patent number: 11264456
    Abstract: The present disclosure describes a fabrication method that prevents divots during the formation of isolation regions in integrated circuit fabrication. In some embodiments, the method of forming the isolation regions includes depositing a protective layer over a semiconductor layer; patterning the protective layer to expose areas of the semiconductor layer; depositing an oxide on the exposed areas the semiconductor layer and between portions of the patterned protective layer; etching a portion of the patterned protective layer to expose the semiconductor layer; etching the exposed semiconductor layer to form isolation openings in the semiconductor layer; and filling the isolation openings with a dielectric to form the isolation regions.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: March 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Gulbagh Singh, Hsin-Chi Chen, Kun-Tsang Chuang
  • Patent number: 11264501
    Abstract: Techniques and mechanisms for imposing stress on a channel region of an NMOS transistor. In an embodiment, a fin structure on a semiconductor substrate includes two source or drain regions of the transistor, wherein a channel region of the transistor is located between the source or drain regions. At least on such source or drain region includes a doped silicon germanium (SiGe) compound, wherein dislocations in the SiGe compound result in the at least one source or drain region exerting a tensile stress on the channel region. In another embodiment, source or drain regions of a transistor each include a SiGe compound which comprises at least 50 wt % germanium.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: March 1, 2022
    Assignee: Intel Corporation
    Inventors: Rishabh Mehandru, Anand Murthy, Karthik Jambunathan, Cory Bomberger
  • Patent number: 11258012
    Abstract: A resistive random access memory (RERAM) apparatus and method for forming the apparatus are provided. Oxygen content control in the RERAM is provided. To provide oxygen content control, a via to an electrode of the RERAM is formed utilizing an oxygen-free plasma etch step. In one embodiment, the dielectric within which the via is formed is silicon nitride (SiN). In exemplary embodiments, the plasma chemistry is a hydrofluorocarbon (CxHyFz)-based plasma chemistry or a fluorocarbon (CxFy)-based plasma chemistry. In one embodiment, the resistive layer of the RERAM is a metal oxide. In another embodiment, the oxygen concentrations in the electrode of the RERAM under the via and outside the via are the same after formation of the via.
    Type: Grant
    Filed: April 16, 2019
    Date of Patent: February 22, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Devi Koty, Qingyun Yang, Hiroyuki Miyazoe, Takashi Ando, Eduard Cartier, Vijay Narayanan, Sebastian Ulrich Englemann
  • Patent number: 11251126
    Abstract: Various methods and structures for fabricating BEOL metallization layer including at least one bulk cobalt contact, the at least one bulk cobalt contact including a replacement non-cobalt metal cap integral to the at least one bulk cobalt contact. The method includes performing selective deposition, by a chemical exchange reaction of metal between a non-cobalt metal and Cobalt in the at least one bulk cobalt contact, of the replacement non-cobalt metal cap integrally formed in a top surface region of the bulk cobalt contact.
    Type: Grant
    Filed: March 16, 2020
    Date of Patent: February 15, 2022
    Assignee: International Business Machines Corporation
    Inventors: James J. Kelly, Cornelius Brown Peethala
  • Patent number: 11239358
    Abstract: A semiconductor structure and fabrication method are provided. The method includes: providing a substrate with a first doped region and a second doped region; forming discrete first isolation structures in the second doped region; forming a third doped region in the second doped region between adjacent first isolation structures and under the first isolation structures; forming a gate structure; forming a source region in the first doped region; and forming a drain region in the second doped region. The first doped region includes first doping ions and the second doped region includes second doping ions with a conductivity type opposite to a conductivity type of the first doping ions. The third doped region includes third doping ions with a conductivity type opposite to the conductivity type of the second doping ions. A portion of the first isolation structure is located between the gate structure and the drain region.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: February 1, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Mao Li, Dae Sub Jung, De Yan Chen
  • Patent number: 11239336
    Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with a niobium-based silicide layer. An IC structure according to the disclosure includes a transistor on a substrate, the transistor including a gate structure above the substrate and a source/drain (S/D) region on the substrate adjacent the gate structure. A niobium-based silicide layer is on at least an upper surface the S/D region of the transistor, and extends across substantially an entire width of the S/D region. An S/D contact to the S/D region is in contact with the niobium-based silicide layer.
    Type: Grant
    Filed: February 12, 2020
    Date of Patent: February 1, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Wei Hong, Yanping Shen, Domingo A. Ferrer, Hong Yu
  • Patent number: 11239317
    Abstract: According to a certain embodiment, the nonvolatile semiconductor memory device includes: a first conductivity-type semiconductor substrate including a crushed layer on a back side surface thereof; a memory cell array disposed on a front side surface of the semiconductor substrate opposite to the crushed layer; and a first conductivity-type high voltage transistor HVP disposed on the semiconductor substrate and including a first conductivity-type channel, configured to supply a high voltage to the memory cell array. The first conductivity-type high voltage transistor includes: a well region NW disposed on the surface of the semiconductor substrate and having a second conductivity type; a source region and a drain region disposed in the well region; and a first conductivity-type first high concentration layer WT2 disposed between the crushed layer of the semiconductor substrate and the well region and having a higher concentration than an impurity concentration of the semiconductor substrate.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: February 1, 2022
    Assignee: Kioxia Corporation
    Inventors: Shoichi Watanabe, Mitsuhiro Noguchi
  • Patent number: 11239246
    Abstract: Various embodiments of the present application are directed to a method of forming an integrated circuit (IC). An isolation structure is formed between a logic region and a memory region of a substrate. A dummy structure is formed on the isolation structure and defines a dummy sidewall of the dummy structure facing the logic region. A boundary sidewall spacer is formed covering the dummy structure and at least partially defines a boundary sidewall of the boundary sidewall spacer facing the logic region. A protecting dielectric layer is formed on a top surface of the boundary sidewall spacer by converting an uppermost portion of the boundary sidewall spacer to the protecting dielectric layer. The protecting dielectric layer is removed, and a logic device structure is formed on the logic region.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: February 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Chih-Ren Hsieh, Wei Cheng Wu, Chih-Pin Huang
  • Patent number: 11233022
    Abstract: A semiconductor device package includes a redistribution structure and an electrical connection. The redistribution structure has an electrical terminal adjacent to a surface of the redistribution structure and a seed layer covering a side surface of the electrical terminal. The electrical connection is disposed on a first surface of the electrical terminal. The seed layer extends to the first surface of the electrical terminal.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: January 25, 2022
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Cheng-Lin Ho, Chih-Cheng Lee
  • Patent number: 11227801
    Abstract: A method for fabricating a semiconductor device includes forming top source/drain contact material on top source/drain material disposed on one or more fins of a base structure, and subtractively patterning the top source/drain contact material to form at least one top source/drain contact. The at least one top source/drain contact has a positive tapered geometry. The method further includes cutting exposed end portions of the top source/drain material to form at least one top source/drain region underneath the at least one top source/drain contact.
    Type: Grant
    Filed: March 19, 2020
    Date of Patent: January 18, 2022
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ruilong Xie, Su Chen Fan, Heng Wu, Julien Frougier
  • Patent number: 11227996
    Abstract: A resistive element in an artificial neural network, the resistive element includes a Silicon-on-insulator (SOI) substrate, and a Silicon layer formed on the Silicon-on-insulator substrate. The Silicon layer includes dopants derived from a thin film dopant layer, and the thin film dopant layer includes a programmed amount of dopant including at least one of Boron and Phosphorus.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: January 18, 2022
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ali Afzali-Ardakani, Matthew Warren Copel, James Bowler Hannon, Satoshi Oida