Patents Examined by Syed I Gheyas
  • Patent number: 11688639
    Abstract: A semiconductor device and method of manufacture are provided. In an embodiment a first semiconductor device and a second semiconductor device are formed within a semiconductor wafer and a scribe region between the first semiconductor device and the second semiconductor device is patterned. A singulation process is then utilized within the scribe region to singulate the first semiconductor device from the second semiconductor device. The first semiconductor device and the second semiconductor device are then bonded to a second semiconductor substrate and thinned in order to remove extension regions from the first semiconductor device and the second semiconductor device.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hua Yu, Hung-Pin Chang, Yi-Hsiu Chen, Ku-Feng Yang, Wen-Chih Chiou
  • Patent number: 11680340
    Abstract: Methods and systems for low etch pit density 6 inch semi-insulating gallium arsenide wafers may include a semi-insulating gallium arsenide single crystal wafer having a diameter of 6 inches or greater without intentional dopants for reducing dislocation density, an etch pit density of less than 1000 cm?2, and a resistivity of 1×107 ?-cm or more. The wafer may have an optical absorption of less than 5 cm?1 less than 4 cm?1 or less than 3 cm?1 at 940 nm wavelength. The wafer may have a carrier mobility of 3000 cm2/V-sec or higher. The wafer may have a thickness of 500 ?m or greater. Electronic devices may be formed on a first surface of the wafer. The wafer may have a carrier concentration of 1.1×107 cm?3 or less.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: June 20, 2023
    Assignee: AXT, Inc.
    Inventors: Rajaram Shetty, Weiguo Liu, Morris Young
  • Patent number: 11682701
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack and a plurality of linear arrays of gates above the quantum well stack to control quantum dot formation in the quantum well stack. An insulating material may be between a first linear array of gates and a second linear array of gates, the insulating material may be between individual gates in the first linear array of gates, and gate metal of the first linear array of gates may extend over the insulating material.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: June 20, 2023
    Assignee: Intel Corporation
    Inventors: Stephanie A. Bojarski, Hubert C. George, Sarah Atanasov, Nicole K. Thomas, Ravi Pillarisetty, Lester Lampert, Thomas Francis Watson, David J. Michalak, Roman Caudillo, Jeanette M. Roberts, James S. Clarke
  • Patent number: 11677017
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include a (111) silicon substrate, a (111) germanium quantum well layer above the substrate, and a plurality of gates above the quantum well layer. In some embodiments, a quantum dot device may include a silicon substrate, an insulating material above the silicon substrate, a quantum well layer above the insulating material, and a plurality of gates above the quantum well layer.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: June 13, 2023
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Van H. Le, Nicole K. Thomas, Hubert C. George, Jeanette M. Roberts, Payam Amin, Zachary R. Yoscovits, Roman Caudillo, James S. Clarke, Roza Kotlyar, Kanwaljit Singh
  • Patent number: 11676853
    Abstract: A method includes: forming a first conductive structure in a first dielectric layer; forming a conductive protection structure that is coupled to at least part of the first conductive structure; forming a second dielectric layer over the first dielectric layer; forming a via hole extending through at least part of the second dielectric layer to expose a portion of the conductive protection structure; cleaning the via hole; and refilling the via hole with a conductive material to form a via structure.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: June 13, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung-Chih Yu, Chien-Mao Chen
  • Patent number: 11678491
    Abstract: An integrated circuit (IC) includes a semiconductor-on-insulator (SOI) substrate comprising a handle substrate, an insulator layer over the handle substrate, and a semiconductor device layer over the insulator layer. A logic device includes a logic gate arranged over the semiconductor device layer. The logic gate is arranged within a high ? dielectric layer. A memory cell includes a control gate and a select gate laterally adjacent to one another and arranged over the semiconductor device layer. A charge-trapping layer underlies the control gate.
    Type: Grant
    Filed: June 2, 2021
    Date of Patent: June 13, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien Hung Liu, Chih-Wei Hung
  • Patent number: 11670709
    Abstract: Disclosed herein are IC structures, packages, and device assemblies with III-N transistors that include additional materials, referred to herein as “stressor materials,” which may be selectively provided over portions of polarization materials to locally increase or decrease the strain in the polarization material. Providing a compressive stressor material may decrease the tensile stress imposed by the polarization material on the underlying portion of the III-N semiconductor material, thereby decreasing the two-dimensional electron gas (2DEG) and increasing a threshold voltage of a transistor. On the other hand, providing a tensile stressor material may increase the tensile stress imposed by the polarization material, thereby increasing the 2DEG and decreasing the threshold voltage. Providing suitable stressor materials enables easier and more accurate control of threshold voltage compared to only relying on polarization material recess.
    Type: Grant
    Filed: March 11, 2019
    Date of Patent: June 6, 2023
    Assignee: Intel Corporation
    Inventors: Sansaptak Dasgupta, Marko Radosavljevic, Han Wui Then, Nidhi Nidhi, Rahul Ramaswamy, Paul B. Fischer, Walid M. Hafez, Johann Christian Rode
  • Patent number: 11658055
    Abstract: Embodiments disclosed herein include electronic packages and methods of forming such packages. In an embodiment, the electronic package comprises a package substrate having a first surface and a second surface opposite from the first surface, and a monolayer having a plurality of first molecules over the first surface of the package substrate. In an embodiment, the first molecules each comprise a first functional group attached to the first surface, and a first release moiety attached to the first functional group.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: May 23, 2023
    Inventors: Suddhasattwa Nad, Rahul Manepalli
  • Patent number: 11658210
    Abstract: The present disclosure provides an HBT that includes (i) a semiconductor support layer; at least four wall structures side-by-side on the support layer; (iii) a semiconductor collector-material ridge structure disposed on the support layer between two adjacent wall structures of the at least four wall structures; (iv) a semiconductor base-material layer, wherein a first part of the base-material layer is disposed on a first region of the ridge structure and a second part of the base-material layer is disposed across the wall structures, wherein the base-material layer is supported by the wall structures; (v) a semiconductor emitter-material layer disposed on the first part of the base-material layer; (vi) a base contact layer disposed on the second part of the base-material layer; an emitter contact layer disposed on the emitter-material layer; and (viii) a collector contact layer disposed on a second region of the ridge structure.
    Type: Grant
    Filed: July 7, 2021
    Date of Patent: May 23, 2023
    Assignee: Imec VZW
    Inventor: Abhitosh Vais
  • Patent number: 11654596
    Abstract: Silicon carbide (SiC) wafers and related methods are disclosed that include intentional or imposed wafer shapes that are configured to reduce manufacturing problems associated with deformation, bowing, or sagging of such wafers due to gravitational forces or from preexisting crystal stress. Intentional or imposed wafer shapes may comprise SiC wafers with a relaxed positive bow from silicon faces thereof. In this manner, effects associated with deformation, bowing, or sagging for SiC wafers, and in particular for large area SiC wafers, may be reduced. Related methods for providing SiC wafers with relaxed positive bow are disclosed that provide reduced kerf losses of bulk crystalline material. Such methods may include laser-assisted separation of SiC wafers from bulk crystalline material.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: May 23, 2023
    Assignee: WOLFSPEED, INC.
    Inventors: Simon Bubel, Matthew Donofrio, John Edmond, Ian Currier
  • Patent number: 11652142
    Abstract: A structure for a lateral bipolar junction transistor is provided. The structure comprising an emitter including a first concentration of a first dopant. A collector including a second concentration of the first dopant, the first concentration of the first dopant may be different from the second concentration of the first dopant. An intrinsic base may be laterally arranged between the emitter and the collector, and an extrinsic base region may be above the intrinsic base. An emitter extension may be arranged adjacent to the emitter, whereby the emitter extension laterally extends under a portion of the extrinsic base region. A halo region may be arranged adjacent to the emitter extension, whereby the halo region laterally extends under another portion of the extrinsic base region.
    Type: Grant
    Filed: September 22, 2021
    Date of Patent: May 16, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Mankyu Yang, Richard Taylor, III, Alexander Derrickson, Alexander Martin, Jagar Singh, Judson Robert Holt, Haiting Wang
  • Patent number: 11646348
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a heterojunction bipolar transistor and methods of manufacture. The structure includes: a sub-collector region; a collector region above the sub-collector region; an intrinsic base region composed of intrinsic base material located above the collector region; an emitter located above and separated from the intrinsic base material; and a raised extrinsic base having a stepped configuration and separated from and self-aligned to the emitter.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: May 9, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: John J. Pekarik, Vibhor Jain
  • Patent number: 11637181
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to lateral bipolar transistors and methods of manufacture. The structure includes: an extrinsic base comprising semiconductor material; an intrinsic base comprising semiconductor material which is located below the extrinsic base; a polysilicon emitter on a first side of the extrinsic base; a raised collector on a second side of the extrinsic base; and sidewall spacers on the extrinsic base which separate the extrinsic base from the polysilicon emitter and the raised collector.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: April 25, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Alvin J. Joseph, Alexander Derrickson, Judson R. Holt, John J. Pekarik
  • Patent number: 11621235
    Abstract: Structures and methods for reducing thermal expansion mismatch during chip scale packaging are disclosed. In one example, a semiconductor structure is disclosed. The semiconductor structure includes a first metal layer over a substrate, a dielectric region, and a polymer region. The first metal layer comprises a first device metal structure. The dielectric region is formed over the first metal layer. The polymer region is formed over the dielectric region. The dielectric region comprises a plurality of metal layers and an inter-metal dielectric layer comprising dielectric material between each pair of two adjacent metal layers in the plurality of metal layers. Each of the plurality of metal layers comprises a dummy metal structure over the first device metal structure. The dummy metal structures in each pair of two adjacent metal layers in the plurality of metal layers shield respectively two non-overlapping portions of the first device metal structure from a top view of the semiconductor structure.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: April 4, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuen-Shian Chen, Chien-Li Kuo
  • Patent number: 11613653
    Abstract: Provided herein are dyes, dye-sensitized solar cells, and sequential series multijunction dye-sensitized solar cell devices. The dyes include an electron deficient acceptor moiety, a medium electron density ?-bridge moiety, and an electron rich donor moiety comprising a biaryl, a substituted biaryl, or an R1, R2, R3 substituted phenyl where each of R1, R2, and R3 independently comprises H, aryl, multiaryl, alkyl substituted aryl, alkoxy substituted aryl, alkyl substituted multiaryl, alkoxy substituted multiaryl, OR4, N(R5)2, or a combination thereof; each R4 independently comprises H, alkyl, aryl, alkyl substituted aryl, alkoxy substituted aryl, or a combination thereof; and each R5 independently comprises aryl, multiaryl, alkyl substituted aryl, alkoxy substituted aryl, alkyl substituted multiaryl, alkoxy substituted multiaryl, or a combination thereof. The solar cells include a glass substrate, a dye-sensitized active layer, and a redox shuttle.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: March 28, 2023
    Assignee: UNIVERSITY OF MISSISSIPPI
    Inventors: Jared Heath Delcamp, Roberta Ramalho Rodrigues, Adithya Peddapuram, Hammad Arshad Cheema
  • Patent number: 11612017
    Abstract: There is provided a substrate processing apparatus, including: a substrate holding/rotating part configured to hold a substrate on a mounting table and rotate the substrate; a laser irradiation head configured to irradiate a laser beam toward a lower surface of the mounting table; and a controller configured to control at least the rotation of the substrate holding/rotating part and the irradiation of the laser beam. The laser irradiation head is fixed below the mounting table so as to be spaced apart from the mounting table. The controller controls the laser irradiation head to irradiate the laser beam when the mounting table is rotated by the substrate holding/rotating part.
    Type: Grant
    Filed: November 5, 2019
    Date of Patent: March 21, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Eiichi Sekimoto
  • Patent number: 11600724
    Abstract: Semiconductor devices, and more particularly semiconductor devices with improved edge termination structures are disclosed. A semiconductor device includes a drift region that forms part of an active region. An edge termination region is arranged along a perimeter of the active region and also includes a portion of the drift region. The edge termination region includes one or more sub-regions of an opposite doping type than the drift region and one or more electrodes may be capacitively coupled to the drift region by way of the one or more sub-regions. During a forward blocking mode for the semiconductor device, the one or more electrodes may provide a path that draws ions away from passivation layers that are on the edge termination region and away from the active region. In this manner, the semiconductor device may exhibit reduced leakage, particularly at higher operating voltages and higher associated operating temperatures.
    Type: Grant
    Filed: September 24, 2020
    Date of Patent: March 7, 2023
    Assignee: Wolfspeed, Inc.
    Inventors: Edward Robert Van Brunt, Thomas E. Harrington, III
  • Patent number: 11598904
    Abstract: A power semiconductor module includes a first substrate, wherein the first substrate includes aluminum, a first aluminum oxide layer arranged on the first substrate, a conductive layer arranged on the first aluminum oxide layer, a first semiconductor chip, wherein the first semiconductor chip is arranged on the conductive layer and is electrically connected thereto, and an electrical insulation material enclosing the first semiconductor chip, wherein the first aluminum oxide layer is configured to electrically insulate the first semiconductor chip from the first substrate.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: March 7, 2023
    Assignee: Infineon Technologies AG
    Inventors: Ivan Nikitin, Dirk Ahlers, Andreas Grassmann, Andre Uhlemann
  • Patent number: 11600719
    Abstract: The present disclosure provides embodiments of bipolar junction transistor (BJT) structures. A BJT according to the present disclosure includes a first epitaxial feature disposed over a well region, a second epitaxial feature disposed over the well region, a vertical stack of channel members each extending lengthwise between the first epitaxial feature and the second epitaxial feature, a gate structure wrapping around each of the vertical stack of channel members, a first electrode coupled to the well region, an emitter electrode disposed over and coupled to the first epitaxial feature, and a second electrode disposed over and coupled to the second epitaxial feature.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: March 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Zi-Ang Su, Ming-Shuan Li, Chih Chieh Yeh
  • Patent number: 11588055
    Abstract: The present disclosure provides a thin-film transistor and a method for manufacturing the same, an array substrate, and a display device. The thin film transistor of the present disclosure include a plurality of insulating layers, among which at least one insulating layer on the low temperature polysilicon layer comprises organic material, so vias could be formed in the organic material by an exposing and developing process, thereby effectively avoiding the over-etching problem of the low temperature polycrystalline silicon layer caused by dry etching process. By adopting the method for manufacturing the film transistors of the present disclosure, the contact area and uniformity of the drain electrode and the low temperature polysilicon material layer can be increased; the conductivity can be improved; and the production cycle of products can be greatly reduced and thereby improving the equipment capacity.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: February 21, 2023
    Assignees: ORDOS YUANGSHENG OPTOELECTRONICS CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Wei Liu, Yongbo Ju, Xikang Jin, Zhimin Wang, Jianbin Gao, Xiaoguang Chen, Xinbo Zhou, Jianjun Chen