Abstract: A measurement device includes: an operation unit that receives an operation of a user; an acquisition unit that acquires depth information indicating a depth image and color information indicating a color image of an object; a controller that calculates, based on at least one of the depth information and the color information, first dimension of the object; and a display unit that displays a frame image showing a contour shape of the object to be superimposed on the color image, the contour shape being based on the first dimension. The operation unit receives a selection and an input of a change amount of the adjustment target plane by the user. The controller calculates, second dimension of the object when the adjustment target plane is moved in a normal direction based on the change amount, and changes the frame image to show a contour shape based on the second dimension.

Abstract: An inspection device includes an objective lens that transmits inspection light reflected from a sample during inspection and measurement light from a point light source during aberration measurement, a first pupil relay lens that transmits the inspection light and the measurement light, a second pupil relay lens in which an intermediate imaging plane is formed between the second pupil relay lens and the first pupil relay lens, a diffraction grating disposed between the first pupil relay lens and the intermediate imaging plane and that diffracts the measurement light, a point diffraction interferometry plate disposed within a depth of focus of the intermediate imaging plane and that selectively transmits the diffracted light, a first detector that detects an image of the sample, and a second detector that detects a fringe image of the measurement light.

Abstract: A three-dimensional (3D) sensing system for determining a 3D profile of an object and a method are provided. The 3D sensing system includes a first light source, a liquid crystal lens, a light detector and a control circuit. The first light source is configured to emit polarized light with a polarization setting for projecting a structured light pattern on the object. The liquid crystal lens in a polarization state allows incident light with the polarization setting to pass through and block incident light without the polarization setting from passing through. The light detector is configured to detect light reflected from the object and passing through the liquid crystal lens. When the 3D sensing system is in a 3D mode, the control circuit is configured to turn on the first light source and control the liquid crystal lens to enter the polarization state.

Abstract: An optical scanning system includes a first radiating source capable of outputting a first source light beam, a second radiating source capable of outputting a second source light beam, a first time-varying beam reflector configured to direct the first source light beam and the second source light beam toward the sample, a scan lens configured to focus the first source light beam and the second source light beam reflected by the first time-varying beam reflector onto the sample, and a compound ellipsoidal collector configured to direct light scattered from the sample toward a scattered radiation detector. The optical scanner causes one of the first or second source light beams to be directed towards a sample at an incident angle. The first light beam has a first wavelength, the second light beam has a second wavelength, and the first wavelength and the second wavelength are not the same.

Abstract: A method of measuring the concentration of a gas in a target environment using a laser lidar system, comprises directing a laser beam towards an environment containing the gas, tuning the laser wavelength over a wavelength range including the absorption line of the gas, and measuring intensity of laser light returned from the environment containing the gas, as a result of scattering as a function of time. The intensity vs time is then converted into gas absorption vs wavelength, and the gas absorption vs wavelength is used to determine the concentration of the gas in the target environment.

Abstract: A metrology system includes front and back vision components portions. The front vision components portion includes a light source, camera, variable focal length (VFL) lens, and objective lens defining an optical axis. The back vision components portion may include a reflective surface and a polarization altering component. A workpiece with apertures is located between the front and back vision components portions. For each aperture of the workpiece, the system adjusts a relative position between the front vision components portion and the workpiece to align its optical axis with each aperture such that light from the light source passes through the aperture and is reflected by the reflective surface of the back vision components portion. The system uses the VFL lens and camera to acquire an image stack including images of the aperture, and analyzes the image stack to determine a measurement related to a workpiece feature of the aperture.

Abstract: The present disclosure relates to devices and methods for detecting and removing vapor for an imaging acquisition device. A device for detecting and removing vapor may include a first light guide. The first light guide may include a first end to receive a light beam, and a second end to output the light beam at a predetermined angle with respect to a reference plane, so that when the light beam enters a target light transmission media from the first light guide, the light beam substantially perfectly reflects between a first surface and a second surface of the target light transmission media. The first surface and second surface may substantially parallel to the reference plane.

Abstract: Even when a missing portion occurs in a solid data set on a columnar structure, an estimator for a deflection value and an accuracy of the deflection value are correctly estimated according to an extent of the missing portion and the like.

Abstract: Apparatus, systems, and methods for the inspection of holes in transparent materials, the apparatus including a processor, an illumination probe, and a detection probe. The illumination probe includes a laser light source and a reflective surface and is configured to be inserted into a first hole in the transparent material. The detection probe includes a second reflective surface and a photodetector and is configured to be inserted in a second hole in the transparent material. Laser light is directed onto the first reflective surface within the first hole and is reflected through a wall of the first hole, into the transparent material, and reflected by the second reflective surface to the photodetector. The photodetector transmits a measured light intensity value to the processor, which compares the light intensity value to a standard intensity value to determine whether or not a crazing condition exists in the second hole.

Abstract: An optical system configured to measure a raised or receded surface feature on a surface of a sample may comprise a broadband light source; a tunable filter configured to filter broadband light emitted from the broadband light source and to generate a first light beam at a selected wavelength; a linewidth control element configured to receive the first light beam and to generate a second light beam having a predefined linewidth and a predetermined coherence length; collimating optics optically coupled to the second light beam and configured to collimate the second light beam; collinearizing optics optically coupled to the collimating optics and configured to align the collimated second light beam onto the raised or receded surface feature of the sample, and a processor system and at least one digital imager configured to measure a height of the raised surface or depth of the receded surface from light reflected at least from those surfaces.

Abstract: An apparatus for inspecting transparent cylindrical containers comprising a support and/or gripping device for a cylindrical container adapted to support and make it rotate about a vertical rotation axis, a video camera directed to capture images of a window of a side wall of the cylindrical container, a first collimated lighting device that illuminates said window, a second lighting device that illuminates said window and is arranged opposite the first lighting device in a symmetrical position with respect to the window, a control unit operationally connected to the support and/or gripping device, to the video camera and to said first and second lighting devices, and programmed to capture images of said window at constant angular intervals, alternately activating the first and second lighting devices for each angular range until a complete 360° rotation of the cylindrical container is made, and processing the images obtained.

Abstract: Methods and systems for detecting and classifying defects based on the phase of dark field scattering from a sample are described herein. In some embodiments, throughput is increased by detecting and classifying defects with the same optical system. In one aspect, a defect is classified based on the measured relative phase of scattered light collected from at least two spatially distinct locations in the collection pupil. The phase difference, if any, between the light transmitted through any two spatially distinct locations at the pupil plane is determined from the positions of the interference fringes in the imaging plane. The measured phase difference is indicative of the material composition of the measured sample. In another aspect, an inspection system includes a programmable pupil aperture device configured to sample the pupil at different, programmable locations in the collection pupil.

Abstract: The present disclosure provides a method for measuring a blade cross-section profile based on a line structured-light sensor at a high precision, including: (10) pose calibration on a line structured-light sensor; (20) calibration on a rotation axis: calibrating the rotation axis with a lateral datum plane of a blade; and (30) cross-section profile measurement on a target measured blade: establishing a global coordinate system, and converting blade cross-section curve feature data acquired by a data coordinate system to the coordinate system for splicing, thereby measuring a blade cross-section profile. The present disclosure reduces the error arising from transfer of calibration objects, reduces the rotation error because it does not involve the rotation angle of the turntable when calibrating the rotation axis and the rotation center, and reduces the translational error of the line structured-light sensor as positions for rotating the line structured-light sensor in two times are unchanged.

Abstract: A fire detection apparatus 1 includes a first light emitting unit 101 that irradiates a detection space located inside or outside the fire detection apparatus 1 with first detection light, a second light emitting unit 102 that irradiates the detection space with second detection light having a different wavelength from a wavelength of the first detection light, a light receiving unit 103 that receives scattered light of the first detection light irradiated from the first light emitting unit 101 due to smoke, outputs a first light receiving signal according to the received scattered light, receives scattered light of the second detection light irradiated from the second light emitting unit 102 with respect to smoke, and outputs a second light receiving signal according to the received scattered light, and an identification unit 107a that identifies a type of smoke present in the detection space on the basis of an output ratio of an output value of the first light receiving signal to an output value of the seco

Abstract: An exhaust gas analyzer to analyze exhaust gas discharged from an internal combustion engine includes an infrared light source, a photodetector, a CO2 concentration calculation part and an O2 concentration calculation part. The infrared light source irradiates infrared light to the exhaust gas. The photodetector detects infrared light after passing through the exhaust gas. The CO2 concentration calculation part calculates a CO2 concentration in the exhaust gas on the basis of a detection signal obtained by the photodetector. The O2 concentration calculation part calculates an O2 concentration in the exhaust gas from the CO2 concentration by using a fuel combustion reaction equation and an EGR rate in an exhaust gas recirculation system or a value related to the EGR rate.

Abstract: An airborne biological particle monitoring device collects particles floating in air. The monitoring device includes a processor, a camera sensor, and a set of approximately monochromatic illumination sources that correspond to a set of spectral curves. The camera sensor captures images of the particles providing a spectral analysis of the particles. The processor analyzes the images to identify the collected particles.

Abstract: A method for aligning to a pattern on a wafer is disclosed. The method includes the steps of obtaining a first inline image from a first sample wafer, obtaining a first contour pattern of an alignment mark pattern from the first inline image, using the first contour pattern to generate a first synthetic image in black and white pixels, using the first synthetic image as a reference to recognize the alignment mark pattern on a tested wafer, and aligning to a tested pattern on the tested wafer according to a position of the alignment mark pattern on the tested wafer and a coordinate information.

Abstract: A Discrete Sample Introduction Module (DSIM) apparatus includes an internal tubing system to receive into the DSIM apparatus a discrete gas sample having a received concentration. A plurality of valves selectively partitions the internal tubing system to form a plurality of loops corresponding to a plurality of loop volumes to contain the discrete gas sample. The plurality of loop volumes receives a carrier gas to dilute the discrete gas sample to a plurality of preselected dilutions. The DSIM apparatus circulates a given one of the plurality of preselected dilutions for analysis by a spectrometer coupled to the DSIM apparatus.

Abstract: The particle sensor device comprises a substrate, a photodetector, a dielectric on or above the substrate, a source of electromagnetic radiation, and a through-substrate via in the substrate. The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion of the waveguide. A further portion of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.

Abstract: The invention relates to a method for detecting particles, having the steps of: receiving (S1) a measurement signal; calculating (S2) at least one estimated noise value using the received measurement signal; and detecting (S3) the particles using the measurement signal on the basis of at least one detection criterion, wherein the at least one detection criterion depends on the at least one calculated estimated noise value.