Abstract: Three-dimensional (3D) non-volatile memory arrays having a vertically-oriented thin film transistor (TFT) select device and method of fabricating such a memory are described. The vertically-oriented TFT may be used as a vertical bit line selection device to couple a global bit line to a vertical bit line. A select device pillar includes a body and upper and lower source/drain regions. At least one gate is separated horizontally from the select device pillar by a gate dielectric. Beneath each gate, a single gap fill dielectric layer extends vertically from a lower surface of the gate, at least partially separating the gate from the underlying global bit line. Between horizontally adjacent pillars, this same dielectric layer extends from its same lower level beneath the gates vertically to a level of the upper source/drain region.

Abstract: A semiconductor device and a method of fabricating the same are provided. The semiconductor device includes conductive patterns and interlayer insulating patterns having a stair structure and being alternately stacked, pad patterns connected to end portions of upper surfaces of the conductive patterns exposed through the stair structure, and a channel film penetrating the conductive patterns and the interlayer insulating patterns.

Abstract: Semiconductor devices and fabrication methods are provided having an isolation feature within a fin structure which, for instance, facilitates isolating circuit elements supported by the fin structure. The fabrication method includes, for instance, providing an isolation material disposed, in part, within the fin structure, the isolation material being formed to include a T-shaped isolation region and a first portion extending into the fin structure, and a second portion disposed over the first portion and extending above the fin structure.

Abstract: Selector elements that can be suitable for nonvolatile memory device applications are disclosed. The selector element can have low leakage currents at low voltages to reduce sneak current paths for non-selected devices, and higher leakage currents at higher voltages to minimize voltage drops during device switching. The selector element can be based on multilayer film stacks (e.g. metal-semiconductor-metal (MSM) stacks). A structure including diamond-like carbon (DLC) can be used to surround the semiconductor layer of the MSM stack. The high thermal conductivity of the DLC structure may serve to remove heat from the selector device while higher currents are flowing through the selector element. This may lead to improved reliability and improved endurance.

Abstract: A pixel unit comprises a pixel electrode, a data line and a TFT, and further comprises: a backup TFT, a source electrode of which is isolated from the data line, and a drain electrode of which is isolated from the pixel electrode; a first repair line, one end of the first repair line and the source electrode of the backup TFT being isolated from each other and there being an overlapping region therebetween, and the other end of the first repair line and the data line or a source electrode of the TFT being isolated from each other and there being an overlapping region therebetween; and a second repair line.

Abstract: The inventive concept provides semiconductor devices having through-vias and methods for fabricating the same. The method may include forming a via-hole opened toward a top surface of a substrate and partially penetrating the substrate, forming a via-insulating layer having a first thickness on a bottom surface of the via-hole and a second thickness smaller than the first thickness on an inner sidewall of the via-hole, forming a through-via in the via-hole which the via-insulating layer is formed in, and recessing a bottom surface of the substrate to expose the through-via. Forming the via-insulating layer may include forming a flowable layer on the substrate, and converting the flowable layer into a first flowable chemical vapor deposition layer having the first thickness on the bottom surface of the via-hole.

Abstract: A method includes providing a semiconductor wafer including multiple semiconductor chips, forming a first scribe line on a frontside of the semiconductor wafer, wherein the first scribe line has a first width and separates semiconductor chips of the semiconductor wafer, forming a second scribe line on the frontside of the semiconductor wafer, wherein the second scribe line has a second width and separates semiconductor chips of the semiconductor wafer, wherein the first scribe line and the second scribe line intersect in a crossing area which is greater than a product of the first width and the second width, and plasma etching the semiconductor wafer in the crossing area.

Abstract: Implementations are presented herein that include an ESD protection structure. The structure may include a plurality of first doped regions forming first terminals of a plurality of transistors, a plurality of second doped regions forming second terminals of the plurality of transistors, and a third doped region surrounding the plurality of first doped regions and the plurality of second doped regions to form a common third terminal of the plurality of transistors. The plurality of first doped regions and the plurality of second doped regions may be arranged in an alternating pattern such that an ESD discharge current received on any one of the plurality of first doped regions dissipates through at least two of the plurality of second doped regions.

Abstract: The present invention provides an array substrate and a manufacturing method thereof, a display panel and a display device. The array substrate includes a plurality of pixel units, each of which includes: a TFT area provided with a TFT including a gate, a gate insulation layer, an active area, a source and a drain; and a display area provided with a pixel electrode.

Abstract: The present disclosure generally provides for integrated circuit (IC) structures with through-semiconductor vias (TSV). In an embodiment, an IC structure may include a through-semiconductor via (TSV) embedded in a substrate, the TSV having a cap; a dielectric layer adjacent to the substrate; a metal layer adjacent to the dielectric layer; a plurality of vias each embedded within the dielectric layer and coupling the metal layer to the cap of the TSV at respective contact points, wherein the plurality of vias is configured to create a substantially uniform current density throughout the TSV.

Abstract: The present disclosure generally provides for an integrated circuit (IC) structure with a TSV, and methods of manufacturing the IC structure and the TSV. An IC structure according to embodiments of the present invention may include a through-semiconductor via (TSV) embedded within a substrate, the TSV having an axial end; and a metal cap contacting the axial end of the TSV, wherein the metal cap has a greater electrical resistivity than the TSV.

Abstract: A semiconductor package includes a semiconductor die having an active face and dielectric layers disposed on the active face of the semiconductor die. At least one opening is formed through the dielectric layers and extends from a non-bond pad area of the active face to an exterior surface of the dielectric layers. An electrically conductive layer is formed in the opening and is in physical contact with the active face of the semiconductor die. A thermally conductive material fills the opening to form a thermal via for dissipating heat away from the semiconductor die.

Abstract: A semiconductor device includes a plurality of first conductive layers stacked on top of one another, a plurality of first slits passing through the first conductive layers, and a plurality of second slits passing through the first conductive layers and crossing end portions of the first slits to form cross-shaped edges.

Abstract: An organic light emitting display includes a substrate, a thin film transistor disposed on the substrate, an overcoat layer having a first thru-hole formed therethrough to expose a portion of the thin film transistor and inclined at an angle with respect to the substrate, an upper passivation layer disposed on the overcoat layer and having a second thru-hole formed threrethrough to expose the portion of the thin film transistor, a first electrode connected to the thin film transistor through the second thru-hole, a light emitting layer disposed on the first electrode, and a second electrode disposed on the light emitting layer.

Abstract: Methods for forming a passivation protection structure on a metal line layer formed in an insulating material in an interconnection structure are provided. In one embodiment, a method for forming passivation protection on a metal line in an interconnection structure for semiconductor devices includes selectively forming a metal capping layer on a metal line bounded by a dielectric bulk insulating layer in an interconnection structure formed on a substrate in a processing chamber incorporated in a multi-chamber processing system, in-situ forming a barrier layer on the substrate in the processing chamber; wherein the barrier layer is a metal dielectric layer, and forming a dielectric capping layer on the barrier layer in the multi-chamber processing system.

Abstract: An electronic chip including a semiconductor substrate (1) covered with an insulating layer (4) including metal interconnection levels (3) and interconnection pillars (10) connected to said metal interconnection levels (3), said pillars (110) forming regions (111) protruding from the upper surface of said insulating layer (4) and capable of forming an electric contact, wherein said pillars (110) have a built-in portion (115) in a housing formed across the thickness of at least said insulating layer (4).

Abstract: A semiconductor device includes a semiconductor substrate having a capacitor region and a resistor region. A capacitor dielectric material and a capacitor electrode are sequentially stacked on an active region in the capacitor region of the semiconductor substrate. A resistor is provided on the resistor region of the semiconductor substrate. A protection pattern is provided on a top surface of the capacitor electrode. The protection pattern is spaced apart from the capacitor electrode. The protection pattern and the resistor include the same material and have the same thickness in a direction vertical to a surface of the semiconductor substrate.

Abstract: A semiconductor device includes a substrate having a semiconducting surface having formed therein a first active region and a second active region, where the first active region consists of a substantially undoped layer at the surface and a highly doped screening layer of a first conductivity type beneath the first substantially undoped layer, and the second active region consists of a second substantially undoped layer at the surface and a second highly doped screening layer of a second conductivity type beneath the second substantially undoped layer. The semiconductor device also includes a gate stack formed in each of the first active region and the second active region consists of at least one gate dielectric layer and a layer of a metal, where the metal has a workfunction that is substantially midgap with respect to the semiconducting surface.

Abstract: Microelectronic packages having layered interconnect structures are provided, as are methods for the fabrication thereof. In one embodiment, the method includes forming a first plurality of interconnect lines in ohmic contact with a first bond pad row provided on a semiconductor. A dielectric layer is deposited over the first plurality of interconnect lines, the first bond pad row, and a second bond pad row adjacent the first bond pad row. A trench via is then formed in the dielectric layer to expose at least the second bond pad row therethrough. A second plurality of interconnect lines is formed in ohmic contact with the second bond pad row within the trench via. The second plurality of interconnect lines extends over the first bond pad row and is electrically isolated therefrom by the dielectric layer to produce at least a portion of the layered interconnect structure.

Abstract: The present invention provides a production method of a radiation image detector, comprising a scintillator panel preparation step, a composite rigid plate preparation step of bonding a flexible polymer film to a rigid plate with an adhesive to prepare the composite rigid plate, a preparation step of a scintillator panel provided with a composite rigid plate of bonding the composite rigid plate to a scintillator panel to prepare the scintillator panel provided with a composite rigid plate, and a preparation step of a radiation image detection member of opposing the surface of the photoelectric conversion base plate in which the photoelectric conversion elements are disposed to the surface of the side of the scintillator layer of the scintillator panel provided with the composite rigid plate and bonding the photoelectric conversion base plate to the scintillator panel to prepare a radiation image detection member; whereby there are provided a production method of a radiation image detector which can be easily