Patents Examined by Wasiul Haider
  • Patent number: 11830874
    Abstract: A semiconductor device including a substrate including an active pattern; a gate electrode crossing the active pattern and extending in a first direction; a source/drain pattern on the active pattern and adjacent to a side of the gate electrode; and an active contact in a contact hole on the source/drain pattern, wherein the active contact includes a first contact in a lower region of the contact hole, the first contact including a barrier pattern and a conductive pattern; a diffusion barrier layer on the first contact; and a second contact on the diffusion barrier layer, and a top surface of the diffusion barrier layer is coplanar with a top surface of the barrier pattern of the first contact.
    Type: Grant
    Filed: January 19, 2022
    Date of Patent: November 28, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Geunwoo Kim, Yoon Tae Hwang, Wandon Kim, Hyunbae Lee
  • Patent number: 11824056
    Abstract: A semiconductor device includes a semiconductor part, first and second electrodes, a control electrode and a control interconnect. The semiconductor part includes first to sixth layers and is provided between the first and second electrodes. The second layer is provided between the first layer and the second electrode. The third layer is provided between the second layer and the second electrode. The fourth and fifth layers are arranged between the first layer and the first electrode. The second electrode and the control interconnect are arranged on the semiconductor part. The control electrode is provided between the second electrode and the semiconductor part. The sixth layer is provided between the first layer and the control interconnect. The fifth semiconductor layer is provided between the first electrode and the sixth layer. The first semiconductor layer includes a carrier trap provided between the fifth and sixth layers.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: November 21, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Ryohei Gejo, Akiyo Minamikawa, Shigeaki Hayase
  • Patent number: 11824091
    Abstract: An integrated gate-commutated thyristor (IGCT) includes a semiconductor wafer having a first main side and a second main side opposite to the first main side and a plurality of first type thyristor cells and second type thyristor cells. The cathode electrode of the first type thyristor cells forms an ohmic contact with the cathode region and the cathode electrode of the second type thyristor cells is insulated from the cathode region. A predefined percentage of second type thyristor cells of the overall amount of first type thyristor cells and second type thyristor cells in a segment ring is greater than 0% and less than or equal to 75%.
    Type: Grant
    Filed: February 22, 2021
    Date of Patent: November 21, 2023
    Assignee: Hitachi Energy Switzerland AG
    Inventors: Tobias Wikstroem, Umamaheswara Vemulapati
  • Patent number: 11824125
    Abstract: An electrostatic discharge (ESD) protection device is provided. The ESD protection device includes a substrate, an active region, a first terminal region, and a second terminal region. The substrate includes dopants having a first dopant conductivity. The active region is arranged over the substrate and has an upper surface. The first terminal region and the second terminal region are arranged in the active region laterally spaced apart from each other. The first terminal region and the second terminal region each include a well region having dopants of the first dopant conductivity and a first doped region arranged in the well region. The first doped region includes dopants having a second dopant conductivity.
    Type: Grant
    Filed: October 27, 2021
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Sagar Premnath Karalkar, James Jerry Joseph, Jie Zeng, Milova Paul, Kyong Jin Hwang
  • Patent number: 11825722
    Abstract: Display device has display region of pixels including first pixel arranged in central portion of the display region and second pixel arranged between the first pixel and the edge of the display region. Each pixel includes first and second light emitting elements. Color filter layer is arranged on the first and second light emitting elements. The first light emitting element includes first color filter, and opening of the first light emitting element is defined by the color filter layer. The second light emitting element includes second color filter and having spectral transmittance characteristic different from the first color filter. Ratio of size of the opening to size of light emitting region of the first light emitting element is smaller in the second pixel than in the first pixel.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: November 21, 2023
    Assignee: Canon Kabushiki Kaisha
    Inventor: Koji Ishizuya
  • Patent number: 11810909
    Abstract: Methods for cutting (e.g., dividing) metal gate structures in semiconductor device structures are provided. A dual layer structure can form sub-metal gate structures in a replacement gate manufacturing processes, in some examples. In an example, a semiconductor device includes a plurality of metal gate structures disposed in an interlayer dielectric (ILD) layer disposed on a substrate, an isolation structure disposed between the metal gate structures, wherein the ILD layer circumscribes a perimeter of the isolation structure, and a dielectric structure disposed between the ILD layer and the isolation structure.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shiang-Bau Wang, Ryan Chia-Jen Chen, Shu-Yuan Ku, Ming-Ching Chang
  • Patent number: 11804521
    Abstract: A device including a transistor is fabricated by forming a first part of a first region of the transistor through the implantation of dopants through a first opening. The second region of the transistor is then formed in the first opening by epitaxy.
    Type: Grant
    Filed: January 26, 2022
    Date of Patent: October 31, 2023
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Alexis Gauthier, Pascal Chevalier, Gregory Avenier
  • Patent number: 11804543
    Abstract: Structures for a diode and methods of fabricating a structure for a diode. The structure includes a layer comprised of a semiconductor material. The layer includes a first section, a second section, and a third section laterally positioned between the first section and the second section. The structure includes a first terminal having a raised semiconductor layer on the first section of the layer, a second terminal including a portion on the second section of the layer, and a gate on the third section of the layer.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: October 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Vibhor Jain, Judson R. Holt
  • Patent number: 11799021
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with a marker layer for emitter and collector terminals. A lateral bipolar transistor structure according to the disclosure includes a semiconductor layer over an insulator layer. The semiconductor layer includes an emitter/collector (E/C) region having a first doping type and an intrinsic base region adjacent the E/C region and having a second doping type opposite the first doping type. A marker layer is on the E/C region of the semiconductor layer, and a raised E/C terminal is on the marker layer. An extrinsic base is on the intrinsic base region of the semiconductor layer, and a spacer is horizontally between the raised E/C terminal and the extrinsic base.
    Type: Grant
    Filed: October 14, 2021
    Date of Patent: October 24, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Vibhor Jain, Alexander M. Derrickson, Judson R. Holt
  • Patent number: 11798868
    Abstract: A semiconductor die having a metal tab connected thereto. The metal tab includes at least one slot on at least one side of the metal tab, wherein the at least one slot i) creates an opening between at least two portions of the metal tab and ii) exposes the semiconductor die in relation to the metal tab. The semiconductor die can be a silicon (Si) die and the metal tab can be a copper (Cu) tab, where the at least one slot includes at least four slots corresponding to each of at least four sides of the metal, and wherein with respect to each of the at least four sides, each corresponding slot i) creates an opening between at least two portions of the Cu metal tab and ii) exposes the Si semiconductor die in relation to the Cu metal tab.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: October 24, 2023
    Inventor: Thomas Spann
  • Patent number: 11784106
    Abstract: A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes a first semiconductor die, a second semiconductor die, a molding compound, a heat dissipation module and an adhesive material. The first and second semiconductor dies are different types of dies and are disposed side by side. The molding compound encloses the first and second semiconductor dies. The heat dissipation module is located directly on and in contact with the back sides of the first and second semiconductor dies. The adhesive material is filled and contacted between the heat dissipation module and the molding compound. The semiconductor package has a central region and a peripheral region surrounding the central region. The first and second semiconductor dies are located within the central region. A sidewall of the heat dissipation module, a sidewall of the adhesive material and a sidewall of the molding compound are substantially coplanar.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: October 10, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Yang Yu, Chin-Liang Chen, Kuan-Lin Ho, Yu-Min Liang, Wen-Lin Chen
  • Patent number: 11784222
    Abstract: A method of semiconductor fabrication includes providing a semiconductor structure having a substrate and first, second, third, and fourth fins above the substrate. The method further includes forming an n-type epitaxial source/drain (S/D) feature on the first and second fins, forming a p-type epitaxial S/D feature on the third and fourth fins, and performing a selective etch process on the semiconductor structure to remove upper portions of the n-type epitaxial S/D feature and the p-type epitaxial S/D feature such that more is removed from the n-type epitaxial S/D feature than the p-type epitaxial S/D feature.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chun-An Lin, Wei-Yuan Lu, Guan-Ren Wang, Peng Wang
  • Patent number: 11776952
    Abstract: Structures for a silicon-controlled rectifier and methods of forming a structure for a silicon-controlled rectifier. The structure includes first and second wells in the semiconductor substrate, a first terminal including a first doped region in the first well, and a second terminal including a second doped region in the second well. The first well and the second doped region have a first conductivity type, and the second well and the first doped region have a second conductivity type opposite to the first conductivity type. First and second conductor layers are positioned on the semiconductor substrate. The first conductor layer partially overlaps with the first well, and the second conductor layer partially overlaps with the second well. A third doped region, which has the second conductivity type, is laterally positioned in the semiconductor substrate between the first and second conductor layers.
    Type: Grant
    Filed: May 5, 2022
    Date of Patent: October 3, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Sagar Premnath Karalkar, Jie Zeng, Milova Paul, Souvick Mitra
  • Patent number: 11769808
    Abstract: A semiconductor memory device includes: a semiconductor substrate; a memory cell array disposed separately from the semiconductor substrate in a first direction; and first and second transistor arrays disposed on the semiconductor substrate. The semiconductor substrate includes a first region to a fourth region arranged in a second direction and a fifth region to an eighth region arranged in the second direction. These regions are each adjacent in a third direction. The memory cell array includes first conducting layers disposed in the first to fourth regions and second conducting layers disposed in the fifth to eighth regions. The first transistor array includes transistors connected to the plurality of first conducting layers via contacts disposed in the second region. The second transistor array includes transistors connected to the plurality of second conducting layers via contacts disposed in the seventh region.
    Type: Grant
    Filed: July 13, 2021
    Date of Patent: September 26, 2023
    Assignee: Kioxia Corporation
    Inventor: Tetsuaki Utsumi
  • Patent number: 11769694
    Abstract: A method includes forming an opening in a dielectric layer, depositing a seed layer in the opening, wherein first portions of the seed layer have a first concentration of impurities, exposing the first portions of the seed layer to a plasma, wherein after exposure to the plasma the first portions have a second concentration of impurities that is less than the first concentration of impurities, and filling the opening with a conductive material to form a conductive feature. In an embodiment, the seed layer includes tungsten, and the conductive material includes tungsten. In an embodiment, the impurities include boron.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: September 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Chiang Wu, Hsueh Wen Tsau, Chia-Ching Lee, Cheng-Lung Hung, Ching-Hwanq Su
  • Patent number: 11769810
    Abstract: A semiconductor device according to an embodiment includes an oxide semiconductor layer, a gate electrode, and the gate electrode, a first electrode electrically connected to the oxide semiconductor layer, a second electrode electrically connected to the oxide semiconductor layer, a first conductive layer provided at at least one position between the oxide semiconductor layer and the first electrode and between the oxide semiconductor layer and the second electrode, the first conductive layer containing a first metal element, a first element different from the first metal element, and one of oxygen (O) or nitrogen (N), and a second conductive layer between the oxide semiconductor layer and the first conductive layer, the second conductive layer containing oxygen (O) and a second element different from both of the first metal element and the first element. The gate electrode is between the first electrode and the second electrode in the first direction.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: September 26, 2023
    Assignee: Kioxia Corporation
    Inventors: Junji Kataoka, Tomomasa Ueda, Shushu Zheng, Nobuyoshi Saito, Keiji Ikeda
  • Patent number: 11770929
    Abstract: A semiconductor device includes gate layers stacked on a substrate in a first direction perpendicular to an upper surface of the substrate, and channel structures penetrating the gate layers and extending in the first direction, each of the channel structures includes first dielectric layers on side surfaces of the gate layers, respectively, and spaced apart from each other in the first direction, electric charge storage layers on side surfaces of the first dielectric layers, respectively, and spaced apart from each other in the first direction, a second dielectric layer extending perpendicularly to the substrate to conform to side surfaces of the electric change storage layers, and a channel layer extending perpendicularly, and each of the first dielectric layers has a first maximum length, and each of the electric charge storage layers has a second maximum length greater than the first maximum length in the first direction.
    Type: Grant
    Filed: August 14, 2020
    Date of Patent: September 26, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sunil Shim, Suhyeong Lee, Taisoo Lim
  • Patent number: 11764309
    Abstract: In a transistor including an oxide semiconductor film, field-effect mobility and reliability are improved. A semiconductor device includes a gate electrode, an insulating film over the gate electrode, an oxide semiconductor film over the insulating film, and a pair of electrodes over the oxide semiconductor film. The oxide semiconductor film includes a first oxide semiconductor film, a second oxide semiconductor film over the first oxide semiconductor film, and a third oxide semiconductor film over the second oxide semiconductor film. The first oxide semiconductor film, the second oxide semiconductor film, and the third oxide semiconductor film include the same elements. The second oxide semiconductor film includes a region having a higher carrier density than the first oxide semiconductor film and the third oxide semiconductor film.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: September 19, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 11764266
    Abstract: A semiconductor device includes a first field-effect transistor positioned over a substrate, a second field-effect transistor stacked over the first field-effect transistor, a third field-effect transistor stacked over the second field-effect transistor, and a fourth field-effect transistor stacked over the third field-effect transistor. A bottom gate structure is disposed around a first channel structure of the first field-effect transistor and positioned over the substrate. An intermediate gate structure is disposed over the bottom gate structure and around a second channel structure of the second field-effect transistor and a third channel structure of the third field-effect transistor. A top gate structure is disposed over the intermediate gate structure and around a fourth channel structure of the fourth field-effect transistor.
    Type: Grant
    Filed: December 5, 2022
    Date of Patent: September 19, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Lars Liebmann, Jeffrey Smith, Daniel Chanemougame, Paul Gutwin
  • Patent number: 11747608
    Abstract: A MEMS optical device including: a semiconductor body; a main cavity, which extends within the semiconductor body; a membrane suspended over the main cavity; a piezoelectric actuator, which is mechanically coupled to the membrane and can be electronically controlled so as to deform the membrane; a micro-lens, mechanically coupled to the membrane so as to undergo deformation following the deformation of the membrane; and a rigid optical element, which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane. The micro-lens and the main cavity are arranged on opposite sides of the membrane.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: September 5, 2023
    Inventors: Enri Duqi, Dario Paci, Lorenzo Baldo, Domenico Giusti