Abstract: A power semiconductor transistor includes: a semiconductor body coupled to a load terminal; a drift region in the semiconductor body and having dopants of a first conductivity type; a first trench extending into the semiconductor body along a vertical direction and including a control electrode electrically insulated from the semiconductor body by an insulator; a second trench extending into the semiconductor body along the vertical direction; a mesa region arranged between the trenches and including a source region electrically connected to the load terminal and a channel region separating the source and drift regions; and a portion of a contiguous plateau region of a second conductivity type arranged in the semiconductor drift region and extending below the trenches and below the channel and source regions, the contiguous plateau region having a plurality of openings aligned below the channel region in a widthwise direction of the channel region.

Abstract: Embodiments of SiC devices and corresponding methods of manufacture are provided. In some embodiments, the SiC device has shielding regions at the bottom of some gate trenches and non-linear junctions formed with the SiC material at the bottom of other gate trenches. In other embodiments, the SiC device has the shielding regions at the bottom of the gate trenches and arranged in rows which run in a direction transverse to a lengthwise extension of the trenches. In still other embodiments, the SiC device has the shielding regions and the non-linear junctions, and wherein the shielding regions are arranged in rows which run in a direction transverse to a lengthwise extension of the trenches.

Abstract: Embodiments of SiC devices and corresponding methods of manufacture are provided. In some embodiments, the SiC device has shielding regions at the bottom of some gate trenches and non-linear junctions formed with the SiC material at the bottom of other gate trenches. In other embodiments, the SiC device has the shielding regions at the bottom of the gate trenches and arranged in rows which run in a direction transverse to a lengthwise extension of the trenches. In still other embodiments, the SiC device has the shielding regions and the non-linear junctions, and wherein the shielding regions are arranged in rows which run in a direction transverse to a lengthwise extension of the trenches.

Abstract: A power semiconductor device includes a semiconductor-on-insulator island having a semiconductor region and an insulation structure, the insulation structure being formed by an oxide and separating the semiconductor region from a portion of a semiconductor body of the power semiconductor device. The insulation structure includes a sidewall that laterally confines the semiconductor region; a bottom that vertically confines the semiconductor region; and a local deepening that forms at least a part of a transition between the sidewall and the bottom, wherein the local deepening extends further along the extension direction as compared to the bottom.

Abstract: A method of manufacturing a silicon carbide device includes: forming a trench in a process surface of a silicon carbide substrate that has a body layer forming second pn junctions with a drift layer structure, wherein the body layer is between the process surface and the drift layer structure and wherein the trench exposes the drift layer structure; implanting dopants through a bottom of the trench to form a shielding region that forms a first pn junction with the drift layer structure; forming dielectric spacers on sidewalls of the trench; and forming a buried portion of an auxiliary electrode in a bottom section of the trench, the buried portion adjoining the shielding region.

Abstract: One embodiment of the invention relates to a method for fabricating a doped semiconductor zone in a semiconductor body. The method includes implanting dopant particles via one side into the semiconductor body or applying a layer containing dopant particles to one side of the semiconductor body. The method also includes irradiating the semiconductor body via the one side with further particles at least in the region containing the dopant particles. The method finally includes carrying out a thermal treatment by means of which the semiconductor body is heated, at least in the region containing the dopant particles, to a predetermined temperature in order to activate the implanted dopant particles, said temperature being less than 700° C.

Abstract: In accordance with an embodiment, a method includes switching on a transistor device by generating a first conducting channel by driving a first gate electrode and, before generating the first conducting channel, generating a second conducting channel by driving a second gate electrode, wherein the second gate electrode is adjacent the first gate electrode in a current flow direction of the transistor device.

Abstract: A silicon carbide substrate has a trench extending from a main surface of the silicon carbide substrate into the silicon carbide substrate. The trench has a trench width at a trench bottom. A shielding region is formed in the silicon carbide substrate. The shielding region extends along the trench bottom. In at least one doping plane extending approximately parallel to the trench bottom, a dopant concentration in the shielding region over a lateral first width deviates by not more than 10% from a maximum value of the dopant concentration. The first width is less than the trench width and is at least 30% of the trench width.

Abstract: An embodiment of a semiconductor device includes a SiC semiconductor body region having a body region of a first conductivity type, a drift zone of a second conductivity type, and a compensation structure of the first conductivity type. The compensation structure and a drift zone section of the drift zone form a super junction structure. The compensation structure adjoins the body region and is positioned entirely below the body region in a vertical direction perpendicular to a surface of the SiC semiconductor body. The compensation structure includes a first compensation sub-structure and a second compensation sub-structure. The first compensation sub-structure and the second compensation sub-structure are arranged above one another in the vertical direction. A width of the compensation structure changes along the vertical direction.

Abstract: A semiconductor device includes a trench structure extending from a first surface into a silicon carbide semiconductor body. The trench structure includes an auxiliary electrode at a bottom of the trench structure and a gate electrode arranged between the auxiliary electrode and the first surface. A shielding region adjoins the auxiliary electrode at the bottom of the trench structure and forms a first pn junction with a drift structure. A corresponding method of manufacturing the semiconductor device is also described.

Abstract: A method includes: forming trenches extending from a surface along a vertical direction into a semiconductor body, facing trench sidewalls of two adjacent trenches laterally confining a mesa region of the semiconductor body along a first lateral direction; forming a body region in the mesa region, a surface of the body region in the mesa region at least partially forming the semiconductor body surface; forming a first insulation layer on the semiconductor body surface; subjecting the semiconductor body region to a tilted source implantation using at least one contact hole in the first insulation layer at least partially as a mask for forming a semiconductor source region in the mesa region. The tilted source implantation is tilted from the vertical direction by an angle of at least 10°. The semiconductor source region extends for no more than 80% of a width of the mesa region along the first lateral direction.

Abstract: A method for protecting a power switch during turn-on includes sensing that a change in current through the power switch is in regulation, measuring a time the change in current through the power switch is in regulation, and comparing the time the change in current through the power switch is in regulation to a reference time. An over current signal, which can be used to disable the power switch, is generated if the time the change in current through the power switch is in excess of the reference time.

Abstract: A body structure and a drift zone are formed in a semiconductor layer, wherein the body structure and the drift zone form a first pn junction. A silicon nitride layer is formed on the semiconductor layer. A silicon oxide layer is formed from at least a vertical section of the silicon nitride layer by oxygen radical oxidation.

Abstract: A circuit includes a transistor circuit including a first node, a second node, and a plurality of transistors coupled in parallel between the first node and the second node. The circuit further includes a drive circuit configured to switch on a first group of the plurality of transistors, the first group including a first subgroup and a second subgroup and each of the first subgroup and the second subgroup including one or more of the transistors. The drive circuit is further configured to switch off the first subgroup at the end of a first time period and switch off the second subgroup at a time instant before the end of the first time period.

Abstract: In accordance with an embodiment, a method includes switching on a transistor device by generating a first conducting channel by driving a first gate electrode and, before generating the first conducting channel, generating a second conducting channel by driving a second gate electrode, wherein the second gate electrode is adjacent the first gate electrode in a current flow direction of the transistor device.

Abstract: A method includes partly removing a supporting layer arranged between a first semiconductor layer and a second semiconductor layer using an etching process to form at least one undercut between the first semiconductor layer and the second semiconductor layer, at least partly filling the at least one undercut with a first material having a higher thermal conductivity than the supporting layer, and forming a sensor device in or on the second semiconductor layer. Semiconductor arrangements and devices produced by the method are also described.

Abstract: A semiconductor device includes an anode doping region of a diode structure arranged in a semiconductor substrate. The anode doping region has a first conductivity type. The semiconductor device further includes a second conductivity type contact doping region having a second conductivity type. The second conductivity type contact doping region is arranged at a surface of the semiconductor substrate and surrounded in the semiconductor substrate by the anode doping region. The anode doping region includes a buried non-depletable portion. At least part of the buried non-depletable portion is located below the second conductivity type contact doping region in the semiconductor substrate.

Abstract: A power semiconductor device includes a semiconductor body coupled to first and second load terminal structures, and first and second cells each configured for controlling a load current and electrically connected to the first load terminal structure and to a drift region. A first mesa in the first cell includes a port region electrically connected to the first load terminal structure, and a first channel region coupled to the drift region. A second mesa included in the second cell includes a port region electrically connected to the first load terminal structure, and a second channel region coupled to the drift region. The mesas are spatially confined in a direction perpendicular to a direction of the load current by an insulation structure, and have a total extension of less than 100 nm in that direction. The first channel region includes an inversion channel. The second channel region includes an accumulation channel.

Abstract: A current sensor and a current sensing method are disclosed. The current sensor includes a sensor chip having a first chip surface, a second chip surface and at least one sensor element, and a housing having a first housing surface adjoining the second chip surface and a second housing surface spaced apart from the first housing surface and separated from the first housing surface by a spacer section of the housing. The second housing surface is configured to be mounted on a conductor and is electrically insulating.

Abstract: A charge-compensation semiconductor device includes a source metallization spaced apart from a gate metallization, and a semiconductor body including opposing first and second sides, a drift region, a plurality of body regions adjacent the first side and each forming a respective first pn-junction with the drift region, and a plurality of compensation regions arranged between the second side and the body regions. Each compensation region forms a respective further pn-junction with the drift region. A plurality of gate electrodes in Ohmic connection with the gate metallization is arranged adjacent the first side and separated from the body regions and the drift region by a dielectric region. A resistive current path is formed between one of the gate electrodes and a first one of the compensation regions, or between the first one of the compensation regions and a further metallization spaced apart from the source metallization and the gate metallization.