Patents by Inventor Armin Willmeroth

Armin Willmeroth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9570607
    Abstract: In a field-effect semiconductor device, alternating first n-type and p-type pillar regions are arranged in the active area. The first n-type pillar regions are in Ohmic contact with the drain metallization. The first p-type pillar regions are in Ohmic contact with the source metallization. An integrated dopant concentration of the first n-type pillar regions substantially matches that of the first p-type pillar regions. A second p-type pillar region is in Ohmic contact with the source metallization, arranged in the peripheral area and has an integrated dopant concentration smaller than that of the first p-type pillar regions divided by a number of the first p-type pillar regions. A second n-type pillar region is arranged between the second p-type pillar region and the first p-type pillar regions, and has an integrated dopant concentration smaller than that of the first n-type pillar regions divided by a number of the first n-type pillar regions.
    Type: Grant
    Filed: November 6, 2015
    Date of Patent: February 14, 2017
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Anton Mauder, Joachim Weyers, Franz Hirler, Markus Schmitt, Armin Willmeroth, Björn Fischer, Stefan Gamerith
  • Patent number: 9530764
    Abstract: A semiconductor device arrangement includes a first semiconductor device having a load path and a plurality of second semiconductor devices, each having a load path between a first and a second load terminal and a control terminal. The second semiconductor devices have their load paths connected in series and connected in series to the load path of the first semiconductor device. Each of the second semiconductor devices has its control terminal connected to the load terminal of one of the other second semiconductor devices, and one of the second semiconductor devices has its control terminal connected to one of the load terminals of the first semiconductor device. Each of the second semiconductor devices has at least one device characteristic. At least one device characteristic of at least one of the second semiconductor devices is different from the corresponding device characteristic of others of the second semiconductor devices.
    Type: Grant
    Filed: January 30, 2013
    Date of Patent: December 27, 2016
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Rolf Weis, Michael Treu, Gerald Deboy, Armin Willmeroth, Hans Weber
  • Publication number: 20160372466
    Abstract: Disclosed is a semiconductor device arrangement including a first semiconductor device having a load path, and a plurality of second transistors, each having a load path between a first and a second load terminal and a control terminal. The second transistors have their load paths connected in series and connected in series to the load path of the first transistor, each of the second transistors has its control terminal connected to the load terminal of one of the other second transistors, and one of the second transistors has its control terminal connected to one of the load terminals of the first semiconductor device.
    Type: Application
    Filed: August 29, 2016
    Publication date: December 22, 2016
    Inventors: Rolf Weis, Franz Hirler, Martin Feldtkeller, Gerald Deboy, Matthias Stecher, Armin Willmeroth
  • Patent number: 9524966
    Abstract: The present disclosure provides a semiconductor device, which includes a compensation area which includes p-regions and n-regions, and a plurality of transistor cells on the compensation area. Each of the plurality of transistor cells includes a source region, a body region, a gate and an interlayer dielectric, and a source metallization layer arranged on the interlayer dielectric. The semiconductor device further includes an additional n-doping region that is provided on top of the n-regions between two neighboring body regions, and a source plug which fills a contact hole formed through the interlayer dielectric between the source and body region and the source metallization layer, so as to electrically connect the source and body region and the source metallization layer.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: December 20, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Winfried Kaindl, Franz Hirler, Armin Willmeroth
  • Patent number: 9515137
    Abstract: A super junction semiconductor device includes a super junction structure that is formed in a semiconductor body having a first and a second, parallel surface. The super junction structure includes first areas of the first conductivity type and second areas of a second conductivity type which is the opposite of the first conductivity type. In a cell area surrounded by an edge area, the super junction structure has a first nominal breakdown voltage in a first portion and a second nominal breakdown voltage, which differs from the first nominal breakdown voltage, in a second portion to provide improved avalanche ruggedness.
    Type: Grant
    Filed: February 21, 2013
    Date of Patent: December 6, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Gerald Deboy
  • Patent number: 9484400
    Abstract: A super junction semiconductor device is formed by forming at least a portion of a drift layer on a doped layer of a first conductivity type, implanting first dopants of a first conductivity type and second dopants of a second conductivity type into the drift layer using one or more implant masks with openings to form stripe-shaped first implant regions of the first conductivity type and stripe-shaped second implant regions of the second conductivity type in alternating order, and performing a heat treatment for controlling a diffusion of dopants from the implant regions to form stripe-shaped first regions of the first conductivity type and stripe-shaped second regions of the second conductivity type.
    Type: Grant
    Filed: October 8, 2015
    Date of Patent: November 1, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans Weber, Markus Schmitt, Thomas Wahls, Rolf Weis
  • Publication number: 20160268370
    Abstract: A super junction semiconductor device includes a semiconductor portion with first and second surfaces parallel to one another and including a doped layer of a first conductivity type formed at least in a cell area. Columnar first super junction regions of a second conductivity type extend in a direction perpendicular to the first surface and are separated by columnar second super junction regions of the first conductivity type. The first and second super junction regions form a super junction structure between the first surface and the doped layer. A first electrode structure directly adjoins the first surface and a second electrode structure directly adjoins the second surface. The first electrode structure has a first thickness and the second electrode structure has a second thickness. A sum of the first and second thicknesses is at least 20% of the thickness of the semiconductor portion between the first and second surfaces.
    Type: Application
    Filed: May 20, 2016
    Publication date: September 15, 2016
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Patent number: 9431382
    Abstract: Disclosed is a semiconductor device arrangement including a first semiconductor device having a load path, and a plurality of second transistors, each having a load path between a first and a second load terminal and a control terminal. The second transistors have their load paths connected in series and connected in series to the load path of the first transistor, each of the second transistors has its control terminal connected to the load terminal of one of the other second transistors, and one of the second transistors has its control terminal connected to one of the load terminals of the first semiconductor device.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: August 30, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Rolf Weis, Franz Hirler, Martin Feldtkeller, Gerald Deboy, Matthias Stecher, Armin Willmeroth
  • Publication number: 20160218174
    Abstract: A super junction semiconductor device includes an impurity layer of a first (conductivity) type formed in a semiconductor portion having first and second parallel surfaces, a super junction structure between the first surface and impurity layer and including first columns of the first type and second columns of a second (conductivity) type, a body zone of the second type formed between the first surface and one of the second columns at least partially in the vertical projection of the second columns, and a field extension zone of the second type electrically connected to the body zone and arranged in the vertical projection of one of the columns. An area impurity density in the field extension zone is between 1×1012 and 5×1012 cm?2. A mean net impurity concentration in the field extension zone is higher than in the second columns and lower than in the body zone.
    Type: Application
    Filed: April 1, 2016
    Publication date: July 28, 2016
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Patent number: 9385119
    Abstract: A semiconductor arrangement includes a semiconductor body with a first active region, a second active region and an isolation region arranged between the first and the second active regions. At least one source region and at least one body region of a first transistor are integrated in the first active region. At least one source region and at least one body region of a second transistor are integrated in the second active region. Source and body regions of a third transistor are integrated in the second active region. The second transistor and the third transistor have a common source electrode. The first transistor, the second transistor and the third transistor have a common drain electrode.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: July 5, 2016
    Assignee: Infineon Technologies AG
    Inventors: Armin Willmeroth, Marc Fahlenkamp
  • Publication number: 20160190125
    Abstract: A semiconductor device includes a semiconductor substrate having an outer rim, a plurality of switchable cells defining an active area, and an edge termination region arranged between the switchable cells and the outer rim. Each of the switchable cells includes a gate electrode structure. The semiconductor device further includes a gate metallization in contact with the gate electrode structure. The active area includes at least a first switchable region having a first specific transconductance and at least a second switchable region having a second specific transconductance which is different from the first specific transconductance. The second switchable region is arranged between the gate metallization and the first switchable region. A ratio of the area of the second switchable region to the total area of the switchable regions is in a range from 5% to 50%.
    Type: Application
    Filed: March 8, 2016
    Publication date: June 30, 2016
    Inventors: Christian Fachmann, Enrique Vecino Vazquez, Armin Willmeroth
  • Patent number: 9349792
    Abstract: A super junction semiconductor device includes a semiconductor portion with a first surface and a second surface parallel to the first surface. The semiconductor portion includes a doped layer of a first conductivity type formed at least in a cell area. The super junction semiconductor device further includes columnar first super junction regions of a second, opposite conductivity type extending in a direction perpendicular to the first surface and separated by columnar second super junction regions of the first conductivity type. The first and second super junction regions form a super junction structure between the first surface and the doped layer. A distance between the first super junction regions and the second surface does not exceed 30 ?m.
    Type: Grant
    Filed: January 29, 2015
    Date of Patent: May 24, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Patent number: 9318549
    Abstract: A super junction semiconductor device includes a semiconductor portion with parallel first and second surfaces. An impurity layer of a first conductivity type is formed in the semiconductor portion. Between the first surface and the impurity layer a super junction structure includes first columns of the first conductivity type and second columns of a second conductivity type. A sign of a compensation rate between the first and second columns may change along a vertical extension of the columns perpendicular to the first surface. A body zone of the second conductivity type is formed between the first surface and one of the second columns. A field extension zone of the second conductivity type may be electrically connected to the body zone or a field extension zone of the first conductivity type may be connected to the impurity layer. The field extension zone improves the avalanche characteristics of the semiconductor device.
    Type: Grant
    Filed: February 18, 2013
    Date of Patent: April 19, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Publication number: 20160104768
    Abstract: A super junction semiconductor device is formed by forming at least a portion of a drift layer on a doped layer of a first conductivity type, implanting first dopants of a first conductivity type and second dopants of a second conductivity type into the drift layer using one or more implant masks with openings to form stripe-shaped first implant regions of the first conductivity type and stripe-shaped second implant regions of the second conductivity type in alternating order, and performing a heat treatment for controlling a diffusion of dopants from the implant regions to form stripe-shaped first regions of the first conductivity type and stripe-shaped second regions of the second conductivity type.
    Type: Application
    Filed: October 8, 2015
    Publication date: April 14, 2016
    Inventors: Armin Willmeroth, Franz Hirler, Hans Weber, Markus Schmitt, Thomas Wahls, Rolf Weis
  • Patent number: 9312346
    Abstract: A semiconductor device has a cell field with drift zones of a first type of conductivity and charge carrier compensation zones of a second type of conductivity complementary to the first type. An edge region which surrounds the cell field has a higher blocking strength than the cell field, the edge region having a near-surface area which is undoped to more weakly doped than the drift zones, and beneath the near-surface area at least one buried, vertically extending complementarily doped zone is positioned.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: April 12, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Franz Hirler, Armin Willmeroth, Michael Rueb, Holger Kapels
  • Patent number: 9312334
    Abstract: A semiconductor component is disclosed. One embodiment provides a semiconductor body having a cell region with at least one zone of a first conduction type and at least one zone of a second conduction type in a rear side. A drift zone of the first conduction type in the cell region is provided. The drift zone contains at least one region through which charge carriers flow in an operating mode of the semiconductor component in one polarity and charge carriers do not flow in an operating mode of the semiconductor component in an opposite polarity.
    Type: Grant
    Filed: September 24, 2014
    Date of Patent: April 12, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Holger Ruething, Frank Pfirsch, Armin Willmeroth, Frank Hille, Hans-Joachim Schulze
  • Patent number: 9306064
    Abstract: The present disclosure provides a semiconductor device and an integrated apparatus having the same. The semiconductor device includes a substrate, a buffer layer on the substrate, a compensation area which includes a p-region and a n-region on the buffer layer, and a transistor cell on the compensation area. The transistor cell includes a source region, a body region, a gate electrode and a gate dielectric formed at least between the gate electrode and the body region. The gate dielectric has a thickness in a range of 12 nm to 50 nm.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: April 5, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Uwe Wahl, Armin Willmeroth
  • Patent number: 9293533
    Abstract: A semiconductor device includes a semiconductor substrate having an outer rim, a plurality of switchable cells defining an active area, and an edge termination region arranged between the switchable cells defining the active area and the outer rim. Each of the switchable cells includes a body region, a gate electrode structure and a source region. The active area defined by the switchable cells includes at least a first switchable region having a first transconductance and a second switchable region having a second transconductance which is different from the first transconductance.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: March 22, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Christian Fachmann, Enrique Vecino Vazquez, Armin Willmeroth
  • Patent number: 9281392
    Abstract: A charge-compensation semiconductor device includes a semiconductor body including a first surface, a second surface arranged opposite to the first surface, an edge delimiting the semiconductor body in a horizontal direction substantially parallel to the first surface, a drain region of a of a first conductivity type extending to the second surface, an active area, and a peripheral area arranged between the active area and the edge, a source metallization arranged on the first surface, and a drain metallization arranged on the drain region and in Ohmic contact with the drain region.
    Type: Grant
    Filed: June 27, 2014
    Date of Patent: March 8, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Joachim Weyers, Armin Willmeroth
  • Publication number: 20160064554
    Abstract: In a field-effect semiconductor device, alternating first n-type and p-type pillar regions are arranged in the active area. The first n-type pillar regions are in Ohmic contact with the drain metallization. The first p-type pillar regions are in Ohmic contact with the source metallization. An integrated dopant concentration of the first n-type pillar regions substantially matches that of the first p-type pillar regions. A second p-type pillar region is in Ohmic contact with the source metallization, arranged in the peripheral area and has an integrated dopant concentration smaller than that of the first p-type pillar regions divided by a number of the first p-type pillar regions. A second n-type pillar region is arranged between the second p-type pillar region and the first p-type pillar regions, and has an integrated dopant concentration smaller than that of the first n-type pillar regions divided by a number of the first n-type pillar regions.
    Type: Application
    Filed: November 6, 2015
    Publication date: March 3, 2016
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Anton Mauder, Joachim Weyers, Franz Hirler, Markus Schmitt, Armin Willmeroth, Björn Fischer, Stefan Gamerith