Patents by Inventor Armin Willmeroth

Armin Willmeroth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150380542
    Abstract: A charge-compensation semiconductor device includes a semiconductor body including a first surface, a second surface arranged opposite to the first surface, an edge delimiting the semiconductor body in a horizontal direction substantially parallel to the first surface, a drain region of a of a first conductivity type extending to the second surface, an active area, and a peripheral area arranged between the active area and the edge, a source metallization arranged on the first surface, and a drain metallization arranged on the drain region and in Ohmic contact with the drain region.
    Type: Application
    Filed: June 27, 2014
    Publication date: December 31, 2015
    Inventors: Joachim Weyers, Armin Willmeroth
  • Publication number: 20150372087
    Abstract: A semiconductor device includes a semiconductor substrate having an outer rim, a plurality of switchable cells defining an active area, and an edge termination region arranged between the switchable cells defining the active area and the outer rim. Each of the switchable cells includes a body region, a gate electrode structure and a source region. The active area defined by the switchable cells includes at least a first switchable region having a first transconductance and a second switchable region having a second transconductance which is different from the first transconductance.
    Type: Application
    Filed: June 20, 2014
    Publication date: December 24, 2015
    Inventors: Christian Fachmann, Enrique Vecino Vazquez, Armin Willmeroth
  • Patent number: 9209292
    Abstract: A field-effect semiconductor device includes a semiconductor body having a first surface and an edge, an active area, and a peripheral area between the active area and the edge, a source metallization on the first surface and a drain metallization. In the active area, first conductivity type drift portions alternate with second conductivity type compensation regions. The drift portions contact the drain metallization and have a first maximum doping concentration. The compensation regions are in Ohmic contact with the source metallization. The peripheral area includes a first edge termination region and a second semiconductor region in Ohmic contact with the drift portions having a second maximum doping of the first conductivity type which lower than the first maximum doping concentration by a factor of ten. The first edge termination region of the second conductivity type adjoins the second semiconductor region and is in Ohmic contact with the source metallization.
    Type: Grant
    Filed: November 15, 2013
    Date of Patent: December 8, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Anton Mauder, Joachim Weyers, Franz Hirler, Markus Schmitt, Armin Willmeroth, Björn Fischer, Stefan Gamerith
  • Publication number: 20150333169
    Abstract: A semiconductor device includes a semiconductor body, which includes transistor cells and a drift zone between a drain layer and the transistor cells. The drift zone includes a compensation structure. Above a depletion voltage a first output charge gradient obtained by increasing a drain-to-source voltage from the depletion voltage to a maximum drain-to-source voltage deviates by less than 5% from a second output charge gradient obtained by decreasing the drain-to-source voltage from the maximum drain-to-source voltage to the depletion voltage. At the depletion voltage the first output charge gradient exhibits a maximum curvature.
    Type: Application
    Filed: May 14, 2014
    Publication date: November 19, 2015
    Inventors: Armin Willmeroth, Franz Hirler, Bjoern Fischer, Joachim Weyers
  • Patent number: 9190511
    Abstract: A semiconductor component with a drift region and a drift control region. One embodiment includes a semiconductor body having a drift region of a first conduction type in the semiconductor body. A drift control region composed of a semiconductor material, which is arranged, at least in sections, is adjacent to the drift region in the semiconductor body. An accumulation dielectric is arranged between the drift region and the drift control region.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: November 17, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Frank Pfirsch, Anton Mauder, Armin Willmeroth, Hans-Joachim Schulze, Stefan Sedlmaier, Markus Zundel, Franz Hirler, Arunjai Mittal
  • Publication number: 20150325641
    Abstract: A super junction semiconductor device includes a semiconductor portion having strip structures in a cell area. Each strip structure has a compensation structure with first and second sections inversely provided on opposite sides of a fill structure. Each section has first and second compensation layers of complementary conductivity types. The strip structures are linear stripes extending through the cell area in a first lateral direction and into an edge area surrounding the cell area in lateral directions. Each strip structure has an end section with a termination portion in the edge area in which the first compensation layer of the first section is connected with the first compensation layer of the second section via a first conductivity layer, and the second compensation layer of the first section is connected with the second compensation layer of the second section via a second conductivity layer.
    Type: Application
    Filed: July 16, 2015
    Publication date: November 12, 2015
    Inventors: Franz Hirler, Hans Weber, Stefan Gamerith, Armin Willmeroth
  • Patent number: 9184277
    Abstract: A super junction semiconductor device may include one or more doped zones in a cell area. A drift layer is provided between a doped layer of a first conductivity type and the one or more doped zones. The drift layer includes first regions of the first conductivity type and second regions of a second conductivity type, which is the opposite of the first conductivity type. In an edge area that surrounds the cell area, the first regions may include first portions separating the second regions in a first direction and second portions separating the second regions in a second direction orthogonal to the first direction. The first and second portions are arranged such that a longest second region in the edge area is at most half as long as a dimension of the edge area parallel to the longest second region.
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: November 10, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans Weber, Markus Schmitt, Thomas Wahls, Rolf Weis
  • Patent number: 9147763
    Abstract: An active area of a semiconductor body includes a first charge-compensation structure having spaced apart n-type pillar regions, and an n-type first field-stop region of a semiconductor material in Ohmic contact with a drain metallization and the n-type pillar regions and having a doping charge per area higher than a breakdown charge per area of the semiconductor material. A punch-through area of the semiconductor body includes a p-type semiconductor region in Ohmic contact with a source metallization, a floating p-type body region and an n-type second field-stop region. The floating p-type body region extends into the active area. The second field-stop region is in Ohmic contact with the first field-stop region, forms a pn-junction with the floating p-type body region, is arranged between the p-type semiconductor region and floating p-type body region, and has a doping charge per area lower than the breakdown charge per area of the semiconductor material.
    Type: Grant
    Filed: September 23, 2013
    Date of Patent: September 29, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Franz Hirler, Armin Willmeroth, Stefan Gamerith
  • Publication number: 20150243645
    Abstract: Disclosed is a semiconductor device arrangement including a first semiconductor device having a load path, and a plurality of second transistors, each having a load path between a first and a second load terminal and a control terminal. The second transistors have their load paths connected in series and connected in series to the load path of the first transistor, each of the second transistors has its control terminal connected to the load terminal of one of the other second transistors, and one of the second transistors has its control terminal connected to one of the load terminals of the first semiconductor device.
    Type: Application
    Filed: February 27, 2015
    Publication date: August 27, 2015
    Inventors: Rolf Weis, Franz Hirler, Martin Feldtkeller, Gerald Deboy, Matthias Stecher, Armin Willmeroth
  • Patent number: 9117874
    Abstract: A semiconductor device, in which a first trench section is produced proceeding from a surface of a semiconductor body into the semiconductor body. A semiconductor layer is produced above the surface and above the first trench section. A further trench section is produced in the semiconductor layer in such a way that the first trench section and the further trench section form a continuous trench structure.
    Type: Grant
    Filed: November 19, 2013
    Date of Patent: August 25, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Franz Hirler, Thoralf Kautzsch, Anton Mauder, Michael Rueb, Hans-Joachim Schulze, Helmut Strack, Armin Willmeroth
  • Patent number: 9117694
    Abstract: A super junction semiconductor device includes strip structures between mesa regions that protrude from a base section in a cell area. Each strip structure includes a compensation structure with a first and a second section inversely provided on opposing sides of a fill structure. Each section includes a first compensation layer of a first conductivity type and a second compensation layer of a complementary second conductivity type. The strip structures extend into an edge area surrounding the cell area. In the edge area the strip structures include end sections. The end sections may be modified to enhance break down voltage characteristics, avalanche ruggedness and commutation behavior.
    Type: Grant
    Filed: May 1, 2013
    Date of Patent: August 25, 2015
    Assignee: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Franz Hirler, Hans Weber, Stefan Gamerith, Armin Willmeroth
  • Publication number: 20150214348
    Abstract: A super junction semiconductor device includes a semiconductor portion including mesa regions protruding from a base section and spatially separated in a lateral direction parallel to a first surface of the semiconductor portion, and a compensation structure covering at least sidewalls of the mesa regions. The compensation structure includes at least two first compensation layers of a first conductivity type, at least two second compensation layers of a complementary second conductivity type, and at least one interdiffusion layer between one of the first and one of the second compensation layers.
    Type: Application
    Filed: April 6, 2015
    Publication date: July 30, 2015
    Inventors: Stefan Gamerith, Armin Willmeroth, Franz Hirler
  • Patent number: 9070580
    Abstract: A super junction structure is formed in a semiconductor portion of a super junction semiconductor device. The super junction structure includes a compensation structure with a first compensation layer of a first conductivity type and a second compensation layer of a complementary second conductivity type. The compensation structure lines at least sidewall portions of compensation trenches that extend between semiconductor mesas along a vertical direction perpendicular to a first surface of the semiconductor portion. Within the super junction structure and a pedestal layer that may adjoin the super junction structure, a sign of a lateral compensation rate changes along the vertical direction resulting in a local peak of a vertical electric field gradient and to improved avalanche ruggedness.
    Type: Grant
    Filed: May 1, 2013
    Date of Patent: June 30, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Markus Schmitt, Winfried Kaindl, Hans Weber
  • Publication number: 20150145038
    Abstract: A super junction semiconductor device includes a semiconductor portion with a first surface and a second surface parallel to the first surface. The semiconductor portion includes a doped layer of a first conductivity type formed at least in a cell area. The super junction semiconductor device further includes columnar first super junction regions of a second, opposite conductivity type extending in a direction perpendicular to the first surface and separated by columnar second super junction regions of the first conductivity type. The first and second super junction regions form a super junction structure between the first surface and the doped layer. A distance between the first super junction regions and the second surface does not exceed 30 ?m.
    Type: Application
    Filed: January 29, 2015
    Publication date: May 28, 2015
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Patent number: 9029944
    Abstract: In a semiconductor substrate with a first surface and a working surface parallel to the first surface, columnar first and second super junction regions of a first and a second conductivity type are formed. The first and second super junction regions extend in a direction perpendicular to the first surface and form a super junction structure. The semiconductor portion is thinned such that, after the thinning, a distance between the first super junction regions having the second conductivity type and a second surface obtained from the working surface does not exceed 30 ?m. Impurities are implanted into the second surface to form one or more implanted zones. The embodiments combine super junction approaches with backside implants enabled by thin wafer technology.
    Type: Grant
    Filed: February 18, 2013
    Date of Patent: May 12, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Patent number: 9024383
    Abstract: A super junction semiconductor device comprises a semiconductor portion with mesa regions protruding from a base section. The mesa regions are spatially separated in a lateral direction parallel to a first surface of the semiconductor portion. A compensation structure with at least two first compensation layers of a first conductivity type and at least two second compensation layers of a complementary second conductivity type may cover sidewalls of the mesa regions and portions of the base section between the mesa regions. Buried lateral faces of segments of the compensation structure may cut the first and second compensation layers between the mesa regions. A drain connection structure of the first conductivity type may extend along the buried lateral faces and may structurally connect the first compensation layers in an economic way keeping the thermal budget low.
    Type: Grant
    Filed: May 1, 2013
    Date of Patent: May 5, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Stefan Gamerith, Armin Willmeroth, Franz Hirler
  • Publication number: 20150116031
    Abstract: The present disclosure provides a semiconductor device and an integrated apparatus having the same. The semiconductor device includes a substrate, a buffer layer on the substrate, a compensation area which includes a p-region and a n-region on the buffer layer, and a transistor cell on the compensation area. The transistor cell includes a source region, a body region, a gate electrode and a gate dielectric formed at least between the gate electrode and the body region. The gate dielectric has a thickness in a range of 12 nm to 50 nm.
    Type: Application
    Filed: October 30, 2014
    Publication date: April 30, 2015
    Inventors: Uwe Wahl, Armin Willmeroth
  • Publication number: 20150115354
    Abstract: The present disclosure provides a semiconductor device, which includes a compensation area which includes p-regions and n-regions, and a plurality of transistor cells on the compensation area. Each of the plurality of transistor cells includes a source region, a body region, a gate and an interlayer dielectric, and a source metallization layer arranged on the interlayer dielectric. The semiconductor device further includes an additional n-doping region that is provided on top of the n-regions between two neighboring body regions, and a source plug which fills a contact hole formed through the interlayer dielectric between the source and body region and the source metallization layer, so as to electrically connect the source and body region and the source metallization layer.
    Type: Application
    Filed: October 30, 2014
    Publication date: April 30, 2015
    Inventors: Winfried Kaindl, Franz Hirler, Armin Willmeroth
  • Patent number: 9012280
    Abstract: According to an embodiment, a super junction semiconductor device may be manufactured by introducing impurities of a first impurity type into an exposed surface of a first semiconductor layer of the first impurity type, thus forming an implant layer. A second semiconductor layer of the first impurity type may be provided on the exposed surface and trenches may be etched through the second semiconductor layer into the first semiconductor layer. Thereby first columns with first overcompensation zones obtained from the implant layer are formed between the trenches. Second columns of the second conductivity type may be provided in the trenches. The first and second columns form a super junction structure with a vertical first section in which the first overcompensation zones overcompensate a corresponding section in the second columns.
    Type: Grant
    Filed: October 31, 2014
    Date of Patent: April 21, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Publication number: 20150097234
    Abstract: A half-bridge circuit includes a low-side transistor and a high-side transistor each having a load path and a control terminal, and a high-side drive circuit having a level shifter with a level shifter transistor. The low-side transistor and the level shifter transistor are integrated in a common semiconductor body.
    Type: Application
    Filed: December 15, 2014
    Publication date: April 9, 2015
    Inventors: Armin Willmeroth, Franz Hirler, Peter Irsigler