Patents by Inventor Armin Willmeroth

Armin Willmeroth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8829584
    Abstract: A semiconductor device with a dynamic gate drain capacitance. One embodiment provides a semiconductor device. The device includes a semiconductor substrate, a field effect transistor structure including a source region, a first body region, a drain region, a gate electrode structure and a gate insulating layer. The gate insulating layer is arranged between the gate electrode structure and the body region. The gate electrode structure and the drain region partially form a capacitor structure including a gate-drain capacitance configured to dynamically change with varying reverse voltages applied between the source and drain regions. The gate-drain capacitance includes at least one local maximum at a given threshold or a plateau-like course at given reverse voltage.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: September 9, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Hans-Joachim Schulze, Carolin Tolksdorf, Winfried Kaindl, Armin Willmeroth
  • Patent number: 8815686
    Abstract: A method for production of doped semiconductor regions in a semiconductor body of a lateral trench transistor includes forming a trench in the semiconductor body and introducing dopants into at least one area of the semiconductor body that is adjacent to the trench, by carrying out a process in which dopants enter the at least one area through inner walls of the trench.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: August 26, 2014
    Assignee: Infineon Technologies AG
    Inventors: Franz Hirler, Uwe Wahl, Thorsten Meyer, Michael Rüb, Armin Willmeroth, Markus Schmitt, Carolin Tolksdorf, Carsten Schaeffer
  • Publication number: 20140231969
    Abstract: A semiconductor device has a cell field with drift zones of a first type of conductivity and charge carrier compensation zones of a second type of conductivity complementary to the first type. An edge region which surrounds the cell field has a higher blocking strength than the cell field, the edge region having a near-surface area which is undoped to more weakly doped than the drift zones, and beneath the near-surface area at least one buried, vertically extending complementarily doped zone is positioned.
    Type: Application
    Filed: April 24, 2014
    Publication date: August 21, 2014
    Applicant: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Franz Hirler, Armin Willmeroth, Michael Rueb, Holger Kapels
  • Publication number: 20140231904
    Abstract: According to an embodiment, a super junction semiconductor device may be manufactured by introducing impurities of a first impurity type into an exposed surface of a first semiconductor layer of the first impurity type, thus forming an implant layer. A second semiconductor layer of the first impurity type may be provided on the exposed surface and trenches may be etched through the second semiconductor layer into the first semiconductor layer. Thereby first columns with first overcompensation zones obtained from the implant layer are formed between the trenches. Second columns of the second conductivity type may be provided in the trenches. The first and second columns form a super junction structure with a vertical first section in which the first overcompensation zones overcompensate a corresponding section in the second columns.
    Type: Application
    Filed: February 18, 2013
    Publication date: August 21, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Publication number: 20140231928
    Abstract: A semiconductor device includes a semiconductor layer with a super junction structure including first columns of a first conductivity type and second columns of a second conductivity type opposite the first conductivity type. The super junction structure is formed in a cell area and in an inner portion of an edge area surrounding the cell area. In the inner portion of the edge area a reverse blocking capability is locally reduced by a local modification of the semiconductor layer. The local modification allows an electric field to extend in case an avalanche breakdown occurs. The reverse blocking capability is locally reduced in the edge area, wherein once an avalanche breakdown has been triggered the semiconductor device accommodates a higher reverse voltage. Avalanche ruggedness is improved.
    Type: Application
    Filed: February 18, 2013
    Publication date: August 21, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Publication number: 20140231903
    Abstract: A super junction semiconductor device includes a semiconductor portion with parallel first and second surfaces. An impurity layer of a first conductivity type is formed in the semiconductor portion. Between the first surface and the impurity layer a super junction structure includes first columns of the first conductivity type and second columns of a second conductivity type. A sign of a compensation rate between the first and second columns may change along a vertical extension of the columns perpendicular to the first surface. A body zone of the second conductivity type is formed between the first surface and one of the second columns. A field extension zone of the second conductivity type may be electrically connected to the body zone or a field extension zone of the first conductivity type may be connected to the impurity layer. The field extension zone improves the avalanche characteristics of the semiconductor device.
    Type: Application
    Filed: February 18, 2013
    Publication date: August 21, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Franz Hirler, Uwe Wahl
  • Publication number: 20140231909
    Abstract: In a semiconductor substrate with a first surface and a working surface parallel to the first surface, columnar first and second super junction regions of a first and a second conductivity type are formed. The first and second super junction regions extend in a direction perpendicular to the first surface and form a super junction structure. The semiconductor portion is thinned such that, after the thinning, a distance between the first super junction regions having the second conductivity type and a second surface obtained from the working surface does not exceed 30 ?m. Impurities are implanted into the second surface to form one or more implanted zones. The embodiments combine super junction approaches with backside implants enabled by thin wafer technology.
    Type: Application
    Filed: February 18, 2013
    Publication date: August 21, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Publication number: 20140231912
    Abstract: A super junction semiconductor device includes a super junction structure that is formed in a semiconductor body having a first and a second, parallel surface. The super junction structure includes first areas of the first conductivity type and second areas of a second conductivity type which is the opposite of the first conductivity type. In a cell area surrounded by an edge area, the super junction structure has a first nominal breakdown voltage in a first portion and a second nominal breakdown voltage, which differs from the first nominal breakdown voltage, in a second portion to provide improved avalanche ruggedness.
    Type: Application
    Filed: February 21, 2013
    Publication date: August 21, 2014
    Inventors: Armin Willmeroth, Gerald Deboy
  • Publication number: 20140231910
    Abstract: A super junction semiconductor device includes a semiconductor portion with a first surface and a parallel second surface. A doped layer of a first conductivity type is formed at least in a cell area. Columnar first super junction regions of a second, opposite conductivity type extend in a direction perpendicular to the first surface. Columnar second super junction regions of the first conductivity type separate the first super junction regions from each other. The first and second super junction regions form a super junction structure between the first surface and the doped layer. A distance between the first super junction regions and the second surface does not exceed 30 ?m. The on-state or forward resistance of low-voltage devices rated for reverse breakdown voltages below 1000 V can be defined by the resistance of the super junction structure.
    Type: Application
    Filed: February 18, 2013
    Publication date: August 21, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans-Joachim Schulze, Uwe Wahl, Winfried Kaindl
  • Patent number: 8803205
    Abstract: A semiconductor device includes a gate terminal, at least one control terminal and first and second load terminals and at least one device cell. The at least one device cell includes a MOSFET device having a load path and a control terminal, the control terminal coupled to the gate terminal and a JFET device having a load path and a control terminal, the load path connected in series with the load path of the MOSFET device between the load terminals. The at least one device cell further includes a first coupling transistor having a load path and a control terminal, the load path coupled between the control terminal of the JFET device and one of the source terminal and the gate terminal, and the control terminal coupled to the at least one control terminal of the transistor device.
    Type: Grant
    Filed: May 31, 2012
    Date of Patent: August 12, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler, Hans Weber, Michael Treu
  • Patent number: 8754468
    Abstract: A lateral power semiconductor component has a front side, a rear side and a lateral edge. The component further includes a drift zone of a first conductivity type, a source zone of the first conductivity type, a body zone of a second conductivity type opposite the first conductivity type, and a drain zone of the first conductivity type. A gate forms a MOS structure with the drift zone, the source zone and the body zone. A horizontally extending field plate above each semiconductor region of the power semiconductor component forms a plate capacitor structure with an edge plate lying under the field plate. The edge plate includes a highly doped semiconductor material and is electrically connected to one of a source potential and a drain potential of the power semiconductor component.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: June 17, 2014
    Inventors: Uwe Wahl, Armin Willmeroth
  • Patent number: 8716792
    Abstract: A semiconductor device has a cell field with drift zones of a first type of conductivity and charge carrier compensation zones of a second type of conductivity complementary to the first type. An edge region which surrounds the cell field has a higher blocking strength than the cell field, the edge region having a near-surface area which is undoped to more weakly doped than the drift zones, and beneath the near-surface area at least one buried, vertically extending complementarily doped zone is positioned.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: May 6, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Franz Hirler, Armin Willmeroth, Michael Rueb, Holger Kapels
  • Publication number: 20140117437
    Abstract: A super junction semiconductor device may include one or more doped zones in a cell area. A drift layer is provided between a doped layer of a first conductivity type and the one or more doped zones. The drift layer includes first regions of the first conductivity type and second regions of a second conductivity type, which is the opposite of the first conductivity type. In an edge area that surrounds the cell area, the first regions may include first portions separating the second regions in a first direction and second portions separating the second regions in a second direction orthogonal to the first direction. The first and second portions are arranged such that a longest second region in the edge area is at most half as long as a dimension of the edge area parallel to the longest second region.
    Type: Application
    Filed: October 31, 2012
    Publication date: May 1, 2014
    Inventors: Armin Willmeroth, Franz Hirler, Hans Weber, Markus Schmitt, Thomas Wahls, Rolf Weis
  • Patent number: 8698229
    Abstract: Disclosed is a MOSFET including at least one transistor cell. The at least one transistor cell includes a source region, a drain region, a body region and a drift region. The body region is arranged between the source region and the drift region and the drift region is arranged between the body region and the drain region. The at least one transistor cell further includes a compensation region arranged in the drift region and distant to the body region, a source electrode electrically contacting the source region and the body region, a gate electrode arranged adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a coupling arrangement including a control terminal. The coupling arrangement is configured to electrically couple the compensation region to at least one of the body region, the source region, the source electrode and the gate electrode dependent on a control signal received at the control terminal.
    Type: Grant
    Filed: May 31, 2011
    Date of Patent: April 15, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Franz Hirler
  • Publication number: 20140073110
    Abstract: A semiconductor device, in which a first trench section is produced proceeding from a surface of a semiconductor body into the semiconductor body. A semiconductor layer is produced above the surface and above the first trench section. A further trench section is produced in the semiconductor layer in such a way that the first trench section and the further trench section form a continuous trench structure.
    Type: Application
    Filed: November 19, 2013
    Publication date: March 13, 2014
    Applicant: Infineon Technologies Austria AG
    Inventors: Franz Hirler, Thoralf Kautzsch, Anton Mauder, Michael Rueb, Hans-Joachim Schulze, Helmut Strack, Armin Willmeroth
  • Publication number: 20140070323
    Abstract: A semiconductor arrangement includes a semiconductor body with a first active region, a second active region and an isolation region arranged between the first and the second active regions. At least one source region and at least one body region of a first transistor are integrated in the first active region. At least one source region and at least one body region of a second transistor are integrated in the second active region. Source and body regions of a third transistor are integrated in the second active region. The second transistor and the third transistor have a common source electrode. The first transistor, the second transistor and the third transistor have a common drain electrode.
    Type: Application
    Filed: February 22, 2013
    Publication date: March 13, 2014
    Inventors: Armin Willmeroth, Marc Fahlenkamp
  • Publication number: 20140062544
    Abstract: Disclosed is a semiconductor device arrangement including a first semiconductor device having a load path, and a plurality of second transistors, each having a load path between a first and a second load terminal and a control terminal. The second transistors have their load paths connected in series and connected in series to the load path of the first transistor, each of the second transistors has its control terminal connected to the load terminal of one of the other second transistors, and one of the second transistors has its control terminal connected to one of the load terminals of the first semiconductor device.
    Type: Application
    Filed: January 9, 2012
    Publication date: March 6, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Rolf Weis, Franz Hirler, Martin Feldtkeller, Gerald Deboy, Matthias Stecher, Armin Willmeroth
  • Patent number: 8643086
    Abstract: A semiconductor component having a semiconductor body is disclosed. In one embodiment, the semiconductor component includes a drift zone of a first conductivity type, a drift control zone composed of a semiconductor material which is arranged adjacent to the drift zone at least in places, a dielectric which is arranged between the drift zone and the drift control zone at least in places. A quotient of the net dopant charge of the drift control zone, in an area adjacent to the accumulation dielectric and the drift zone, divided by the area of the dielectric arranged between the drift control zone and the drift zone is less than the breakdown charge of the semiconductor material in the drift control zone.
    Type: Grant
    Filed: February 7, 2012
    Date of Patent: February 4, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Frank Dieter Pfirsch, Armin Willmeroth, Anton Mauder, Stefan Sedlmaier
  • Publication number: 20140001528
    Abstract: A semiconductor component with a drift region and a drift control region. One embodiment includes a semiconductor body having a drift region of a first conduction type in the semiconductor body. A drift control region composed of a semiconductor material, which is arranged, at least in sections, is adjacent to the drift region in the semiconductor body. An accumulation dielectric is arranged between the drift region and the drift control region.
    Type: Application
    Filed: June 11, 2013
    Publication date: January 2, 2014
    Inventors: Frank Pfirsch, Anton Mauder, Armin Willmeroth, Hans-Joachim Schulze, Stefan Sedlmaier, Markus Zundel, Franz Hirler, Arunjai Mittal
  • Publication number: 20140002145
    Abstract: In various embodiments, a driving circuit for a transistor is provided. The driving circuit may include a transistor including a control terminal; a capacitance; a first switch and a power source, wherein the first switch may be coupled between the power source and a first terminal of the capacitance; a second switch and an inductance which may be coupled in series between the first terminal of the capacitance and the control terminal of the transistor.
    Type: Application
    Filed: June 27, 2012
    Publication date: January 2, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Anton Mauder, Armin Willmeroth