Patents by Inventor Benjamin Chu

Benjamin Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10692973
    Abstract: Techniques are disclosed for forming germanium (Ge)-rich channel transistors including one or more dopant diffusion barrier elements. The introduction of one or more dopant diffusion elements into at least a portion of a given source/drain (S/D) region helps inhibit the undesired diffusion of dopant (e.g., B, P, or As) into the adjacent Ge-rich channel region. In some embodiments, the elements that may be included in a given S/D region to help prevent the undesired dopant diffusion include at least one of tin and relatively high silicon. Further, in some such embodiments, carbon may also be included to help prevent the undesired dopant diffusion. In some embodiments, the one or more dopant diffusion barrier elements may be included in an interfacial layer between a given S/D region and the Ge-rich channel region and/or throughout at least a majority of a given S/D region. Numerous embodiments, configurations, and variations will be apparent.
    Type: Grant
    Filed: April 1, 2017
    Date of Patent: June 23, 2020
    Assignee: INTEL CORPORATION
    Inventors: Glenn A. Glass, Anand S. Murthy, Karthik Jambunathan, Benjamin Chu-Kung, Seung Hoon Sung, Jack T. Kavalieros, Tahir Ghani, Harold W. Kennel
  • Publication number: 20200185504
    Abstract: An embodiment includes an apparatus comprising: a substrate; a thin film transistor (TFT) comprising: source, drain, and gate contacts; a semiconductor material, comprising a channel, between the substrate and the gate contact; a gate dielectric layer between the gate contact and the channel; and an additional layer between the channel and the substrate; wherein (a)(i) the channel includes carriers selected from the group consisting of hole carriers or electron carriers, (a)(ii) the additional layer includes an insulator material that includes charged particles having a polarity equal to a polarity of the carriers. Other embodiments are described herein.
    Type: Application
    Filed: September 27, 2017
    Publication date: June 11, 2020
    Inventors: Abhishek A. Sharma, Van H. Le, Jack T. Kavalieros, Tahir Ghani, Gilbert Dewey, Shriram Shivaraman, Sean T. Ma, Benjamin Chu-Kung
  • Publication number: 20200168724
    Abstract: Disclosed herein are tunneling field effect transistors (TFETs), and related methods and computing devices. In some embodiments, a TFET may include: a first source/drain material having a p-type conductivity; a second source/drain material having an n-type conductivity; a channel material at least partially between the first source/drain material and the second source/drain material, wherein the channel material has a first side face and a second side face opposite the first side face; and a gate above the channel material, on the first side face, and on the second side face.
    Type: Application
    Filed: August 18, 2017
    Publication date: May 28, 2020
    Applicant: Intel Corporation
    Inventors: Cheng-Ying Huang, Willy Rachmady, Matthew V. Metz, Ashish Agrawal, Benjamin Chu-Kung, Uygar E. Avci, Jack T. Kavalieros, Ian A. Young
  • Patent number: 10665688
    Abstract: An apparatus including a substrate; a transistor device on the substrate including a channel and a source and a drain disposed between the channel; a source contact coupled to the source and a drain contact coupled to the drain; and the source and drain each including a composition including a concentration of germanium at an interface with the channel that is greater than a concentration of germanium at a junction with the source contact. A method including defining an area on a substrate for a transistor device; forming a source and a drain each including an interface with the channel; and forming a contact to one of the source and the drain, wherein a composition of each of the source and the drain includes a concentration of germanium at an interface with the channel that is greater than a concentration at a junction with the contact.
    Type: Grant
    Filed: December 24, 2015
    Date of Patent: May 26, 2020
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Matthew V. Metz, Benjamin Chu-Kung, Van H. Le, Gilbert Dewey, Ashish Agrawal, Jack T. Kavalieros
  • Publication number: 20200160121
    Abstract: Systems and methods of improved network analytics are disclosed. A system may determine feature propagation in a network of nodes of a graph database. The system may compute, at scale, datasets having complex relationships using graph analysis to determine network effects of entities in a network of entities stored in a graph database. The system may identify entities of interest, which may be associated with a quantitative feature value. The system may compute paths from an entity to the entities of interest, centrality metrics for entities in each of the paths, and path lengths to determine network effects of the entity of interests on the entity. The system may use the computed network effects, taking into account types of relationships between entities in the paths, to determine scaled quantitative feature values for the entity that is subject to the network effects of the entities of interest.
    Type: Application
    Filed: November 15, 2019
    Publication date: May 21, 2020
    Applicant: REFINITIV US ORGANIZATION LLC
    Inventors: Sanjna Balkrishna PARASRAMPURIA, Benjamin Chu MIN XIAN, Thibaut Patrick Marc Michel TIBERGHIEN
  • Patent number: 10644111
    Abstract: An embodiment includes a device comprising: a substrate; a dielectric layer on the substrate and including a trench; a first portion of the trench including a first material that comprises at least one of a group III-V material and a group IV material; and a second portion of the trench, located between the first portion and the substrate, which includes a second material and an upper region and a lower region; wherein: (a)(i) the second material in the upper region has fewer defects than the second material in the lower region, and (a)(ii) the first material is strained. Other embodiments are described herein.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: May 5, 2020
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-Kung, Van H. Le, Ashish Agrawal, Jack T. Kavalieros, Matthew V. Metz, Seung Hoon Sung, Rafael Rios, Gilbert Dewey
  • Patent number: 10644112
    Abstract: A subfin leakage problem with respect to the silicon-germanium (SiGe)/shallow trench isolation (STI) interface can be mitigated with a halo implant. A halo implant is used to form a highly resistive layer. For example, a silicon substrate layer 204 is coupled to a SiGe layer, which is coupled to a germanium (Ge) layer. A gate is disposed on the Ge layer. An implant is implanted in the Ge layer that causes the layer to become more resistive. However, an area does not receive the implant due to being protected (or covered) by the gate. The area remains less resistive than the remainder of the Ge layer. In some embodiments, the resistive area of a Ge layer can be etched and/or an undercuttage (etch undercut or EUC) can be performed to expose the unimplanted Ge area of the Ge layer.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: May 5, 2020
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-Kung, Van Le, Seung Hoon Sung, Jack Kavalieros, Ashish Agrawal, Harold Kennel, Siddharth Chouksey, Anand Murthy, Tahir Ghani, Glenn Glass, Cheng-Ying Huang
  • Publication number: 20200105892
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT). The transistor includes a source electrode oriented in a horizontal direction, and a channel layer in contact with a portion of the source electrode and oriented in a vertical direction substantially orthogonal to the horizontal direction. A gate dielectric layer conformingly covers a top surface of the source electrode and surfaces of the channel layer. A gate electrode conformingly covers a portion of the gate dielectric layer. A drain electrode is above the channel layer, oriented in the horizontal direction. A current path is to include a current portion from the source electrode along a gated region of the channel layer under the gate electrode in the vertical direction, and a current portion along an ungated region of the channel layer in the horizontal direction from the gate electrode to the drain electrode. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 28, 2018
    Publication date: April 2, 2020
    Inventors: Nazila HARATIPOUR, Tahir GHANI, Jack T. KAVALIEROS, Gilbert DEWEY, Benjamin CHU-KUNG, Seung Hoon SUNG, Van H. LE, Shriram SHIVARAMAN, Abhishek SHARMA
  • Publication number: 20200098930
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate oriented in a horizontal direction and a transistor above the substrate. The transistor includes a gate electrode above the substrate, a gate dielectric layer around the gate electrode, and a channel layer around the gate dielectric layer, all oriented in a vertical direction substantially orthogonal to the horizontal direction. Furthermore, a source electrode or a drain electrode is above or below the channel layer, separated from the gate electrode, and in contact with a portion of the channel layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 26, 2020
    Inventors: Van H. LE, Tahi GHANI, Jack T. KAVALIEROS, Gilbert DEWEY, Matthew METZ, Miriam RESHOTKO, Benjamin CHU-KUNG, Shriram SHIVARAMAN, Abhishek SHARMA, NAZILA HARATIPOUR
  • Publication number: 20200098926
    Abstract: Disclosed herein are transistors with ferroelectric gates, and related methods and devices. For example, in some embodiments, a transistor may include a channel material, and a gate stack, and the gate stack may include a gate electrode material and a ferroelectric material between the gate electrode material and the channel material.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Applicant: Intel Corporation
    Inventors: Abhishek A. Sharma, Ravi Pillarisetty, Brian S. Doyle, Elijah V. Karpov, Prashant Majhi, Gilbert W. Dewey, Benjamin Chu-Kung, Van H. Le, Jack T. Kavalieros, Tahir Ghani
  • Publication number: 20200099685
    Abstract: Systems, methods, and apparatuses for implementing authentication of a user login to an external website from a community in a cloud based computing environment. An exemplary system having at least a processor and a memory therein includes means for identifying a first domain where a user is to be allowed to login to an external web page hosted thereon, and means for connecting the external web page with a community of a cloud computing environment hosted on a second domain different than the identified first domain, the connecting means handling how the connected community authenticates the user when the user logs into the external web page and providing one of a plurality of login experiences for the user based on conditions determined at run time.
    Type: Application
    Filed: September 24, 2018
    Publication date: March 26, 2020
    Inventors: Albert Wijaya, Benjamin Chu, William Charles Mortimore, JR., Ian Glazer, Matthew Bahrenburg, Prashanth Mahalingam Ganesan, Puneet Dhaliwal
  • Publication number: 20200098874
    Abstract: Embodiments herein describe techniques for an integrated circuit that includes a substrate, a semiconductor device on the substrate, and a contact stack above the substrate and coupled to the semiconductor device. The contact stack includes a contact metal layer, and a semiconducting oxide layer adjacent to the contact metal layer. The semiconducting oxide layer includes a semiconducting oxide material, while the contact metal layer includes a metal with a sufficient Schottky-barrier height to induce an interfacial electric field between the semiconducting oxide layer and the contact metal layer to reject interstitial hydrogen from entering the semiconductor device through the contact stack. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 26, 2020
    Inventors: Justin WEBER, Harold KENNEL, Abhishek SHARMA, Christopher JEZEWSKI, Matthew V. METZ, Tahir GHANI, Jack T. KAVALIEROS, Benjamin CHU-KUNG, Van H. LE, Arnab SEN GUPTA
  • Publication number: 20200098657
    Abstract: Embodiments herein describe techniques for a semiconductor device including a substrate and a transistor above the substrate. The transistor includes a channel layer above the substrate, a conductive contact stack above the substrate and in contact with the channel layer, and a gate electrode separated from the channel layer by a gate dielectric layer. The conductive contact stack may be a drain electrode or a source electrode. In detail, the conductive contact stack includes at least a metal layer, and at least a metal sealant layer to reduce hydrogen diffused into the channel layer through the conductive contact stack. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Arnab SEN GUPTA, Matthew METZ, Benjamin CHU-KUNG, Abhishek SHARMA, Van H. LE, Miriam R. RESHOTKO, Christopher J. JEZEWSKI, Ryan ARCH, Ande KITAMURA, Jack T. KAVALIEROS, Seung Hoon SUNG, Lawrence WONG, Tahir GHANI
  • Publication number: 20200098931
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate oriented in a horizontal direction and a transistor above the substrate. The transistor includes a gate electrode above the substrate, a gate dielectric layer around the gate electrode, and a channel layer around the gate dielectric layer, all oriented in a vertical direction substantially orthogonal to the horizontal direction. Furthermore, a first metal electrode located in a first metal layer is coupled to a first portion of the channel layer by a first short via, and a second metal electrode located in a second metal layer is coupled to a second portion of the channel layer by a second short via. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Abhishek SHARMA, Nazila HARATIPOUR, Seung Hoon SUNG, Benjamin CHU-KUNG, Gilbert DEWEY, Shriram SHIVARAMAN, Van H. LE, Jack T. KAVALIEROS, Tahir GHANI, Matthew V. METZ, Arnab SEN GUPTA
  • Publication number: 20200098875
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT) above a substrate. The transistor includes a contact electrode having a conductive material above the substrate, an epitaxial layer above the contact electrode, and a channel layer including a channel material above the epitaxial layer and above the contact electrode. The channel layer is in contact at least partially with the epitaxial layer. A conduction band of the channel material and a conduction band of a material of the epitaxial layer are substantially aligned with an energy level of the conductive material of the contact electrode. A bandgap of the material of the epitaxial layer is smaller than a bandgap of the channel material. Furthermore, a gate electrode is above the channel layer, and separated from the channel layer by a gate dielectric layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Seung Hoon SUNG, Justin WEBER, Matthew METZ, Arnab SEN GUPTA, Abhishek SHARMA, Benjamin CHU-KUNG, Gilbert DEWEY, Charles KUO, Nazila HARATIPOUR, Shriram SHIVARAMAN, Van H. LE, Tahir GHANI, Jack T. KAVALIEROS, Sean MA
  • Publication number: 20200091274
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate and a transistor above the substrate. The transistor includes a channel layer above the substrate, a gate dielectric layer adjacent to the channel layer, and a gate electrode separated from the channel layer by the gate dielectric layer. The gate dielectric layer includes a non-linear gate dielectric material. The gate electrode, the channel layer, and the gate dielectric layer form a non-linear capacitor. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 18, 2018
    Publication date: March 19, 2020
    Inventors: Abhishek SHARMA, Ravi PILLARISETTY, Brian DOYLE, Elijah KARPOV, Prashant MAJHI, Gilbert DEWEY, Benjamin CHU-KUNG, Van H. LE, Jack T. KAVALIEROS, Tahir GHANI
  • Publication number: 20200083225
    Abstract: Disclosed herein are memory cells and memory arrays, as well as related methods and devices. For example, in some embodiments, a memory device may include: a support having a surface; and a three-dimensional array of memory cells on the surface of the support, wherein individual memory cells include a transistor and a capacitor, and a channel of the transistor in an individual memory cell is oriented parallel to the surface.
    Type: Application
    Filed: September 7, 2018
    Publication date: March 12, 2020
    Applicant: Intel Corporation
    Inventors: Sean T. Ma, Aaron D. Lilak, Abhishek A. Sharma, Van H. Le, Seung Hoon Sung, Gilbert W. Dewey, Benjamin Chu-Kung, Jack T. Kavalieros, Tahir Ghani
  • Publication number: 20200083354
    Abstract: An apparatus is provided which comprises: a semiconductor region on a substrate, a gate stack on the semiconductor region, a source region of doped semiconductor material on the substrate adjacent a first side of the semiconductor region, a cap region on the substrate adjacent a second side of the semiconductor region, wherein the cap region comprises semiconductor material of a higher band gap than the semiconductor region, and a drain region comprising doped semiconductor material on the cap region. Other embodiments are also disclosed and claimed.
    Type: Application
    Filed: December 31, 2016
    Publication date: March 12, 2020
    Applicant: Intel Corporation
    Inventors: Seung Hoon SUNG, Dipanjan BASU, Ashish AGRAWAL, Van H. LE, Benjamin CHU-KUNG, Harold W. KENNEL, Glenn A. GLASS, Anand S. MURTHY, Jack T. KAVALIEROS, Tahir GHANI
  • Patent number: 10580895
    Abstract: Techniques are disclosed for forming a GaN transistor on a semiconductor substrate. An insulating layer forms on top of a semiconductor substrate. A trench, filled with a trench material comprising a III-V semiconductor material, forms through the insulating layer and extends into the semiconductor substrate. A channel structure, containing III-V material having a defect density lower than the trench material, forms directly on top of the insulating layer and adjacent to the trench. A source and drain form on opposite sides of the channel structure, and a gate forms on the channel structure. The semiconductor substrate forms a plane upon which both GaN transistors and other transistors can form.
    Type: Grant
    Filed: July 19, 2018
    Date of Patent: March 3, 2020
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert S. Chau, Sansaptak Dasgupta, Marko Radosavljevic, Benjamin Chu-Kung, Seung Hoon Sung, Sanaz Gardner, Ravi Pillarisetty
  • Patent number: 10580882
    Abstract: Embodiments of the present invention are directed to low band gap channel semiconductor devices. In an example, a device includes a first semiconductor material formed above a substrate, the first semiconductor material having a first band gap. A gate dielectric layer is on a surface of the first semiconductor material. A gate electrode is on the gate dielectric layer. A pair of source/drain regions is on opposite sides of the gate electrode. A channel is disposed in the first semiconductor material between the pair of source/drain regions and beneath the gate electrode. The pair of source/drain regions includes a second semiconductor material having a second band gap, and a third semiconductor material having a third band gap. The second semiconductor material is between the first semiconductor material and the third semiconductor material, and the second band gap is greater than the first bandgap.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: March 3, 2020
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Jack T. Kavalieros, Willy Rachmady, Matthew V. Metz, Van H. Le, Seiyon Kim, Benjamin Chu-Kung