Patents by Inventor Benjamin Chu

Benjamin Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200066515
    Abstract: An apparatus including a transistor device including a channel including germanium disposed on a substrate; a buffer layer disposed on the substrate between the channel and the substrate, wherein the buffer layer includes silicon germanium; and a seed layer disposed on the substrate between the buffer layer and the substrate, wherein the seed layer includes germanium. A method including forming seed layer on a silicon substrate, wherein the seed layer includes germanium; forming a buffer layer on the seed layer, wherein the buffer layer includes silicon germanium; and forming a transistor device including a channel on the buffer layer.
    Type: Application
    Filed: July 2, 2016
    Publication date: February 27, 2020
    Inventors: Van H. LE, Benjamin CHU-KUNG, Willy RACHMADY, Marc C. FRENCH, Seung Hoon SUNG, Jack T. KAVALIEROS, Matthew V. METZ, Ashish AGRAWAL
  • Patent number: 10573717
    Abstract: A first III-V material based buffer layer is deposited on a silicon substrate. A second III-V material based buffer layer is deposited onto the first III-V material based buffer layer. A III-V material based device channel layer is deposited on the second III-V material based buffer layer.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: February 25, 2020
    Assignee: Intel Corporation
    Inventors: Niti Goel, Gilbert Dewey, Niloy Mukherjee, Matthew V. Metz, Marko Radosavljevic, Benjamin Chu-Kung, Jack T. Kavalieros, Robert S. Chau
  • Patent number: 10556222
    Abstract: Water filtration membranes are provided. Such membranes include polysaccharide fibers that have been modified to possess thiol groups thereon, resulting in materials that effectively bind heavy metal ions. The resulting fibers may be used by themselves or applied to a scaffold to form a membrane suitable for removing heavy metals from water, including groundwater.
    Type: Grant
    Filed: March 10, 2016
    Date of Patent: February 11, 2020
    Assignee: The Research Foundation for the State University of New York
    Inventors: Robert B. Grubbs, Benjamin S. Hsiao, Benjamin Chu, Rui Yang
  • Publication number: 20200035839
    Abstract: Disclosed herein are transistor gate-channel arrangements that may be implemented in nanowire thin film transistors (TFTs) with textured semiconductors, and related methods and devices. An example transistor gate-channel arrangement may include a substrate, a channel material that includes a textured thin film semiconductor material shaped as a nanowire, a gate dielectric that at least partially wraps around the nanowire, and a gate electrode material that wraps around the gate dielectric. Implementing textured thin film semiconductor channel materials shaped as a nanowire and having a gate stack of a gate dielectric and a gate electrode material wrapping around the nanowire advantageously allows realizing gate all-around or bottom-gate transistor architectures for TFTs with textured semiconductor channel materials.
    Type: Application
    Filed: July 24, 2018
    Publication date: January 30, 2020
    Applicant: Intel Corporation
    Inventors: Shriram Shivaraman, Van H. Le, Abhishek A. Sharma, Gilbert W. Dewey, Benjamin Chu-Kung, Miriam R. Reshotko, Jack T. Kavalieros, Tahir Ghani
  • Publication number: 20200031269
    Abstract: A tie down anchor tension monitoring system includes a tension level monitoring module and at least one tie down anchoring point integrated into a cargo carrying space configured for connecting to a free end of a cargo tie down strap. The system further includes at least one tension level monitoring sensor integrated with the at least one tie down anchoring point, wherein the at least one tension monitoring sensor is configured to output a signal to the tension monitoring module that is indicative of a tension level of the cargo tie down strap.
    Type: Application
    Filed: July 27, 2018
    Publication date: January 30, 2020
    Inventor: Benjamin Chu
  • Patent number: 10541305
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Grant
    Filed: January 11, 2019
    Date of Patent: January 21, 2020
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 10532322
    Abstract: Elastic microfiltration membranes are provided. These membranes may be used in a membrane bioreactor. Due to the elastic nature of the membranes, removal of fouling materials is improved, thereby increasing the efficiency and longevity of the membranes. Methods for forming such membranes and uses of the membranes are also provided, including their use in membrane bioreactors.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: January 14, 2020
    Assignee: The Research Foundation for the State University of New York
    Inventors: Benjamin Chu, Benjamin S. Hsiao, Ying Su
  • Publication number: 20200006572
    Abstract: Thin film transistors are described. An integrated circuit structure includes a first source or drain contact above a substrate. A gate stack pedestal is on the first source or drain contact, the gate stack pedestal including a first gate dielectric layer, a gate electrode layer on the first gate dielectric layer, a second gate dielectric layer on the gate electrode layer, and gate dielectric sidewalls along the first gate dielectric layer, the gate electrode layer and the second gate dielectric layer. A channel material layer is over and along sidewalls of the gate stack pedestal, the channel material layer further on a portion of the first source or drain contact. Dielectric spacers are adjacent portions of the channel material layer along the sidewalls of the gate stack pedestal. A second source or drain contact is over a portion of the channel material layer over the gate stack pedestal.
    Type: Application
    Filed: June 28, 2018
    Publication date: January 2, 2020
    Inventors: Abhishek A. SHARMA, Yih WANG, Van H. LE, Jack T. KAVALIEROS, Tahir GHANI, Nazila HARATIPOUR, Benjamin CHU-KUNG, Seung Hoon SUNG, Gilbert DEWEY, Shriram SHIVARAMAN, Matthew V. METZ
  • Publication number: 20200006575
    Abstract: Thin film transistors having U-shaped features are described. In an example, integrated circuit structure including a gate electrode above a substrate, the gate electrode having a trench therein. A channel material layer is over the gate electrode and in the trench, the channel material layer conformal with the trench. A first source or drain contact is coupled to the channel material layer at a first end of the channel material layer outside of the trench. A second source or drain contact is coupled to the channel material layer at a second end of the channel material layer outside of the trench.
    Type: Application
    Filed: June 29, 2018
    Publication date: January 2, 2020
    Inventors: Gilbert DEWEY, Aaron LILAK, Van H. LE, Abhishek A. SHARMA, Tahir GHANI, Willy RACHMADY, Rishabh MEHANDRU, Nazila HARATIPOUR, Jack T. KAVALIEROS, Benjamin CHU-KUNG, Seung Hoon SUNG, Shriram SHIVARAMAN
  • Publication number: 20200006570
    Abstract: Embodiments of the present disclosure are contact structures for thin film transistor (TFT) devices. One embodiment is a TFT device comprising: a substrate; a gate formed above the substrate; a TFT channel formed above the substrate; and a pair of contacts formed on the TFT channel, wherein each of the contacts comprises one or more layers including: a metal that is non-reactive with a material of the TFT channel; or a plurality of layers including a first metal layer formed on a second layer, the second layer in contact with the TFT channel and between the first mater layer and the TFT channel. Other embodiments may be disclosed and/or claimed.
    Type: Application
    Filed: June 29, 2018
    Publication date: January 2, 2020
    Inventors: Van H. LE, Rajat PAUL, Abhishek SHARMA, Tahir GHANI, Jack KAVALIEROS, Gilbert DEWEY, Matthew METZ, Miriam RESHOTKO, Benjamin CHU-KUNG, Justin WEBER, Shriram SHIVARAMAN
  • Publication number: 20200006229
    Abstract: Techniques are disclosed for forming transistor devices having reduced interfacial resistance in a local interconnect. The local interconnect can be a material having similar composition to that of the source/drain material. That composition can be a metal alloy of a group IV element such as nickel germanide. The local interconnect of the semiconductor integrated circuit can function in the absence of barrier and liner layers. The devices can be used on MOS transistors including PMOS transistors.
    Type: Application
    Filed: October 28, 2016
    Publication date: January 2, 2020
    Applicant: INTEL CORPORATION
    Inventors: SEUNG HOON SUNG, GLENN A. GLASS, VAN H. LE, ASHISH AGRAWAL, BENJAMIN CHU-KUNG, ANAND S. MURTHY, JACK T. KAVALIEROS
  • Publication number: 20190393356
    Abstract: Embodiments herein describe techniques for a semiconductor device including a transistor. The transistor includes a first metal contact as a source electrode, a second metal contact as a drain electrode, a channel area between the source electrode and the drain electrode, and a third metal contact aligned with the channel area as a gate electrode. The first metal contact may be located in a first metal layer along a first direction. The second metal contact may be located in a second metal layer along the first direction, in parallel with the first metal contact. The third metal contact may be located in a third metal layer along a second direction substantially orthogonal to the first direction. The third metal layer is between the first metal layer and the second metal layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: June 22, 2018
    Publication date: December 26, 2019
    Inventors: Van H. LE, Seung Hoon SUNG, Benjamin CHU-KUNG, Miriam RESHOTKO, Matthew METZ, Yih WANG, Gilbert DEWEY, Jack KAVALIEROS, Tahir GHANI, Nazila HARATIPOUR, Abhishek SHARMA, Shriram SHIVARAMAN
  • Publication number: 20190385657
    Abstract: An apparatus is provided which comprises: a storage node; a first device coupled to the storage node; a second device coupled to a first reference and the storage node, wherein the second device has negative differential resistance (NDR); a third device coupled to a second reference and the storage node, wherein the third device has NDR; and a circuitry for reading data, the circuitry coupled to the storage node and the first, second, and third devices, wherein the first, second, and third devices, and the circuitry are positioned in a backend-of-line (BEOL) of a die.
    Type: Application
    Filed: June 19, 2018
    Publication date: December 19, 2019
    Applicant: Intel Corporation
    Inventors: Charles Augustine, Charles Kuo, Benjamin Chu-kung, Muhammad Khellah
  • Publication number: 20190378932
    Abstract: Embodiments disclosed herein include thin film transistors and methods of forming such thin film transistors. In an embodiment, the thin film transistor may comprise a substrate, a gate electrode over the substrate, and a gate dielectric stack over the gate electrode. In an embodiment, the gate dielectric stack may comprise a plurality of layers. In an embodiment, the plurality of layers may comprise an amorphous layer. In an embodiment, the thin film transistor may also comprise a semiconductor layer over the gate dielectric. In an embodiment, the semiconductor layer is a crystalline semiconductor layer. In an embodiment, the thin film transistor may also comprise a source electrode and a drain electrode.
    Type: Application
    Filed: June 6, 2018
    Publication date: December 12, 2019
    Inventors: Van H. LE, Inanc MERIC, Gilbert DEWEY, Sean MA, Abhishek A. SHARMA, Miriam RESHOTKO, Shriram SHIVARAMAN, Kent MILLARD, Matthew V. METZ, Wilhelm MELITZ, Benjamin CHU-KUNG, Jack KAVALIEROS
  • Publication number: 20190348500
    Abstract: Techniques are disclosed for forming germanium (Ge)-rich channel transistors including one or more dopant diffusion barrier elements. The introduction of one or more dopant diffusion elements into at least a portion of a given source/drain (S/D) region helps inhibit the undesired diffusion of dopant (e.g., B, P, or As) into the adjacent Ge-rich channel region. In some embodiments, the elements that may be included in a given S/D region to help prevent the undesired dopant diffusion include at least one of tin and relatively high silicon. Further, in some such embodiments, carbon may also be included to help prevent the undesired dopant diffusion. In some embodiments, the one or more dopant diffusion barrier elements may be included in an interfacial layer between a given S/D region and the Ge-rich channel region and/or throughout at least a majority of a given S/D region. Numerous embodiments, configurations, and variations will be apparent.
    Type: Application
    Filed: April 1, 2017
    Publication date: November 14, 2019
    Applicant: Intel Corporation
    Inventors: Glenn A. GLASS, Anand S. MURTHY, Karthik JAMBUNATHAN, Benjamin CHU-KUNG, Seung Hoon SUNG, Jack T. KAVALIEROS, Tahir GHANI, Harold W. KENNEL
  • Publication number: 20190348415
    Abstract: Techniques are disclosed for forming transistors employing a source/drain (S/D) cap layer for Ge-rich S/D regions to, e.g., help suppress contact metal piping. Contact metal piping occurs when metal material from the S/D contact region diffuses into the channel region, which can lead to a reduction of the effective gate length and can even cause device shorting/failure. The S/D cap layer includes silicon (Si) and/or carbon (C) to help suppress the continuous reaction of contact metal material with the Ge-rich S/D material (e.g., Ge or SiGe with at least 50% Ge concentration by atomic percentage), thereby reducing or preventing the diffusion of metal from the S/D contact region into the channel region as subsequent processing occurs. In addition, the Si and/or C-based S/D cap layer is more selective to contact trench etch than the doped Ge-rich material included in the S/D region, thereby increasing controllability during contact trench etch processing.
    Type: Application
    Filed: March 30, 2017
    Publication date: November 14, 2019
    Applicant: INTEL CORPORATION
    Inventors: SEUNG HOON SUNG, GLENN A. GLASS, HAROLD W. KENNEL, ASHISH AGRAWAL, VAN H. LE, BENJAMIN CHU-KUNG, SIDDHARTH CHOUKSEY, ANAND S. MURTHY, JACK T. KAVALIEROS, TAHIR GHANI
  • Publication number: 20190348499
    Abstract: Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.
    Type: Application
    Filed: July 29, 2019
    Publication date: November 14, 2019
    Inventors: Van H. LE, Benjamin CHU-KUNG, Harold Hal W. KENNEL, Willy RACHMADY, Ravi PILLARISETTY, Jack T. KAVALIEROS
  • Patent number: 10475888
    Abstract: An insulating layer is conformally deposited on a plurality of mesa structures in a trench on a substrate. The insulating layer fills a space outside the mesa structures. A nucleation layer is deposited on the mesa structures. A III-V material layer is deposited on the nucleation layer. The III-V material layer is laterally grown over the insulating layer.
    Type: Grant
    Filed: April 20, 2017
    Date of Patent: November 12, 2019
    Assignee: Intel Corporation
    Inventors: Sansaptak Dasgupta, Han Wui Then, Seung Hoon Sung, Sanaz K. Gardner, Marko Radosavljevic, Benjamin Chu-Kung, Robert S. Chau
  • Patent number: 10475706
    Abstract: Electronic device fins may be formed by epitaxially growing a first layer of material on a substrate surface at a bottom of a trench formed between sidewalls of shallow trench isolation (STI) regions. The trench height may be at least 1.5 times its width, and the first layer may fill less than the trench height. Then a second layer of material may be epitaxially grown on the first layer in the trench and over top surfaces of the STI regions. The second layer may have a second width extending over the trench and over portions of top surfaces of the STI regions. The second layer may then be patterned and etched to form a pair of electronic device fins over portions of the top surfaces of the STI regions, proximate to the trench. This process may avoid crystaline defects in the fins due to lattice mismatch in the layer interfaces.
    Type: Grant
    Filed: February 10, 2017
    Date of Patent: November 12, 2019
    Assignee: Intel Corporation
    Inventors: Niti Goel, Benjamin Chu-Kung, Sansaptak Dasgupta, Niloy Mukherjee, Matthew V. Metz, Van H. Le, Jack T. Kavalieros, Robert S. Chau, Ravi Pillarisetty
  • Publication number: 20190341300
    Abstract: Techniques are disclosed for forming transistors employing a carbon-based etch stop layer (ESL) for preserving source and drain (S/D) material during contact trench etch processing. As can be understood based on this disclosure, carbon-based layers can provide increased resistance for etch processing, such that employing a carbon-based ESL on S/D material can preserve that S/D material during contact trench etch processing. This is due to carbon-based layers being able to provide more robust (e.g., more selective) etch selectivity during contact trench etch processing than the S/D material it is preserving (e.g., Si, SiGe, Ge, group III-V semiconductor material) and other etch stop layers (e.g., insulator material-based etch stop layers). Employing a carbon-based ESL enables a given S/D region to protrude from shallow trench isolation (STI) material prior to contact metal deposition, thereby providing more surface area for making contact to the given S/D region, which improves transistor performance.
    Type: Application
    Filed: March 30, 2017
    Publication date: November 7, 2019
    Applicant: INTEL CORPORATION
    Inventors: GLENN A. GLASS, ANAND S. MURTHY, KARTHIK JAMBUNATHAN, BENJAMIN CHU-KUNG, SEUNG HOON SUNG, JACK T. KAVALIEROS, TAHIR GHANI