Abstract: Systems and methods for shaping a film. The method of shaping a film may comprise dispensing a polymerizable fluid as a plurality of droplets onto a substrate. The method of shaping a film may further comprise bringing an initial superstrate contact region of a superstrate into contact with an initial subset of droplets of the plurality of droplets. The initial subset of droplets may merge and form an initial fluid film over the initial substrate contact region. The method of shaping a film may further comprise prior to the superstrate coming into contact with the remaining plurality of droplets on the substrate, polymerizing a region of the initial fluid film on the initial substrate contact region.

Abstract: An apparatus is provided. The apparatus has a chuck having a first side configured to retain a superstrate or a template and a second side, an array of image sensors disposed at the second side of the chuck and spaced from the chuck, and an array of light sources disposed between the transparent chuck and the array of image sensors.

Abstract: A touch sensor includes a base layer, first sensing electrodes arranged on the base layer along a first direction, second sensing electrodes arranged on the base layer along a second direction, first compensation electrodes on the first sensing electrodes, and second compensation electrodes on the second sensing electrodes. The first compensation electrodes entirely cover each of the first sensing electrodes in a plan view, and the second compensation entirely cover each of the second sensing electrodes in a plan view.

Abstract: A head module of an imprint lithography system includes a base, a control body coupled to the base, a first set of actuators configured to generate a first force to translate the control body relative to the base along a first axis and to rotate the control body relative to the base about a second axis perpendicular to the first axis and about a third axis perpendicular to the first axis and to the second axis, a second set of actuators configured to generate a second force to translate the control body relative to the base in a plane defined by the second axis and the third axis and to rotate the control body relative to the base about the first axis, and a flexure coupling the base and the control body and restricting translation and rotation of the control body with respect to the base.

Abstract: Reducing an alignment error of an imprint lithography template with respect to a substrate includes locating central alignment marks of the template with respect to corresponding central alignment marks of the substrate and locating peripheral alignment marks of the template with respect to corresponding peripheral alignment marks of the substrate. In-plane alignment error of the template is assessed based on relative positions of central alignment marks of the template and corresponding central alignment marks of the substrate. A combined alignment error of the template is assessed based on relative positions of peripheral alignment marks of the template and corresponding peripheral alignment marks of the substrate. Out-of-plane alignment error of the template is assessed based on a difference between the-combined and the in-plane alignment error of the template, and a relative position of the template and the substrate is adjusted to reduce the out-of-plane alignment error of the template.

Abstract: A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.

Abstract: A template for imprint lithography can include a body. The body can include a base surface and have a recession extending from the base surface lying along a base plane, the recession including a main portion having a tapered sidewall. In a particular embodiment, the recession includes an intermediate portion having an intermediate sidewall. The intermediate sidewall is rounded or at least part of the intermediate sidewall lies at a different angle as compared to an average tapered angle of the main portion. In another aspect, a method of fabricating a semiconductor device can include forming a patterned resist layer having a tapered sidewall over a substrate having device layers; patterning the device layers using the patterned resist layer; and etching portions of at least some of device layers to expose lateral portions of the at least some device layers. The template is well suited for forming 3D memory arrays.

Abstract: The present invention relates to a touch sensor having an antenna. The touch sensor comprises: a touch sensor part including a sensing electrode part; and an antenna part formed on the touch sensor part. The antenna part is formed in a state of being insulated from the sensing electrode part on the sensing electrode part composing the touch sensor part. According to the present invention, even when mounting the antenna on a display region in which a touch sensor is installed, noise due to interference between a touch sensor signal and an antenna transmission/reception signal can be minimized.

Abstract: A method of deposition is disclosed. The method can include dispensing a formable material over a substrate, where the substrate includes a non-uniform surface topography, and where the substrate includes an active zone and an exclusion zone. The method can also include curing the formable material in the exclusion zone to form a circular edge between the exclusion zone and the active zone, contacting the formable material with a superstrate, and curing the formable material in the active zone to form a layer over the substrate, wherein curing is performed while the superstrate is contacting the formable material.

Abstract: Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.

Abstract: Methods, systems, and apparatus for adjusting a relative position of templates including determining a first plurality of position points of a surface of a region adjacent to an active region of a first template, the surface of the adjacent region and a surface of the active region forming a continuous surface of the first template; identifying a plane of the surface of the adjacent region of the first template based on the first plurality of position points; determining a second plurality of position points of a surface of an active region of a second template, the active region of the second template protruding from a surface of the second template; identifying a plane of the surface of the active region of the second template based on the second plurality of position points; and adjusting a relative position of the first template and the second template based on the identified planes.

Abstract: An electrode connection unit is to be electrically connected with electrode terminals. The electrode connection unit includes a metallic core part having a plurality of first holes therein and a conductive nonmetallic coating layer on the metallic core part. An image display device and a touch screen panel include the electrode connection unit.

Abstract: Reducing an overlay error in nanoimprint lithography includes forming an imprinted substrate having pairs of corresponding peripheral overlay marks and corresponding central overlay marks on the imprinted substrate. An in-plane overlay error is assessed based on relative positions of corresponding central overlay marks, and a combined overlay error is assessed based on relative positions of corresponding peripheral overlay marks. A difference between the combined overlay error and the in-plane overlay error is assessed to yield an adjusted overlay error for each pair of corresponding peripheral overlay marks.

Abstract: A touch sensor includes a substrate layer, first sensing electrodes arranged on the substrate layer along a first direction parallel to a top surface of the substrate layer, the first sensing electrodes including first slits therein, second sensing electrodes arranged on the substrate layer along a second direction parallel to a top surface of the substrate layer and crossing the first direction, the second sensing electrodes including second slits therein, bridge electrodes electrically connecting neighboring ones of the first sensing electrodes, and connecting portions which connect neighboring ones of the second sensing electrodes.

Abstract: A method, comprising retaining a superstrate with a superstrate chuck; applying a pressure to deflect the superstrate toward a substrate, deflection of the superstrate being gradually extended along a radial direction; maintaining a vacuum applied to a perimeter of the superstrate and continuously retaining the superstrate with the chuck while the deflecting the superstrate by the pressure; releasing the vacuum from the perimeter of the superstrate; and releasing the superstrate from the chuck.

Abstract: A method is provided, comprising creating at least one crack at a point on an edge of a stack of at least a substrate and a superstrate; propagating the crack along the periphery; and moving the superstrate relative to the substrate to complete separation of the superstrate from the substrate.

Abstract: A chuck is provided. The chuck comprises a plurality of lands protruding from a surface of the chuck, the lands defining a series of zones; and a trenched recessed from the surface of the chuck in at least one of the zones.

Abstract: Provided is a touch sensor capable of forming a fine pattern by forming a touch sensor pattern layer on an outgassing prevention layer so that both a finger input and a pen input can be detected.

Abstract: A high performance touch sensor according to the present invention comprises: a substrate; a first detection electrode formed on the substrate; an insulation layer formed on the first detection electrode; a second detection electrode formed on the insulation layer; and a protection layer formed on the second detection electrode, wherein one of the first detection electrode and the second detection electrode has a triple-film structure including a metal oxide and a thin film metal laminated on each other, and the other one includes a metal pattern. Therefore, the present invention can implement touch sensor having a high resolution and a large area while simultaneously satisfying a low resistance characteristic and an optical characteristic, facilitate progress of a high-temperature process, and diversify the substrate.

Abstract: A touch sensor may include a substrate, a sensing pattern, and bridge electrodes. The sensing pattern may include a first pattern along a first direction and a second pattern along a second direction. The second pattern may include unit patterns isolated from each other. The bridge may electrically connect neighboring unit patterns, and the bridge electrodes adjacent in the first direction may be parallel to each other. An angle between an extending direction of the bridge electrode and the first direction may be from 45° to 89°. The substrate, the bridge electrode and the sensing pattern may be bent together to form a bending portion. The bridge electrode may extend in a direction the same as a bending direction. A bending angle between a body of the substrate which is not bent and an end portion of the bending portion may be greater than 0° and less than 180°.