Patents by Inventor C. Yu

C. Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5240552
    Abstract: A method and apparatus for chemically mechanically planarizing (CMP) a semiconductor wafer includes directing acoustic waves at the wafer and receiving reflected acoustic waves from the wafer during the (CMP) process. By analyzing the acoustic waves and reflected acoustic waves a thickness of the wafer can be determined and an endpoint and thickness of films formed on the wafer can be monitored in real time during the (CMP) process. The process parameters of the (CMP) process can then be adjusted as required to improve the uniformity of the process.
    Type: Grant
    Filed: December 11, 1991
    Date of Patent: August 31, 1993
    Assignee: Micron Technology, Inc.
    Inventors: Chris C. Yu, Gurtej S. Sandhu
  • Patent number: 5238990
    Abstract: A thermoplastic composition is provided which comprises a polyamide, a grafted polymer of an isomonoolefin and an alkylstyrene, such as a maleic anhydride-grafted copolymer of isobutylene and para-methylstyrene, and optionally a polyolefin polymer.
    Type: Grant
    Filed: June 5, 1991
    Date of Patent: August 24, 1993
    Assignee: Exxon Chemical Patents Inc.
    Inventors: Thomas C. Yu, Donald A. White, Hsien C. Wang
  • Patent number: 5235034
    Abstract: Poly(arylene sulfide/sulfone) polymers are treated in order to increase melt stability and decrease impurities by contacting the poly(arylene sulfide/sulfone) polymer with a soluble zinc compound and an acidic solution. In one embodiment, the polymer is treated first with the soluble zinc compound, followed by treatment with the acidic solution. In another embodiment, the polymer is treated in one step with a solution comprising a water soluble zinc compound in an acidic solution.
    Type: Grant
    Filed: May 6, 1991
    Date of Patent: August 10, 1993
    Assignee: Phillips Petroleum Company
    Inventors: Rex L. Bobsein, Michael C. Yu, Roy F. Wright, David A. Soules
  • Patent number: 5232549
    Abstract: Fabrication of spacer supports for use in flat panel displays through a process which involves 1) depositing an insulating material on an electrode plate, 2) optionally, patterning a reflective material superjacent the insulating material, 3) irradiating the electrode plate, and thereby removing the exposed insulating material, 4) optionally, removing the reflective material, and thereby exposing the remaining insulative material which will serve as the spacer supports, after which the plate can be aligned with a complementary electrode plate, and a vacuum formed therebetween.
    Type: Grant
    Filed: April 14, 1992
    Date of Patent: August 3, 1993
    Assignee: Micron Technology, Inc.
    Inventors: David A. Cathey, Chris C. Yu, Trung T. Doan, Tyler A. Lowrey, J. Brett Rolfson
  • Patent number: 5225034
    Abstract: A semiconductor processing method of chemical mechanical polishing a predominately copper containing metal layer on a semiconductor substrate includes, a) providing a chemical mechanical polishing slurry comprising H.sub.2 O, a solid abrasive material, and a third component selected from the group consisting of HNO.sub.3, H.sub.2 SO.sub.4, and AgNO.sub.3 or mixtures thereof; and b) chemical mechanical polishing a predominately copper containing metal layer on a semiconductor substrate with the slurry. Such slurry also constitutes part of the invention. Such slurry may also contain an additional oxidant selected from the group consisting of H.sub.2 O.sub.2, HOCl, KOCl, KMgO.sub.4 and CH.sub.3 COOH or mixtures thereof to form a copper oxide passivating-type layer at the copper surface.
    Type: Grant
    Filed: June 4, 1992
    Date of Patent: July 6, 1993
    Assignee: Micron Technology, Inc.
    Inventors: Chris C. Yu, Trung T. Doan
  • Patent number: 5222329
    Abstract: A method and system for controlling the depth of removal by polishing of a selected material on a supporting underlayer where it is desired to terminate removal of the selected material, such as tungsten, at the material-underlayer interface. In accordance with this novel method and system, the selected material such as a surface metallization layer is polished to initiate removal thereof in the direction of the material-underlayer interface. A microphone is positioned at a predetermined distance from the wafer to sense acoustical waves generated when the depth of material removal reaches a certain determinable distance from the interface to thereby generate output detection signals. These output detection signals are amplified and then applied to a spectrum analyzer which operates to analyze the sound intensity-versus-frequency characteristic of the acoustical waves received by the microphone.
    Type: Grant
    Filed: March 26, 1992
    Date of Patent: June 29, 1993
    Assignee: Micron Technology, Inc.
    Inventor: Chris C. Yu
  • Patent number: 5219983
    Abstract: Poly(biphenylene sulfide/poly(phenylene sulfide) copolymers are produced by contacting a p-dihalobenzene and a bis-p-halobiphenyl under polymerization conditions. Additionally a poly(biphenylene sulfide)/poly(phenylene sulfide) copolymer/fiber reinforced composite is provided.
    Type: Grant
    Filed: May 8, 1991
    Date of Patent: June 15, 1993
    Assignee: Phillips Petroleum Company
    Inventors: Michael C. Yu, Jimmie J. Straw
  • Patent number: 5209816
    Abstract: A semiconductor processing method of chemical mechanical polishing an aluminum containing metal layer on a semiconductor substrate includes, a) providing a chemical mechanical polishing slurry comprising H.sub.3 PO.sub.4 at from about 0.1% to about 20% by volume; H.sub.2 O.sub.2 at from about 1% to about 30% by volume, H.sub.2 O, and a solid abrasive material; and b) chemical mechanical polishing an aluminum containing metal layer on a semiconductor substrate with the slurry. Such process and slurry are also usable in chemical mechanical polishing of other layers, such as Ti, TiN and TiW materials. Such enables chemical mechanical polishing of a barrier metal/aluminum layer composite in a single polishing step, leading to increased controllability and resulting increased throughput. With respect to aluminum containing metal layers, the H.sub.2 O.sub.2 is understood to cause oxidation to aluminum oxide, which is subsequently removed by both chemical and mechanical action the result of the polish and slurry.
    Type: Grant
    Filed: June 4, 1992
    Date of Patent: May 11, 1993
    Assignee: Micron Technology, Inc.
    Inventors: Chris C. Yu, Trung T. Doan, Alan E. Laulusa
  • Patent number: 5194506
    Abstract: Polyethylene terephthalate molding compositions are provided which comprise polyethylene terephthalate, an aliphatic polyester, a warp resisting amount of an arylene sulfide copolymer, filler, and optionally, colorants.
    Type: Grant
    Filed: December 20, 1990
    Date of Patent: March 16, 1993
    Assignee: Phillips Petroleum Company
    Inventors: Howard F. Efner, Michael C. Yu, Ray D. Ramsay
  • Patent number: 5190258
    Abstract: An articulated support for an audio amplifier housing comprising a first arm pivotable from a retracted position in the housing to an angularly extended position and then translatable in and out with respect to the housing, and a second arm pivotable at one end from a retracted position in the first arm to an angularly extended position, with an adjustable speaker mount at the other end of the second arm allowing a speaker to be rotated and tilted.
    Type: Grant
    Filed: May 26, 1992
    Date of Patent: March 2, 1993
    Inventor: Chung C. Yu
  • Patent number: 5188723
    Abstract: A process for selectively electrodepositing a pattern of metal such as copper on a substrate comprises the deposition of two successive layers over the entire substrate, photolithographic patterning of the upper layer, and placement of the exposed part of the first deposited layer to a lower surface potential then the patterned second layer. The metal is then deposited under a periodical modulated voltage signal that is adjusted in reference to the reduction potential of the metal so that any metal deposited on the exposed part of the first layer during the positive duty cycle of the signal is removed during the negative duty cycle while little or none of the metal deposited on the second layer is removed due to the second layer higher surface potential. The remaining exposed part of the first layer is etched away after the electrodeposition process is terminated.
    Type: Grant
    Filed: April 13, 1992
    Date of Patent: February 23, 1993
    Assignee: Micron Technology, Inc.
    Inventors: Chris C. Yu, Gurtej S. Sandhu, Terry Gilton
  • Patent number: 5189121
    Abstract: Low temperature heat curable arylene sulfide copolymer compositions which are particularly suitable for use in coating applications are provided. The compositions basically comprise a first arylene sulfide copolymer having unsubstituted para- and ortho-aromatic sulfide repeating units in the polymer chain, and a second arylene sulfide copolymer having unsubstituted para-aromatic sulfide repeating units and alkyl-substituted aromatic sulfide repeating units in the polymer chain.
    Type: Grant
    Filed: September 25, 1989
    Date of Patent: February 23, 1993
    Assignee: Phillips Petroleum Company
    Inventors: Roy F. Wright, Michael C. Yu
  • Patent number: 5178726
    Abstract: The present invention is a surface modification process which provides a means of rapidly heating a thin layer of a polymer surface or a thin coating of material on a coated substrate and various surfaces produced by such a process.
    Type: Grant
    Filed: March 7, 1991
    Date of Patent: January 12, 1993
    Assignee: Minnesota Mining and Manufacturing Company
    Inventors: Edward C. Yu, Susan N. Bohlke, Andrew J. Ouderkirk, Douglas S. Dunn
  • Patent number: 5122228
    Abstract: Method is disclosed of treatment of waste paper or the like at high temperatures in the range of 160.degree. C. to about 230.degree. C. The furnish is treated in a digester with or without added chemicals but in the presence of saturated steam. The preferred dwell times are in the range of about 1 minute to about 6 minutes. The treated furnish is then discharged from the digester, preferably, but not exclusively, by an explosive discharge.The advance in the art is in an improved de-inking effect, reduced consumption of chemicals and power. Also, some furnishes previously unsuitable for re-cycling, have been successfully processed by the method of the invention.
    Type: Grant
    Filed: December 10, 1990
    Date of Patent: June 16, 1992
    Assignees: Stake Technology Limited, Chesapeake Resources Company
    Inventors: Michael P. Bouchette, Ernest K. C. Yu
  • Patent number: 5121158
    Abstract: A durable filter driving mechanism for a color optical reader that is capable of being positively and accurately positioned is proposed. The filter driving mechanism includes a guiding piece mounting thereon a reduction gear assembly having a reduction gear set meshing with a rack of a sliding piece having a rail coupling thereto a color filter assembly operating in cooperation with a lens assembly and a charge coupled element.
    Type: Grant
    Filed: October 31, 1990
    Date of Patent: June 9, 1992
    Assignee: Umax Data System Inc.
    Inventors: Chau-Hwang Chen, Chi-Ming C. Yu
  • Patent number: 5087666
    Abstract: There are provided compositions comprising poly(arylene sulfide), polymeric rubber, polyethylene, and carboxylic anhydride; and methods for making these compositions. Articles produced from the compositions have reduced shrinkage and improved impact strength.
    Type: Grant
    Filed: July 10, 1990
    Date of Patent: February 11, 1992
    Assignee: Phillips Petroleum Company
    Inventors: Michael C. Yu, John B. Allison
  • Patent number: 5082698
    Abstract: This invention relates to aqueous epoxy resin-containing compositions and to such compositions which are particularly useful for depositing coatings on metallic substrates in order to protect substrates against corrosion. The aqueous compositions generally comprise (A) an organic resin component consisting essentially of at least one water-dispersible or emulsifiable epoxy resin or a mixture of resins containing more than 50% by weight of at least one water-dispersible or emulsifiable epoxy resin, (B) chromium trioxide, and (C) water, said composition further characterized as being substantially free of strontium chromate. The aqueous compositions may also contain other ingredients including zinc and/or ferro alloys.These aqueous compositions are useful as pretreatment coatings on metal surfaces, and in particular, on steel and on galvanized and aluminized metal substrates.
    Type: Grant
    Filed: October 29, 1990
    Date of Patent: January 21, 1992
    Assignee: Morton Coatings, Inc.
    Inventors: Karl P. Anderson, Whaite M. Clark, Poli C. Yu, Richard T. Moyle
  • Patent number: 5075420
    Abstract: A phenylene sulfide/sulfone polymer with relatively good melt stability and a method of producing such a polymer are provided. A previously produced phenylene sulfide/sulfone polymer is redissolved in N-methyl-2-pyrrolidone to form a solution. This solution is combined with an alcohol to precipitate highly melt stable phenylene sulfide/sulfone polymer in a particulate form. The alcohol has one to four carbon atoms, such as methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, 2-butanol, and the like and mixtures thereof.
    Type: Grant
    Filed: January 11, 1991
    Date of Patent: December 24, 1991
    Assignee: Phillips Petroleum Company
    Inventors: Rex L. Bobsein, Robert W. Campbell, Harold D. Yelton, Michael C. Yu
  • Patent number: 5051477
    Abstract: A dynamically vulcanized thermoplastic composition is provided which comprises a polymer blend of a polyolefin resin, a halogenated elastomeric copolymer, such as a halogenated butyl rubber, or a halogenated copolymer of a C.sub.4 to C.sub.7 isomonoolefin and a para-alkylstyrene, and a halogenated polyethylene. The composition has improved flame retarding properties. Additional flame retarding additives may be incorporated in the composition. The dynamically vulcanized thermoplastic composition is suitable for use in roofing sheets.
    Type: Grant
    Filed: May 4, 1990
    Date of Patent: September 24, 1991
    Assignee: Advanced Elastomer Systems, L. P.
    Inventors: Thomas C. Yu, Robert C. Puydak, Charles W. Degener
  • Patent number: 5039788
    Abstract: A phenylene sulfide/sulfone polymer with relatively good melt stability and a method of producing such a polymer are provided. A previously produced phenylene sulfide/sulfone polymer is redissolved in N-methyl-2-pyrrolidone to form a solution. This solution is combined with an alcohol to precipitate highly melt stable phenylene sulfide/sulfone polymer in a particulate form. The alcohol has one to four carbon atoms, such as methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, 2-butanol, and the like and mixtures thereof.
    Type: Grant
    Filed: April 2, 1990
    Date of Patent: August 13, 1991
    Assignee: Phillips Petroleum Company
    Inventors: Rex L. Bobsein, Robert W. Campbell, Harold D. Yelton, Michael C. Yu