Patents by Inventor Chang Yun
Chang Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11239365Abstract: A semiconductor structure includes an isolation feature formed in the semiconductor substrate and a first fin-type active region. The first fin-type active region extends in a first direction. A dummy gate stack is disposed on an end region of the first fin-type active region. The dummy gate stack may overlie an isolation structure. In an embodiment, any recess such as formed for a source/drain region in the first fin-type active region will be displaced from the isolation region by the distance the dummy gate stack overlaps the first fin-type active region.Type: GrantFiled: December 24, 2019Date of Patent: February 1, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shao-Ming Yu, Chang-Yun Chang, Chih-Hao Chang, Hsin-Chih Chen, Kai-Tai Chang, Ming-Feng Shieh, Kuei-Liang Lu, Yi-Tang Lin
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Patent number: 11239072Abstract: A semiconductor structure includes a substrate, a pair of first fins extending from the substrate, a pair of second fins extending from the substrate, an isolation feature over the substrate and separating bottom portions of the first and the second fins, a pair of first epitaxial semiconductor features over the pair of first fins respectively, a pair of second epitaxial semiconductor features over the pair of second fins respectively, and a first dielectric feature sandwiched between and separating the pair of first epitaxial semiconductor features. The pair of second epitaxial semiconductor features merge with each other.Type: GrantFiled: April 21, 2020Date of Patent: February 1, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ming-Chang Wen, Chang-Yun Chang, Hsien-Chin Lin, Hung-Kai Chen
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Publication number: 20220005139Abstract: The present disclosure relates to a diversified and connected freight allocation system and method, and more particularly, to a diversified and connected freight allocation system and method capable of reducing company's costs and improving resource utilization and efficiency. In an aspect of the present disclosure, a diversified and connected freight allocation system is provided. The system includes: a data input unit; a reference information database containing reference information; and a diversified and connected freight allocation calculation unit determining diversified and connected freight allocations based on the information received from the data input unit and the reference information database.Type: ApplicationFiled: September 22, 2021Publication date: January 6, 2022Inventors: Tae Hyun KIM, Jong In CHAE, Chang Yun CHUNG, Jun Hyuk CHOI, Seung Jin YOON, Jae Won KIM, Ok Kyung LIM, Wan Sik KIM, Eun Jeong YOO
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Patent number: 11177180Abstract: The present disclosure describes a method of fabricating a semiconductor structure that includes forming a gate structure over a substrate, forming an interlayer dielectric structure surrounding the gate structures, and forming a first opening in the gate structure and the interlayer dielectric structure. The first opening has a first portion in the gate structure and a second portion in the interlayer dielectric structure, in which the first portion has a width larger than the second portion. The method further includes depositing a dielectric layer in the first opening and forming a second opening over the first opening. The first portion of the opening remains open and the second portion of the opening is filled after depositing the dielectric layer. The second opening in the gate structure has a depth larger than the first opening in the gate structure.Type: GrantFiled: February 11, 2020Date of Patent: November 16, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wan-Yao Wu, Chang-Yun Chang, Ming-Chang Wen
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Patent number: 11158725Abstract: The fin structure includes a first portion and a second, lower portion separated at a transition. The first portion has sidewalls that are substantially perpendicular to the major surface of the substrate. The lower portion has tapered sidewalls on opposite sides of the upper portion and a base having a second width larger than the first width.Type: GrantFiled: July 15, 2019Date of Patent: October 26, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Feng Yuan, Hung-Ming Chen, Tsung-Lin Lee, Chang-Yun Chang, Clement Hsingjen Wann
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Publication number: 20210296484Abstract: A first FinFET device includes first fin structures that extend in a first direction in a top view. A second FinFET device includes second fin structures that extend in the first direction in the top view. The first FinFET device and the second FinFET device are different types of FinFET devices. A plurality of gate structures extend in a second direction in the top view. The second direction is different from the first direction. Each of the gate structures partially wraps around the first fin structures and the second fin structures. A dielectric structure is disposed between the first FinFET device and the second FinFET device. The dielectric structure cuts each of the gate structures into a first segment for the first FinFET device and a second segment for the second FinFET device. The dielectric structure is located closer to the first FinFET device than to the second FinFET device.Type: ApplicationFiled: June 7, 2021Publication date: September 23, 2021Inventors: Chang-Yun Chang, Ming-Ching Chang, Shu-Yuan Ku
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Publication number: 20210256646Abstract: The present disclosure relates to a diversified and connected freight allocation system and method, and more particularly, to a diversified and connected freight allocation system and method capable of reducing company's costs and improving resource utilization and efficiency. In an aspect of the present disclosure, a diversified and connected freight allocation system is provided. The system includes: a data input unit; a reference information database containing reference information; and a diversified and connected freight allocation calculation unit determining diversified and connected freight allocations based on the information received from the data input unit and the reference information database.Type: ApplicationFiled: December 30, 2020Publication date: August 19, 2021Inventors: Tae Hyun KIM, Jong In CHAE, Chang Yun CHUNG, Jun Hyuk CHOI, Seung Jin YOON, Jae Won KIM, Ok Kyung LIM, Wan Sik KIM, Eun Jeong YOO
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Publication number: 20210249309Abstract: The present disclosure describes a method of fabricating a semiconductor structure that includes forming a gate structure over a substrate, forming an interlayer dielectric structure surrounding the gate structures, and forming a first opening in the gate structure and the interlayer dielectric structure. The first opening has a first portion in the gate structure and a second portion in the interlayer dielectric structure, in which the first portion has a width larger than the second portion. The method further includes depositing a dielectric layer in the first opening and forming a second opening over the first opening. The first portion of the opening remains open and the second portion of the opening is filled after depositing the dielectric layer. The second opening in the gate structure has a depth larger than the first opening in the gate structure.Type: ApplicationFiled: February 11, 2020Publication date: August 12, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wan-Yao Wu, Chang-Yun Chang, Ming-Chang Wen
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Publication number: 20210249271Abstract: In an embodiment, a structure includes: a semiconductor substrate; a gate spacer over the semiconductor substrate, the gate spacer having an upper portion and a lower portion, a first width of the upper portion decreasing continually in a first direction extending away from a top surface of the semiconductor substrate, a second width of the lower portion being constant along the first direction; a gate stack extending along a first sidewall of the gate spacer and the top surface of the semiconductor substrate; and an epitaxial source/drain region adjacent a second sidewall of the gate spacer.Type: ApplicationFiled: February 11, 2020Publication date: August 12, 2021Inventors: Yu-Jiun Peng, Hsiu-Hao Tsao, Shu-Han Chen, Chang-Jhih Syu, Kuo-Feng Yu, Jian-Hao Chen, Chih-Hao Yu, Chang-Yun Chang
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Publication number: 20210242090Abstract: A device includes a substrate; semiconductor fins extending from the substrate; a liner layer on sidewalls of the semiconductor fins; an etch stop layer over the substrate and extending laterally from a first portion of the liner layer on a first one of the semiconductor fins to a second portion of the line layer on a second one of the semiconductor fins; an isolation structure over the etch stop layer, wherein the etch stop layer and the isolation structure include different materials; a gate dielectric layer over a top surface of the isolation structure; and a dielectric feature extending through the gate dielectric layer and into the isolation structure, wherein the isolation structure and the dielectric feature collectively extend laterally from the first portion of the liner layer to the second portion of the line layer.Type: ApplicationFiled: April 26, 2021Publication date: August 5, 2021Inventors: Ming-Chang Wen, Chang-Yun Chang, Hsien-Chin Lin, Hung-Kai Chen
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Publication number: 20210202320Abstract: The present disclosure describes fabricating devices with tunable gate height and effective capacitance. A method includes forming a first metal gate stack in a dummy region of a semiconductor substrate, the first metal gate stack including a first work function metal (WFM) layer; forming a second metal gate stack in an active device region of the semiconductor substrate, the second metal gate stack including a second WFM layer different than the first WFM layer; and performing a CMP process using a slurry including a charged abrasive nanoparticles. The charged abrasive nanoparticles include a first concentration in the active device region different from a second concentration in the dummy region causing different polish rates in the active device region and dummy region. After the performing of the CMP process, the first metal gate stack has a first height greater different from a second height of the second metal gate stack.Type: ApplicationFiled: December 17, 2020Publication date: July 1, 2021Inventors: Ming-Chang Wen, Chang-Yun Chang, Keng-Yao Chen, Chen-Yu Tai, Yi-Ting Fu
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Publication number: 20210193530Abstract: The embodiments described herein are directed to a method for mitigating the fringing capacitances generated by patterned gate structures. The method includes forming a gate structure on fin structures disposed on a substrate; forming an opening in the gate structure to divide the gate structure into a first section and a second section, where the first and second sections are spaced apart by the opening. The method also includes forming a fill structure in the opening, where forming the fill structure includes depositing a silicon nitride liner in the opening to cover sidewall surfaces of the opening and depositing silicon oxide on the silicon nitride liner.Type: ApplicationFiled: December 18, 2019Publication date: June 24, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Keng-Yao CHEN, Chang-Yun CHANG, Ming-Chang WEN
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Publication number: 20210183713Abstract: A method of controlling gate formation of a semiconductor device includes acquiring a correlation between gate critical dimensions (CDs) and etching recipes for forming gate trenches; measuring a gate CD on a target wafer; determining an etching recipe based on the correction and the measured gate CD; and performing an etching process on the target wafer to form a gate trench with the determined etching recipe.Type: ApplicationFiled: October 20, 2020Publication date: June 17, 2021Inventors: Chang-Jhih Syu, Chih-Hao Yu, Chang-Yun Chang, Hsiu-Hao Tsao, Yu-Jiun Peng
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Patent number: 11034736Abstract: An isolated and purified nucleic acid molecule that encodes a polypeptide comprising at least eight contiguous amino acids of SEQ ID NO: 1, 2, or 3, wherein the at least eight contiguous amino acids have anti-viral activity, as well as an isolated and purified nucleic acid molecule that encodes a polypeptide comprising at least eight contiguous amino acids of SEQ ID NO: 1, 2, or 3, wherein the at least eight contiguous amino acids have anti-viral activity, a vector comprising such an isolated and purified nucleic acid molecule, a host cell comprising the nucleic acid molecule, optionally in the form of a vector, a method of producing an antiviral polypeptide or conjugate thereof, the anti-viral polypeptide itself, a conjugate or fusion protein comprising the anti-viral polypeptide, and compositions comprising an effective amount of the anti-viral polypeptide or conjugate or fusion protein thereof. Further provided are methods of inhibiting prophylactically or therapeutically a viral infection of a host.Type: GrantFiled: January 9, 2015Date of Patent: June 15, 2021Assignee: The United States of America, as represented by the Secretary, Department of Health and Human ServicesInventors: Barry R. O'Keefe, James B. McMahon, Koreen Ramessar, Chang-yun Xiong
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Publication number: 20210175126Abstract: A semiconductor device includes a substrate, first and second fins protruding from the substrate, and first and second source/drain (S/D) features over the first and second fins respectively. The semiconductor device further includes an isolation feature over the substrate and disposed between the first and second S/D features, and a dielectric layer disposed on sidewalls of the first and second S/D features and on sidewalls of the isolation feature. A top portion of the isolation feature extends above the dielectric layer.Type: ApplicationFiled: February 22, 2021Publication date: June 10, 2021Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chang-Yun Chang, Ching-Feng Fu, Peng Wang
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Patent number: 11031501Abstract: A first FinFET device includes first fin structures that extend in a first direction in a top view. A second FinFET device includes second fin structures that extend in the first direction in the top view. The first FinFET device and the second FinFET device are different types of FinFET devices. A plurality of gate structures extend in a second direction in the top view. The second direction is different from the first direction. Each of the gate structures partially wraps around the first fin structures and the second fin structures. A dielectric structure is disposed between the first FinFET device and the second FinFET device. The dielectric structure cuts each of the gate structures into a first segment for the first FinFET device and a second segment for the second FinFET device. The dielectric structure is located closer to the first FinFET device than to the second FinFET device.Type: GrantFiled: December 16, 2019Date of Patent: June 8, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chang-Yun Chang, Ming-Ching Chang, Shu-Yuan Ku
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Patent number: 10991628Abstract: A device includes a substrate; semiconductor fins extending from the substrate; an isolation structure over the substrate and laterally between the semiconductor fins; a liner layer between sidewalls of the semiconductor fins and the isolation structure; and an etch stop layer between the substrate and the isolation structure and laterally between the semiconductor fins. The etch stop layer includes a material different than that of the isolation structure and the liner layer.Type: GrantFiled: November 21, 2019Date of Patent: April 27, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ming-Chang Wen, Chang-Yun Chang, Hsien-Chin Lin, Hung-Kai Chen
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Patent number: 10978351Abstract: A device that includes a substrate; semiconductor fins extending from the substrate; an isolation structure over the substrate and laterally between the semiconductor fins; a liner layer between sidewalls of the semiconductor fins and the isolation structure; and an etch stop layer between the substrate and the isolation structure and laterally between the semiconductor fins. The etch stop layer includes a material different than that of the isolation structure and the liner layer.Type: GrantFiled: November 17, 2017Date of Patent: April 13, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ming-Chang Wen, Chang-Yun Chang, Hsien-Chin Lin, Hung-Kai Chen
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Patent number: 10930564Abstract: A method includes providing a structure having first and second fins over a substrate and oriented lengthwise generally along a first direction and source/drain (S/D) features over the first and second fins; forming an interlayer dielectric (ILD) layer covering the S/D features; performing a first etching process at least to an area between the S/D features, thereby forming a trench in the ILD layer; depositing a dielectric material in the trench; performing a second etching process to selectively recess the dielectric material; and performing a third etching process to selectively recess the ILD layer, thereby forming a contact hole that exposes the S/D features.Type: GrantFiled: August 9, 2019Date of Patent: February 23, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chang-Yun Chang, Ching-Feng Fu, Peng Wang
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Patent number: 10868003Abstract: A semiconductor device includes first and second transistors each having a high-k metal gate disposed over a respective channel region of the transistors. The semiconductor device further includes first and second dielectric features in physical contact with an end of the respective high-k metal gates. The first and second transistors are of a same conductivity type. The two high-k metal gates have a same number of material layers. The first transistor's threshold voltage is different from the second transistor's threshold voltage, and at least one of following is true: the two high-k metal gates have different widths, the first and second dielectric features have different distances from respective channel regions of the two transistors, and the first and second dielectric features have different dimensions.Type: GrantFiled: October 25, 2019Date of Patent: December 15, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ming-Chang Wen, Chang-Yun Chang, Hsien-Chin Lin, Bone-Fong Wu, Ya-Hsiu Lin