Patents by Inventor Cheng-Hung Chang

Cheng-Hung Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150168594
    Abstract: A two-tier wireless soil measurement apparatus is disclosed, including a top head and a plurality of sensors, wherein the top head being placed on or above the ground and the plurality of sensors being buried under the soil for sensing soil conditions, generating soil data representing the sensed soil conditions, and transmitting generated soil conditions to the top head; the plurality of sensors able to be assembled into a pole and each of the plurality of sensors including a sensor unit for sensing a soil condition; a circuit module connected to the sensor unit for transmitting sensed soil condition to the top head, a sensor housing for housing the sensor unit and the circuit module; and an engaging element for engaging two sensors in a head-to-tail manner for form a pole.
    Type: Application
    Filed: December 13, 2013
    Publication date: June 18, 2015
    Inventor: Cheng-Hung CHANG
  • Patent number: 9054194
    Abstract: Non-planar transistors and methods of fabrication thereof are described. In an embodiment, a method of forming a non-planar transistor includes forming a channel region on a first portion of a semiconductor fin, the semiconductor fin having a top surface and sidewalls. A gate electrode is formed over the channel region of the semiconductor fin, and an in-situ doped semiconductor layer is grown on the top surface and the sidewalls of the semiconductor fin on opposing sides of the gate electrode using a selective epitaxial growth process. At least a part of the doped semiconductor layer is converted to form a dopant rich region.
    Type: Grant
    Filed: January 6, 2010
    Date of Patent: June 9, 2015
    Assignee: Taiwan Semiconductor Manufactruing Company, Ltd.
    Inventors: Chih-Hang Tung, Chin-Hsiang Lin, Cheng-Hung Chang, Sey-Ping Sun
  • Patent number: 9048259
    Abstract: A semiconductor structure includes a semiconductor substrate having a first portion and a second portion. A first Fin field-effect transistor (FinFET) is formed over the first portion of the semiconductor substrate, wherein the first FinFET includes a first fin having a first fin height. A second FinFET is formed over the second portion of the semiconductor substrate, wherein the second FinFET includes a second fin having a second fin height different from the first fin height. A top surface of the first fin is substantially level with a top surface of the second fin. A punch-through stopper is underlying and adjoining the first FinFET, wherein the punch-through stopper isolates the first fin from the first portion of the semiconductor substrate.
    Type: Grant
    Filed: July 31, 2012
    Date of Patent: June 2, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Ting Hung, Cheng-Hung Chang, Chen-Yi Lee, Chen-Nan Yeh, Chen-Hua Yu
  • Patent number: 8957477
    Abstract: A method of forming a semiconductor structure includes providing a composite substrate, which includes a bulk silicon substrate and a silicon germanium (SiGe) layer over and adjoining the bulk silicon substrate. A first condensation is performed to the SiGe layer to form a condensed SiGe layer, so that the condensed SiGe layer has a substantially uniform germanium concentration. The condensed SiGe layer and a top portion of the bulk silicon substrate are etched to form a composite fin including a silicon fin and a condensed SiGe fin over the silicon fin. The method further includes oxidizing a portion of the silicon fin; and performing a second condensation to the condensed SiGe fin.
    Type: Grant
    Filed: October 13, 2011
    Date of Patent: February 17, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hung Chang, Yu-Rung Hsu, Chen-Yi Lee, Shih-Ting Hung, Chen-Nan Yeh, Chen-Hua Yu
  • Patent number: 8883597
    Abstract: The present disclosure provides a method of fabricating a FinFET element including providing a substrate including a first fin and a second fin. A first layer is formed on the first fin. The first layer comprises a dopant of a first type. A dopant of a second type is provided to the second fin. High temperature processing of the substrate is performed on the substrate including the formed first layer and the dopant of the second type.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: November 11, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hung Chang, Chen-Hua Yu, Chen-Nan Yeh, Chu-Yun Fu, Yu-Rang Hsu, Ding-Yuan Chen
  • Publication number: 20140070318
    Abstract: A semiconductor structure includes a semiconductor fin on a top surface of a substrate, wherein the semiconductor fin includes a middle section having a first width; and a first and a second end section connected to opposite ends of the middle section, wherein the first and the second end sections each comprises at least a top portion having a second width greater than the first width. The semiconductor structure further includes a gate dielectric layer on a top surface and sidewalls of the middle section of the semiconductor fin; and a gate electrode on the gate dielectric layer.
    Type: Application
    Filed: November 14, 2013
    Publication date: March 13, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hua Yu, Yu-Rung Hsu, Chen-Nan Yeh, Cheng-Hung Chang
  • Patent number: 8644904
    Abstract: A flexible dry electrode and the manufacturing method thereof are provided. The electrode has an electroplated uneven surface and at least one hole and is made of porous material.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: February 4, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Cheng-Hung Chang, Yi-Shiang Ouyang, Wen-Ying Chang
  • Publication number: 20140015146
    Abstract: A semiconductor component includes a semiconductor substrate having an opening A first dielectric liner having a first compressive stress is disposed in the opening. A second dielectric liner having a tensile stress is disposed on the first dielectric liner. A third dielectric liner having a second compressive stress disposed on the second dielectric liner.
    Type: Application
    Filed: September 23, 2013
    Publication date: January 16, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hua YU, Cheng-Hung CHANG, Ebin LIAO, Chia-Lin YU, Hsiang-Yi WANG, Chun Hua CHANG, Li-Hsien HUANG, Darryl KUO, Tsang-Jiuh WU, Wen-Chih CHIOU
  • Patent number: 8617948
    Abstract: A semiconductor structure includes a semiconductor fin on a top surface of a substrate, wherein the semiconductor fin includes a middle section having a first width; and a first and a second end section connected to opposite ends of the middle section, wherein the first and the second end sections each comprises at least a top portion having a second width greater than the first width. The semiconductor structure further includes a gate dielectric layer on a top surface and sidewalls of the middle section of the semiconductor fin; and a gate electrode on the gate dielectric layer.
    Type: Grant
    Filed: May 9, 2011
    Date of Patent: December 31, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Yu-Rung Hsu, Chen-Nan Yeh, Cheng-Hung Chang
  • Patent number: 8575725
    Abstract: A semiconductor component includes a semiconductor substrate having a top surface. An opening extends from the top surface into the semiconductor substrate. The opening includes an interior surface. A first dielectric liner having a first compressive stress is disposed on the interior surface of the opening. A second dielectric liner having a tensile stress is disposed on the first dielectric liner. A third dielectric liner having a second compressive stress disposed on the second dielectric liner. A metal barrier layer is disposed on the third dielectric liner. A conductive material is disposed on the metal barrier layer and fills the opening.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: November 5, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Cheng-Hung Chang, Ebin Liao, Chia-Lin Yu, Hsiang-Yi Wang, Chun Hua Chang, Li-Hsien Huang, Darryl Kuo, Tsang-Jiuh Wu, Wen-Chih Chiou
  • Publication number: 20130277769
    Abstract: Non-planar transistors and methods of fabrication thereof are described. In an embodiment, a method of forming a non-planar transistor includes forming a channel region on a first portion of a semiconductor fin, the semiconductor fin having a top surface and sidewalls. A gate electrode is formed over the channel region of the semiconductor fin, and an in-situ doped semiconductor layer is grown on the top surface and the sidewalls of the semiconductor fin on opposing sides of the gate electrode using a selective epitaxial growth process. At least a part of the doped semiconductor layer is converted to form a dopant rich region.
    Type: Application
    Filed: June 14, 2013
    Publication date: October 24, 2013
    Inventors: Chih-Hang Tung, Chin-Hsiang Lin, Cheng-Hung Chang, Sey-Ping Sun
  • Patent number: 8519792
    Abstract: A differential voltage sensing method for achieving input impedance matching comprises the steps of: providing a first bio-potential signal to a first variable resistor for generating a first signal; providing a second bio-potential signal to a second variable resistor for generating a second signal; differentially amplifying first and second signals for generating a third signal; selecting an operation band of the third signal for generating first and second logic signals; and dynamically adjusting one of the impedances of the first and second variable resistors according to the first and second logic signals, wherein each of the first and second bio-potential signals has a common signal voltage level and a differential signal voltage level.
    Type: Grant
    Filed: May 21, 2010
    Date of Patent: August 27, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Wen Ying Chang, Cheng Hung Chang, Ying Ju Chen
  • Patent number: 8487410
    Abstract: A semiconductor component includes a semiconductor substrate having a top surface. An opening extends from the top surface into the semiconductor substrate. The opening includes an interior surface. A first dielectric liner having a first compressive stress is disposed on the interior surface of the opening. A second dielectric liner having a tensile stress is disposed on the first dielectric liner. A third dielectric liner having a second compressive stress disposed on the second dielectric liner. A metal barrier layer is disposed on the third dielectric liner. A conductive material is disposed on the metal barrier layer and fills the opening.
    Type: Grant
    Filed: April 13, 2011
    Date of Patent: July 16, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Cheng-Hung Chang, Ebin Liao, Chia-Lin Yu, Hsiang-Yi Wang, Chun Hua Chang, Li-Hsien Huang, Darryl Kuo, Tsang-Jiuh Wu, Wen-Chih Chiou
  • Publication number: 20130165813
    Abstract: A sensor for acquiring EMG and MMG signals is provided, including a substrate, an inertial sensing element received in a hole of the substrate, a circuit element disposed on the substrate, a plurality of electrical connecting members connecting the inertial sensing element with the substrate, and a sensing ring disposed on the substrate and surrounding the hole. The electrical connecting members are flexible, and the circuit element and the sensing ring are disposed on opposite sides of the substrate.
    Type: Application
    Filed: April 16, 2012
    Publication date: June 27, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Cheng-Hung Chang, Kuan-Jen Fang, Chun-Hsiang Huang, Chueh-Shan Liu, Yii-Tay Chiou, Yung-Ching Huang
  • Patent number: 8442628
    Abstract: A differential voltage sensing method for achieving input impedance matching comprises the steps of: providing a first bio-potential signal to a first variable resistor for generating a first signal; providing a second bio-potential signal to a second variable resistor for generating a second signal; differentially amplifying first and second signals for generating a third signal; selecting an operation band of the third signal for generating first and second logic signals; and dynamically adjusting one of the impedances of the first and second variable resistors according to the first and second logic signals, wherein each of the first and second bio-potential signals has a common signal voltage level and a differential signal voltage level.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: May 14, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Wen Ying Chang, Cheng Hung Chang, Ying Ju Chen
  • Publication number: 20130009245
    Abstract: Semiconductor devices with low junction capacitances and methods of fabrication thereof are described. In one embodiment, a method of forming a semiconductor device includes forming isolation regions in a substrate to form active areas. The sidewalls of the active areas are enclosed by the isolation regions. The isolation regions are recessed to expose first parts of the sidewalls of the active areas. The first parts of the sidewalls of the active areas are covered with spacers. The isolation regions are etched to expose second parts of the sidewalls of the active area, the second parts being disposed below the first parts. The active areas are etched through the exposed second parts of the sidewalls to form lateral openings. The lateral openings are filled with a spin on dielectric.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 10, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Hung Chang, Yu-Rung Hsu, Chen-Hua Yu
  • Publication number: 20120299110
    Abstract: A semiconductor structure includes a semiconductor substrate having a first portion and a second portion. A first Fin field-effect transistor (FinFET) is formed over the first portion of the semiconductor substrate, wherein the first FinFET includes a first fin having a first fin height. A second FinFET is formed over the second portion of the semiconductor substrate, wherein the second FinFET includes a second fin having a second fin height different from the first fin height. A top surface of the first fin is substantially level with a top surface of the second fin. A punch-through stopper is underlying and adjoining the first FinFET, wherein the punch-through stopper isolates the first fin from the first portion of the semiconductor substrate.
    Type: Application
    Filed: July 31, 2012
    Publication date: November 29, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Ting Hung, Cheng-Hung Chang, Chen-Yi Lee, Chen-Nan Yeh, Chen-Hua Yu
  • Patent number: 8306597
    Abstract: A physiological signal sensing device for examination of human is provided. The physiological signal sensing device includes a light emitting fiber and a light receiving fiber. The light emitting fiber includes a plurality of light emitting portions, wherein the light emitting fiber provides a plurality of sensing beams, and the sensing beams are respectively emitted through the light emitting portions. The light receiving fiber includes a plurality of light receiving portions. The light receiving fiber corresponds to the light emitting fiber. The sensing beams are emitted through the light emitting portions, reflected or refracted by the human. And then the sensing beams are received by the light receiving portions.
    Type: Grant
    Filed: March 10, 2010
    Date of Patent: November 6, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Wen-Ying Chang, Cheng-Hung Chang
  • Patent number: 8293616
    Abstract: Semiconductor devices with low junction capacitances and methods of fabrication thereof are described. In one embodiment, a method of forming a semiconductor device includes forming isolation regions in a substrate to form active areas. The sidewalls of the active areas are enclosed by the isolation regions. The isolation regions are recessed to expose first parts of the sidewalls of the active areas. The first parts of the sidewalls of the active areas are covered with spacers. The isolation regions are etched to expose second parts of the sidewalls of the active area, the second parts being disposed below the first parts. The active areas are etched through the exposed second parts of the sidewalls to form lateral openings. The lateral openings are filled with a spin on dielectric.
    Type: Grant
    Filed: November 13, 2009
    Date of Patent: October 23, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hung Chang, Yu-Rung Hsu, Chen-Hua Yu
  • Publication number: 20120261827
    Abstract: A semiconductor component includes a semiconductor substrate having a top surface. An opening extends from the top surface into the semiconductor substrate. The opening includes an interior surface. A first dielectric liner having a first compressive stress is disposed on the interior surface of the opening. A second dielectric liner having a tensile stress is disposed on the first dielectric liner. A third dielectric liner having a second compressive stress disposed on the second dielectric liner. A metal barrier layer is disposed on the third dielectric liner. A conductive material is disposed on the metal barrier layer and fills the opening.
    Type: Application
    Filed: April 13, 2011
    Publication date: October 18, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hua YU, Cheng-Hung CHANG, Ebin LIAO, Chia-Lin YU, Hsiang-Yi WANG, Chun Hua CHANG, Li-Hsien HUANG, Darryl KUO, Tsang-Jiuh WU, Wen-Chih CHIOU