Abstract: The present disclosure provides a method of fabricating a semiconductor device that includes providing a substrate having a first region and a second region, forming first and second gate stacks in the first and second regions, respectively, the first gate stack including a first dummy gate and the second gate stack including a second dummy gate, removing the first dummy gate in the first gate stack thereby forming a first trench and removing the second dummy gate in the second gate stack thereby forming a second trench, forming a first metal layer in the first trench and in the second trench, removing at least a portion of the first metal layer in the first trench, forming a second metal layer in the remainder of the first trench and in the remainder of the second trench, reflowing the second metal layer, and performing a chemical mechanical polishing (CMP).

Abstract: Disclosed is a packet forwarding apparatus and method for a virtualization switch, applicable to switch environments built by Internet Small Computer System Interface (iSCSI) connections. The packet forwarding apparatus comprises a header extractor, a dispatcher, and a forwarding unit. After completion of the authorization for iSCSI session connections, the header extractor receives iSCSI packets and extracts the headers for the iSCSI packets. The dispatcher decides the flow directions for the received packets. The forwarding unit forwards the packets between the client-side connection and the storage-side connection of the virtualization switch, including converting virtual addresses into physical addresses for the received iSCSI packets, building the mapping between the client-side interface and the storage-side interface, and delivering the payload associated with the connections.

Abstract: A method for fabricating a integrated circuit with improved performance is disclosed. The method comprises providing a substrate; forming a hard mask layer over the substrate; forming protected portions and unprotected portions of the hard mask layer; performing a first etching process, a second etching process, and a third etching process on the unprotected portions of the hard mask layer, wherein the first etching process partially removes the unprotected portions of the hard mask layer, the second etching process treats the unprotected portions of the hard mask layer, and the third etching process removes the remaining unprotected portions of the hard mask layer; and performing a fourth etching process to remove the protected portions of the hard mask layer.

Abstract: A cleaning sequence usable in semiconductor manufacturing efficiently cleans semiconductor substrates while preventing chemical oxide formation thereon. The sequence includes the sequence of: 1) treating with an HF solution; 2) treating with pure H2SO4; 3) treating with an H2O2 solution; 4) a DI water rinse; and 5) treatment with an HCl solution. The pure H2SO4 solution may include an H2SO4 concentration of about ninety-eight percent (98%) or greater. After the HCl solution treatment, the cleaned surface may be a silicon surface that is free of a chemical oxide having a thickness of 5 angstroms or greater. The invention finds particular advantage in semiconductor devices that utilize multiple gate oxide thicknesses.

Abstract: The present disclosure provides a method that includes forming first and second gate structures over first and second regions, respectively, removing a first dummy gate and first dummy dielectric from the first gate structure thereby forming a first trench and removing a second dummy gate and second dummy dielectric from the second gate structure thereby forming a second trench, forming a gate layer to partially fill the first and second trenches, forming a material layer to fill the remainder of the first and second trenches, removing a portion of the material layer such that a remaining portion of the material layer protects a first portion of the gate layer located at a bottom portion of the first and second trenches, removing a second portion of the gate layer, removing the remaining portion of the material layer from the first and second trenches.

Abstract: A method of forming a gate dielectric layer includes forming a gate dielectric layer over a substrate. The gate dielectric layer is processed with carbon-containing ions. The gate dielectric layer is thermally processed, thereby providing the gate dielectric layer with a level of carbon between about 1 atomic % and about 20 atomic %.

Abstract: The present disclosure provides a method for fabricating a semiconductor device. The method includes forming first, second, third, and fourth gate structures on a semiconductor substrate, each gate structure having a dummy gate, removing the dummy gate from the first, second, third, and fourth gate structures, thereby forming first, second, third, and fourth trenches, respectively, forming a metal layer to partially fill in the first, second, third, and fourth trenches, forming a first photoresist layer over the first, second, and third trenches, etching a portion of the metal layer in the fourth trench, removing the first photoresist layer, forming a second photoresist layer over the second and third trenches, etching the metal layer in the first trench and the remaining portion of the metal layer in the fourth trench, and removing the second photoresist layer.

Abstract: The present disclosure provides a method of fabricating a semiconductor device that includes providing a substrate having a first region and a second region, forming first and second gate stacks in the first and second regions, respectively, the first gate stack including a first dummy gate and the second gate stack including a second dummy gate, removing the first dummy gate in the first gate stack thereby forming a first trench and removing the second dummy gate in the second gate stack thereby forming a second trench, forming a first metal layer in the first trench and in the second trench, removing at least a portion of the first metal layer in the first trench, forming a second metal layer in the remainder of the first trench and in the remainder of the second trench, reflowing the second metal layer, and performing a chemical mechanical polishing (CMP).

Abstract: The present disclosure provides a method that includes providing a semiconductor substrate having a first region and a second region, forming first and second gate stacks over the first and second regions, respectively, the first and second gate stacks each including a dummy gate electrode, removing the dummy gate electrodes from the first and second gate stacks, respectively, thereby forming trenches, forming a metal layer to partially fill the trenches, forming an oxide layer over the metal layer filling a remaining portion of the trenches, applying a first treatment to the oxide layer, forming a patterned photoresist layer on the oxide layer overlying the first region, applying a second treatment to the oxide layer overlying the second region, etching the oxide layer overlying the second region, etching the first metal layer overlying the second region, removing the patterned photoresist layer, and removing the oxide layer overlying the first region.

Abstract: The present disclosure provides a semiconductor device that includes a semiconductor substrate, and a transistor formed in the substrate. The transistor has a gate structure that includes an interfacial layer formed on the substrate, a high-k dielectric layer formed on the interfacial layer, a capping layer formed on the high-k dielectric layer, the capping layer including a silicon oxide, silicon oxynitride, silicon nitride, or combinations thereof, and a polysilicon layer formed on the capping layer.

Abstract: Provided are methods of patterning metal gate structures including a high-k gate dielectric. In an embodiment, a soluble hard mask layer may be used to provide a masking element to pattern a metal gate. The soluble hard mask layer may be removed from the substrate by water or a photoresist developer. In an embodiment, a hard mask including a high-k dielectric is formed. In a further embodiment, a protection layer is formed underlying a photoresist pattern. The protection layer may protect one or more layers formed on the substrate from a photoresist stripping process.

Abstract: A method for fabricating a semiconductor device comprises providing a silicon-containing substrate with first, second, and third regions. First, second, and third gate stacks respectively overlie a portion of the silicon-containing substrate in the first, second, and third regions. A spacer is formed on opposing sidewalls of each of the first, second, and third gate stacks, the spacer overlying a portion of the silicon-containing substrate in the first, second, and third regions, respectively. A source/drain region is formed in a portion of the silicon-containing substrate in the first, second, and third regions, with the source/drain region adjacent to the first, second, and third gate stacks, respectively. The first, second, and third gate stacks have first, second, and third gate dielectric layers of various thicknesses and at least one thereof with a relatively thin thickness is treated by NH3-plasma, having a nitrogen-concentration of about 1013˜1021 atoms/cm2 therein.

Abstract: A method of forming an integrated circuit is provided. The method includes performing a multiple-time flash anneal process to a wafer, wherein the multiple-time flash anneal process comprises preheating the wafer to a first preheat temperature; performing a first flash on the wafer with a first flash energy; preheating the wafer to a second preheat temperature; and performing a second flash on the wafer with a second flash energy.

Abstract: A fan control system includes a power source, a switch control circuit, a switch control signal delivering unit and a fan circuit module. The power source outputs a nominal power, the switch control circuit electrically connects to the power source, the switch control signal delivering unit electrically connects to the switch control circuit and can send a power control signal to the switch control circuit, and the fan circuit module electrically connects to the switch control circuits. In an initial operation state, the nominal power output from the power source can be reduced to a control power sending to the fan circuit module via the switch control circuit to drive at least one fan within the fan circuit module, and then the power control signal controls the control power after the switch control signal delivering unit sends the power control signal to the switch control circuit.

Abstract: A distributed audio visual (AV) system including a plurality of media servers, a media renderer, and a control point which are connected to each other via a peer-to-peer network is provided. Each of the media servers includes a content directory management unit (CDMU) and a query content information (QCI) module, wherein the CDMU includes a synchronizer module and a content information maintainer (CIM) module. The synchronizer module synchronizes content information of AV contents stored in all the media servers. The CIM module records the content information and establishes an integrated content directory list according to the content information. The QCI module queries the content information. The control point obtains the integrated content directory list from one of the media servers and queries the content information related to all the AV contents, so as to control the media renderer to play the AV contents.

Abstract: Disclosed is a packet forwarding apparatus and method for virtualization switch, applicable to switch environments built by Internet Small Computer System Interface (iSCSI) connections. The packet forwarding apparatus comprises a header extractor, a dispatcher, and a forwarding unit. After completion of the authorization for iSCSI session connections, the header extractor receives at least an iSCSI packet and extracts the header for the at least an iSCSI packet. The dispatcher decides the flow directions for the received packets. The forwarding unit forwards the packets between the client-side connection and the storage-side connection, including converting the virtual address into physical address for the received iSCSI packets, building the mapping between the client-side interface and the storage-side interface, and delivering the payload associated with the connections.

Abstract: A semiconductor structure includes a PMOS device and an NMOS device. The PMOS device includes a first gate dielectric on a semiconductor substrate, a first gate electrode on the first gate dielectric, and a first gate spacer along sidewalls of the first gate electrode and the first gate dielectric. The NMOS device includes a second gate dielectric on the semiconductor substrate, a second gate electrode on the second gate dielectric, a nitrided polysilicon re-oxidation layer having a vertical portion and a horizontal portion wherein the vertical portion is on sidewalls of the second gate electrode and the second gate dielectric and wherein the horizontal portion is on the semiconductor substrate, and a second gate spacer on sidewalls of the second gate electrode and the second gate dielectric, wherein the second gate spacer is on the horizontal portion of the nitrided polysilicon re-oxidation layer.

Abstract: A method of manufacturing a semiconductor device comprising forming a gate oxide layer over a substrate subjecting the gate oxide layer to a first nitridation process, subjecting the gate oxide layer to a first anneal process after the first nitridation process, subjecting the gate oxide layer to a second nitridation process after the first anneal process, subjecting the gate oxide layer to a second anneal process after the second nitridation process, and forming a gate electrode over the gate oxide.

Abstract: A docking station is used for cooperating with a computer host, and the computer host has a first power connecting portion and a first peripheral component connecting portion. The docking station includes a casing, a second power connecting portion and a second peripheral component connecting portion. The casing is used for disposing the computer host. The second power connecting portion and the second peripheral component connecting portion are disposed at the casing. When the computer host is disposed at the casing, the second power connecting portion is connected to the first power connecting portion to transmit a power signal to the computer host, and the second peripheral component connecting portion is connected to the first peripheral component connecting portion to transmit at least one peripheral component signal to the computer host. An expandable computer system is also disclosed.

Abstract: A method for forming a semiconductor structure includes providing a semiconductor substrate; forming a gate stack over the semiconductor substrate; implanting carbon into the semiconductor substrate; and implanting an n-type impurity into the semiconductor substrate to form a lightly doped source/drain (LDD) region, wherein the n-type impurity comprises more than one phosphorous atom. The n-type impurity may include phosphorous dimer or phosphorous tetramer.