Patents by Inventor Ching Chu
Ching Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240339510Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a stack of channel structures and a first epitaxial structure and a second epitaxial structure adjacent to opposite sides of the channel structures. The semiconductor device structure also includes a gate stack wrapped around the channel structures and a backside conductive contact connected to the second epitaxial structure. The second epitaxial structure is between a top of the backside conductive contact and a top of the gate stack. The semiconductor device structure further includes an etch stop layer extending along a sidewall of the backside conductive contact and a bottom of the gate stack.Type: ApplicationFiled: June 17, 2024Publication date: October 10, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Feng-Ching CHU, Wei-Yang LEE, Chia-Pin LIN
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Publication number: 20240329464Abstract: A semiconductor substrate includes: a substrate; a first conductive line extending along a first direction; a semiconductor layer, wherein the first conductive line includes a first part overlapping with the semiconductor layer and a second part not overlapping with the semiconductor layer, the first part of the first conductive line has a first width along a second direction different from the first direction, the second part of conductive line has a second width along the second direction, and the first width is greater than the second width; and an electrode disposed on the semiconductor layer and including an arc edge outside the first conductive line, wherein the semiconductor layer includes a first part extending along the second direction and overlapping with the arc edge and a second part connecting the first part and overlapping with a side of the first part of the first conductive line.Type: ApplicationFiled: June 12, 2024Publication date: October 3, 2024Inventors: Tsung-Han TSAI, Hsia-Ching CHU, Mei-Chun SHIH
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Patent number: 12107165Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first fin structure extended above a substrate along a first direction, and a first gate structure formed over the first fin structure along a second direction. The semiconductor device structure includes a first source/drain (S/D) structure formed over the first fin structure and adjacent to the first gate structure, and a cap layer formed on and in direct contact with the first S/D structure. The semiconductor device structure includes an isolation structure formed adjacent to the first gate structure and the first S/D structure along the first direction, and a bottom surface of the isolation structure is lower than a bottom surface of the first gate structure and a bottom surface of the first S/D structure.Type: GrantFiled: December 19, 2022Date of Patent: October 1, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 12100712Abstract: A substrate assembly includes: a substrate; a gate structure disposed on the substrate; a conductive line disposed on the substrate, wherein from a top view, the conductive line extends along a first direction; and a conductive structure disposed on the substrate, wherein from the top view, the conductive structure is adjacent to the conductive line and separated from the conductive line, and the conductive structure has an overlapping region overlapping the gate structure, wherein from the top view, the overlapping region extends along a second direction, the first direction and the second direction are different, the overlapping region comprises a first end portion, and the first end portion has a curved shape.Type: GrantFiled: March 1, 2023Date of Patent: September 24, 2024Assignee: INNOLUX CORPORATIONInventors: An-Chang Wang, Bo-Chin Tsuei, Hsia-Ching Chu, Ming-Chien Sun
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Publication number: 20240292679Abstract: A display device includes: a substrate; a first transistor and a second transistor disposed on the substrate; a first electrode and a second electrode, wherein the first electrode is electrically connected to the first transistor through a first via hole, and the second electrode is electrically connected to the second transistor through a second via hole; a first signal line disposed on the substrate and overlapped with the first electrode and the second electrode; and a second signal line disposed on the substrate and adjacent to the first signal line, wherein the first signal line and the second signal line extend along a first direction, wherein a distance between the first via hole and the second via hole along the first direction is greater than a distance between the first signal line and the second signal line along a second direction different the first direction.Type: ApplicationFiled: May 9, 2024Publication date: August 29, 2024Inventors: Lien-Hsiang CHEN, Kung-Chen KUO, Sheng-Kai HSU, Hsia-Ching CHU, Mei-Chun SHIH
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Patent number: 12068204Abstract: A method of fabricating a fin-like field effect transistor (FinFET) device includes providing a semiconductor substrate having a region for forming p-type metal-oxide-semiconductor (PMOS) devices and a region for forming n-type metal-oxide-semiconductor (PMOS) devices, forming fin structures in both regions of the substrate separated by isolation features, first forming source/drain (S/D) features in the PMOS region, and subsequently forming S/D features in the NMOS region. First forming the PMOS S/D features and then forming the NMOS S/D features results in a greater extent of loss of isolation features in the PMOS region than in the NMOS region.Type: GrantFiled: July 26, 2023Date of Patent: August 20, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Publication number: 20240251539Abstract: A semiconductor device according to the present disclosure includes a gate-all-around (GAA) transistor in a first device area and a fin-type field effect transistor (FinFET) in a second device area. The GAA transistor includes a plurality of vertically stacked channel members and a first gate structure over and around the plurality of vertically stacked channel members. The FinFET includes a fin-shaped channel member and a second gate structure over the fin-shaped channel member. The fin-shaped channel member includes semiconductor layers interleaved by sacrificial layers.Type: ApplicationFiled: February 26, 2024Publication date: July 25, 2024Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 12038654Abstract: A semiconductor substrate includes: a substrate; a first conductive line disposed on the substrate and extending along a first direction; a semiconductor layer disposed on the substrate; an electrode disposed on the semiconductor layer and including an arc edge outside the first conductive line; and a conductive layer disposed on the electrode, wherein a part of the semiconductor layer extends along a second direction different from the first direction and the arc edge overlaps the part of the semiconductor layer.Type: GrantFiled: April 11, 2023Date of Patent: July 16, 2024Assignee: INNOLUX CORPORATIONInventors: Tsung-Han Tsai, Hsia-Ching Chu, Mei-Chun Shih
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Patent number: 12027626Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary method of manufacture comprises receiving a substrate including a semiconductor material stack formed thereon, wherein the semiconductor material stack includes a first semiconductor layer of a first semiconductor material and second semiconductor layer of a second semiconductor material that is different than the first semiconductor material. Patterning the semiconductor material stack to form a trench. The patterning includes performing a first etch process with a first etchant for a first duration and then performing a second etch process with a second etchant for a second duration, where the second etchant is different from the first etchant and the second duration is greater than the first duration. The first etch process and the second etch process are repeated a number of times. Then epitaxially growing a third semiconductor layer of the first semiconductor material on a sidewall of the trench.Type: GrantFiled: December 14, 2022Date of Patent: July 2, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Feng-Ching Chu, Wei-Yang Lee, Chia-Pin Lin
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Patent number: 12015060Abstract: A semiconductor device structure and a formation method are provided. The semiconductor device structure includes a stack of channel structures and includes a first epitaxial structure and a second epitaxial structure adjacent to opposite sides of the channel structures. The semiconductor device structure also includes a gate stack wrapped around each of the channel structures and a backside conductive contact connected to the second epitaxial structure. The second epitaxial structure is between a top of the backside conductive contact and a top of the gate stack. The semiconductor device structure further includes a dielectric fin stacked over an isolation structure. The dielectric fin is adjacent to the second epitaxial structure, and the isolation structure is adjacent to the backside conductive contact. The isolation structure has a first height, the dielectric fin has a second height, and the second height is greater than the first height.Type: GrantFiled: June 24, 2021Date of Patent: June 18, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Feng-Ching Chu, Wei-Yang Lee, Chia-Pin Lin
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Publication number: 20240194537Abstract: A semiconductor device includes a substrate having a first region and a second region of opposite conductivity types, an isolation feature over the substrate, a first fin protruding from the substrate in the first region, a first epitaxial feature over the first fin, a second fin protruding from the substrate in the second region, and a second epitaxial feature over the second fin. The isolation feature includes a first portion disposed on sidewalls of the first fin, a second portion disposed on sidewalls of the second fin, and a third portion located between the first fin and the second fin. The third portion has a thickness larger than the first portion and the second portion.Type: ApplicationFiled: February 19, 2024Publication date: June 13, 2024Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 12010881Abstract: A display device includes: a substrate; a metal layer disposed on the substrate; an insulating layer disposed on the metal layer; and a first light emitting diode including a first electrode disposed on the metal layer, wherein a via hole passes through the insulating layer, the first electrode electrically connects to the metal layer through the via hole, and an outline of the via hole includes an arc edge.Type: GrantFiled: June 14, 2023Date of Patent: June 11, 2024Assignee: INNOLUX CORPORATIONInventors: Lien-Hsiang Chen, Kung-Chen Kuo, Sheng-Kai Hsu, Hsia-Ching Chu, Mei-Chun Shih
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Patent number: 12008183Abstract: The disclosure provides a display panel including a substrate, an active layer, a first electrode layer, a common electrode layer, a cathode layer, and a spacer. The active layer is located on the substrate. The first electrode layer is located on the active layer, and the first electrode layer includes a first gate and a second gate. The common electrode layer is located on the first electrode layer. The common electrode layer has a first region, a second region, and a first necking region. The first necking region connects the first region and the second region. The first region and the first gate are correspondingly disposed, and the second region and the second gate are correspondingly disposed. The cathode layer is located on the common electrode layer. The spacer is located between the common electrode layer and the cathode layer. The spacer and the first necking region are correspondingly disposed.Type: GrantFiled: February 6, 2023Date of Patent: June 11, 2024Assignee: Innolux CorporationInventors: Chung-Wen Yen, Hsia-Ching Chu, Kuan-Feng Lee, Yu-Sheng Tsai
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Publication number: 20240186187Abstract: A method of manufacturing an integrated circuit (IC) includes providing a structure having a fin over a substrate in a region of the IC, a sacrificial gate stack engaging a channel region of the fin, and gate spacers on sidewalls of the sacrificial gate stack. The first layers and the second layers are alternately stacked over the substrate. The method also includes etching the fin adjacent the gate spacers, resulting in source/drain trenches, partially recessing the second layers exposed in the source/drain trenches, resulting in gaps between adjacent layers of the first layers in the fin, depositing inner spacer features in the gaps in the fin, epitaxially growing source/drain features in the source/drain trenches, and replacing the sacrificial gate stack with a metal gate stack. The metal gate stack includes a gate dielectric layer disposed over top and sidewalls of the fin having both the first and the second layers.Type: ApplicationFiled: February 12, 2024Publication date: June 6, 2024Inventors: Feng-Ching Chu, Wei-Yang Lee, Chia-Pin Lin
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Publication number: 20240178271Abstract: Various examples of an integrated circuit device and a method for forming the device are disclosed herein. In an example, a method includes receiving a workpiece that includes a substrate, and a device fin extending above the substrate. The device fin includes a channel region. A portion of the device fin adjacent the channel region is etched, and the etching creates a source/drain recess and forms a dielectric barrier within the source/drain recess. The workpiece is cleaned such that a bottommost portion of the dielectric barrier remains within a bottommost portion of the source/drain recess. A source/drain feature is formed within the source/drain recess such that the bottommost portion of the dielectric barrier is disposed between the source/drain feature and a remainder of the device fin.Type: ApplicationFiled: February 5, 2024Publication date: May 30, 2024Inventors: Feng-Ching Chu, Wei-Yang Lee, Yen-Ming Chen, Feng-Cheng Yang
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Patent number: 11937426Abstract: The present disclosure provides a semiconductor structure and a method for forming a semiconductor structure. The semiconductor structure includes a substrate, and a dielectric stack over the substrate. The dielectric stack includes a first layer over the substrate and a second layer over the first layer. The semiconductor structure further includes a gate layer including a first portion traversing the second layer and a second portion extending between the first layer and the second layer.Type: GrantFiled: May 3, 2021Date of Patent: March 19, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Feng-Ching Chu, Feng-Cheng Yang, Katherine H. Chiang, Chung-Te Lin, Chieh-Fang Chen
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Publication number: 20240086021Abstract: A substrate assembly is provided, including a first substrate, an active element layer, a plurality of first electrodes, a circuit substrate, and a plurality of second electrodes. The active element layer is disposed on the first substrate. The plurality of first electrodes are disposed on the first substrate and arranged along a first direction. The circuit substrate is partially overlapping the first substrate in a vertical projection direction. The plurality of second electrodes are disposed on the circuit substrate. A distance between the edge of one of the plurality of second electrodes and the edge of one of the plurality of first electrodes is greater than zero in the first direction, and a width of the one of the plurality of first electrodes is different from a width of the one of the plurality of second electrodes.Type: ApplicationFiled: November 20, 2023Publication date: March 14, 2024Inventors: Chia-Hsiung CHANG, Yang-Chen CHEN, Kuo-Chang SU, Hsia-Ching CHU
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Patent number: 11917803Abstract: A semiconductor device according to the present disclosure includes a gate-all-around (GAA) transistor in a first device area and a fin-type field effect transistor (FinFET) in a second device area. The GAA transistor includes a plurality of vertically stacked channel members and a first gate structure over and around the plurality of vertically stacked channel members. The FinFET includes a fin-shaped channel member and a second gate structure over the fin-shaped channel member. The fin-shaped channel member includes semiconductor layers interleaved by sacrificial layers.Type: GrantFiled: July 7, 2022Date of Patent: February 27, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Publication number: 20240065042Abstract: The disclosure provides a display device, including a first thin film transistor, an insulating layer disposed on the first thin film transistor, a conductive line, and a pixel define layer. The conductive line is electrically coupled to the first thin film transistor via a first contact hole of the insulating layer. The pixel define layer is disposed on the insulating layer. The pixel define layer has a first opening region, a second opening region, and a third opening region. The first opening region and the second opening region are arranged along the first direction. A distance is the shortest distance between the first contact hole and the first opening region. A second distance is the shortest distance between the first contact hole and the second opening region. The first distance is different from the second distance.Type: ApplicationFiled: October 31, 2023Publication date: February 22, 2024Applicant: Innolux CorporationInventors: Hsia-Ching Chu, Pai-Chiao Cheng
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Patent number: 11908748Abstract: A semiconductor device includes a substrate having a first region and a second region of opposite conductivity types, an isolation feature over the substrate, a first fin protruding from the substrate and through the isolation feature in the first region, a first epitaxial feature over the first fin, a second fin protruding from the substrate and through the isolation feature in the second region, and a second epitaxial feature over the second fin. A portion of the isolation feature located between the first fin and the second fin protrudes from a top surface of the isolation feature.Type: GrantFiled: November 15, 2022Date of Patent: February 20, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen