Patents by Inventor Fumitaka Arai

Fumitaka Arai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10686045
    Abstract: A semiconductor memory device according to an embodiment, includes a pair of first electrodes, a semiconductor pillar, an inter-pillar insulating member, a first insulating film, a second electrode, and a second insulating film. The pair of first electrodes are separated from each other, and extend in a first direction. The semiconductor pillar and the inter-pillar insulating member are arranged alternately along the first direction between the pair of first electrodes. The semiconductor pillar and the inter-pillar insulating member extend in a second direction crossing the first direction. The first insulating film is provided at a periphery of the semiconductor pillar. The second electrode is provided between the first insulating film and each electrode of the pair of first electrodes. The second electrode is not provided between the semiconductor pillar and the inter-pillar insulating member. The second insulating film is provided between the second electrode and the first electrode.
    Type: Grant
    Filed: August 23, 2017
    Date of Patent: June 16, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Tatsuya Kato, Fumitaka Arai, Katsuyuki Sekine, Toshiyuki Iwamoto, Yuta Watanabe, Wataru Sakamoto
  • Publication number: 20200176033
    Abstract: According to one embodiment, a semiconductor memory device includes: a conductive layer including a first portion and a second portion electrically coupled to the first portion; a first contact plug electrically coupled to the first portion; a first semiconductor layer; a first insulating layer between the second portion and the first semiconductor layer, and between the first portion and the first semiconductor layer; a second contact plug coupled to the first semiconductor layer in a region in which the first insulating layer is formed; a first interconnect; and a first memory cell apart from the second portion in the second direction and storing information between the first semiconductor layer and the first interconnect.
    Type: Application
    Filed: September 5, 2019
    Publication date: June 4, 2020
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Keiji HOSOTANI, Fumitaka ARAI, Keisuke NAKATSUKA
  • Patent number: 10650894
    Abstract: A semiconductor memory device of an embodiment includes a substrate, a first conductive layer provided above the substrate, the first conductive layer being spaced apart from the substrate in a first direction, and the first conductive layer being provided parallel to a substrate plane, a second conductive layer provided adjacent to the first conductive layer in a second direction intersecting the first direction, the second conductive layer being provided parallel to the substrate plane, a third conductive layer provided above the first conductive layer, the third conductive layer being spaced apart from the first conductive layer in the first direction, and the third conductive layer being provided parallel to the substrate plane, a fourth conductive layer provided above the second conductive layer, the fourth conductive layer being spaced apart from the second conductive layer in the first direction, and the fourth conductive layer being provided parallel to the substrate plane, a fifth conductive layer pr
    Type: Grant
    Filed: March 7, 2019
    Date of Patent: May 12, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tatsuya Kato, Yusuke Shimada, Fumitaka Arai
  • Patent number: 10650900
    Abstract: A semiconductor memory device includes a first NAND string and a second NAND string sharing a channel and being connected in parallel. When reading a value from a first memory cell transistor of the first NAND string, a first potential is applied to a gate of a second memory cell transistor of the first NAND string and a gate of at least one of fourth memory cell transistors opposing the second memory cell transistor, a second potential is applied to a gate of a third memory cell transistor of the second NAND string opposing the first memory cell transistor, and a gate potential of the first memory cell transistor is swept between the second potential and the first potential. The second potential is lower than the first potential.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: May 12, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Yusuke Shimada, Fumitaka Arai, Tatsuya Kato
  • Publication number: 20200135242
    Abstract: According to one embodiment, a semiconductor memory device includes: first to fifth interconnects; a semiconductor layer having one end located between the fourth interconnect and the fifth interconnect and other end connected to the first interconnect; a memory cell; a conductive layer having one end connected to the second interconnect and other end connected to the semiconductor layer; a first insulating layer provided to extend between the third and fourth interconnects and the semiconductor layer, and between the fifth interconnect and the conductive layer; an oxide semiconductor layer provided to extend between the fourth and fifth interconnects and the first insulating layer; and a second insulating layer provided to extend between the fourth and fifth interconnects and the oxide semiconductor layer.
    Type: Application
    Filed: July 3, 2019
    Publication date: April 30, 2020
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Fumitaka ARAI, Keiji HOSOTANI, Nobuyuki MOMO
  • Patent number: 10636803
    Abstract: A semiconductor memory device includes a semiconductor member extending in a first direction, a first interconnect extending in a second direction crossing the first direction, and a first electrode disposed between the semiconductor member and the first interconnect. A curvature radius of a corner portion facing the semiconductor member in the first electrode is larger than a curvature radius of a corner portion facing the first interconnect in the first electrode.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: April 28, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Tatsuya Kato, Fumitaka Arai, Kohei Sakaike, Satoshi Nagashima
  • Publication number: 20200098784
    Abstract: According to one embodiment, a semiconductor memory includes: a first member extending in a first direction perpendicular to a surface of a substrate, and including a first semiconductor layer; first and second interconnects extending in a second direction parallel to the surface of the substrate, the second interconnect neighboring the first interconnect in a third direction; a second member extending in the first direction and above the first member, the second member including a second semiconductor layer; third and a fourth interconnects extending in the second direction, the fourth interconnect neighboring the third interconnect in the third direction; and a third semiconductor layer between the first and the second members, the third semiconductor layer being continuous with the first and the second semiconductor layers.
    Type: Application
    Filed: March 8, 2019
    Publication date: March 26, 2020
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Satoshi NAGASHIMA, Fumitaka ARAI
  • Publication number: 20200090752
    Abstract: A semiconductor memory device of an embodiment includes a substrate, a first conductive layer provided above the substrate, the first conductive layer being spaced apart from the substrate in a first direction, and the first conductive layer being provided parallel to a substrate plane, a second conductive layer provided adjacent to the first conductive layer in a second direction intersecting the first direction, the second conductive layer being provided parallel to the substrate plane, a third conductive layer provided above the first conductive layer, the third conductive layer being spaced apart from the first conductive layer in the first direction, and the third conductive layer being provided parallel to the substrate plane, a fourth conductive layer provided above the second conductive layer, the fourth conductive layer being spaced apart from the second conductive layer in the first direction, and the fourth conductive layer being provided parallel to the substrate plane, a fifth conductive layer pr
    Type: Application
    Filed: March 7, 2019
    Publication date: March 19, 2020
    Applicant: Toshiba Memory Corporation
    Inventors: Tatsuya KATO, Yusuke SHIMADA, Fumitaka ARAI
  • Patent number: 10553601
    Abstract: According to one embodiment, a memory includes: a member extending in a first direction and including an oxide semiconductor layer including first to third portions arranged in order from the bit line to the source line; first, second and third conductive layers arranged along the first direction and facing the first to third portions, respectively, the first conductive layer including first material, and each of the second and third conductive layer including a second material different from the first material; a memory cell in a first position corresponding to the first portion, the memory cell including a charge storage layer in the oxide semiconductor layer; a first transistor in a second position corresponding to the second portion; and a second transistor in a third position corresponding to the third portion.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: February 4, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tsutomu Tezuka, Fumitaka Arai, Keiji Ikeda, Tomomasa Ueda, Nobuyoshi Saito, Chika Tanaka, Kentaro Miura, Tomoaki Sawabe
  • Patent number: 10541311
    Abstract: In a semiconductor memory device, first insulating films are arranged along a first direction and a second direction and extend in a third direction. Interconnect is disposed between the first insulating films in the first direction and extends in the third direction. Electrodes are disposed between the first insulating films in the first direction on a second direction side of the interconnect, and is arranged along the third direction. Second insulating film is disposed between the interconnect and the electrodes. Semiconductor members are arranged along the third direction between the first insulating films in the second direction and extend in the first direction. The electrode is disposed between the interconnect and the semiconductor members. Third insulating film is disposed between the electrodes and the semiconductor member and is thicker than the second insulating film.
    Type: Grant
    Filed: September 13, 2016
    Date of Patent: January 21, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Katsuyuki Sekine, Tatsuya Kato, Fumitaka Arai, Toshiyuki Iwamoto, Yuta Watanabe, Atsushi Murakoshi
  • Patent number: 10497712
    Abstract: According to one embodiment, a memory includes: a first gate of a first transistor and a second gate electrode of the second transistor facing the a semiconductor layer; an oxide semiconductor layer between the first and second transistors and including first to fifth portions in order; a third gate of a first cell facing the first portion; a fourth gate of a third transistor facing the second portion; a fifth gate of a second cell facing the third portion; a sixth gate of a fourth transistor facing the fourth portion; an interconnect connected to the fifth portion; a source line connected to the first transistor; and a bit line connected to the second transistor. A material of the third gate is different from a material of the fourth gate.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: December 3, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Tsutomu Tezuka, Fumitaka Arai, Keiji Ikeda, Tomomasa Ueda, Nobuyoshi Saito, Chika Tanaka, Kentaro Miura, Tomoaki Sawabe
  • Publication number: 20190333928
    Abstract: According to one embodiment, a semiconductor memory device includes: first and second signal lines; a first memory cell storing first information by applying voltage across the first signal line and a first interconnect layer; a second memory cell storing second information by applying voltage across the second signal line and a second interconnect layer; a first conductive layer provided on the first and second signal lines; third and fourth signal lines provided on the first conductive layer; a third memory cell storing third information by applying voltage across the third signal line and a third interconnect layer; and a fourth memory cell storing fourth information by applying voltage across the fourth signal line and a fourth interconnect layer.
    Type: Application
    Filed: March 11, 2019
    Publication date: October 31, 2019
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Satoshi NAGASHIMA, Keisuke NAKATSUKA, Fumitaka ARAI, Shinya ARAI, Yasuhiro UCHIYAMA
  • Patent number: 10438959
    Abstract: A semiconductor memory device includes a first electrode film and a second electrode film spreading along a first direction and a second direction, first insulating plates intermittently disposed along the first direction and each of two columns separated in the second direction from each other, second insulating plates provided between the two columns, intermittently disposed along the first direction and each of n columns, third insulating plates provided between one of the two columns and a column formed of the second insulating plates, intermittently disposed along the first direction, a first insulating member provided between the first insulating plate and the third insulating plate, and a second insulating member provided between the second insulating plate and the third insulating plate. The first electrode film is divided into two parts between the two columns. The second electrode film is divided into {(n+1)×2} parts between the two columns.
    Type: Grant
    Filed: June 19, 2018
    Date of Patent: October 8, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Tatsuya Kato, Atsushi Murakoshi, Fumitaka Arai
  • Patent number: 10418376
    Abstract: A semiconductor memory device according to one embodiment, includes a first electrode film, a plurality of semiconductor members, and a charge storage member. The first electrode film includes three or more first portions and a second portion connecting the first portions to each other. The first portions extend in a first direction and are arranged along a second direction that intersects with the first direction. The plurality of semiconductor members are arranged along the first direction between the first portions and extending in a third direction. The third direction intersects with a plane containing the first direction and the second direction. The charge storage member is disposed between each of the semiconductor members and each of the first portions. The second portion is disposed between the semiconductor members.
    Type: Grant
    Filed: November 21, 2017
    Date of Patent: September 17, 2019
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Koichi Sakata, Yuta Watanabe, Keisuke Kikutani, Satoshi Nagashima, Fumitaka Arai, Toshiyuki Iwamoto
  • Publication number: 20190181151
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, semiconductor pillars, first electrode films, a second electrode film, a first insulating film, a second insulating film, and a contact. The semiconductor pillars are provided on the substrate, extend in a first direction crossing an upper surface of the substrate, and are arranged along second and third directions being parallel to the upper surface and crossing each other. The first electrode films extend in the third direction. The second electrode film is provided between the semiconductor pillars and the first electrode films. The first insulating film is provided between the semiconductor pillars and the second electrode film. The second insulating film is provided between the second electrode film and the first electrode films. The contact is provided at a position on the third direction of the semiconductor pillars and is connected to the first electrode films.
    Type: Application
    Filed: February 14, 2019
    Publication date: June 13, 2019
    Applicant: Toshiba Memory Corporation
    Inventors: Tatsuya Kato, Wataru Sakamoto, Fumitaka Arai
  • Publication number: 20190181150
    Abstract: A semiconductor memory device includes two first electrode films, a first column and a second insulating film. The two first electrode films extend in a first direction and are separated from each other in a second direction. The first column is provided between the two first electrode films and has a plurality of first members and a plurality of insulating members. Each of the first members and each of the insulating members are arranged alternately in the first direction. One of the plurality of first members has a semiconductor pillar, a second electrode film and a first insulating film provided between the semiconductor pillar and the second electrode film. The semiconductor pillar, the first insulating film and the second electrode film are arranged in the second direction. The second insulating film is provided between the first column and one of the two first electrode films.
    Type: Application
    Filed: February 5, 2019
    Publication date: June 13, 2019
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Wataru SAKAMOTO, Ryota SUZUKI, Tatsuya OKAMOTO, Tatsuya KATO, Fumitaka ARAI
  • Patent number: 10312239
    Abstract: According to one embodiment, a memory includes: a bit line; a source line; a pillar extending in a first direction and including an oxide semiconductor layer; first, second and third layers arranged along the first direction and opposed to a side of the pillar; a memory cell at an intersection between the first layer and the pillar, the memory cell including a charge storage layer in the oxide semiconductor layer; a first transistor at an intersection between the second layer and the pillar; and a second transistor at an intersection between the third layer and the pillar. A first end of the oxide semiconductor layer in the first direction is in contact with the source line, and a second end of the oxide semiconductor layer in the first direction is electrically disconnected from the bit line.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: June 4, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Tsutomu Tezuka, Fumitaka Arai, Keiji Ikeda, Tomomasa Ueda, Nobuyoshi Saito, Chika Tanaka, Kentaro Miura
  • Patent number: 10276586
    Abstract: According to one embodiment, a semiconductor device includes a substrate and a semiconductor layer. The device further includes a first electrode layer that is provided on a side surface of the semiconductor layer with a first insulating film interposed therebetween. The device further includes a charge storage layer provided on a side surface of the first electrode layer with the second insulating film interposed therebetween.
    Type: Grant
    Filed: September 1, 2016
    Date of Patent: April 30, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Atsushi Murakoshi, Yasuhito Yoshimizu, Tomofumi Inoue, Tatsuya Kato, Yuta Watanabe, Fumitaka Arai
  • Patent number: 10249635
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, semiconductor pillars, first electrode films, a second electrode film, a first insulating film, a second insulating film, and a contact. The semiconductor pillars are provided on the substrate, extend in a first direction crossing an upper surface of the substrate, and are arranged along second and third directions being parallel to the upper surface and crossing each other. The first electrode films extend in the third direction. The second electrode film is provided between the semiconductor pillars and the first electrode films. The first insulating film is provided between the semiconductor pillars and the second electrode film. The second insulating film is provided between the second electrode film and the first electrode films. The contact is provided at a position on the third direction of the semiconductor pillars and is connected to the first electrode films.
    Type: Grant
    Filed: November 27, 2017
    Date of Patent: April 2, 2019
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tatsuya Kato, Wataru Sakamoto, Fumitaka Arai
  • Patent number: 10242992
    Abstract: A semiconductor memory device includes two first electrode films, a first column and a second insulating film. The two first electrode films extend in a first direction and are separated from each other in a second direction. The first column is provided between the two first electrode films and has a plurality of first members and a plurality of insulating members. Each of the first members and each of the insulating members are arranged alternately in the first direction. One of the plurality of first members has a semiconductor pillar, a second electrode film and a first insulating film provided between the semiconductor pillar and the second electrode film. The semiconductor pillar, the first insulating film and the second electrode film are arranged in the second direction. The second insulating film is provided between the first column and one of the two first electrode films.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: March 26, 2019
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Wataru Sakamoto, Ryota Suzuki, Tatsuya Okamoto, Tatsuya Kato, Fumitaka Arai