Patents by Inventor Fumitaka Arai

Fumitaka Arai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190088588
    Abstract: A semiconductor memory device includes first and second insulating plates, a stacked body provided between the first insulating plate and the second insulating plate, and a semiconductor member. The stacked body includes interconnect layers. The interconnect layer includes a first interconnect portion contacting the first insulating plate, a second interconnect portion contacting the second insulating plate, a third interconnect portion, a fourth interconnect portion, fifth and sixth interconnect portions are separated from the first and the second insulating plates. The fifth interconnect portion is connected to the first interconnect portion via the third interconnect portion, and is insulated from the second interconnect portion. The sixth interconnect portion is connected to the second interconnect portion via the fourth interconnect portion, and is insulated from the first interconnect portion. The semiconductor member is disposed between the fifth interconnect portion and the sixth interconnect portion.
    Type: Application
    Filed: March 16, 2018
    Publication date: March 21, 2019
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Fumitaka ARAI, Satoshi NAGASHIMA
  • Patent number: 10236254
    Abstract: A semiconductor memory device includes first and second insulating plates, a stacked body provided between the first insulating plate and the second insulating plate, and a semiconductor member. The stacked body includes interconnect layers. The interconnect layer includes a first interconnect portion contacting the first insulating plate, a second interconnect portion contacting the second insulating plate, a third interconnect portion, a fourth interconnect portion, fifth and sixth interconnect portions are separated from the first and the second insulating plates. The fifth interconnect portion is connected to the first interconnect portion via the third interconnect portion, and is insulated from the second interconnect portion. The sixth interconnect portion is connected to the second interconnect portion via the fourth interconnect portion, and is insulated from the first interconnect portion. The semiconductor member is disposed between the fifth interconnect portion and the sixth interconnect portion.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: March 19, 2019
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Fumitaka Arai, Satoshi Nagashima
  • Patent number: 10229924
    Abstract: A semiconductor memory device according to an embodiment includes first and second semiconductor pillars extending in a first direction and being arranged along a second direction, first and second interconnects extending in a third direction and being provided between the first semiconductor pillar and the second semiconductor pillar, a first electrode provided between the first semiconductor pillar and the first interconnect, a second electrode provided between the second semiconductor pillar and the second interconnect, third and fourth interconnects extending in the second direction, a first contact contacting the first semiconductor pillar and being connected to the third interconnect, and a second contact contacting the second semiconductor pillar and being connected to the fourth interconnect. The third and fourth interconnects each pass through both a region directly above the first semiconductor pillar and a region directly above the second semiconductor pillar.
    Type: Grant
    Filed: August 25, 2017
    Date of Patent: March 12, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Wataru Sakamoto, Tatsuya Kato, Yuta Watanabe, Katsuyuki Sekine, Toshiyuki Iwamoto, Fumitaka Arai
  • Publication number: 20190074066
    Abstract: A semiconductor memory device includes a first NAND string and a second NAND string sharing a channel and being connected in parallel. When reading a value from a first memory cell transistor of the first NAND string, a first potential is applied to a gate of a second memory cell transistor of the first NAND string and a gate of at least one of fourth memory cell transistors opposing the second memory cell transistor, a second potential is applied to a gate of a third memory cell transistor of the second NAND string opposing the first memory cell transistor, and a gate potential of the first memory cell transistor is swept between the second potential and the first potential. The second potential is lower than the first potential.
    Type: Application
    Filed: March 16, 2018
    Publication date: March 7, 2019
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Yusuke SHIMADA, Fumitaka ARAI, Tatsuya KATO
  • Publication number: 20190006419
    Abstract: A semiconductor memory includes a plurality of stripe-like active areas formed by stacking, in a direction perpendicular to a substrate, a plurality of layers extending parallel to the substrate, a first gate electrode formed on first side surfaces of the active areas, the first side surfaces being perpendicular to the substrate, a second gate electrode formed on second side surfaces of the active areas, the second side surfaces being perpendicular to the substrate. The layers are patterned in self-alignment with each other, intersections of the active areas and the first gate electrode form a plurality of memory cells, and the plurality of memory cells in an intersecting plane share the first gate electrode.
    Type: Application
    Filed: August 14, 2018
    Publication date: January 3, 2019
    Applicant: Toshiba Memory Corporation
    Inventors: Masahiro Kiyotoshi, Akihito Yamamoto, Yoshio Ozawa, Fumitaka Arai, Riichiro Shirota
  • Publication number: 20180350829
    Abstract: According to one embodiment, a memory includes: a member extending in a first direction and including an oxide semiconductor layer including first to third portions arranged in order from the bit line to the source line; first, second and third conductive layers arranged along the first direction and facing the first to third portions, respectively, the first conductive layer including first material, and each of the second and third conductive layer including a second material different from the first material; a memory cell in a first position corresponding to the first portion, the memory cell including a charge storage layer in the oxide semiconductor layer; a first transistor in a second position corresponding to the second portion; and a second transistor in a third position corresponding to the third portion.
    Type: Application
    Filed: July 20, 2018
    Publication date: December 6, 2018
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Tsutomu TEZUKA, Fumitaka ARAI, Keiji IKEDA, Tomomasa UEDA, Nobuyoshi SAITO, Chika TANAKA, Kentaro MIURA, Tomoaki SAWABE
  • Patent number: 10134750
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, semiconductor pillars, first electrode films, a second electrode film, a first insulating film, a second insulating film, and a contact. The semiconductor pillars are provided on the substrate, extend in a first direction crossing an upper surface of the substrate, and are arranged along second and third directions being parallel to the upper surface and crossing each other. The first electrode films extend in the third direction. The second electrode film is provided between the semiconductor pillars and the first electrode films. The first insulating film is provided between the semiconductor pillars and the second electrode film. The second insulating film is provided between the second electrode film and the first electrode films. The contact is provided at a position on the third direction of the semiconductor pillars and is connected to the first electrode films.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: November 20, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tatsuya Kato, Wataru Sakamoto, Fumitaka Arai
  • Publication number: 20180331116
    Abstract: According to one embodiment, a memory includes: a first gate of a first transistor and a second gate electrode of the second transistor facing the a semiconductor layer; an oxide semiconductor layer between the first and second transistors and including first to fifth portions in order; a third gate of a first cell facing the first portion; a fourth gate of a third transistor facing the second portion; a fifth gate of a second cell facing the third portion; a sixth gate of a fourth transistor facing the fourth portion; an interconnect connected to the fifth portion; a source line connected to the first transistor; and a bit line connected to the second transistor. A material of the third gate is different from a material of the fourth gate.
    Type: Application
    Filed: July 20, 2018
    Publication date: November 15, 2018
    Applicant: Toshiba Memory Corporation
    Inventors: Tsutomu TEZUKA, Fumitaka ARAI, Keiji IKEDA, Tomomasa UEDA, Nobuyoshi SAITO, Chika TANAKA, Kentaro MIURA, Tomoaki SAWABE
  • Publication number: 20180301461
    Abstract: A semiconductor memory device includes a first electrode film and a second electrode film spreading along a first direction and a second direction, first insulating plates intermittently disposed along the first direction and each of two columns separated in the second direction from each other, second insulating plates provided between the two columns, intermittently disposed along the first direction and each of n columns, third insulating plates provided between one of the two columns and a column formed of the second insulating plates, intermittently disposed along the first direction, a first insulating member provided between the first insulating plate and the third insulating plate, and a second insulating member provided between the second insulating plate and the third insulating plate. The first electrode film is divided into two parts between the two columns. The second electrode film is divided into {(n+1)×2} parts between the two columns.
    Type: Application
    Filed: June 19, 2018
    Publication date: October 18, 2018
    Applicant: Toshiba Memory Corporation
    Inventors: Tatsuya Kato, Atsushi Murakoshi, Fumitaka Arai
  • Patent number: 10103155
    Abstract: A semiconductor memory device according to an embodiment, includes a first semiconductor member, a second semiconductor member, an insulating member, a plurality of electrode films, a first electrode, and a second electrode. The first semiconductor member and the second semiconductor member are separated in a first direction and extending in a second direction. The second direction crosses the first direction. The insulating member is provided between the first semiconductor member and the second semiconductor member. The plurality of electrode films are arranged to be separated from each other along the second direction. Each of the electrode films surrounds the first semiconductor member, the second semiconductor member, and the insulating member when viewed from the second direction. The first electrode is provided between the first semiconductor member and the electrode film. The second electrode is provided between the second semiconductor member and the electrode film.
    Type: Grant
    Filed: March 3, 2017
    Date of Patent: October 16, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Kohei Sakaike, Toshiyuki Iwamoto, Tatsuya Kato, Keisuke Kikutani, Fumitaka Arai, Satoshi Nagashima, Koichi Sakata, Yuta Watanabe
  • Publication number: 20180269210
    Abstract: According to one embodiment, a memory includes: a bit line; a source line; a pillar extending in a first direction and including an oxide semiconductor layer; first, second and third layers arranged along the first direction and opposed to a side of the pillar; a memory cell at an intersection between the first layer and the pillar, the memory cell including a charge storage layer in the oxide semiconductor layer; a first transistor at an intersection between the second layer and the pillar; and a second transistor at an intersection between the third layer and the pillar. A first end of the oxide semiconductor layer in the first direction is in contact with the source line, and a second end of the oxide semiconductor layer in the first direction is electrically disconnected from the bit line.
    Type: Application
    Filed: September 14, 2017
    Publication date: September 20, 2018
    Applicant: Toshiba Memory Corporation
    Inventors: Tsutomu TEZUKA, Fumitaka Arai, Keiji Ikeda, Tomomasa Ueda, Nobuyoshi Saito, Chika Tanaka, Kentaro Miura
  • Publication number: 20180269218
    Abstract: A semiconductor memory device includes a semiconductor member extending in a first direction, a first interconnect extending in a second direction crossing the first direction, and a first electrode disposed between the semiconductor member and the first interconnect. A curvature radius of a corner portion facing the semiconductor member in the first electrode is larger than a curvature radius of a corner portion facing the first interconnect in the first electrode.
    Type: Application
    Filed: September 14, 2017
    Publication date: September 20, 2018
    Applicant: Toshiba Memory Corporation
    Inventors: Tatsuya KATO, Fumitaka Arai, Kohei Sakaike, Satoshi Nagashima
  • Publication number: 20180261623
    Abstract: A semiconductor memory device includes a first memory cell array layer includes a first memory cell array region, in which memory cells are 3-dimensionally arrayed, and a first and second surface wiring layer connected to the memory cells. A second memory cell array layer includes second memory cell array region, in which memory cells are 3-dimensionally arrayed, and a third and fourth surface wiring layer connected to the second plurality of memory cells. The first memory cell array layer and the second memory cell array layer are bonded to each other such that the second surface wiring layer and the third surface wiring layer face each other and are bonded to each other. The first and second memory cell array regions overlap each other as viewed from a direction orthogonal to a layer plane.
    Type: Application
    Filed: August 28, 2017
    Publication date: September 13, 2018
    Inventors: Kazuyuki HIGASHI, Kazumichi TSUMURA, Ryota KATSUMATA, Fumitaka ARAI
  • Patent number: 10074667
    Abstract: A semiconductor memory device includes a first memory cell array layer includes a first memory cell array region, in which memory cells are 3-dimensionally arrayed, and a first and second surface wiring layer connected to the memory cells. A second memory cell array layer includes second memory cell array region, in which memory cells are 3-dimensionally arrayed, and a third and fourth surface wiring layer connected to the second plurality of memory cells. The first memory cell array layer and the second memory cell array layer are bonded to each other such that the second surface wiring layer and the third surface wiring layer face each other and are bonded to each other. The first and second memory cell array regions overlap each other as viewed from a direction orthogonal to a layer plane.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: September 11, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Kazuyuki Higashi, Kazumichi Tsumura, Ryota Katsumata, Fumitaka Arai
  • Patent number: 10056433
    Abstract: A semiconductor memory includes a plurality of stripe-like active areas formed by stacking, in a direction perpendicular to a substrate, a plurality of layers extending parallel to the substrate, a first gate electrode formed on first side surfaces of the active areas, the first side surfaces being perpendicular to the substrate, a second gate electrode formed on second side surfaces of the active areas, the second side surfaces being perpendicular to the substrate. The layers are patterned in self-alignment with each other, intersections of the active areas and the first gate electrode form a plurality of memory cells, and the plurality of memory cells in an intersecting plane share the first gate electrode.
    Type: Grant
    Filed: August 8, 2016
    Date of Patent: August 21, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Masahiro Kiyotoshi, Akihito Yamamoto, Yoshio Ozawa, Fumitaka Arai, Riichiro Shirota
  • Patent number: 10043808
    Abstract: According to one embodiment, a semiconductor memory includes: a first gate of a first select transistor and a second gate of a second select transistor on a gate insulating film on a semiconductor layer; an oxide semiconductor layer above the semiconductor layer; a first control gate of a first cell and a second control gate of a second cell on an insulating layer on the oxide semiconductor layer; a third gate of a first transistor between the first control gate and the second control gate; a fourth gate of a second transistor between a first end of the oxide semiconductor layer and the second control gate; an interconnect connected to the first end; a source line connected to the first select transistor; and a bit line connected to the second select transistor.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: August 7, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Tsutomu Tezuka, Fumitaka Arai, Keiji Ikeda, Tomomasa Ueda, Nobuyoshi Saito, Chika Tanaka, Kentaro Miura
  • Patent number: 10020315
    Abstract: A semiconductor memory device includes a first electrode film and a second electrode film spreading along a first direction and a second direction, first insulating plates intermittently disposed along the first direction and each of two columns separated in the second direction from each other, second insulating plates provided between the two columns, intermittently disposed along the first direction and each of n columns, third insulating plates provided between one of the two columns and a column formed of the second insulating plates, intermittently disposed along the first direction, a first insulating member provided between the first insulating plate and the third insulating plate, and a second insulating member provided between the second insulating plate and the third insulating plate. The first electrode film is divided into two parts between the two columns. The second electrode film is divided into {(n+1)×2} parts between the two columns.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: July 10, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Tatsuya Kato, Atsushi Murakoshi, Fumitaka Arai
  • Patent number: 9984754
    Abstract: According to an embodiment, an operation method for a memory device which has a first memory element and a second memory element respectively provided on both sides of a semiconductor member includes applying a first potential on the second word line to write a second data to the second memory and applying a second potential on the first word line to write the first data to the first memory. The first potential increases by a first step voltage and the second potential increases by a second step voltage.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: May 29, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Wataru Sakamoto, Fumitaka Arai, Tatsuya Kato
  • Patent number: 9966381
    Abstract: A semiconductor memory device includes a semiconductor substrate, a first insulating film provided on the semiconductor substrate, a first conductive film provided on a first region of the first insulating film, a second conductive film provided on a second region of the first insulating film, a first stacked body provided on the first conductive film, a second stacked body provided on the second conductive film, a first semiconductor pillar, and two conductive pillars. In the first stacked body, a second insulating film and an electrode film are stacked alternately. In the second stacked body, a third insulating film and a first film are stacked alternately. The two conductive pillars extend in the first direction through the second stacked body, are separated from the second conductive film, sandwich the second conductive film, and are connected at a bottom ends of the second conductive pillars to the semiconductor substrate.
    Type: Grant
    Filed: September 16, 2016
    Date of Patent: May 8, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Fumitaka Arai, Tatsuya Kato, Satoshi Nagashima, Katsuyuki Sekine, Yuta Watanabe, Keisuke Kikutani, Atsushi Murakoshi
  • Publication number: 20180097011
    Abstract: A semiconductor memory device according to one embodiment, includes a first electrode film, a plurality of semiconductor members, and a charge storage member. The first electrode film includes three or more first portions and a second portion connecting the first portions to each other. The first portions extend in a first direction and are arranged along a second direction that intersects with the first direction. The plurality of semiconductor members are arranged along the first direction between the first portions and extending in a third direction. The third direction intersects with a plane containing the first direction and the second direction. The charge storage member is disposed between each of the semiconductor members and each of the first portions. The second portion is disposed between the semiconductor members.
    Type: Application
    Filed: November 21, 2017
    Publication date: April 5, 2018
    Applicant: Toshiba Memory Corporation
    Inventors: Koichi Sakata, Yuta Watanabe, Keisuke Kikutani, Satoshi Nagashima, Fumitaka Arai, Toshiyuki Iwamoto